Silicon carbide crystal graphite paper removing apparatus

Abstract

The utility model discloses a silicon carbide crystal graphite paper removes equipment, including frame and controller, the top of frame is provided with the rotary seat that can rotate around vertical axis, the top of rotary seat is provided with the material holding platform that can hold silicon carbide crystal and the material holding lifting mechanism that can drive material holding platform reciprocating lift along vertical direction, still be provided with the material clamping mechanism on rotary seat with material holding platform alignment arrangement and can clamp silicon carbide crystal and fix on material holding platform, still be provided with tool support on frame, tool support is located rotary seat one side, and tool support is provided with the tool support arm of alignment arrangement in material holding platform top on, and the scraper is detachably arranged on tool support arm, and the cutting edge part of scraper projects the bottom end of tool support arm and with the top surface of material holding platform along vertical direction alignment adaptation, still be provided with the tool lifting mechanism of tool support that can drive tool support arm reciprocating lift along vertical direction.

Description

Technical Field

[0001] This utility model relates to the technical field of supporting equipment for silicon carbide crystal extraction and processing, and in particular to a silicon carbide crystal graphite paper removal device. Background Technology

[0002] In the current semiconductor-related fields, the cultivation and growth of silicon carbide crystals are usually completed in a single crystal furnace. Accordingly, after the silicon carbide crystals have completed their growth in the single crystal furnace, they need to be completely removed through a crystal removal process for downstream processing.

[0003] Currently, the crystal extraction process for silicon carbide crystals typically requires two key operations performed sequentially by workers: separating the silicon carbide crystal from the graphite support at the bottom of the crystal in the single crystal furnace; and removing the graphite paper residue remaining on the bottom surface of the silicon carbide crystal. Both of these processes are currently handled manually, especially the second step, which usually involves workers using a blade to remove the remaining graphite paper residue from the bottom surface of the silicon carbide crystal.

[0004] However, while the aforementioned method of removing graphite paper by hand-held blades can meet the current processing requirements of silicon carbide crystals, in actual operation, a single scraping operation typically takes about 2 minutes, resulting in low efficiency and hindering the overall processing efficiency of silicon carbide crystals. Due to the high hardness and brittleness of silicon carbide crystals, uneven force applied by workers during scraping can easily cause scratches or micro-cracks on the surface, adversely affecting the product quality. Furthermore, the quality of the scraping process depends entirely on the operator's skill level. Inconsistent skill levels can easily lead to over-scraping or localized graphite paper residue on the silicon carbide crystal surface, resulting in inconsistent batch processing quality. In addition, the use of blades as the operating tool throughout the graphite paper scraping process poses a safety hazard of cuts to workers, restricting the overall operational safety of the process and increasing personal safety risks for relevant personnel.

[0005] In view of this, how to optimize the method of removing graphite paper from the bottom surface of silicon carbide crystals to make the removal process safer and more efficient, to make the graphite paper removal treatment more thorough, and to improve the product quality after removing graphite paper residue from silicon carbide crystals is an important technical problem that needs to be solved by those skilled in the art. Utility Model Content

[0006] The purpose of this invention is to provide a silicon carbide crystal graphite paper removal device that can thoroughly remove graphite paper residue on the bottom surface of silicon carbide crystals. The device is safe and efficient in operation, thereby improving the product quality of silicon carbide crystals.

[0007] To solve the above-mentioned technical problems, this utility model provides a silicon carbide crystal graphite paper removal device, including a frame and a controller. The top of the frame is provided with a rotary seat that can rotate around a vertical axis. The top of the rotary seat is provided with a material support platform that can support the silicon carbide crystal and a material lifting mechanism that can drive the material support platform to reciprocate and rise and fall in the vertical direction. The rotary seat is also provided with a clamping mechanism that is aligned with the material support platform and can clamp and fix the silicon carbide crystal on the material support platform.

[0008] The frame is also equipped with a tool holder, which is located on one side of the rotary seat. The tool holder is equipped with a tool support arm that is aligned and arranged above the material support platform. A scraper is detachably mounted on the tool support arm. The blade of the scraper protrudes from the bottom end of the tool support arm and is aligned and adapted to the top surface of the material support platform in the vertical direction. The tool holder is also equipped with a tool lifting mechanism that can drive the tool support arm to reciprocate and move up and down in the vertical direction.

[0009] Preferably, the clamping mechanism includes a positioning frame linked to the material support platform and at least two positioning claws movably mounted on the positioning frame. The positioning frame is arranged around the outer edge of the material support platform in the circumferential direction, and each of the positioning claws is evenly distributed at equal intervals in the circumferential direction of the material support platform.

[0010] The frame is equipped with a clamping control knob, and a clamping transmission assembly is connected between the clamping control knob and the positioning claw to drive the positioning claw to reciprocate radially along the material support table.

[0011] Preferably, the clamping transmission assembly includes a worm gear mechanism and a threaded disc with a guide spiral groove on its end face. The worm of the worm gear mechanism is coaxially linked with the clamping control knob, and the threaded disc is coaxially linked with the worm gear of the worm gear mechanism. The threaded disc is horizontally arranged and coaxially aligned below the positioning frame, and the guide spiral groove is located on the top surface of the threaded disc and is concentric with the top surface of the threaded disc.

[0012] The bottom of each positioning claw is provided with a guide pin that protrudes one by one. The bottom end of the guide pin is slidably inserted into the guide spiral groove, and the top end of the guide pin is linked to the positioning claw. The positioning frame is provided with at least two positioning guide rails that extend radially along the material support platform. The positioning claws are slidably disposed on the positioning guide rails one by one.

[0013] Preferably, the extended end of the positioning claw is provided with a buffer pad that can contact and engage with the sidewall of the silicon carbide crystal.

[0014] Preferably, the outer wall of the protruding end of the positioning claw is recessed with a positioning groove that is adapted to the side wall of the silicon carbide crystal, and the buffer pad is fitted onto the inner wall of the positioning groove.

[0015] Preferably, the positioning slot is provided with a pressure sensor that can cooperate with the sidewall of the silicon carbide crystal, and the pressure sensor is communicatively connected to the controller.

[0016] Preferably, the bottom of the cutter arm is provided with a distance measuring sensor arranged in alignment with the top surface of the material support platform, and the distance measuring sensor is communicatively connected to the controller.

[0017] Preferably, a tool rotary motor is connected between the tool support arm and the tool lifting mechanism. The body of the tool rotary motor is linked to the tool lifting mechanism, and the output shaft of the tool rotary motor is coaxially linked to the assembly end of the tool support arm.

[0018] Preferably, the bottom surface of the tool support arm is recessed with a tool groove, the back of the scraper is aligned and inserted into the tool groove, and a locking pin is inserted into the side of the tool support arm. The front end of the locking pin can be inserted into the tool groove from the side and abut against and press against the side wall of the scraper.

[0019] Preferably, the rack is equipped with a touch screen that is communicatively connected to the controller.

[0020] Compared to the aforementioned background technology, the silicon carbide crystal graphite paper removal device provided by this utility model, during operation, places the silicon carbide crystal, after being taken out of the single crystal furnace, upside down on the support platform so that the bottom surface of the silicon carbide crystal faces upward. Then, the lifting mechanism is controlled to adjust the vertical height of the support platform, thereby adjusting the bottom surface of the silicon carbide crystal on the support platform to an appropriate height that protrudes a certain distance from the top of the clamping mechanism and other surrounding cooperating mechanisms, to meet the subsequent scraper adaptation requirements. Then, the clamping mechanism is controlled to gradually tighten, during which the clamping mechanism fully contacts and reliably presses against the sidewall of the silicon carbide crystal until the clamping mechanism reliably holds the silicon carbide crystal on the support platform, completing the removal of the silicon carbide crystal. The side clamping and fixing achieves radial and circumferential limiting of the silicon carbide crystal; then, the operation of the tool lifting mechanism is controlled to drive the tool support arm and scraper to move up and down synchronously until the scraper is adjusted to fit the bottom surface of the silicon carbide crystal, so that the blade of the scraper can just pierce the graphite paper attached to the bottom surface of the silicon carbide crystal without damaging the silicon carbide crystal; then, the rotation of the rotary seat is controlled to drive the material support table and silicon carbide crystal to rotate synchronously. During this period, the position of the scraper remains constant, so that the blade of the scraper and the rotating bottom surface of the silicon carbide crystal form relative motion, thereby using the blade of the scraper to scrape off the graphite paper residue attached to the bottom surface of the silicon carbide crystal until there is no graphite paper residue left on the bottom surface of the silicon carbide crystal. After the graphite paper residue on the bottom surface of the silicon carbide crystal is removed, the rotary table stops rotating, and the tool lifting mechanism is activated to raise the tool arm and scraper to a suitable position, ensuring a sufficient safety distance between the scraper's blade and the bottom surface of the silicon carbide crystal. The clamping mechanism can then be released to remove the silicon carbide crystal from the support platform. During this process, if necessary, the support lifting mechanism can be activated to lower the rotary table appropriately, further increasing the vertical distance between the support platform and the scraper, providing sufficient space for the operator to safely remove the silicon carbide crystal. The entire operation of the silicon carbide crystal graphite paper removal equipment is smooth and efficient. The operation eliminates the need for operators to hold the tools, significantly improving operational safety and ensuring operator safety. Furthermore, the equipment thoroughly removes the graphite paper residue from the bottom surface of the silicon carbide crystal, effectively optimizing the processing results and thus improving the product quality.

[0021] In another preferred embodiment of this utility model, the clamping mechanism includes a positioning frame linked to the material support platform and at least two positioning claws movably mounted on the positioning frame. The positioning frame is arranged around the outer edge of the material support platform in the circumferential direction, and the positioning claws are evenly distributed at equal intervals in the circumferential direction of the material support platform. A clamping control knob is provided on the frame, and a clamping transmission assembly is connected between the clamping control knob and the positioning claws to drive the positioning claws to reciprocate radially along the material support platform through the clamping control knob. In specific operation, when it is necessary to clamp the silicon carbide crystal on the support platform, turn the clamping control knob forward. This will cause the positioning claw to move synchronously towards the center of the support platform through the forward movement of the clamping transmission component, until the positioning claw contacts the outer wall of the silicon carbide crystal on the support platform and reliably clamps the silicon carbide crystal. When it is necessary to release the silicon carbide crystal on the support platform, turn the clamping control knob in reverse. This will cause the positioning claw to move synchronously away from the center of the support platform through the reverse movement of the clamping transmission component, until the positioning claw disengages from the outer wall of the silicon carbide crystal on the support platform and the distance between them increases sufficiently to allow the silicon carbide crystal to be smoothly removed from the support platform. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is an isometric view of the silicon carbide crystal graphite paper removal device provided in a specific embodiment of the present invention.

[0024] in:

[0025] 10-Frame; 101-Clamping control knob; 102-Touch screen; 103-Switch button; 104-Emergency stop button;

[0026] 11-Rotary seat; 111-Material support platform; 112-Clamping mechanism;

[0027] 12-Tool holder; 121-Tool lifting mechanism; 122-Tool rotary motor;

[0028] 13-Tool support arm; 131-Scraper; 132-Locking pin. Detailed Implementation

[0029] The core of this utility model is to provide a silicon carbide crystal graphite paper removal device, which can thoroughly remove the graphite paper residue on the bottom surface of silicon carbide crystals, and its operation process is safe and efficient, thereby improving the product quality of silicon carbide crystals.

[0030] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] It should be noted in advance that, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing" in this utility model should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0032] Furthermore, in this invention, unless otherwise expressly specified and limited, the first feature being "on" or "below" the second feature may include direct contact between the first and second features, or contact between the first and second features not being in direct contact but through another feature between them.

[0033] In addition, the terms "above," "over," and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicating that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "under," and "beneath" for the first feature and the second feature include the first feature being directly below or diagonally below the second feature, or simply indicating that the first feature is at a lower horizontal level than the second feature. The terms "above," "below," "front," "back," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0034] Please refer to the reference. Figure 1 As shown.

[0035] In a specific embodiment, the silicon carbide crystal graphite paper removal device provided by this utility model includes a frame 10 and a controller. The top of the frame 10 is provided with a rotary seat 11 that can rotate around a vertical axis. The top of the rotary seat 11 is provided with a material support platform 111 that can support silicon carbide crystals and a material lifting mechanism that can drive the material support platform 111 to reciprocate and rise and fall in the vertical direction. The rotary seat 11 is also provided with a clamping mechanism 112 that is aligned with the material support platform 111 and can clamp and fix the silicon carbide crystals on the material support platform 111.

[0036] The frame 10 is also equipped with a tool holder 12, which is located on one side of the rotary seat 11. The tool holder 12 is equipped with a tool support arm 13 that is aligned and arranged above the material support table 111. A scraper 131 is detachably mounted on the tool support arm 13. The blade of the scraper 131 protrudes from the bottom end of the tool support arm 13 and is aligned and adapted with the top surface of the material support table 111 in the vertical direction. The tool holder 12 is also equipped with a tool lifting mechanism 121 that can drive the tool support arm 13 to reciprocate in the vertical direction.

[0037] In actual operation, after the silicon carbide crystal is removed from the single crystal furnace, it is placed upside down on the support platform 111 so that the bottom surface of the silicon carbide crystal faces upwards. Then, the lifting mechanism is controlled to adjust the vertical height of the support platform 111, thereby adjusting the bottom surface of the silicon carbide crystal on the support platform 111 to an appropriate height that protrudes a certain distance from the top of the clamping mechanism 112 and other surrounding cooperating mechanisms, so that the scraper 131 can be adapted to the requirements later.

[0038] Then, the clamping mechanism 112 can be controlled to gradually tighten. During this period, the clamping mechanism 112 fully contacts and reliably presses against the sidewall of the silicon carbide crystal until the clamping mechanism 112 reliably clamps the silicon carbide crystal onto the support table 111, completing the side clamping and fixing of the silicon carbide crystal, so as to achieve radial and circumferential limiting of the silicon carbide crystal.

[0039] Then, the tool lifting mechanism 121 is controlled to move, so as to drive the tool support arm 13 and the scraper 131 to move up and down synchronously until the scraper 131 is adjusted to fit the bottom surface of the silicon carbide crystal, so that the blade of the scraper 131 can just pierce the graphite paper attached to the bottom surface of the silicon carbide crystal without damaging the silicon carbide crystal.

[0040] After the above adjustments are completed, the rotary seat 11 is controlled to rotate on a fixed axis, thereby driving the material support table 111 and the silicon carbide crystal to rotate synchronously. During this period, the position of the scraper 131 remains constant, so that the blade of the scraper 131 and the bottom surface of the rotating silicon carbide crystal form relative motion. This allows the blade of the scraper 131 to scrape off the graphite paper residue adhering to the bottom surface of the silicon carbide crystal until no graphite paper residue remains on the bottom surface of the silicon carbide crystal.

[0041] After the graphite paper remaining on the bottom surface of the silicon carbide crystal is removed, the rotary seat 11 is stopped from rotating, and the tool lifting mechanism 121 is activated to lift the tool arm 13 and the scraper 131 to an appropriate position so that a sufficient safe distance is formed between the blade of the scraper 131 and the bottom surface of the silicon carbide crystal.

[0042] Afterwards, the clamping mechanism 112 can be released to remove the silicon carbide crystal from the support table 111. During this period, if necessary, the lifting mechanism can be controlled to lower the rotary table 11 appropriately, thereby further increasing the vertical distance between the support table 111 and the scraper 131, so that there is enough space for the operator to safely remove the silicon carbide crystal.

[0043] The entire operation of the silicon carbide crystal graphite paper removal equipment is smooth and efficient. During operation, there is no need for staff to operate with knives, which greatly improves the corresponding operational safety and ensures the personal safety of the staff. Moreover, the equipment can completely remove the graphite paper remaining on the bottom surface of the silicon carbide crystal, effectively optimizing the processing effect of the silicon carbide crystal, thereby improving the product quality of the silicon carbide crystal.

[0044] Specifically, the clamping mechanism 112 includes a positioning frame linked to the material support table 111 and at least two positioning claws movably mounted on the positioning frame. The positioning frame is arranged around the outer edge of the material support table 111 in the circumferential direction, and the positioning claws are evenly distributed at equal intervals in the circumferential direction of the material support table 111. A clamping control knob 101 is provided on the frame 10. A clamping transmission assembly is connected between the clamping control knob 101 and the positioning claws to drive the positioning claws to reciprocate radially along the material support table 111 via the clamping control knob 101.

[0045] In actual operation, when it is necessary to clamp the silicon carbide crystal on the support platform 111, the clamping control knob 101 is turned in the forward direction. This causes the positioning claw to move synchronously towards the center of the support platform 111 through the forward movement of the clamping transmission component, until the positioning claw contacts the outer wall of the silicon carbide crystal on the support platform 111 and reliably clamps the silicon carbide crystal. When it is necessary to release the silicon carbide crystal on the support platform 111, the clamping control knob 101 is turned in the reverse direction. This causes the positioning claw to move synchronously away from the center of the support platform 111 through the reverse movement of the clamping transmission component, until the positioning claw disengages from the outer wall of the silicon carbide crystal on the support platform 111 and the distance between them increases sufficiently to allow the silicon carbide crystal to be smoothly removed from the support platform 111.

[0046] More specifically, the clamping transmission assembly includes a worm gear mechanism and a threaded disc with a guide helical groove on its end face. The worm of the worm gear mechanism is coaxially linked with the clamping control knob 101, and the threaded disc is coaxially linked with the worm wheel of the worm gear mechanism. The threaded disc is horizontally arranged and coaxially aligned below the positioning frame, and the guide helical groove is located on the top surface of the threaded disc and is concentric with the top surface of the threaded disc.

[0047] The bottom of each positioning claw is provided with a guide pin that protrudes one by one. The bottom end of the guide pin is slidably inserted into the guide spiral groove, and the top end of the guide pin is linked to the positioning claw. The positioning frame is provided with at least two positioning guide rails that extend radially along the material support table 111. The positioning claws are slidably set on the positioning guide rails one by one.

[0048] When it is necessary to clamp the silicon carbide crystal located on the material support table 111, the clamping control knob 101 is turned in the forward direction to drive the worm in the worm gear mechanism to rotate synchronously in the forward direction. This drives the worm wheel to rotate synchronously in the forward direction through the meshing transmission between the worm and the worm wheel. At this time, the threaded disc rotates in the same direction along with the worm wheel on the same axis. During this period, the guide spiral groove also rotates synchronously in the forward direction with the threaded disc. Since the bottom end of the guide pin is inserted into the guide spiral groove and slides and adapts to the guide spiral groove, and the guide pin is linked to the bottom of the positioning claw, and the positioning claw is restricted by the positioning guide rail and can only perform reciprocating motion along the radial direction of the material support table 111, the guide spiral groove and the positioning pins inserted therein can move relative to each other during the forward fixed axis rotation of the threaded disc. Therefore, during this process, as the guide spiral groove rotates in the forward fixed axis, the positioning pin slides along the spiral extension groove of the guide spiral groove and gradually approaches the axis of the threaded disc, thereby driving the positioning claw to move synchronously toward the center position of the material support table 111. The distance between the positioning claw and the silicon carbide crystal on the material support table 111 also gradually decreases until the end face of the positioning claw contacts and adheres to the outer wall of the silicon carbide crystal. After each positioning claw is attached to and pressed into place with the outer wall of the silicon carbide crystal, the array of positioning claws can work together to press the silicon carbide crystal from multiple directions, thereby ensuring radial and circumferential positioning and locking of the silicon carbide crystal on the material support platform 111.

[0049] Conversely, if it is necessary to release the silicon carbide crystal located on the support platform 111, the clamping control knob 101 is turned in the opposite direction to drive the worm in the worm gear mechanism to rotate synchronously in the opposite direction. This drives the worm gear to rotate synchronously through the meshing transmission between the worm and the worm wheel. At this time, the threaded disc rotates in the same direction as the worm wheel, coaxially linked. During this period, the guide spiral groove also rotates synchronously in the opposite direction with the threaded disc. During the reverse fixed-axis rotation of the threaded disc, the guide spiral groove and the positioning pins inserted therein undergo relative movement. Therefore, during this process, as the guide spiral groove rotates in the opposite fixed-axis direction, the positioning pins slide along the spiral extension of the guide spiral groove and gradually move away from the axis of the threaded disc. This drives the positioning claw to move synchronously away from the center position of the support platform 111, so that the positioning claw disengages from the outer wall of the silicon carbide crystal located on the support platform 111 and gradually moves away until the distance between the end face of the positioning claw and the outer wall of the silicon carbide crystal increases sufficiently to remove the silicon carbide crystal from the support platform 111.

[0050] Based on this, the extended end of the positioning claw is equipped with a buffer pad that can contact and engage with the sidewall of the silicon carbide crystal. This buffer pad, as the component on the positioning claw that directly contacts the silicon carbide crystal, undergoes moderate elastic deformation under pressure after contacting the outer wall of the silicon carbide crystal. This effectively prevents rigid contact between the positioning claw and the silicon carbide crystal, and consequently avoids structural damage to the silicon carbide crystal due to rigid impact. This optimizes the fit between the positioning claw and the silicon carbide crystal, and further ensures the product quality after silicon carbide crystal processing.

[0051] Generally, the cushioning pad is preferably a soft pad made of silicone material, and can be equipped with a rubber sleeve structure so that it can be fitted onto the protruding end of the positioning claw to ensure the connection strength and structural stability between the cushioning pad and the main structure of the positioning claw.

[0052] Correspondingly, the outer wall of the extended end of the positioning claw is recessed with a positioning groove that matches the side wall of the silicon carbide crystal. The buffer pad is fitted onto the inner wall of the positioning groove. The positioning groove is generally an arc-shaped groove, which can fit with the outer wall of the silicon carbide crystal. This further optimizes the fitting effect between the buffer pad at the extended end of the positioning claw and the silicon carbide crystal, so that the buffer pad can fully fit and press against the outer wall of the silicon carbide crystal, ensuring the clamping force and limiting stability of the corresponding silicon carbide crystal.

[0053] In addition, a pressure sensor capable of engaging with the sidewall of the silicon carbide crystal can be installed within the positioning slot. This pressure sensor is communicatively connected to the controller. During the gradual clamping and fitting process between the extended end of the positioning claw and the outer wall of the silicon carbide crystal, the pressure sensor can detect the engagement pressure between the extended end of the positioning claw and the silicon carbide crystal in real time. When the engagement pressure reaches the process set value, the pressure sensor sends a pressure compliance signal to the controller. This allows the operator to promptly stop the further clamping action of the positioning claw based on the feedback signal received from the controller, preventing excessive clamping force applied to the silicon carbide crystal and potential damage. This further optimizes the processing effect of the silicon carbide crystal and the corresponding product quality.

[0054] Considering the material handling requirements under most operating conditions, three positioning claws are preferred. However, if the circumferential extension length of a single positioning claw is sufficient, only two positioning claws are needed to reliably clamp the silicon carbide crystal. Correspondingly, each positioning claw cooperates with the platform of the material support 111 to form a positioning groove structure capable of accommodating the silicon carbide crystal. The reciprocating motion of the clamping transmission component controls the coordinated movement of the positioning claws, allowing for flexible adjustment of the inner diameter of the positioning groove structure. This adapts to the clamping requirements of silicon carbide crystals with different outer diameters, improving the adaptability and ease of operation of the silicon carbide crystal graphite paper removal equipment. Generally, the inner diameter of this positioning groove structure can be flexibly adjusted within the range of 80mm to 220mm to meet the clamping requirements of silicon carbide crystals of most sizes under normal operating conditions.

[0055] On the other hand, a distance sensor is provided at the bottom of the tool arm 13, aligned with the top surface of the support table 111. The distance sensor is communicatively connected to the controller. When the height of the tool arm 13 is adjusted using the tool lifting mechanism 121, the distance sensor can detect the vertical distance between the tool arm 13 and the support table 111 in real time. This continues until the blade of the scraper 131 penetrates the graphite paper and reaches a position that maintains a 1mm gap with the bottom surface of the silicon carbide crystal or is just not in contact. At this point, the distance sensor sends a tool positioning signal to the controller, allowing the operator to stop the tool lifting mechanism 121 in time based on the feedback from the controller. This prevents the tool arm 13 from moving too low and causing the scraper 131 to make rigid contact with the silicon carbide crystal, thus avoiding accidental damage to the silicon carbide crystal by the scraper 131. This further ensures the structural integrity of the silicon carbide crystal and optimizes the processing quality of the corresponding silicon carbide crystal products.

[0056] More specifically, a tool rotary motor 122 is connected between the tool support arm 13 and the tool lifting mechanism 121. The body of the tool rotary motor 122 is linked to the tool lifting mechanism 121, and the output shaft of the tool rotary motor 122 is coaxially linked to the mounting end of the tool support arm 13. By reciprocating the output shaft of the tool rotary motor 122, the tool support arm 13 can be driven to reciprocate accordingly, so as to appropriately adjust the tilt angle of the blade of the scraper 131, thereby adapting to the requirements of graphite paper scraping on the bottom surface of silicon carbide crystals under different working conditions, ensuring that the graphite paper remaining on the bottom of the silicon carbide crystal can be thoroughly and efficiently removed under different working conditions.

[0057] Generally, a horizontal adjustment mechanism capable of reciprocating in the horizontal direction can also be provided between the tool support arm 13 and the tool lifting mechanism 121 to adjust the horizontal position of the tool support arm 13, thereby adjusting the cutting and scraping surface of the scraper 131 in the horizontal direction. Of course, in practical applications, after the scraper 131 is installed, it will be in a position that is fully aligned with the table surface of the material support table 111, ensuring that the cutting edge of the scraper 131 has the most ideal scraping range. Therefore, this horizontal adjustment mechanism is not a necessary component of this solution. If there is a specific requirement in practical applications, the horizontal adjustment mechanism can be a screw mechanism, a cylinder mechanism, or a hydraulic cylinder mechanism. The specific assembly position of the horizontal adjustment mechanism can be between the tool support arm 13 and the tool rotary motor 122, or between the tool rotary motor 122 and the tool lifting mechanism 121.

[0058] It should be noted that the tool lifting mechanism 121 is generally a lead screw mechanism, but it can also be an electric cylinder or a pneumatic cylinder mechanism. In principle, any mechanism that can complete linear reciprocating motion to ensure the accuracy and adjustment efficiency of the reciprocating lifting motion of the tool support arm 13 is acceptable.

[0059] In addition, a groove is recessed on the bottom surface of the tool support arm 13. The back of the scraper 131 is inserted into the groove. A locking pin 132 is inserted into the side of the tool support arm 13. The front end of the locking pin 132 can be inserted into the groove from the side and abut against and press against the side wall of the scraper 131. After the scraper 131 is inserted into the groove, the locking pin 132 can be inserted into the groove from the side until the front end of the locking pin 132, i.e., the insertion end, can reliably abut against and press against the side wall of the scraper 131. In this way, the locking pin 132 is used to reliably clamp and fix the scraper 131 in the groove, so as to prevent the scraper 131 from loosening, misaligning or even falling out of the groove. This ensures the reliability of the assembly structure of the scraper 131 and the tool support arm 13, and makes the tracking and scraping accuracy of the scraper 131 more stable and reliable when performing the removal of residual graphite paper on the bottom surface of the silicon carbide crystal.

[0060] Furthermore, the fixed-axis rotation of the rotary seat 11 can be driven by a rotary motor located at the bottom of the rotary seat 11, while the material lifting mechanism can be a lead screw mechanism or electric cylinder mechanism located below the rotary seat 11, similar to the tool lifting mechanism 121. It is easy to understand that the starting and stopping of each lifting mechanism and rotating mechanism in this solution can be controlled by a controller to achieve automated control of the equipment, further reducing the labor intensity of workers and improving work efficiency.

[0061] Accordingly, a PLC (Programmable Logic Controller) is typically selected as the controller, while a touch screen 102 connected to the controller is installed on the rack 10. During equipment operation, the touch screen 102 can display in real time the operating status information and relevant operating parameters fed back to the controller by each actuator and sensor, so that the operator can understand the working status of each mechanism of the equipment. When necessary, the operator can input control information for different actuators through the touch screen 102, so that the controller can feed back the control information input by the operator to the corresponding actuator, complete the regulation of the corresponding actuator, and optimize the operating efficiency of the silicon carbide crystal graphite paper removal equipment.

[0062] Based on this, a switch button 103 that can communicate with the controller can be installed on the frame 10 to flexibly control the start and stop of each action mechanism in the equipment; an emergency stop button 104 can also be arranged on the frame 10 to stop the entire equipment in special circumstances such as abnormal operation of the scraper 131 or human operation error, or other necessary situations, so as to avoid danger, ensure the personal safety of relevant personnel, and avoid damage to the equipment and silicon carbide crystal materials.

[0063] In summary, the silicon carbide crystal graphite paper removal device provided in this utility model involves placing the silicon carbide crystal, taken from the single crystal furnace, upside down on the support platform with its bottom surface facing upwards. The lifting mechanism is then controlled to adjust the vertical height of the support platform, thereby adjusting the bottom surface of the silicon carbide crystal on the platform to a suitable height that protrudes a certain distance from the top of the clamping mechanism and other surrounding components, to meet the requirements of the subsequent scraper. The clamping mechanism is then controlled to gradually tighten, ensuring full contact and reliable clamping between the clamping mechanism and the sidewall of the silicon carbide crystal until the crystal is reliably held on the support platform, thus completing the removal of the silicon carbide crystal's side surface. The silicon carbide crystal is clamped and fixed to achieve radial and circumferential positioning. Then, the tool lifting mechanism is controlled to move the tool arm and scraper synchronously up and down until the scraper is adjusted to fit the bottom surface of the silicon carbide crystal, so that the blade can just pierce the graphite paper attached to the bottom surface of the silicon carbide crystal without damaging the silicon carbide crystal. After that, the rotary table is controlled to rotate on the fixed axis to drive the material support table and silicon carbide crystal to rotate synchronously. During this period, the position of the scraper remains constant, so that the blade of the scraper and the rotating bottom surface of the silicon carbide crystal form relative motion. The blade of the scraper is used to scrape off the graphite paper residue attached to the bottom surface of the silicon carbide crystal until there is no graphite paper residue left on the bottom surface of the silicon carbide crystal. After the graphite paper residue on the bottom surface of the silicon carbide crystal is removed, the rotary table stops rotating, and the tool lifting mechanism is activated to raise the tool arm and scraper to a suitable position, ensuring a sufficient safety distance between the scraper's blade and the bottom surface of the silicon carbide crystal. The clamping mechanism can then be released to remove the silicon carbide crystal from the support platform. During this process, if necessary, the support lifting mechanism can be activated to lower the rotary table appropriately, further increasing the vertical distance between the support platform and the scraper, providing sufficient space for the operator to safely remove the silicon carbide crystal. The entire operation of the silicon carbide crystal graphite paper removal equipment is smooth and efficient. The operation eliminates the need for operators to hold the tools, significantly improving operational safety and ensuring operator safety. Furthermore, the equipment thoroughly removes the graphite paper residue from the bottom surface of the silicon carbide crystal, effectively optimizing the processing results and thus improving the product quality.

[0064] The silicon carbide crystal graphite paper removal device provided by this utility model has been described in detail above. Specific examples have been used to illustrate the principle and implementation of this utility model. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core idea of ​​this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principle of this utility model, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. A silicon carbide crystal graphite paper removal device, characterized in that, The device includes a frame and a controller. The top of the frame is provided with a rotary seat that can rotate around a vertical axis. The top of the rotary seat is provided with a material support platform that can support silicon carbide crystals and a material lifting mechanism that can drive the material support platform to reciprocate and rise and fall in the vertical direction. The rotary seat is also provided with a clamping mechanism that is aligned with the material support platform and can clamp and fix the silicon carbide crystals on the material support platform. The frame is also equipped with a tool holder, which is located on one side of the rotary seat. The tool holder is equipped with a tool support arm that is aligned and arranged above the material support platform. A scraper is detachably mounted on the tool support arm. The blade of the scraper protrudes from the bottom end of the tool support arm and is aligned and adapted to the top surface of the material support platform in the vertical direction. The tool holder is also equipped with a tool lifting mechanism that can drive the tool support arm to reciprocate and move up and down in the vertical direction.

2. The silicon carbide crystal graphite paper removal device as described in claim 1, characterized in that, The clamping mechanism includes a positioning frame linked to the material support platform and at least two positioning claws movably mounted on the positioning frame. The positioning frame is arranged around the outer edge of the material support platform in the circumferential direction, and each of the positioning claws is evenly distributed at equal intervals in the circumferential direction of the material support platform. The frame is equipped with a clamping control knob, and a clamping transmission assembly is connected between the clamping control knob and the positioning claw to drive the positioning claw to reciprocate radially along the material support table.

3. The silicon carbide crystal graphite paper removal device as described in claim 2, characterized in that, The clamping transmission assembly includes a worm gear mechanism and a threaded disc with a guide spiral groove on its end face. The worm of the worm gear mechanism is coaxially linked with the clamping control knob, and the threaded disc is coaxially linked with the worm gear of the worm gear mechanism. The threaded disc is horizontally arranged and coaxially aligned below the positioning frame, and the guide spiral groove is located on the top surface of the threaded disc and is concentric with the top surface of the threaded disc. The bottom of each positioning claw is provided with a guide pin that protrudes one by one. The bottom end of the guide pin is slidably inserted into the guide spiral groove, and the top end of the guide pin is linked to the positioning claw. The positioning frame is provided with at least two positioning guide rails that extend radially along the material support platform. The positioning claws are slidably disposed on the positioning guide rails one by one.

4. The silicon carbide crystal graphite paper removal device as described in claim 3, characterized in that, The extended end of the positioning claw is equipped with a buffer pad that can contact and engage with the sidewall of the silicon carbide crystal.

5. The silicon carbide crystal graphite paper removal device as described in claim 4, characterized in that, The outer wall of the extended end of the positioning claw is recessed with a positioning groove that matches the side wall of the silicon carbide crystal, and the buffer pad is fitted onto the inner wall of the positioning groove.

6. The silicon carbide crystal graphite paper removal device as described in claim 5, characterized in that, The positioning slot is equipped with a pressure sensor that can cooperate with the sidewall of the silicon carbide crystal, and the pressure sensor is communicatively connected to the controller.

7. The silicon carbide crystal graphite paper removal device as described in claim 1, characterized in that, The bottom of the cutter arm is equipped with a distance sensor that is aligned with the top surface of the material support platform, and the distance sensor is communicatively connected to the controller.

8. The silicon carbide crystal graphite paper removal device as described in claim 7, characterized in that, A tool rotary motor is connected between the tool support arm and the tool lifting mechanism. The body of the tool rotary motor is linked to the tool lifting mechanism, and the output shaft of the tool rotary motor is coaxially linked to the assembly end of the tool support arm.

9. The silicon carbide crystal graphite paper removal device as described in claim 1, characterized in that, The bottom surface of the tool support arm is recessed with a groove, and the back of the scraper is inserted into the groove. A locking pin is inserted into the side of the tool support arm, and the front end of the locking pin can be inserted into the groove from the side and abut against and press against the side wall of the scraper.

10. The silicon carbide crystal graphite paper removal device as described in claim 1, characterized in that, The rack is equipped with a touch screen that is communicatively connected to the controller.

Images