An apparatus for grinding a positioning edge of a silicon carbide crystal
Patent Information
- Application Number
- CN202522124550.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-09
- Publication Date
- 2026-09-04
- Estimated Expiration
- 2035-10-09
AI Technical Summary
[0005]为了解决碳化硅晶体在调节时较为不便的问题，本申请提供一种磨削碳化硅晶体定位边的装置
1、通过将限位盘安装在加工料表面，限位盘的表面借助安装架安装有固定架，固定架的顶部借助转动块连接有电动推杆，以便于借助电动推杆调节自身长度后，控制限位盘与加工料表面卡接，且通过控制限位盘旋转，从而方便控制加工料调节，限位盘的底端安装有滑块，滑块的表面借助连接环与电动推杆一端固定安装，以便于借助滑块与连接环方便电动推杆与限位盘之间相互转动，安装架的内壁开设有滑槽，滑槽的内壁滑动连接有滑块，以便于借助滑块与滑槽防止限位盘偏移，限位盘的表面安装橡胶材质的固定环，固定环的表面开设有数个辅助槽，以便于借助固定环配合辅助槽提升限位盘对加工料的固定效果；相较于现有技术，有效提升了碳化硅晶体调节的便利性；
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Figure CN224713675U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of silicon carbide crystal processing, and more particularly to an apparatus for grinding the positioning edge of a silicon carbide crystal. Background Technology
[0002] Silicon carbide crystal is a covalent compound composed of carbon and silicon elements, belonging to inorganic non-metallic materials. Its crystal structure consists of Si-C tetrahedra forming more than 250 polymorphs through different stacking methods. Common polymorphs such as 3C-SiC (cubic), 4H-SiC, and 6H-SiC (hexagonal) are widely used in semiconductor devices and optoelectronics due to their differences in electrical and optical properties. In silicon carbide crystal, both carbon and silicon atoms adopt sp³ hybridization, forming a densely packed sublattice structure. Its smallest ring consists of 6 atoms (3 carbon atoms and 3 silicon atoms) that are not in the same plane. Silicon carbide crystal is often processed by grinding machines. Silicon carbide crystal grinding machines are precision equipment specifically used for processing silicon carbide wafers. They are mainly used for wafer thinning, removal of damaged layers during slicing, and other processes. The core of the process is to achieve low-damage and high-efficiency grinding through diamond grinding wheels. It is mainly used in semiconductor, power electronics and other fields.
[0003] Regarding the aforementioned technologies, the inventors believe that conventional silicon carbide crystals often require tools to fix the processing material during use. The conventional bolt-mounted fixing structure is simple, which leads to the need to repeatedly install and remove the processing material when adjusting the silicon carbide crystal, thus causing inconvenience during the processing of silicon carbide crystals.
[0004] The information disclosed in this background section is only intended to enhance the understanding of the background technology of this application, and therefore may include prior art that is not known to those skilled in the art. Utility Model Content
[0005] To address the inconvenience of adjusting silicon carbide crystals, this application provides a device for grinding the positioning edge of silicon carbide crystals.
[0006] The device for grinding the positioning edge of a silicon carbide crystal provided in this application adopts the following technical solution: A device for grinding the positioning edge of a silicon carbide crystal includes a workpiece. Two limiting discs are snapped onto the surface of the workpiece, and the two limiting discs are symmetrically distributed about the workpiece. A mounting frame is slidably mounted on the surface of the limiting discs. A fixing frame is welded to the surface of the mounting frame. Two rotating blocks are fixedly connected to the top of the fixing frame. An electric push rod is rotatably mounted on the surface of the rotating blocks. The mounting frame has a U-shaped cross-section. The two rotating blocks are symmetrically distributed about the fixing frame. One end of the electric push rod is rotatably connected to the bottom end of the limiting disc.
[0007] Preferably, a slider is fixedly installed at the bottom of the limiting plate, and a connecting ring is rotatably connected to the surface of the slider. One end of the connecting ring is fixedly installed to one end of the electric push rod, and the dimensions of the inner wall of the connecting ring are compatible with the dimensions of the slider surface.
[0008] Preferably, the surface of the mounting bracket is provided with a groove adapted to the slider, the inner wall of the groove is slidably connected to the surface of the slider, and the dimensions of the inner wall of the groove are adapted to the dimensions of the surface of the slider.
[0009] Preferably, a fixing ring is fixedly installed on the surface of the limiting plate. The size of the inner wall of the fixing ring is adapted to the size of the surface of the limiting plate. The fixing ring is a rubber ring, and a plurality of auxiliary grooves are opened on the surface of the fixing ring. The plurality of auxiliary grooves are arranged in a circular array with the center of the fixing ring as the axis.
[0010] Preferably, an adjusting block is fixedly installed at the bottom end of the electric push rod, and a sliding frame is slidably connected to the surface of the adjusting block. The sliding frame has a "T" shaped cross-section, and one end of the sliding frame is welded to the surface of the fixed frame.
[0011] Preferably, a timing frame is slidably mounted on the bottom end of the sliding frame, and two connecting grooves are formed on the inner wall of the timing frame. The inner wall of the connecting groove is slidably connected to the surface of the adjusting block, and the two connecting grooves are symmetrically distributed about the timing frame.
[0012] Preferably, a slide rail is slidably installed on the inner wall of the synchronization frame. The slide rail has a "T" shaped cross-section, and the top of the slide rail is fixedly connected to the bottom of the sliding frame.
[0013] In summary, this application includes the following beneficial technical effects: 1. By mounting a limiting disc on the surface of the workpiece, a fixing bracket is installed on the surface of the limiting disc using a mounting frame. An electric push rod is connected to the top of the fixing bracket via a rotating block, allowing the electric push rod to adjust its length and engage with the workpiece surface. The rotation of the limiting disc facilitates the adjustment of the workpiece. A slider is mounted at the bottom of the limiting disc, and its surface is fixed to one end of the electric push rod via a connecting ring, allowing for easy rotation between the electric push rod and the limiting disc. A groove is formed on the inner wall of the mounting frame, and a slider is slidably connected to the inner wall of the groove to prevent the limiting disc from shifting. A rubber fixing ring is mounted on the surface of the limiting disc, and several auxiliary grooves are formed on the surface of the fixing ring to enhance the fixing effect of the limiting disc on the workpiece. Compared to existing technologies, this method effectively improves the convenience of adjusting silicon carbide crystals. 2. An adjusting block can also be installed at the bottom of the electric push rod. A sliding frame is slidably connected to the surface of the adjusting block, so as to limit the rotation angle of the electric push rod by means of the sliding frame and the adjusting block. A synchronous frame is slidably connected to the bottom of the sliding frame. Two connecting grooves are opened in the inner wall of the synchronous frame, so as to keep the two adjusting blocks moving synchronously by means of the synchronous frame and the connecting grooves, so as to keep the limiting plate in contact with the surface of the workpiece. A slide rail is installed at the bottom of the sliding frame, so as to limit the movement position of the synchronous frame by means of the slide rail, thereby improving the stability of the synchronous frame movement; effectively improving the use effect of the device. Attached Figure Description
[0014] Figure 1 This is a schematic diagram of the overall structure of a device for grinding the positioning edge of a silicon carbide crystal according to an embodiment of the application; Figure 2 This is a schematic diagram of the mounting bracket structure in an embodiment of the application; Figure 3 This is a side view of the embodiment of the application. Figure 4 This is a schematic diagram of the structure at point A in the embodiment of the application.
[0015] Explanation of reference numerals in the attached drawings: 1. Processing material; 2. Mounting bracket; 3. Fixing bracket; 4. Rotating block; 5. Electric push rod; 6. Limiting plate; 7. Slide groove; 8. Sliding block; 9. Connecting ring; 10. Fixing ring; 11. Auxiliary groove; 12. Adjusting block; 13. Sliding bracket; 14. Synchronizing bracket; 15. Connecting groove; 16. Slide rail. Detailed Implementation
[0016] The following is in conjunction with the appendix Figure 1-4 This application will be described in further detail.
[0017] This application discloses an apparatus for grinding the positioning edge of a silicon carbide crystal, referring to... Figure 1 - Figure 2 The system includes a processing material 1, a limiting plate 6 installed on the surface of the processing material 1, a mounting frame 2 slidably connected to the surface of the limiting plate 6, a fixing frame 3 welded to the surface of the mounting frame 2, a rotating block 4 fixedly installed on the top of the fixing frame 3, and an electric push rod 5 rotatably connected to the surface of the rotating block 4. One end of the electric push rod 5 is rotatably installed with the bottom end of the limiting plate 6. After adjusting its own length with the help of the electric push rod 5, the limiting plate 6 is controlled to engage with the surface of the processing material 1, thereby fixing the processing material 1 in the mounting frame 2. By controlling the rotation of the limiting plate 6, the adjustment of the processing material 1 can be easily controlled, effectively improving the convenience of silicon carbide crystal adjustment.
[0018] Reference Figure 2A slider 8 is installed at the bottom of the limiting plate 6. A connecting ring 9 is rotatably connected to the surface of the slider 8. One end of the connecting ring 9 is fixedly installed to one end of the electric push rod 5. The slider 8 and the connecting ring 9 facilitate the mutual rotation between the electric push rod 5 and the limiting plate 6, thereby adjusting the angle of the electric push rod 5 to ensure the control effect of the electric push rod 5 on the limiting plate 6. A sliding groove 7 is provided on the inner wall of the mounting bracket 2. The slider 8 is slidably connected to the inner wall of the sliding groove 7. The top of the slider 8 is fixedly installed to the bottom of the limiting plate 6. The slider 8 and the sliding groove 7 restrict the movement of the limiting plate 6, thereby preventing the limiting plate 6 from deviating and affecting the limiting effect on the processing material 1. A rubber fixing ring 10 is installed on the surface of the limiting plate 6. Several auxiliary grooves 11 are provided on the surface of the fixing ring 10. The rubber material of the fixing ring 10 has the property of increasing friction, which, together with the auxiliary grooves 11, improves the fixing effect of the limiting plate 6 on the processing material 1.
[0019] Reference Figure 3 - Figure 4 An adjusting block 12 is installed at the bottom of the electric push rod 5. A sliding frame 13 is slidably connected to the surface of the adjusting block 12. The sliding frame 13, in conjunction with the adjusting block 12, limits the rotation angle of the electric push rod 5, thereby improving the stability of the electric push rod 5 during use. A synchronization frame 14 is slidably connected to the bottom of the sliding frame 13. Two connecting grooves 15 are opened on the inner wall of the synchronization frame 14. The inner wall of the connecting grooves 15 is slidably installed with the surface of the adjusting block 12. The synchronization frame 14, in conjunction with the connecting grooves 15, keeps the two adjusting blocks 12 moving synchronously, thereby keeping the two electric push rods 5 rotating synchronously and keeping the two limiting discs 6 connected to the surface of the processing material 1. A slide rail 16 is installed at the bottom of the sliding frame 13. The surface of the slide rail 16 is slidably connected to the inner wall of the synchronization frame 14. The slide rail 16 limits the movement position of the synchronization frame 14, thereby improving the stability of the movement of the synchronization frame 14.
[0020] The implementation principle of the device for positioning the edge of a silicon carbide crystal in this embodiment is as follows: A limiting disk 6 is installed on the surface of the workpiece 1. A mounting frame 2 is slidably connected to the surface of the limiting disk 6. A fixing frame 3 is welded to the surface of the mounting frame 2. A rotating block 4 is fixedly installed on the top of the fixing frame 3. An electric push rod 5 is rotatably connected to the surface of the rotating block 4. One end of the electric push rod 5 is rotatably installed at the bottom end of the limiting disk 6, so that after adjusting its own length, the limiting disk 6 can be controlled to engage with the surface of the workpiece 1, thereby fixing the workpiece 1 within the mounting frame 2. Furthermore, by controlling the rotation of the limiting disk 6, the adjustment of the workpiece 1 can be easily controlled. A slider 8 is installed at the bottom end of the limiting disk 6. A connecting ring 9 is rotatably connected to the surface of the slider 8. One end of the connecting ring 9 is fixedly installed at one end of the electric push rod 5. The mounting bracket 2 is equipped with a sliding groove 7 on its inner wall. A slider 8 is slidably connected to the inner wall of the sliding groove 7. The top of the slider 8 is fixedly installed to the bottom of the limiting plate 6. The slider 8 and the sliding groove 7 restrict the movement of the limiting plate 6, thereby preventing the limiting plate 6 from shifting and affecting the limiting effect on the processing material 1. A rubber fixing ring 10 is installed on the surface of the limiting plate 6. The surface of the fixing ring 10 has several auxiliary grooves 11. The rubber material of the fixing ring 10 has the property of increasing friction. The auxiliary grooves 11 are used to improve the fixing effect of the limiting plate 6 on the processing material 1.
[0021] An adjusting block 12 can also be installed at the bottom of the electric push rod 5. A sliding frame 13 is slidably connected to the surface of the adjusting block 12, so as to limit the rotation angle of the electric push rod 5 with the help of the sliding frame 13 and the adjusting block 12, thereby improving the stability of the electric push rod 5 during use. A synchronous frame 14 is slidably connected to the bottom of the sliding frame 13. Two connecting grooves 15 are opened in the inner wall of the synchronous frame 14. The inner wall of the connecting groove 15 is slidably installed with the surface of the adjusting block 12, so as to keep the two adjusting blocks 12 moving synchronously with the help of the synchronous frame 14 and the connecting groove 15, thereby keeping the two electric push rods 5 rotating synchronously, and keeping the two limiting discs 6 connected to the surface of the processing material 1. A slide rail 16 is installed at the bottom of the sliding frame 13. The surface of the slide rail 16 is slidably connected with the inner wall of the synchronous frame 14, so as to limit the movement position of the synchronous frame 14 with the help of the slide rail 16, thereby improving the stability of the movement of the synchronous frame 14.
[0022] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.
Claims
1. An apparatus for grinding the positioning edge of a silicon carbide crystal, comprising a processing material (1), characterized in that: Two limiting discs (6) are snapped onto the surface of the processing material (1). The two limiting discs (6) are symmetrically distributed about the processing material (1). A mounting bracket (2) is slidably installed on the surface of the limiting disc (6). A fixing bracket (3) is welded to the surface of the mounting bracket (2). Two rotating blocks (4) are fixedly connected to the top of the fixing bracket (3). An electric push rod (5) is rotatably installed on the surface of the rotating block (4).
2. The apparatus for grinding the positioning edge of a silicon carbide crystal according to claim 1, characterized in that: The mounting bracket (2) has a U-shaped cross section. The two rotating blocks (4) are symmetrically distributed about the fixed bracket (3). One end of the electric push rod (5) is rotatably connected to the bottom end of the limiting plate (6).
3. The apparatus for grinding the positioning edge of a silicon carbide crystal according to claim 1, characterized in that: The bottom end of the limiting plate (6) is fixedly installed with a slider (8), and a connecting ring (9) is rotatably connected to the surface of the slider (8). One end of the connecting ring (9) is fixedly installed with one end of the electric push rod (5), and the size of the inner wall of the connecting ring (9) is compatible with the size of the surface of the slider (8).
4. The apparatus for grinding the positioning edge of a silicon carbide crystal according to claim 1, characterized in that: The mounting bracket (2) has a groove (7) on its surface that is compatible with the slider (8). The inner wall of the groove (7) is slidably connected to the surface of the slider (8), and the dimensions of the inner wall of the groove (7) are compatible with the dimensions of the surface of the slider (8).
5. The apparatus for grinding the positioning edge of a silicon carbide crystal according to claim 1, characterized in that: A fixing ring (10) is fixedly installed on the surface of the limiting plate (6). The size of the inner wall of the fixing ring (10) is compatible with the size of the surface of the limiting plate (6). The fixing ring (10) is a rubber ring, and a number of auxiliary grooves (11) are opened on the surface of the fixing ring (10). The number of auxiliary grooves (11) are arranged in a circular array with the center of the fixing ring (10) as the axis.
6. The apparatus for grinding the positioning edge of a silicon carbide crystal according to claim 1, characterized in that: An adjusting block (12) is fixedly installed at the bottom of the electric push rod (5). A sliding frame (13) is slidably connected to the surface of the adjusting block (12). The cross section of the sliding frame (13) is a "T" shaped structure, and one end of the sliding frame (13) is welded to the surface of the fixed frame (3).
7. The apparatus for grinding the positioning edge of a silicon carbide crystal according to claim 6, characterized in that: A timing frame (14) is slidably installed at the bottom of the sliding frame (13). Two connecting grooves (15) are opened on the inner wall of the timing frame (14). The inner wall of the connecting groove (15) is slidably connected to the surface of the adjusting block (12). The two connecting grooves (15) are symmetrically distributed about the timing frame (14).
8. The apparatus for grinding the positioning edge of a silicon carbide crystal according to claim 7, characterized in that: The inner wall of the synchronous frame (14) is slidably fitted with a slide rail (16). The slide rail (16) has a "T" shaped cross section and the top of the slide rail (16) is fixedly connected to the bottom of the sliding frame (13).