A quartz glass ingot pickling device

Abstract

The utility model provides a quartz glass ingot pickling device belongs to quartz glass processing technical field. The quartz glass ingot pickling device includes the work bin, and the first pickling pool, first water washing pool and air dry pool of sequence setting in the work bin, still be provided with a plurality of aeration heads in the first pickling pool, the position of aeration head is lower than the position of quartz glass ingot that rests on the ingot pickling support foot, the bottom and the periphery lateral wall of first water washing pool are provided with a plurality of spray nozzles or a plurality of water washing spray pipe, are provided with a plurality of spray holes or spray branch pipe on water washing spray pipe, the bottom and the periphery lateral wall of air dry pool are provided with a plurality of hot -blast pipe, are provided with a plurality of air -out hole or air -out branch pipe on hot -blast pipe. In the utility model, through the work bin is isolated, will not directly outside exhaust hydrogen fluoride gas, no outside exhaust pollution, no secondary pollution of pollutant, and the safety factor is high.

Description

Technical Field

[0001] This utility model relates to the field of quartz glass processing technology, and in particular to a quartz glass ingot pickling device. Background Technology

[0002] Before columnar quartz glass ingots prepared by methods such as VAD are further geothermally melted into cakes, their outer surfaces need to be thoroughly cleaned to prevent contaminants from being drawn into the interior of the quartz glass during melting, which could lead to defects such as inclusions, crystallization, and bubbles. The traditional cleaning method for quartz glass ingots involves manually immersing and brushing them in a simple tank of hydrofluoric acid solution, then immersing them again in a washing tank for a second rinse with deionized water, and finally removing them from the tank and air-drying them.

[0003] However, this traditional cleaning method has the following drawbacks:

[0004] (1) The cleaning method is too simple and crude, which poses a safety hazard to the operators. The volatilized hydrogen fluoride gas enters the environment and causes pollution.

[0005] (2) The entire cleaning process is completely exposed to the natural environment, and there is a high probability that dust and other pollutants in the environment will adhere to the surface of the ingot, making the cleaning a complete failure. Utility Model Content

[0006] This invention addresses the safety hazards, environmental pollution, and unavoidable secondary pollution issues associated with traditional cleaning methods by providing a quartz glass ingot acid washing device. This device utilizes a working chamber for isolation, preventing direct emission of hydrogen fluoride gas, eliminating external pollution, preventing secondary pollution, and ensuring a high safety factor.

[0007] The technical solution adopted in this utility model is:

[0008] A quartz glass ingot pickling apparatus, comprising:

[0009] The working compartment has an inlet and an outlet, and is equipped with matching doors;

[0010] The first pickling tank is located near the inlet of the working chamber; the lower part of the first pickling tank has at least four ingot pickling support feet, which are arranged in pairs; the distance between two ingot pickling support feet in the same group is less than the diameter of the quartz glass ingot; the first pickling tank is also provided with a number of aeration heads, which are positioned below the position of the quartz glass ingot resting on the ingot pickling support feet.

[0011] A drying tank is located near the outlet within the working chamber. The lower part of the drying tank has at least four drying support legs for ingots, arranged in pairs. The distance between two drying support legs within the same group is less than the diameter of the quartz glass ingot. Several hot air pipes are installed on the bottom and surrounding side walls of the drying tank. Each hot air pipe has several air outlets or branch pipes, with the outlets or branch pipes facing the surface of the placed quartz glass ingot.

[0012] The first washing tank is located within the working chamber and between the first pickling tank and the air drying tank. The lower part of the first washing tank has at least four ingot washing support legs, arranged in pairs. The distance between two ingot washing support legs in the same group is less than the diameter of the quartz glass ingot. The bottom and the surrounding side walls of the first washing tank are provided with a number of nozzles or washing spray pipes. Each washing spray pipe has a number of spray holes or spray branches. The nozzles, spray holes or spray branches are oriented towards the surface of the placed quartz glass ingot.

[0013] Furthermore, the opposite sides of the pickling support feet of the two ingots in the same group are inclined to form a "V" shape structure, and the minimum distance of the "V" shape structure is less than the diameter of the quartz glass ingot.

[0014] And / or, the opposite sides of the two ingot washing support feet in the same group are inclined to form a "V" shape structure, and the minimum distance of the "V" shape structure is less than the diameter of the quartz glass ingot.

[0015] And / or, the opposite sides of the two ingot drying support feet in the same group are inclined to form a "V" shape structure, and the minimum distance of the "V" shape structure is less than the diameter of the quartz glass ingot.

[0016] Furthermore, the bottom of the work chamber is evenly provided with multiple adjustable support legs;

[0017] And / or, the working chamber is also connected to an exhaust gas treatment system;

[0018] And / or, the work compartment includes modular wall panels, a floor panel, a top panel, and a supporting frame;

[0019] And / or, the work compartment has a transparent window on at least one side.

[0020] Furthermore, a cooling pipe is spirally wound on the outer peripheral wall of the first pickling tank, and a low-temperature medium of 0~15 ℃ circulates inside the cooling pipe.

[0021] Furthermore, it also includes a feeding trolley and a discharging trolley.

[0022] Furthermore, multi-degree-of-freedom transfer industrial robots are respectively installed near the first pickling tank, the first washing tank and the air drying tank in the working chamber, and the surface of the gripper of the multi-degree-of-freedom transfer industrial robot that contacts the quartz glass ingot is provided with a polytetrafluoroethylene protective layer.

[0023] Alternatively, multi-degree-of-freedom transfer industrial robots are respectively installed near the first pickling tank, between the first pickling tank and the first washing tank, between the first washing tank and the air drying tank, and near the air drying tank in the working chamber. The surface of the gripper of the multi-degree-of-freedom transfer industrial robot that contacts the quartz glass ingot is provided with a polytetrafluoroethylene protective layer.

[0024] Alternatively, a slide rail is provided on the bottom surface of the working chamber, and the first pickling tank, the first washing tank and the air drying tank are arranged in sequence near the slide rail; an electric trolley is provided on the slide rail, and a multi-degree-of-freedom transfer industrial robot is provided on the electric trolley, and the surface of the gripper of the multi-degree-of-freedom transfer industrial robot that contacts the quartz glass ingot is provided with a polytetrafluoroethylene protective layer.

[0025] Furthermore, two parallel overhead rails are arranged in the upper part of the working chamber, and the first pickling tank, the first washing tank, and the drying tank are arranged in a straight line in the area below the two overhead rails; a trolley is slidably mounted on the overhead rails, and a lift is provided below the trolley in the area corresponding to the arrangement positions of the first pickling tank, the first washing tank, and the drying tank.

[0026] The lifting device is slidably connected to the traveling crane on two opposite sides via lifting ladders, and at least one of the lifting ladders is provided with a rack; the lifting device is provided with a lifting gear motor and a lifting gear connected to the power output end of the lifting gear motor, and the lifting gear cooperates with the rack;

[0027] The lifting device is also equipped with a lifting motor and two fixed pulleys. Two hanging rings are provided on the bottom surface of the lifting device, and the hanging rings correspond one-to-one with the fixed pulleys. One end of the lifting rope is provided with a hook, which can be hung on the hanging ring. The other end of the lifting rope passes through the corresponding fixed pulley and is wound around the winding shaft of the lifting motor. At the same time, the surface of the lifting rope is provided with a polytetrafluoroethylene protective layer.

[0028] Alternatively, two parallel ground rails are arranged on the bottom surface of the working chamber, and the first pickling tank, the first washing tank, and the drying tank are arranged in a straight line in the area below the two ground rails; a gantry-shaped moving frame is slidably fitted on the ground rails, and a lift is provided in the area below the middle of the gantry-shaped moving frame corresponding to the arrangement positions of the first pickling tank, the first washing tank, and the drying tank.

[0029] The lifting device is slidably connected to the traveling crane on two opposite sides via lifting ladders, and at least one of the lifting ladders is provided with a rack; the lifting device is provided with a lifting gear motor and a lifting gear connected to the power output end of the lifting gear motor, and the lifting gear cooperates with the rack;

[0030] The lifting device is also equipped with a lifting motor and two fixed pulleys. Two hanging rings are provided on the bottom surface of the lifting device, and the hanging rings correspond one-to-one with the fixed pulleys. One end of the lifting rope is provided with a hook, which can be hung on the hanging ring. The other end of the lifting rope passes through the corresponding fixed pulley and is wound around the winding shaft of the lifting motor. At the same time, the surface of the lifting rope is provided with a polytetrafluoroethylene protective layer.

[0031] Furthermore, multiple second pickling tanks and multiple second washing tanks are alternately arranged between the first washing tank and the air drying tank; the structure of the second pickling tank is the same as the structure of the first pickling tank, and the structure of the second washing tank is the same as the structure of the first washing tank.

[0032] Furthermore, multi-degree-of-freedom transfer industrial robots are respectively installed near the first pickling tank, the first washing tank, the second pickling tank, the second washing tank and the air drying tank in the working chamber, and the surface of the gripper of the multi-degree-of-freedom transfer industrial robot that contacts the quartz glass ingot is provided with a polytetrafluoroethylene protective layer.

[0033] Alternatively, multi-degree-of-freedom transfer industrial robots are respectively installed near the first pickling tank, between the first pickling tank and the first water washing tank, between the first water washing tank and the second pickling tank, between the second pickling tank and the second water washing tank, between the second water washing tank and the air drying tank, and near the air drying tank. The surface of the gripper of the multi-degree-of-freedom transfer industrial robot that contacts the quartz glass ingot is provided with a polytetrafluoroethylene protective layer.

[0034] Alternatively, a slide rail is provided on the bottom surface of the working chamber, and the first pickling tank, the first washing tank, the second pickling tank, the second washing tank, and the air drying tank are arranged in sequence near the slide rail; an electric trolley is provided on the slide rail, and a multi-degree-of-freedom transfer industrial robot is provided on the electric trolley, and the surface of the gripper of the multi-degree-of-freedom transfer industrial robot that contacts the quartz glass ingot is provided with a polytetrafluoroethylene protective layer.

[0035] Furthermore, two parallel overhead rails are arranged in the upper part of the working chamber. The first pickling tank, the first washing tank, the second pickling tank, the second washing tank, and the drying tank are arranged in a straight line in the area below the two overhead rails. A trolley is slidably mounted on the overhead rails, and a lift is provided below the trolley in the area corresponding to the arrangement of the first pickling tank, the first washing tank, the second pickling tank, the second washing tank, and the drying tank.

[0036] The lifting device is slidably connected to the traveling crane on two opposite sides via lifting ladders, and at least one of the lifting ladders is provided with a rack; the lifting device is provided with a lifting gear motor and a lifting gear connected to the power output end of the lifting gear motor, and the lifting gear cooperates with the rack;

[0037] The lifting device is also equipped with a lifting motor and two fixed pulleys. Two hanging rings are provided on the bottom surface of the lifting device, and the hanging rings correspond one-to-one with the fixed pulleys. One end of the lifting rope is provided with a hook, which can be hung on the hanging ring. The other end of the lifting rope passes through the corresponding fixed pulley and is wound around the winding shaft of the lifting motor. At the same time, the surface of the lifting rope is provided with a polytetrafluoroethylene protective layer.

[0038] Alternatively, two parallel ground rails are arranged on the bottom surface of the working chamber, and the first pickling tank, the first washing tank, the second pickling tank, the second washing tank, and the drying tank are arranged in a straight line in the area below the two ground rails; a gantry-shaped moving frame is slidably installed on the ground rails, and a lift is installed in the lower middle of the gantry-shaped moving frame in the area corresponding to the arrangement positions of the first pickling tank, the first washing tank, the second pickling tank, the second washing tank, and the drying tank;

[0039] The lifting device is slidably connected to the traveling crane on two opposite sides via lifting ladders, and at least one of the lifting ladders is provided with a rack; the lifting device is provided with a lifting gear motor and a lifting gear connected to the power output end of the lifting gear motor, and the lifting gear cooperates with the rack;

[0040] The lifting device is also equipped with a lifting motor and two fixed pulleys. Two hanging rings are provided on the bottom surface of the lifting device, and the hanging rings correspond one-to-one with the fixed pulleys. One end of the lifting rope is provided with a hook, which can be hung on the hanging ring. The other end of the lifting rope passes through the corresponding fixed pulley and is wound around the winding shaft of the lifting motor. At the same time, the surface of the lifting rope is provided with a polytetrafluoroethylene protective layer.

[0041] The beneficial effects of this utility model are:

[0042] This invention addresses the safety hazards, environmental pollution, and unavoidable secondary pollution associated with traditional cleaning methods by providing a quartz glass ingot pickling device. This device pickles quartz glass ingots within a largely enclosed working chamber, preventing the direct release of volatilized hydrogen fluoride gas into the surrounding environment, thus eliminating pollution. Furthermore, the working chamber's isolation prevents dust and other pollutants from re-adhering to the surface of the quartz glass ingot, ensuring effective pickling. Moreover, the device combines multiple technologies, including bubble-assisted pickling, deionized water rinsing, and hot air drying, guaranteeing a high-quality pickling process and avoiding direct contact with hydrofluoric acid for operators, resulting in a high safety factor. Attached Figure Description

[0043] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0044] Figure 1 This is a top view of the quartz glass ingot pickling apparatus in the embodiment.

[0045] Figure 2 This is a front view of the quartz glass ingot pickling apparatus in the embodiment.

[0046] Figure 3 This is a right view of the quartz glass ingot pickling apparatus in the embodiment.

[0047] The attached chart shows the price:

[0048] 100. Working compartment; 110. Compartment door; 120. Adjustable support feet; 130. Crane track; 140. Crane; 141. Roller; 142. Crane motor; 150. Lifting device; 151. Lifting ladder; 152. Lifting gear motor; 153. Lifting and discharging motor; 154. Fixed pulley; 155. Hanging ring; 156. Lifting rope; 157. Hook;

[0049] 200. Exhaust fan;

[0050] 300. First pickling tank; 310. Support feet for ingot pickling; 320. Aeration head;

[0051] 400. First washing tank; 410. Support legs for ingot washing; 420. Washing nozzles;

[0052] 500. Drying tank; 510. Support legs for ingot drying; 520. Hot air duct;

[0053] 600. Second pickling tank;

[0054] 700. Second washing pool;

[0055] 800. Feeding and handling trolley;

[0056] 900. Material unloading and handling trolley. Detailed Implementation

[0057] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0058] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this invention.

[0059] The embodiments of the utility model will now be described in detail with reference to the accompanying drawings.

[0060] Figure 1 This is a top view of the quartz glass ingot pickling apparatus in the embodiment. Figure 2 3 is a front view of the quartz glass ingot pickling apparatus in the embodiment. 4 is a right view of the quartz glass ingot pickling apparatus in the embodiment. Figures 1-3As described, the quartz glass ingot pickling device includes a rectangular working chamber 100, with all other equipment installed inside. The front side wall of the working chamber 100 has inlets and outlets on its left and right sides, and is equipped with matching doors 110. Opening the doors 110 allows the quartz glass ingots to be pickled to be transferred into the working chamber 100, or allows the pickled quartz glass ingots to be transferred out of the working chamber 100. Closing the doors 110 essentially seals the working chamber 100. Simultaneously, multiple adjustable feet 120 are evenly distributed at the bottom of the working chamber 100. By adjusting the height of the adjustable feet 120, the working chamber 100 can be kept approximately level to accommodate uneven ground conditions. Furthermore, an exhaust gas treatment system is installed on the rear wall of the working chamber 100. This system is connected to the interior of the working chamber 100. The exhaust fan 200 of the exhaust gas treatment system extracts and treats hydrogen fluoride gas and other gases volatilized during pickling within the working chamber 100, preventing direct discharge and pollution to the surrounding environment. Small amounts of floating dust within the working chamber 100 are also extracted and treated along with the hydrogen fluoride gas, ensuring a high level of cleanliness within the working chamber 100. Furthermore, the working chamber 100 can be constructed from modular wall panels, a floor panel, a top panel, and a supporting frame, allowing for quick assembly and disassembly, and facilitating the installation, maintenance, or replacement of internal equipment. Moreover, at least one side of the working chamber 100 is equipped with a transparent window (e.g., made of polychlorotrifluoroethylene) to facilitate observation of the internal working conditions. In this embodiment, by setting up a working chamber 100, the pickling process of the quartz glass ingot is moved to the working chamber 100. The hydrogen fluoride gas volatilized during the pickling process is confined within the working chamber 100 and then treated by the exhaust gas treatment system, preventing direct discharge into the surrounding environment and thus avoiding environmental pollution. Simultaneously, since the entire pickling process takes place within the working chamber 100, dust and other pollutants from the surrounding environment will not re-adhere to the surface of the quartz glass ingot due to the barrier provided by the working chamber 100, ensuring the pickling effect. It should be noted that the exhaust gas treatment system in this embodiment is a publicly available prior art, such as the Chinese Utility Model Publication "A Hydrogen Fluoride Exhaust Gas Treatment System" (Announcement No.: CN210251808U).

[0061] In this embodiment, the working chamber 100 is sequentially equipped with a first pickling tank 300, a first washing tank 400, and a drying tank 500 along the direction from inlet to outlet, to respectively achieve immersion pickling, deionized water rinsing, and hot air drying of the quartz glass ingot. Simultaneously, to further improve the pickling effect, multiple second pickling tanks 600 and multiple second washing tanks 700 can be alternately arranged between the first washing tank 400 and the drying tank 500. For example... Figure 1 and Figure 2 The diagram shows that the working chamber 100 is provided with a first pickling tank 300, a first washing tank 400, a second pickling tank 600, a second washing tank 700, and an air drying tank 500 arranged sequentially from the inlet to the outlet.

[0062] Specifically, the lower part of the first pickling tank 300 is provided with four ingot pickling support feet 310, which are arranged in pairs. The distance between two ingot pickling support feet 310 in the same group is less than the diameter of the quartz glass ingot. Thus, the two ends of the quartz glass ingot along the axial length direction can be placed between the two ingot pickling support feet 310 in the same group. An appropriate amount of hydrofluoric acid is injected into the first pickling tank 300, and the liquid level of the hydrofluoric acid is slightly higher than the highest point of the placed quartz glass ingot, so that immersion pickling can be carried out. Meanwhile, to improve the pickling effect of quartz glass ingots immersed in hydrofluoric acid in the first pickling tank 300, several aeration heads 320 are evenly arranged in the first pickling tank 300. The position of the aeration heads 320 is lower than the position of the quartz glass ingots placed on the pickling support feet 310. Thus, by introducing clean air or inert gas into the aeration heads 320, a large number of bubbles are generated, and the airflow disturbance accelerates the separation of impurities on the surface of the quartz glass ingots, thus assisting in improving the pickling process. At the same time, the bubble-assisted pickling method can also avoid the safety risks caused by manual brushing. Furthermore, to further improve the support and fixation effect of the pickling support feet 310 on the quartz glass ingots, the opposite sides of the two pickling support feet 310 in the same group are inclined to form a "V" shape structure, and the minimum distance of the "V" shape structure is less than the diameter of the quartz glass ingot. Thus, the two ends of the quartz glass ingot along the axial length direction can be placed in the inner V-shaped area of ​​the two "V" shapes. Furthermore, a cooling pipe (not shown in the figure) is spirally wound around the outer peripheral wall of the first pickling tank 300. By circulating a low-temperature medium (such as brine) at 0-15 °C within the cooling pipe, the temperature of the area in the first pickling tank 300 can be reduced, thereby decreasing the amount of hydrogen fluoride gas released from the hydrofluoric acid in the first pickling tank 300 into the working chamber 100. When the hydrofluoric acid in the first pickling tank 300 fails to meet requirements due to excessive impurities, it can be discharged through the acid discharge pipe (not shown in the figure) at the bottom of the first pickling tank 300, and then replenished with new hydrofluoric acid through the acid inlet pipe (not shown in the figure) at the bottom of the first pickling tank 300. The structure of the second pickling tank 600 in this embodiment is the same as that of the first pickling tank 300, mainly differing in their installation positions within the working chamber 100. Those skilled in the art can understand the specific structure of the second pickling tank 600 based on the foregoing text.

[0063] The lower part of the first washing tank 400 is equipped with four ingot washing support feet 410, arranged in pairs. The distance between two ingot washing support feet 410 in the same group is less than the diameter of the quartz glass ingot. Thus, the two ends of the acid-washed quartz glass ingot along its axial length can rest between the two ingot washing support feet 410 in the same group. At the same time, several nozzles or several washing spray pipes 420 are provided on the bottom and surrounding side walls of the first washing tank 400. Each washing spray pipe 420 has several spray holes or spray branches. The nozzles, spray holes or spray branches are directed towards the surface of the rested quartz glass ingot. By spraying deionized water onto the surface of the quartz glass through the nozzles or washing spray pipes 420, the quartz glass ingot can be rinsed to remove residual hydrofluoric acid and impurities. The rinsing water is discharged from the bottom of the first washing tank 400 through a drain pipe (not shown in the figure). Furthermore, to further improve the support and fixing effect of the ingot washing support feet 410 on the quartz glass ingot, the opposing sides of the two ingot washing support feet 410 in the same group are inclined to form a "V" shape structure, and the minimum distance of the "V" shape structure is less than the diameter of the quartz glass ingot; thus, the two ends of the quartz glass ingot along the axial length direction can rest on the inner V-shaped area of ​​the two "V" shapes. The structure of the second washing tank 700 in this embodiment is the same as that of the first washing tank 400, mainly differing in their installation positions within the working chamber 100. Those skilled in the art can understand the specific structure of the second washing tank 700 based on the foregoing text.

[0064] The lower part of the drying tank 500 is equipped with four ingot drying support legs 510, arranged in pairs. The distance between two ingot drying support legs 510 in the same group is less than the diameter of the quartz glass ingot. Thus, the two ends of the quartz glass ingot along its axial length can be placed between the two ingot drying support legs 510 in the same group. At the same time, several hot air pipes 520 are provided on the bottom and surrounding side walls of the drying tank 500. Each hot air pipe 520 has several air outlets or air outlet branches, which face the surface of the placed quartz glass ingot. By spraying clean hot air at a temperature of 50~100℃ onto the surface of the quartz glass through the hot air pipes 520, the quartz glass ingot can be dried by hot air to remove residual moisture. The dried quartz glass ingot can then be taken out and transferred to the working chamber 100 for the next process. Furthermore, in order to further improve the support and fixing effect of the ingot drying support foot 510 on the quartz glass ingot, the opposite sides of the two ingot drying support feet 510 in the same group are inclined to form a "V" shaped structure, and the minimum distance of the "V" shaped structure is less than the diameter of the quartz glass ingot; thus, the two ends of the quartz glass ingot along the axial length direction can be placed in the inner V-shaped area of ​​the two "V" shaped structures.

[0065] The quartz glass ingot pickling device in this embodiment is used to pickle quartz glass ingots. The pickling process is completed in a largely enclosed working chamber, which can prevent the direct release of hydrogen fluoride gas volatilized during the pickling process into the surrounding environment, thus avoiding pollution. At the same time, due to the barrier of the working chamber, dust and other pollutants in the surrounding environment will not re-adhere to the surface of the quartz glass ingots, ensuring the pickling effect. Furthermore, the quartz glass ingots are pickled using a combination of multiple technologies such as bubble-assisted pickling, deionized water rinsing, and hot air drying, which ensures the pickling effect and avoids direct contact between operators and hydrofluoric acid, resulting in a high safety factor.

[0066] In the optimized technical solution of this embodiment, a multi-degree-of-freedom transfer industrial robot is respectively arranged near the first pickling tank 300, the first washing tank 400, the second pickling tank 600, the second washing tank 700, and the drying tank 500 in the working chamber 100. Alternatively, a multi-degree-of-freedom transfer industrial robot is arranged near the first pickling tank 300, between the first pickling tank 300 and the first washing tank 400, between the first washing tank 400 and the second pickling tank 600, between the second pickling tank 600 and the second washing tank 700, between the second washing tank 700 and the drying tank 500, and near the drying tank 500. Alternatively, a slide rail is arranged on the bottom surface of the working chamber 100, and the first pickling tank 300, the first washing tank 400, the second pickling tank 600, the second washing tank 700, and the drying tank 500 are arranged sequentially near the slide rail. At the same time, an electric trolley is arranged on the slide rail, and a multi-degree-of-freedom transfer industrial robot is arranged on the electric trolley. Meanwhile, the surface of the gripper of the multi-degree-of-freedom transfer industrial robot that contacts the quartz glass ingot is covered with a polytetrafluoroethylene protective layer to prevent damage to the quartz glass surface and avoid hydrofluoric acid corrosion. In this embodiment, the multi-degree-of-freedom transfer industrial robot can realize intelligent control and transfer of the quartz glass ingot, as well as small-angle axial rotation (clamping, rotating, and lowering) of the quartz glass ingot during processes such as bubble-assisted pickling, deionized water rinsing, and hot air drying, to ensure the pickling effect. It should be noted that the multi-degree-of-freedom transfer industrial robot used in this embodiment is a publicly available prior art, such as the "Industrial Robot Capable of Multi-Degree-of-Freedom Steering" (Announcement No.: CN217256415U) and the "Multi-Degree-of-Freedom Industrial Robot" (Announcement No.: CN203266665U) disclosed in the Chinese Utility Model Publication, and the large industrial robot sold by Shanghai FANUC, etc. Only adaptive adjustments to the shape of the gripper are needed according to requirements, which can be derived by those skilled in the art without creative effort.

[0067] In the optimized technical solution of this embodiment, two parallel trolley tracks 130 are arranged in the upper part of the working chamber 100. The first pickling tank 300, the first washing tank 400, the second pickling tank 600, the second washing tank 700, and the drying tank 500 are arranged in a straight line in the lower area between the two trolley tracks 130. The trolley tracks 130 carry a trolley 140, which moves to a designated position on the trolley tracks 130 via internally provided rollers 141 and a trolley motor 142. A lifter 150 is installed below the crane 140 at the positions of the first pickling tank 300, the first washing tank 400, the second pickling tank 600, the second washing tank 700, and the drying tank 500, which are arranged in a straight line. The two opposite sides of the lifter 150 are slidably connected to the crane 140 through a lifting ladder 151, and at least one lifting ladder 151 is provided with a rack. At the same time, the lifter 150 is provided with a lifting gear motor 152 and a lifting gear connected to the power output end of the lifting gear motor 152. The lifting gear cooperates with the rack, so that the lifting gear motor 152 can drive the lifter 150 to move up and down. Furthermore, the lifting device 150 is also equipped with a lifting motor 153 and two fixed pulleys 154. Two hanging rings 155 are provided on the bottom surface of the lifting device 150. One hanging ring 155 and one fixed pulley 154 are roughly in the same vertical plane, that is, the hanging ring 155 and the fixed pulley 154 correspond one-to-one, and each is provided with a suspension rope 156. One end of the lifting rope 156 is equipped with a hook 157, which can be hooked onto the hanging ring 155. The other end of the lifting rope 156 passes through the corresponding fixed pulley 154 and is wound around the winding shaft of the lifting and discharging machine 153. At the same time, the surface of the lifting rope 156 is provided with a polytetrafluoroethylene protective layer. After the two lifting ropes 156 pass through the bottom of the quartz glass ingot, the height of the quartz glass ingot can be raised by the lifter 150. With the movement of the traveling crane 140, the ingot can be transferred between the first pickling tank 300, the first washing tank 400, the second pickling tank 600, the second washing tank 700, and the drying tank 500. During the change of length of the lifting rope 156, the quartz glass ingot will be rotated axially in sync. With the height adjustment of the lifter 150, the pickling of the quartz glass ingot can be better achieved. It should be noted that in this embodiment, the contact position between the lifting rope 156 and the quartz glass ingot does not coincide with the contact positions between the ingot pickling support foot 310, the ingot washing support foot 410, and the ingot drying support foot 510 and the quartz glass ingot. After the quartz glass ingot is placed, the length of the lifting rope 156 continues to increase appropriately until it separates from the quartz glass ingot. It should also be noted that in this embodiment, the trolley track 130 can be replaced with a ground track laid on the bottom surface of the working chamber 100, and the trolley 140 can be replaced with a similar gantry-shaped moving frame. A lifter 150 is installed in the lower middle of the gantry-shaped moving frame. Those skilled in the art can understand the remaining structure based on the foregoing text, and the quartz glass ingot can also be lifted and rotated.

[0068] In the optimized technical solution of this embodiment, the quartz glass ingot pickling device also includes a feeding trolley 800 and a discharging trolley 900 to facilitate the transfer of quartz glass ingots. The feeding trolley 800 and the discharging trolley 900 in this embodiment have the same structure and are both publicly available prior art, such as the Chinese Utility Model Publication "A Cylindrical Material Handling Device" (Announcement No.: CN218085648U) and the Chinese Utility Model Publication "A Cylindrical Material Transfer Device" (Announcement No.: CN217124854U).

Claims

1. A pickling apparatus for quartz glass ingots, characterized in that, include: The working compartment has an inlet and an outlet, and is equipped with matching doors; The first pickling tank is located near the inlet of the working chamber; the lower part of the first pickling tank has at least four ingot pickling support feet, which are arranged in pairs; the distance between two ingot pickling support feet in the same group is less than the diameter of the quartz glass ingot; the first pickling tank is also provided with a number of aeration heads, which are positioned below the position of the quartz glass ingot resting on the ingot pickling support feet. A drying tank is located near the outlet within the working chamber. The lower part of the drying tank has at least four drying support legs for ingots, arranged in pairs. The distance between two drying support legs within the same group is less than the diameter of the quartz glass ingot. Several hot air pipes are installed on the bottom and surrounding side walls of the drying tank. Each hot air pipe has several air outlets or branch pipes, with the outlets or branch pipes facing the surface of the placed quartz glass ingot. The first washing tank is located within the working chamber and between the first pickling tank and the air drying tank. The lower part of the first washing tank has at least four ingot washing support legs, arranged in pairs. The distance between two ingot washing support legs in the same group is less than the diameter of the quartz glass ingot. The bottom and the surrounding side walls of the first washing tank are provided with a number of nozzles or washing spray pipes. Each washing spray pipe has a number of spray holes or spray branches. The nozzles, spray holes or spray branches are oriented towards the surface of the placed quartz glass ingot.

2. The quartz glass ingot pickling apparatus according to claim 1, characterized in that, The two pickling support feet of the same group have opposite faces that are inclined to form a "V" shape structure, and the minimum distance of the "V" shape structure is less than the diameter of the quartz glass ingot. And / or, the opposite sides of the two ingot washing support feet in the same group are inclined to form a "V" shape structure, and the minimum distance of the "V" shape structure is less than the diameter of the quartz glass ingot. And / or, the opposite sides of the two ingot drying support feet in the same group are inclined to form a "V" shape structure, and the minimum distance of the "V" shape structure is less than the diameter of the quartz glass ingot.

3. The quartz glass ingot pickling apparatus according to claim 1, characterized in that, The bottom of the working chamber is evenly provided with multiple adjustable support legs; And / or, the working chamber is also connected to an exhaust gas treatment system; And / or, the work compartment includes modular wall panels, a floor panel, a top panel, and a supporting frame; And / or, the work compartment has a transparent window on at least one side.

4. The quartz glass ingot pickling apparatus according to claim 1, characterized in that, A cooling pipe is spirally wound on the outer peripheral wall of the first pickling tank, and a low-temperature medium of 0~15 ℃ circulates inside the cooling pipe.

5. The quartz glass ingot pickling apparatus according to claim 1, characterized in that, It also includes a feeding trolley and a discharging trolley.

6. The quartz glass ingot pickling apparatus according to any one of claims 1 to 5, characterized in that, Multi-degree-of-freedom transfer industrial robots are respectively installed near the first pickling tank, the first washing tank and the air drying tank in the working chamber. The surface of the gripper of the multi-degree-of-freedom transfer industrial robot that contacts the quartz glass ingot is provided with a polytetrafluoroethylene protective layer. Alternatively, multi-degree-of-freedom transfer industrial robots are respectively installed near the first pickling tank, between the first pickling tank and the first washing tank, between the first washing tank and the air drying tank, and near the air drying tank in the working chamber. The surface of the gripper of the multi-degree-of-freedom transfer industrial robot that contacts the quartz glass ingot is provided with a polytetrafluoroethylene protective layer. Alternatively, a slide rail is provided on the bottom surface of the working chamber, and the first pickling tank, the first washing tank and the air drying tank are arranged in sequence near the slide rail; an electric trolley is provided on the slide rail, and a multi-degree-of-freedom transfer industrial robot is provided on the electric trolley, and the surface of the gripper of the multi-degree-of-freedom transfer industrial robot that contacts the quartz glass ingot is provided with a polytetrafluoroethylene protective layer.

7. The quartz glass ingot pickling apparatus according to any one of claims 1 to 5, characterized in that, Two parallel overhead rails are arranged in the upper part of the working chamber. The first pickling tank, the first washing tank, and the drying tank are arranged in a straight line in the area below the two overhead rails. A trolley is slidably mounted on the overhead rails. A lift is installed below the trolley in the area corresponding to the arrangement of the first pickling tank, the first washing tank, and the drying tank. The lifting device is slidably connected to the traveling crane on two opposite sides via lifting ladders, and at least one of the lifting ladders is provided with a rack; the lifting device is provided with a lifting gear motor and a lifting gear connected to the power output end of the lifting gear motor, and the lifting gear cooperates with the rack; The lifting device is also equipped with a lifting motor and two fixed pulleys. Two hanging rings are provided on the bottom surface of the lifting device, and the hanging rings correspond one-to-one with the fixed pulleys. One end of the lifting rope is provided with a hook, which can be hung on the hanging ring. The other end of the lifting rope passes through the corresponding fixed pulley and is wound around the winding shaft of the lifting motor. At the same time, the surface of the lifting rope is provided with a polytetrafluoroethylene protective layer. Alternatively, two parallel ground rails are arranged on the bottom surface of the working chamber, and the first pickling tank, the first washing tank, and the drying tank are arranged in a straight line in the area below the two ground rails; a gantry-shaped moving frame is slidably fitted on the ground rails, and a lift is provided in the area below the middle of the gantry-shaped moving frame corresponding to the arrangement positions of the first pickling tank, the first washing tank, and the drying tank. The lifting device is slidably connected to the traveling crane on two opposite sides via lifting ladders, and at least one of the lifting ladders is provided with a rack; the lifting device is provided with a lifting gear motor and a lifting gear connected to the power output end of the lifting gear motor, and the lifting gear cooperates with the rack; The lifting device is also equipped with a lifting motor and two fixed pulleys. Two hanging rings are provided on the bottom surface of the lifting device, and the hanging rings correspond one-to-one with the fixed pulleys. One end of the lifting rope is provided with a hook, which can be hung on the hanging ring. The other end of the lifting rope passes through the corresponding fixed pulley and is wound around the winding shaft of the lifting motor. At the same time, the surface of the lifting rope is provided with a polytetrafluoroethylene protective layer.

8. The quartz glass ingot pickling apparatus according to any one of claims 1 to 5, characterized in that, Multiple second acid washing tanks and multiple second water washing tanks are alternately arranged between the first water washing tank and the air drying tank; The structure of the second pickling tank is the same as that of the first pickling tank, and the structure of the second washing tank is the same as that of the first washing tank.

9. The quartz glass ingot pickling apparatus according to claim 8, characterized in that, Multi-degree-of-freedom transfer industrial robots are respectively installed near the first pickling tank, the first washing tank, the second pickling tank, the second washing tank and the air drying tank in the working chamber. The surface of the gripper of the multi-degree-of-freedom transfer industrial robot that contacts the quartz glass ingot is provided with a polytetrafluoroethylene protective layer. Alternatively, multi-degree-of-freedom transfer industrial robots are respectively installed near the first pickling tank, between the first pickling tank and the first water washing tank, between the first water washing tank and the second pickling tank, between the second pickling tank and the second water washing tank, between the second water washing tank and the air drying tank, and near the air drying tank. The surface of the gripper of the multi-degree-of-freedom transfer industrial robot that contacts the quartz glass ingot is provided with a polytetrafluoroethylene protective layer. Alternatively, a slide rail is provided on the bottom surface of the working chamber, and the first pickling tank, the first washing tank, the second pickling tank, the second washing tank, and the air drying tank are arranged in sequence near the slide rail; an electric trolley is provided on the slide rail, and a multi-degree-of-freedom transfer industrial robot is provided on the electric trolley, and the surface of the gripper of the multi-degree-of-freedom transfer industrial robot that contacts the quartz glass ingot is provided with a polytetrafluoroethylene protective layer.

10. The quartz glass ingot pickling apparatus according to claim 8, characterized in that, Two parallel overhead rails are arranged in the upper part of the working chamber. The first pickling tank, the first washing tank, the second pickling tank, the second washing tank, and the drying tank are arranged in a straight line in the area below the two overhead rails. A trolley is slidably mounted on the overhead rails. A lift is installed below the trolley in the area corresponding to the arrangement of the first pickling tank, the first washing tank, the second pickling tank, the second washing tank, and the drying tank. The lifting device is slidably connected to the traveling crane on two opposite sides via lifting ladders, and at least one of the lifting ladders is provided with a rack; the lifting device is provided with a lifting gear motor and a lifting gear connected to the power output end of the lifting gear motor, and the lifting gear cooperates with the rack; The lifting device is also equipped with a lifting motor and two fixed pulleys. Two hanging rings are provided on the bottom surface of the lifting device, and the hanging rings correspond one-to-one with the fixed pulleys. One end of the lifting rope is provided with a hook, which can be hung on the hanging ring. The other end of the lifting rope passes through the corresponding fixed pulley and is wound around the winding shaft of the lifting motor. At the same time, the surface of the lifting rope is provided with a polytetrafluoroethylene protective layer. Alternatively, two parallel ground rails are arranged on the bottom surface of the working chamber, and the first pickling tank, the first washing tank, the second pickling tank, the second washing tank, and the drying tank are arranged in a straight line in the area below the two ground rails; a gantry-shaped moving frame is slidably installed on the ground rails, and a lift is installed in the lower middle of the gantry-shaped moving frame in the area corresponding to the arrangement positions of the first pickling tank, the first washing tank, the second pickling tank, the second washing tank, and the drying tank; The lifting device is slidably connected to the traveling crane on two opposite sides via lifting ladders, and at least one of the lifting ladders is provided with a rack; the lifting device is provided with a lifting gear motor and a lifting gear connected to the power output end of the lifting gear motor, and the lifting gear cooperates with the rack; The lifting device is also equipped with a lifting motor and two fixed pulleys. Two hanging rings are provided on the bottom surface of the lifting device, and the hanging rings correspond one-to-one with the fixed pulleys. One end of the lifting rope is provided with a hook, which can be hung on the hanging ring. The other end of the lifting rope passes through the corresponding fixed pulley and is wound around the winding shaft of the lifting motor. At the same time, the surface of the lifting rope is provided with a polytetrafluoroethylene protective layer.

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