An integrated device for safely and efficiently dissolving special gas process water

Abstract

An integrated device for safely and efficiently dissolving process water of special gas, comprising a hollow fiber membrane unit C, a process gas inlet joint control unit A, a gas phase side automatic liquid discharge unit D, a gas leakage detection and emergency discharge unit B; the hollow fiber membrane unit C comprises a hollow fiber membrane device, the hollow fiber membrane device is connected with a gas phase side inlet pipeline, a liquid phase side inlet pipeline and a water outlet pipeline; the process gas inlet joint control unit comprises a process gas control valve arranged on the gas phase side inlet pipeline, a water outlet cut-off valve and a dissolved gas analyzer arranged on the water outlet pipeline; the gas phase side automatic liquid discharge unit D comprises a liquid collection container, and a connecting rod float ball liquid level switch is arranged in the liquid collection container. The dissolved gas analyzer is debugged and calibrated, the process gas control valve is controlled by PLC to ensure the process gas flow, and the purpose of stably controlling the dissolved gas concentration of the process water is achieved. The automatic drainage device collects the water permeated from the liquid phase side of the hollow fiber membrane device to a certain amount of discharge, solving the problem of liquid accumulation. The gas leakage detection and emergency discharge unit B is linked by PLC to solve the safety emergency problem.

Description

Technical Field

[0001] This utility model relates to the field of physics, and in particular to process gas dissolution technology, especially an integrated device for safely and efficiently dissolving special gases in process water. Background Technology

[0002] The high-end display manufacturing industry involves numerous and complex processes, with extremely high requirements for energy, water, and chemicals, making it a resource-intensive industry. Some specialized processes in the high-end display industry have high demands for ultrapure water containing H2, NH3, and CO2. Current technology uses hollow fiber membrane devices to dissolve process gases into ultrapure water. The principle is based on Henry's Law: high-purity process gases enter the gas phase, while ultrapure water enters from the liquid phase to dissolve in a hydrophobic microporous polypropylene hollow fiber membrane. The hydrophobic hollow fiber membrane acts as the interface between the gas and liquid phases, allowing the gas to dissolve into the liquid at a fixed interface. Using a hollow fiber membrane device can achieve gas dissolution under normal operating pressure of the pure water system and relatively low pressure of the process gas, increasing safety and reducing energy consumption compared to traditional processes. However, this device also has the following drawbacks: firstly, the concentration of process gas in the effluent is not stable enough and is difficult to control. Second, due to the properties of the hydrophobic microporous polypropylene fiber membrane, liquid accumulation may occur on the gas phase side. Liquid accumulation on the gas phase side will reduce the contact area between the process gas and the process water, resulting in a decrease in the solubility of the process gas. Utility Model Content

[0003] The purpose of this invention is to provide a safe and efficient integrated device for dissolving special gases in process water, which solves the technical problems of unstable and uncontrollable gas concentration in process water and liquid accumulation on the gas phase side in the prior art.

[0004] This utility model provides an integrated device for safely and efficiently dissolving special gases in process water, including a hollow fiber membrane unit C, a process gas inlet control unit A, a gas phase side automatic draining unit D, and a PLC;

[0005] The hollow fiber membrane unit C includes a hollow fiber membrane device, which is connected to a gas phase inlet pipe, a liquid phase inlet pipe, and a water outlet pipe.

[0006] The process gas inlet control unit includes an inlet shut-off valve, a first pressure gauge, a pressure regulating valve, a second pressure gauge, a process gas inlet control valve, a flow meter, a first membrane device inlet shut-off valve, a second membrane device inlet shut-off valve, a third membrane device inlet shut-off valve, and a fourth membrane device inlet shut-off valve installed on the gas phase side inlet pipe. A process water inlet shut-off valve is installed on the liquid phase side inlet pipe, and an outlet water shut-off valve and a dissolved gas analyzer are installed on the outlet water pipe. The control terminal of the process gas inlet control valve and the signal output terminal of the dissolved gas analyzer are electrically connected to the PLC.

[0007] The gas-phase side automatic drain unit D includes a liquid collection container, an inlet pipe and a drain pipe connected to the liquid collection container. The inlet pipe is connected to the gas-phase side inlet pipe. An automatic membrane discharge valve is installed on the inlet pipe, and an automatic drain valve for the liquid collection container is installed on the drain pipe. A linkage float level switch is installed in the liquid collection container. The control terminals of the automatic membrane discharge valve, the automatic drain valve for the liquid collection container, and the signal output terminal of the linkage float level switch are all electrically connected to a PLC.

[0008] Furthermore, the hollow fiber membrane device comprises a hydrophobic microporous polypropylene centrally controlled fiber membrane.

[0009] Furthermore, it also includes a gas leak detection and emergency emission unit B, which includes a closed shell. The hollow fiber membrane unit C, the process gas inlet control unit A, and the gas phase side automatic liquid drainage unit D are all installed inside the closed shell. The closed shell is equipped with a process gas leak detector, an alarm, and an emergency exhaust fan. The signal output terminal of the process gas leak detector, the control terminal of the alarm, and the control terminal of the emergency exhaust fan are all electrically connected to the PLC.

[0010] Furthermore, a membrane bypass valve is also connected between the liquid phase inlet pipe and the outlet pipe.

[0011] Compared with existing technologies, this invention offers positive and significant advantages. By adjusting the pressure regulating valve and observing the second pressure gauge, the flow meter is used to adjust the pressure and flow rate, ensuring the system meets design requirements. The dissolved gas analyzer is debugged and calibrated, and the measured values ​​are transmitted back to the PLC. Target parameter values ​​are set on the PLC, and the process inlet control valve is controlled to ensure the process inlet flow rate, achieving stable control of the dissolved gas concentration in the process effluent, making process gas dissolution stable and easily controllable. An automatic drainage device collects water permeating from the liquid phase side of the hollow fiber membrane device to a certain amount for discharge, solving the liquid accumulation problem and ensuring the effective contact area between the gas permeating the membrane and the liquid, thereby guaranteeing efficient dissolution. Attached Figure Description

[0012] Figure 1This is a schematic diagram of an integrated device for safely and efficiently dissolving special gases in process water according to the present invention. Detailed Implementation

[0013] The present invention will be further described below with reference to embodiments, but the present invention is not limited to these embodiments. Any similar variations using the present invention should be included in the protection scope of the present invention. The use of directional terms such as up, down, front, back, left, right, middle, inside, and outside in the present invention is only for the convenience of clear description and is not intended to limit the technical solution of the present invention.

[0014] like Figure 1 As shown, the present invention provides an integrated device for safely and efficiently dissolving special gas process water, including a hollow fiber membrane unit C, a process gas inlet control unit A, a gas phase side automatic draining unit D, and a PLC.

[0015] The hollow fiber membrane unit C includes a hollow fiber membrane device 20, which is connected to a gas phase inlet pipe 22, a liquid phase inlet pipe 23, and a water outlet pipe 24.

[0016] The process gas inlet control unit includes an inlet isolation valve 1, a first pressure gauge 2, a pressure regulating valve 3, a second pressure gauge 4, a process gas inlet control valve 5, a flow meter 6, a first membrane device inlet side isolation valve 7, a second membrane device inlet side isolation valve 8, a third membrane device inlet side isolation valve 9, and a fourth membrane device inlet side isolation valve 10, all installed on the gas phase side inlet pipe 22. A process water inlet isolation valve 12 is installed on the liquid phase side inlet pipe 23, and an outlet water isolation valve 11 and a dissolved gas analyzer 16 are installed on the outlet water pipe 24. The control terminal of the process gas inlet control valve 5 and the signal output terminal of the dissolved gas analyzer 16 are electrically connected to the PLC.

[0017] The gas-phase side automatic drainage unit D includes a liquid collection container 21, which is connected to an inlet pipe and a drain pipe. The inlet pipe is connected to the gas-phase side inlet pipe 22. A membrane discharge automatic valve 14 is installed on the inlet pipe, and a liquid collection container discharge automatic valve 15 is installed on the drain pipe. A linkage float level switch 13 is installed in the liquid collection container 21. The control terminals of the membrane discharge automatic valve 14, the liquid collection container discharge automatic valve 15, and the signal output terminal of the linkage float level switch 13 are all electrically connected to a PLC.

[0018] Debugging hollow fiber membrane unit C: Process water (ultrapure water) and process gas enter the hollow fiber membrane unit through liquid phase inlet pipe 23 and gas phase inlet pipe 22, respectively. The process gas comes into contact with the process water and dissolves into the process water.

[0019] Debugging Process Gas Inlet Control Unit A: Process gases (H2, NH3, CO2, etc.) flow through the gas phase side inlet pipe 22. Open inlet isolation valve 1, first membrane unit inlet side isolation valve 7, second membrane unit inlet side isolation valve 8, third membrane unit inlet side isolation valve 9, and fourth membrane unit inlet side isolation valve 10. Adjust pressure regulating valve 3, observe the second pressure gauge 4, and adjust the pressure and flow rate using flow meter 6 to ensure the system meets design requirements. Debug and calibrate dissolved gas analyzer 16, transmitting the measured values ​​back to the PLC. Set target parameter values ​​on the PLC and control process inlet control valve 5 to ensure process inlet flow rate, achieving stable control of dissolved gas concentration in the process effluent, making process gas dissolution stable and easily controllable.

[0020] Debugging the automatic drainage unit D on the gas phase side: In the initial state, the membrane discharge automatic valve 14 is open, and the liquid collection container discharge automatic valve 15 is closed. Liquid on the gas phase side flows to the liquid collection container 21 through the inlet pipe. When the H point of the connecting rod float level switch 13 is activated (the liquid level in the liquid collection container 21 reaches the discharge level), a signal is transmitted to the PLC. The PLC controls the membrane discharge automatic valve 14 to close and the liquid collection container discharge automatic valve 15 to open, allowing the liquid collection container 21 to drain. This continues until the L point of the connecting rod float level switch 13 is deactivated. Then, the PLC controls the membrane discharge automatic valve 14 to open again and the liquid collection container discharge automatic valve 15 to close, repeating the above process to achieve automatic drainage. The automatic drainage device collects water that permeates from the liquid phase side of the hollow fiber membrane device 20 on the gas phase side to a certain amount for discharge, solving the problem of liquid accumulation and ensuring the effective contact area between the gas on the gas phase side permeating the membrane and the liquid on the liquid phase side, thereby ensuring efficient dissolution.

[0021] Furthermore, the hollow fiber membrane device comprises a hydrophobic microporous polypropylene centrally controlled fiber membrane.

[0022] Furthermore, it also includes a gas leak detection and emergency emission unit B, which includes a closed housing 22. The hollow fiber membrane unit C, the process gas inlet control unit A, and the gas phase side automatic liquid drainage unit D are all installed inside the closed housing 22. The closed housing 22 is equipped with a process gas leak detector 17, an alarm, and an emergency exhaust fan 18. The signal output terminal of the process gas leak detector 17, the alarm, and the control terminal of the emergency exhaust fan 18 are all electrically connected to the PLC.

[0023] Debugging Gas Leak Detection and Emergency Emission Unit B: Test the airtightness of the enclosed casing 22 of the integrated equipment to ensure that no abnormalities are found, guaranteeing that relevant special process gases will not leak into the machine room environment after an abnormal leak (relevant special gases such as H2, NH3, and CO2 can become explosive, toxic, or asphyxiating gases when they reach a certain concentration in a general factory space). Debug and calibrate the process gas leak detector 17 and the emergency exhaust fan 18. Trigger the alarm value of the process gas leak detector 17, and the PLC control alarm will indicate that the area is off-limits. Relevant personnel can manually close the process gas inlet control valve 5 via the remote control interface, and the emergency exhaust fan 18 will start to expel the process gas from the enclosed casing 22 until the process gas leak detector 17 no longer alarms. Relevant personnel can then enter the equipment for inspection and maintenance, thereby ensuring personnel and environmental safety.

[0024] Furthermore, a membrane bypass valve 19 is connected between the liquid phase inlet pipe 22 and the outlet pipe 24. The membrane bypass valve 19 is used to replace the membrane after the hollow fiber membrane device 20 reaches its service life, ensuring that the system does not shut down.

[0025] This utility model provides an integrated device for the safe and efficient dissolution of special gases in process water. It can meet the needs of high-end display technology factories for dissolving process water such as H2 / NH3 / CO2. It also utilizes dissolved oxygen or carbon dioxide removal technology in water to provide an integrated device that combines stable dissolution of process gases, detection, gas leak detection, and emergency discharge.

[0026] Specifically, the hollow fiber membrane device 20, isolation valve, pressure regulating valve, control valve, flow meter 6, dissolved gas analyzer 16, connecting rod float level switch 13, PLC, process gas leak detector 17, membrane bypass valve 19 in this utility model, as well as other aspects not described in detail, all adopt known solutions in the prior art, which are already understood by those skilled in the art and will not be elaborated here.

Claims

1. An integrated device for safely and efficiently dissolving special gases in process water, characterized in that, Includes hollow fiber membrane unit C, process gas inlet control unit A, gas phase side automatic liquid draining unit D, and PLC; The hollow fiber membrane unit C includes a hollow fiber membrane device, which is connected to a gas phase inlet pipe, a liquid phase inlet pipe, and a water outlet pipe. The process gas inlet control unit includes an inlet shut-off valve, a first pressure gauge, a pressure regulating valve, a second pressure gauge, a process gas inlet control valve, a flow meter, a first membrane device inlet shut-off valve, a second membrane device inlet shut-off valve, a third membrane device inlet shut-off valve, and a fourth membrane device inlet shut-off valve installed on the gas phase side inlet pipe. A process water inlet shut-off valve is installed on the liquid phase side inlet pipe, and an outlet water shut-off valve and a dissolved gas analyzer are installed on the outlet water pipe. The control terminal of the process gas inlet control valve and the signal output terminal of the dissolved gas analyzer are electrically connected to the PLC. The gas-phase side automatic drain unit D includes a liquid collection container, an inlet pipe and a drain pipe connected to the liquid collection container. The inlet pipe is connected to the gas-phase side inlet pipe. An automatic membrane discharge valve is installed on the inlet pipe, and an automatic drain valve for the liquid collection container is installed on the drain pipe. A linkage float level switch is installed in the liquid collection container. The control terminals of the automatic membrane discharge valve, the automatic drain valve for the liquid collection container, and the signal output terminal of the linkage float level switch are all electrically connected to a PLC.

2. The integrated device for safely and efficiently dissolving special gases in process water according to claim 1, characterized in that, The hollow fiber membrane device includes a hydrophobic microporous polypropylene centrally controlled fiber membrane.

3. The integrated device for safely and efficiently dissolving special gases in process water according to claim 1, characterized in that, It also includes a gas leak detection and emergency emission unit B, which includes a closed housing. The hollow fiber membrane unit C, the process gas inlet control unit A, and the gas phase side automatic liquid drainage unit D are all installed inside the closed housing. The closed housing is equipped with a process gas leak detector, an alarm, and an emergency exhaust fan. The signal output terminal of the process gas leak detector, the control terminal of the alarm, and the control terminal of the emergency exhaust fan are all electrically connected to the PLC.

4. The integrated device for safely and efficiently dissolving special gases in process water according to claim 1, characterized in that, A membrane bypass valve is also connected between the liquid phase inlet pipe and the outlet pipe.

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