A new silicon powder preparation device

Abstract

The utility model discloses a novel silicon powder preparation device relates to the technical field of semiconductor material, including auxiliary airflow pipe, silicon source raw material gas pipe and reactor, and the heater is installed on auxiliary airflow pipe and silicon source raw material gas pipe, and auxiliary airflow pipe and silicon source raw material gas pipe all are connected with the reactor, and the reactor includes dispersion section and settlement section, and after the inert gas of heating and silicon source raw material gas are dispersed into mist in dispersion section, settle and separate in settlement section. Can effectively reduce the equipment investment cost, and the raw material is only silicon source raw material gas and inert gas or hydrogen, and the tail gas can be repeatedly recycled, and the production cost is low, and the silicon source raw material gas is dispersed through heating, and can be separated into the silicon micro powder of even granularity, and different grade silicon micro powder is screened through multistage screening assembly.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor materials technology, and specifically relates to a novel silicon powder preparation device. Background Technology

[0002] With the rapid development of science and technology, materials science has become a crucial pillar driving modern industry and information technology. Among these, silicon micropowder, as a high-performance, multifunctional material, is widely used in aerospace, electronics, new energy, and pharmaceutical fields due to its excellent physical and chemical properties. Especially in the emerging information industry, the demand for silicon micropowder is increasing year by year. Therefore, developing new, high-performance silicon micropowder materials is of great significance to my country.

[0003] Given that traditional silicon powder preparation methods and new preparation methods on the market generally suffer from drawbacks such as poor flowability, uneven particle size, high production costs, high equipment technical requirements, and difficulty in large-scale production. Utility Model Content

[0004] In view of the problems mentioned in the background art, the purpose of this utility model is to provide a novel silicon powder preparation apparatus to solve the problems mentioned in the background art.

[0005] The above-mentioned technical objective of this utility model is achieved through the following technical solution:

[0006] A novel silicon powder preparation device includes an auxiliary gas flow pipe, a silicon source raw material gas pipe, and a reactor. Heaters are installed on the auxiliary gas flow pipe and the silicon source raw material gas pipe. Both the auxiliary gas flow pipe and the silicon source raw material gas pipe are connected to the reactor. The reactor includes a dispersion section and a settling section. After being heated, the inert gas and the silicon source raw material gas are dispersed into a mist in the dispersion section and then separated by settling in the settling section.

[0007] Preferably, the auxiliary gas can be an inert gas or hydrogen, which is heated to 400-1200°C by a heater.

[0008] Preferably, the silicon source gas is preheated to 20-600°C by a heater.

[0009] Preferably, the dispersion section includes a Venturi tube, and the output ends of the auxiliary gas flow pipe and the silicon source raw material gas pipe are all connected to the inlet of the Venturi tube, while the outlet of the Venturi tube is connected to the settling section.

[0010] Preferably, it also includes at least two screening components, and the outlet of each screening component is connected to a set of product bins. The settling section includes a settling tank, the coarse particle outlet of the settling tank is connected to the product bins, and the fine particle outlet of the settling tank is connected to the first-stage screening component through a pipe.

[0011] Preferably, the particle size of silicon powder in the product bin connected to the settling tank is larger than the particle size of silicon powder in the product bin connected to the primary screening component.

[0012] Preferably, as the number of stages increases, the outlet of the fine particles of the previous stage is connected to the inlet of the screening component of the next stage, and the particle size of silicon powder in the product bins connected by the multi-stage screening components gradually decreases as the number of stages increases.

[0013] The novel silicon powder preparation device proposed in this utility model can effectively reduce equipment investment costs. The raw materials are only silicon source gas and inert gas or hydrogen. The tail gas can be repeatedly recycled and reused, resulting in low production costs. The silicon source gas can be separated into silicon micro powder with uniform particle size by heating and dispersion, and different grades of silicon micro powder can be screened out by multi-stage screening components.

[0014] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0015] Figure 1 This is a structural diagram of the novel silicon powder preparation apparatus proposed in this utility model.

[0016] Reference numerals: 1. Heater; 2. Reactor; 21. Venturi tube; 22. Settling tank; 3. Product bin; 4. Primary screening assembly; 5. Secondary screening assembly; 7. Auxiliary gas flow pipe; 8. Silicon source raw material gas pipe. Detailed Implementation

[0017] The embodiments of this utility model are described in detail below. Examples of these embodiments are illustrated in the accompanying drawings, wherein the same or similar symbols denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0018] Example 1

[0019] refer to Figure 1 The novel silicon powder preparation device described in this embodiment includes an auxiliary gas flow pipe 7, a silicon source raw material gas pipe 8, and a reactor 2. Heaters 1 are installed on the auxiliary gas flow pipe 7 and the silicon source raw material gas pipe 8. Both the auxiliary gas flow pipe 7 and the silicon source raw material gas pipe 8 are connected to the reactor 2. The reactor 2 includes a dispersion section and a settling section. After the heated inert gas and silicon source raw material gas are dispersed into a mist in the dispersion section, they are separated by settling in the settling section. The device also includes at least two stages of screening components. As the number of stages increases, the outlet of the fine particles of the previous stage is connected to the inlet of the next stage screening component.

[0020] An inert gas or hydrogen can be used as the auxiliary gas.

[0021] Silane gas can be used as the silicon source gas.

[0022] The heater 1 of the auxiliary gas flow pipe 7 heats the inert gas or hydrogen to 400-1200℃, and the heater 1 on the silicon source raw material gas pipe 8 heats the silicon source raw material gas to 20-600℃.

[0023] Taking a two-stage screening component as an example, the number of screening stages is not limited to two stages; it can be designed according to the final exhaust gas compliance requirements.

[0024] Specifically, the dispersion section includes a Venturi tube 21, the settling section includes a settling tank 22, the output ends of the auxiliary airflow pipe 7 and the silicon source raw material gas pipe 8 are all connected to the inlet of the Venturi tube 21, the outlet of the Venturi tube 21 is connected to the settling tank 22, the coarse particle outlet of the settling tank 22 is connected to the product bin 3, and the fine particle outlet of the settling tank 22 is connected to the primary screening component 4 through a pipe.

[0025] According to the SiH4 → Si + 2H2 formula, the silicon source gas and auxiliary gas can be rapidly and uniformly mixed and dispersed through the Venturi tube 21. Under the further heating of the auxiliary gas, the silicon source gas decomposes into atomized silicon powder and hydrogen gas, which enter the settling tank 22. Under the action of gravity, the silicon powder with larger particle size naturally settles into the product hopper 3-A. Preferably, a dust extraction fan is installed on the pipes of the settling tank 22 and the primary screening component 4. Silicon powder and impurities with smaller particle size that cannot settle naturally enter the primary screening component 4 for further screening to separate out silicon powder with even smaller particle size.

[0026] Preferably, the primary screening component 4 includes a cyclone dust collector, the bottom ash discharge port of which is connected to another set of product bins 3-B, and the exhaust pipe on the side of the cyclone dust collector is connected to the secondary screening component 5. The particle size at the ash discharge port is larger than the particle size at the exhaust pipe. The exhaust gas and smaller silicon powder enter the secondary screening component 5 from the exhaust pipe for further screening. The particle size in product bin 3-B is smaller than the particle size in product bin 3-A.

[0027] Preferably, the secondary screening component 5 includes a dust separator such as an electrostatic precipitator or a dust filter, and also includes another product chamber 3-C. The exhaust gas output from the cyclone dust collector is captured by the electrostatic precipitator, and the captured silicon powder with a smaller particle size enters the product chamber 3-C. The qualified exhaust gas is directly discharged.

[0028] In summary, the silicon source gas and auxiliary gas are heated and then injected into the Venturi structure tube 21 through the silicon source gas pipe 8 and the auxiliary gas pipe 7, respectively. After heating, the silicon source gas decomposes into silicon micro powder with uniform particle size and hydrogen. The silicon micro powder settles in the settling tank 22 and enters the product chamber 3-A. The silicon micro powder with exhaust gas and smaller particle size enters the primary screening component 4 for screening under the suction of the dust extraction fan 6, and then enters the next stage screening component in sequence until the exhaust gas meets the standard. The particle size of silicon powder in the product chambers 3-A, 3-B and 3-C decreases in sequence.

[0029] This device has a simple structure, which can effectively reduce equipment investment costs. The raw materials are only silicon source gas and inert gas or hydrogen. The tail gas can be repeatedly recycled and reused, resulting in low production costs. The silicon source gas can be separated into silicon micro powder with uniform particle size by heating and dispersion, and then screened into different grades of silicon micro powder by multi-stage screening components.

[0030] It should be understood that the terms "length", "thickness", "upper", "lower", "left", "right", "front", "rear", "inner", "outer", "axial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0032] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0033] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0034] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A novel silicon powder preparation apparatus, characterized in that: It includes an auxiliary gas flow pipe (7), a silicon source gas pipe (8), and a reactor (2). A heater (1) is installed on the auxiliary gas flow pipe (7) and the silicon source gas pipe (8). The auxiliary gas flow pipe (7) and the silicon source gas pipe (8) are both connected to the reactor (2). The reactor (2) includes a dispersion section and a settling section. After the heated auxiliary gas and silicon source gas are dispersed into a mist in the dispersion section, they are separated by settling in the settling section.

2. The novel silicon powder preparation apparatus according to claim 1, characterized in that: The auxiliary gas can be an inert gas or hydrogen, which is heated to 400-1200°C by a heater (1).

3. The novel silicon powder preparation apparatus according to claim 1, characterized in that: The silicon source gas is preheated to 20-600℃ by heater (1).

4. The novel silicon powder preparation apparatus according to claim 1, characterized in that: The dispersion section includes a Venturi tube (21), an auxiliary airflow tube (7), and a silicon source gas tube (8). The output ends of the auxiliary airflow tube (7) and the silicon source gas tube (8) are all connected to the inlet of the Venturi tube (21), and the outlet of the Venturi tube (21) is connected to the settling section.

5. The novel silicon powder preparation apparatus according to claim 4, characterized in that: It also includes at least two screening components, and the outlet of each screening component is connected to a product bin (3). The settling section includes a settling tank (22). The coarse particle outlet of the settling tank (22) is connected to the product bin (3), and the fine particle outlet of the settling tank (22) is connected to the first-stage screening component (4) through a pipeline.

6. The novel silicon powder preparation apparatus according to claim 5, characterized in that: The silicon powder particle size in the product bin (3) connected to the settling tank (22) is larger than the silicon powder particle size in the product bin (3) connected to the primary screening component (4).

7. The novel silicon powder preparation apparatus according to claim 6, characterized in that: As the number of stages increases, the outlet of the fine particles of the previous stage is connected to the inlet of the screening component of the next stage, and the particle size of silicon powder in the product bin (3) connected by the multi-stage screening components gradually decreases as the number of stages increases.

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