A pneumatic cleaning rotary nozzle for a flow channel carrier

Abstract

The utility model relates to a kind of pneumatic cleaning rotary nozzle for runner carrier, including gas supply connector, rotary joint, gas nozzle cantilever;Rotary joint is rotatably installed on gas supply connector, and gas nozzle cantilever is two, and is installed in the two sides of rotary joint;Gas nozzle cantilever includes cantilever;Cantilever has first gas passage;The bottom side of the side of cantilever away from rotary joint is equipped with nozzle;Cantilever side is also equipped with the air release hole being communicated with first gas passage;Air release hole is used to make gas discharge, and provide the action force of rotary joint and gas nozzle cantilever around gas supply connector;Adjusting assembly is also provided in first gas passage;Adjusting assembly is used to control the opening of air release hole, control the size of the action force provided by air release hole, to control rotation rate further.The utility model solves the problem of prior art in low pressure stability, multiple nozzle synchronism and anti-blocking ability, applicable to semiconductor, precision manufacturing and other sensitive fields to cleaning precision and energy consumption, with significant technical progress and industrial application value.

Description

Technical Field

[0001] This utility model relates to the field of industrial cleaning equipment technology, and in particular to a pneumatic cleaning rotary nozzle for flow channel carriers. Background Technology

[0002] In fields such as semiconductor manufacturing and precision machinery, the surface cleaning precision requirements for flow channel carriers have increased to the sub-micron level (e.g., 14nm chip manufacturing requires particle size control ≤0.1μm). Traditional cleaning technologies face three major challenges:

[0003] 1. Contact cleaning (brush / scraper) is prone to secondary pollution and cannot penetrate complex flow channels, resulting in a loss of yield.

[0004] 2. High-pressure air knife cleaning relies on an air source of 0.6MPa or higher, which consumes a lot of energy and causes dust redeposition due to airflow disturbance, resulting in a cleaning efficiency of <75%.

[0005] Third, the fixed nozzle system has problems with insufficient coverage (typical blind spots of up to 20%) and uneven cleaning.

[0006] Pneumatic rotary nozzles have become a research hotspot due to their non-contact and omnidirectional coverage characteristics, but their technical bottlenecks are significant, and the products have considerable shortcomings in low-pressure stability, multi-nozzle synchronization, and anti-clogging capabilities. Utility Model Content

[0007] To address the aforementioned technical problems, this utility model provides a pneumatic cleaning rotary nozzle for flow channel carriers, which solves the difficulties of existing technologies in low-pressure stability, multi-nozzle synchronization, and anti-clogging capability. It is suitable for fields such as semiconductors and precision manufacturing that are sensitive to cleaning accuracy and energy consumption, and has significant technological advancements and industrial application value.

[0008] The technical solution adopted by this utility model to solve its technical problem is: a pneumatic cleaning rotary nozzle for a flow channel carrier, including an air supply connector, a rotary connector, and an air nozzle cantilever; the rotary connector is rotatably mounted on the air supply connector, and there are two air nozzle cantilever arms, symmetrically mounted on both sides of the rotary connector; each air nozzle cantilever arm includes a cantilever arm; each cantilever arm has a first air passage; a nozzle is mounted on the bottom side of the cantilever arm away from the rotary connector; a vent hole communicating with the first air passage is also provided on the side of the cantilever arm; the vent hole is used to discharge gas, thereby providing a force for the air nozzle cantilever arm and the rotary connector to rotate around the air supply connector; an adjustment component is also provided in the first air passage; the adjustment component is used to control the opening of the vent hole, control the magnitude of the force provided by the vent hole, and thus control the rotation speed.

[0009] Furthermore, the adjustment assembly includes an adjustment core, an adjustment end cap, and an adjustment bolt; the cantilever has an opening at the end furthest from the rotary joint, and the inner wall of the opening is provided with internal threads; the adjustment end cap is threadedly connected to the opening of the cantilever; the adjustment end cap is provided with a through hole; the adjustment core is disposed within a first air passage, and the adjustment core has an adjustment core threaded hole at the end furthest from the rotary joint, and the adjustment bolt passes through the through hole and is threadedly connected to the adjustment core threaded hole; a second air passage is provided within the adjustment core for connecting the first air passage and the nozzle; the side wall of the adjustment core is also provided with a radially arranged limiting groove; the cantilever has a limiting screw hole at a position corresponding to the limiting groove; the limiting screw hole is fitted with a limiting set screw, the end of which engages with the limiting groove to limit the circumferential rotation of the adjustment core; the end of the adjustment core near the rotary joint engages with a vent hole, and the adjustment core is used to move radially under the coordination of the adjustment end cap, the adjustment bolt, the limiting groove, and the limiting set screw to control the size of the vent hole obstruction, thereby controlling the opening degree of the vent hole.

[0010] Furthermore, the adjusting end cover has multiple operating holes on the side away from the rotary joint and on the outer periphery of the through hole, which are used to provide operating positions for the rotation of the adjusting end cover.

[0011] Furthermore, the air supply connector includes an air supply pipe; the rotary connector includes a first rotary cylinder and a second rotary cylinder; the first rotary cylinder is rotatably mounted on the air supply pipe via a bearing; the second rotary cylinder is fixedly mounted to the first rotary cylinder; the second rotary cylinder has a rotary air passage inside; the rotary air passage is connected to the air supply pipe; two air nozzle cantilevers are symmetrically mounted on both sides of the second rotary cylinder, and the first air passage of the air nozzle cantilevers is connected to the rotary air passage.

[0012] Furthermore, there are two bearings, including a first bearing and a second bearing; the first bearing and the second bearing are respectively located at both ends of the first rotating cylinder; the inner wall of the first rotating cylinder is fixedly installed with the outer rings of the first bearing and the second bearing, and the inner rings of the first bearing and the second bearing are fixedly installed with the outer wall of the air supply pipe.

[0013] Furthermore, a sealing element is provided between the outlet end of the air supply pipe and the second rotating cylinder to seal and isolate the outlet end of the air supply pipe from the second rotating cylinder.

[0014] The beneficial effects of this utility model are as follows: This utility model provides a pneumatic cleaning rotary nozzle for flow channel carriers. By adjusting the core, adjusting the end cap, and adjusting the bolts, the opening of the vent hole can be precisely adjusted, thereby precisely controlling the rotation speed. Simultaneously, by controlling the opening of the vent hole, it can adapt to low-pressure conditions and maintain low-pressure stability. Each nozzle arm is symmetrically arranged with a nozzle, and the vent holes of the two nozzle arms are also symmetrically arranged, further improving stability and the synchronization of multiple nozzles. Through the direct connection between the air supply pipe and the rotating air channel, and the design of the sealing component, impurities can be effectively prevented from entering the rotating air channel, thereby preventing nozzle blockage and improving anti-clogging capability. This rotary nozzle is applicable to fields sensitive to cleaning precision and energy consumption, such as semiconductors and precision manufacturing, and has significant technological advancements and industrial application value. Attached Figure Description

[0015] Figure 1 This is a three-dimensional schematic diagram of a pneumatic cleaning rotary nozzle for a flow channel carrier, as an embodiment.

[0016] Figure 2 This is a three-dimensional schematic diagram of the explosion state of a pneumatic cleaning rotary nozzle for a flow channel carrier, as shown in the embodiment.

[0017] Figure 3 This is a three-dimensional schematic diagram from another angle showing the explosive state of a pneumatic cleaning rotary nozzle for a flow channel carrier, as described in an embodiment.

[0018] Figure 4 This is a three-dimensional schematic diagram of the explosion state of the air nozzle cantilever of a pneumatic cleaning rotary nozzle for a flow channel carrier, as an embodiment.

[0019] Figure 5 This is a schematic diagram of the internal structure of a pneumatic cleaning rotary nozzle for a flow channel carrier, as shown in the embodiment.

[0020] Figure 6 for Figure 5 A magnified view of a portion of region A;

[0021] Figure 7 for Figure 5 A schematic diagram of the vent 312 opening control in area A;

[0022] Figure 8 This is a schematic diagram illustrating the operational state of a pneumatic cleaning rotary nozzle for a flow channel carrier, as shown in the embodiment.

[0023] Among them, 1-air supply connector, 2-rotary connector, 3-air nozzle cantilever, 11-air supply pipe, 21-first rotating cylinder, 22-second rotating cylinder, 23-first bearing, 24-second bearing, 25-sealing component, 221-rotating air passage, 31-cantilever, 32-nozzle, 33-adjusting core, 34-adjusting end cap, 35-adjusting bolt, 36-limiting set screw, 311-first air passage, 312-vent hole, 313-limiting screw hole, 331-second air passage, 332-limiting groove, 333-adjusting core threaded hole, 341-through hole, 342-operating hole. Detailed Implementation

[0024] To enhance understanding of this utility model, it will be described in further detail below with reference to the accompanying drawings and embodiments. These embodiments are only used to explain this utility model and do not limit the scope of protection of this utility model.

[0025] Example

[0026] Please refer to Figures 1 to 8 As shown, this embodiment provides a pneumatic cleaning rotary nozzle for a flow channel carrier, including an air supply connector 1, a rotary connector 2, and an air nozzle cantilever 3. The rotary connector 2 is rotatably mounted on the air supply connector 1. Two air nozzle cantilever arms 3 are symmetrically mounted on both sides of the rotary connector 2. Each air nozzle cantilever arm 3 includes a cantilever 31. The cantilever 31 has a first air passage 311. A nozzle 32 is mounted on the bottom side of the cantilever 31 away from the rotary connector 2. A vent hole 312 communicating with the first air passage 311 is also provided on the side of the cantilever 31. The vent hole 312 is used to discharge gas, thereby providing a force for the air nozzle cantilever arm 3 and the rotary connector 2 to rotate around the air supply connector 1. An adjustment component is also provided within the first air passage 311. The adjustment component is used to control the opening degree of the vent hole 312, control the magnitude of the force provided by the vent hole 3, and thus control the rotation speed. (Refer to...) Figure 4As shown, the adjustment assembly includes an adjustment core 33, an adjustment end cap 34, and an adjustment bolt 35; the cantilever 31 has an opening at the end away from the rotary joint 2, and the inner wall of the opening is provided with internal threads; the adjustment end cap 34 is threadedly connected to the opening of the cantilever 31; the adjustment end cap 34 is provided with a through hole 341; the adjustment core 33 is disposed in the first air passage 311, and the adjustment core 33 has an adjustment core threaded hole 333 at the end away from the rotary joint 2, and the adjustment bolt 35 passes through the through hole 341 and is threadedly connected to the adjustment core threaded hole 333; the adjustment core 33 is provided with a second air passage 331 for connecting the first air passage 311 and the spray nozzle. The adjusting core 33 has a radially arranged limiting groove 332 on its side wall; the cantilever 31 has a limiting screw hole 313 at a position corresponding to the limiting groove 332; the limiting screw hole 313 is fitted with a limiting set screw 36, the end of which cooperates with the limiting groove 332 to limit the circumferential rotation of the adjusting core 33; the end of the adjusting core 33 near the rotary joint 2 cooperates with the vent hole 312, and the adjusting core 33 is used to move radially under the cooperation of the adjusting end cover 34, the adjusting bolt 35, the limiting groove 332 and the limiting set screw 36 to control the size of the blockage of the vent hole 312, thereby controlling the opening of the vent hole 312. In this embodiment, when it is necessary to adjust the radial position of the adjusting core 33, first loosen the adjusting bolt 35 and the limiting screw 36 so that the adjusting core 33 is no longer locked to the adjusting end cover 34 and the cantilever 31. Then, rotate the adjusting end cover 34 to adjust its radial position. After adjusting to the desired position, tighten the adjusting bolt 35. Under the limiting and guiding action of the limiting groove 332 and the limiting screw 36, and under the action of the adjusting bolt 35, the adjusting core 33 moves radially toward the adjusting end cover 34 until it is locked and fixed with the adjusting end cover 34. Tighten the limiting screw 36. That is to say, by controlling the position of the adjusting end cover 34, the blocking range of the adjusting core 33 on the vent hole 312 can be controlled, thereby controlling the opening of the vent hole 312.

[0027] Refer to Figure 4 As shown, the adjusting end cover 34 is provided with a plurality of operating holes 342 on the side away from the rotary joint 2 and on the outer periphery of the through hole 341, which are used to provide operating positions for the rotation of the adjusting end cover 34.

[0028] Refer to Figure 2 , Figure 3 and Figure 5As shown, the air supply connector 1 includes an air supply pipe 11; the rotary connector 2 includes a first rotary cylinder 21 and a second rotary cylinder 22; the first rotary cylinder 21 is rotatably mounted on the air supply pipe 11 via a bearing; the second rotary cylinder 22 is fixedly mounted to the first rotary cylinder 21; the second rotary cylinder 22 has a rotary air passage 221 inside; the rotary air passage is connected to the air supply pipe 11; two air nozzle cantilevers 3 are symmetrically mounted on both sides of the second rotary cylinder 22, and the first air passage 311 of the air nozzle cantilevers 3 is connected to the rotary air passage 221. In this embodiment, there are two bearings, including a first bearing 23 and a second bearing 24. The first bearing 23 and the second bearing are located at opposite ends of the first rotating cylinder 21. The inner wall of the first rotating cylinder 21 is fixedly installed with the outer rings of the first bearing 23 and the second bearing 24, and the inner rings of the first bearing 23 and the second bearing 24 are fixedly installed with the outer wall of the air supply pipe 11. A sealing member 25 is also provided between the air outlet end of the air supply pipe 11 and the second rotating cylinder 22 to seal and isolate the air outlet end of the air supply pipe 11 from the second rotating cylinder 22. This prevents air leakage and also prevents powder impurities generated by the relative rotation of the outer side of the air supply pipe 11 from entering the rotating air passage 221. In this embodiment, the gas supply connector 1 also includes a gas supply cover 12; a washer is fitted on the gas supply pipe 11 at the position between the gas supply cover 12 and the first bearing 23, and a limiting spring is fitted on the gas supply pipe 11 at the position between the second bearing 24 and the sealing member 25; the gas supply connector 1 can be stably installed with the first bearing 23, the second bearing 24, and the first rotating cylinder 21 through the washer and the limiting spring.

[0029] This embodiment describes a pneumatic cleaning rotary nozzle for a flow channel carrier. First, the air supply pipe of the air supply connector is installed on the first rotating cylinder via washers, limit springs, a first bearing, and a second bearing. A sealing member is fitted onto the bottom side of the air supply pipe. The second rotating cylinder is then connected to the first rotating cylinder and fitted onto the outside of the sealing member. The second rotating cylinder and the first rotating cylinder are locked together using long bolts. The adjusting core and adjusting end cap are initially connected (but not locked) using adjusting bolts, and then placed into the cantilever. The limiting groove of the adjusting core aligns with the limiting screw hole of the cantilever, and the limiting set screw is screwed in (but not locked). Then, the adjusting end cap is screwed onto the opening of the cantilever, and the adjusting bolt and limiting set screw are tightened. This represents the maximum obstruction of the vent hole, i.e., the minimum opening of the vent hole. Finally, the nozzle cantilever is inserted into the second rotating cylinder, and the nozzle cantilever is fixed to the second rotating cylinder using fixing set screws, thus completing the assembly.

[0030] This embodiment describes a pneumatic cleaning rotary nozzle for a flow channel carrier. In use, compressed air enters the rotary air passage through the air supply connector, and then splits into the first air passage between the two cantilever walls. The compressed air flows inside the cantilever walls, first passing through a vent hole. After passing through the vent hole, the air pressure is stabilized and reaches equilibrium. The released compressed air, through reaction force, pushes the cantilever arm to move, causing the nozzle cantilever to drive the rotary connector to rotate around the air supply connector. The remaining compressed air is ejected outward through the nozzle. During the rotation, a rotating airflow is formed, such as... Figure 8 As shown.

[0031] This embodiment provides a pneumatic cleaning rotary nozzle for a flow channel carrier. The rotating airflow acts on the surface to be cleaned, thereby blowing away the dust on the surface. If the surface to be cleaned is an irregular uneven surface, the rotating airflow will carry away the hidden dust.

[0032] This embodiment describes a pneumatic cleaning rotary nozzle for a flow channel carrier. When speed adjustment is required, first loosen the adjusting bolt to de-lock the adjusting core and adjusting end cap, and then loosen the limit screw. Next, operate the adjusting end cap through the operating hole to rotate it out to the desired distance. Then, tighten the adjusting bolt again, pulling the adjusting core closer to the adjusting end cap until it is locked in place. Finally, tighten the limit screw. At this point, the adjusting core... Figure 6 Move to the position shown Figure 7 The position shown allows the vent to open to the desired degree, thereby achieving the purpose of speed regulation.

[0033] The above embodiments should not limit the present invention in any way. All technical solutions obtained by equivalent substitution or equivalent conversion fall within the protection scope of the present invention.

Claims

1. A pneumatic cleaning rotary nozzle for a flow channel carrier, characterized in that: The device includes an air supply connector (1), a rotary connector (2), and an air nozzle cantilever (3). The rotary connector (2) is rotatably mounted on the air supply connector (1). There are two air nozzle cantilever (3), which are symmetrically mounted on both sides of the rotary connector (2). Each air nozzle cantilever (3) includes a cantilever (31). The cantilever (31) has a first air passage (311). A nozzle (32) is mounted on the bottom side of the cantilever (31) away from the rotary connector (2). The side of the cantilever (31) is also provided with a vent hole (312) that communicates with the first air passage (311). The vent hole (312) is used to discharge gas, thereby providing a force for the air nozzle cantilever (3) and the rotary connector (2) to rotate around the air supply connector (1). An adjustment component is also provided in the first air passage (311). The adjustment component is used to control the opening of the vent hole (312), control the magnitude of the force provided by the vent hole (3), and thus control the rotation speed.

2. The pneumatic cleaning rotary nozzle for a flow channel carrier according to claim 1, characterized in that: The adjustment assembly includes an adjustment core (33), an adjustment end cap (34), and an adjustment bolt (35); the cantilever (31) has an opening at the end away from the rotary joint (2), and the inner wall of the opening is provided with internal threads; the adjustment end cap (34) is threadedly connected to the opening of the cantilever (31); the adjustment end cap (34) is provided with a through hole (341); the adjustment core (33) is disposed in the first air passage (311), and the adjustment core (33) has an adjustment core threaded hole (333) at the end away from the rotary joint (2), and the adjustment bolt (35) passes through the through hole (341) and is threadedly connected to the adjustment core threaded hole (333); the adjustment core (33) is provided with a second air passage (331) for connecting the first air passage (311) and the nozzle (3). 2); The side wall of the adjusting core (33) is also provided with a radially arranged limiting groove (332); The cantilever (31) is provided with a limiting screw hole (313) at a position corresponding to the limiting groove (332); The limiting screw hole (313) is equipped with a limiting set screw (36), the end of the limiting set screw (36) cooperates with the limiting groove (332) to limit the circumferential rotation of the adjusting core (33); The end of the adjusting core (33) near the rotary joint (2) cooperates with the vent hole (312), and the adjusting core (33) is used to move radially under the cooperation of the adjusting end cover (34), adjusting bolt (35), limiting groove (332) and limiting set screw (36) to control the size of the blockage of the vent hole (312), thereby controlling the opening of the vent hole (312).

3. A pneumatic cleaning rotary nozzle for a flow channel carrier according to claim 2, characterized in that: The adjusting end cap (34) is provided with a plurality of operating holes (342) on the side away from the rotary joint (2) and on the outer periphery of the through hole (341), which are used to provide operating positions for the rotation of the adjusting end cap (34).

4. A pneumatic cleaning rotary nozzle for a flow channel carrier according to any one of claims 1-3, characterized in that: The air supply connector (1) includes an air supply pipe (11); the rotary connector (2) includes a first rotary cylinder (21) and a second rotary cylinder (22); the first rotary cylinder (21) is rotatably mounted on the air supply pipe (11) via a bearing; the second rotary cylinder (22) is fixedly mounted to the first rotary cylinder (21); the second rotary cylinder (22) has a rotary air passage (221) inside; the rotary air passage is connected to the air supply pipe (11); two air nozzle cantilevers (3) are symmetrically mounted on both sides of the second rotary cylinder (22), and the first air passage (311) of the air nozzle cantilevers (3) is connected to the rotary air passage (221).

5. A pneumatic cleaning rotary nozzle for a flow channel carrier according to claim 4, characterized in that: There are two bearings, including a first bearing (23) and a second bearing (24); the first bearing (23) and the second bearing are located at the two ends of the first rotating cylinder (21); the inner wall of the first rotating cylinder (21) is fixedly installed with the outer ring of the first bearing (23) and the second bearing (24), and the inner ring of the first bearing (23) and the second bearing (24) is fixedly installed with the outer wall of the air supply pipe (11).

6. A pneumatic cleaning rotary nozzle for a flow channel carrier according to claim 4, characterized in that: A sealing element (25) is also provided between the air outlet end of the air supply pipe (11) and the second rotating cylinder (22) to seal and block the air outlet end of the air supply pipe (11) from the second rotating cylinder (22).

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