Mini UVW alignment platform

Abstract

The utility model relates to alignment platform technical field discloses a kind of micro UVW alignment platform, including installation pedestal, first axial driving part, second axial driving part, third axial driving part and rotating pedestal, installation pedestal is rectangular, first axial driving part, second axial driving part and third axial driving part are respectively arranged on three corner of installation pedestal, the top of first axial driving part, second axial driving part and third axial driving part is uniformly provided with driving end, rotating pedestal is provided with three relatively arranged assembly holes, rotating pedestal is connected with first axial driving part, second axial driving part and third axial driving part respectively through assembly hole;Rotating pedestal is rotated by the common action of first axial driving part, second axial driving part and third axial driving part, reduce the floor area of alignment platform while improving the rotation accuracy of alignment platform.

Description

Technical Field

[0001] This utility model relates to the field of alignment platform technology, and in particular to a micro UVW alignment platform. Background Technology

[0002] In the process of workpiece processing, alignment platforms are usually required to correct and position the workpiece. Existing alignment platforms have a large structure and usually have components such as drive motors, ball screws, screw fixing seats, and couplings. They cannot be reduced in size. When facing the alignment requirements of semiconductor components such as IC chips and wafers, the large size of existing alignment platforms will cause serious space waste and is not conducive to production scheduling. Therefore, improvements are needed. Utility Model Content

[0003] The main objective of this invention is to propose a miniature UVW alignment platform, which aims to provide a small-sized alignment platform suitable for the alignment requirements of semiconductor components.

[0004] To achieve the above objectives, this utility model proposes a miniature UVW alignment platform, including a mounting base, a first axial drive, a second axial drive, a third axial drive, and a rotating base. The mounting base is rectangular in shape. The first axial drive, the second axial drive, and the third axial drive are respectively disposed on the three corners of the mounting base. A drive end is provided above each of the first axial drive, the second axial drive, and the third axial drive. The rotating base is provided with three oppositely arranged mounting holes, and the rotating base is connected to the first axial drive, the second axial drive, and the third axial drive through the mounting holes.

[0005] Specifically, the first axial drive member and the second axial drive member have the same driving direction, and the driving direction of the third axial drive member is perpendicular to the driving direction of the first axial drive member.

[0006] Specifically, the first axial drive member, the second axial drive member, and the third axial drive member each include a drive motor, a first movable seat, and a second movable seat. The mounting base is provided with a first crossed roller guide rail. The first movable seat is movably mounted on the first crossed roller guide rail. The drive motor is connected to the first movable seat in a transmission connection. The upper end of the first movable seat is provided with a second crossed roller guide rail. The second movable seat is mounted on the second crossed roller guide rail. The upper end of the second movable seat is provided with a rotating seat. When the rotating base is assembled, the rotating seat is located in the mounting hole.

[0007] Specifically, the extension direction of the first cross roller guide is perpendicular to the extension direction of the second cross roller guide.

[0008] Specifically, a connecting groove is provided in the middle of the first movable seat, and the motor shaft end of the drive motor is located in the connecting groove and is connected to the first movable seat in a transmission manner.

[0009] Specifically, the third axial drive component is provided with a planar bearing, and the rotating seat is provided with a bearing groove corresponding to the planar bearing, with the planar bearing located in the bearing groove.

[0010] Specifically, a number of sensors are provided on the side wall of the mounting base, and the sensors are provided in correspondence with the first axial drive, the second axial drive and the third axial drive.

[0011] This utility model's technical solution involves setting a first axial drive component, a second axial drive component, and a third axial drive component on the mounting base. The rotating base achieves rotation through the combined action of the first axial drive component, the second axial drive component, and the third axial drive component, thereby reducing the footprint of the alignment platform while improving its rotational accuracy. Attached Figure Description

[0012] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0013] Figure 2 This is a schematic diagram showing the connection state of some structures of this utility model.

[0014] Figure 3 This is a schematic diagram of a partial assembly state of the present invention.

[0015] The reference numerals include: 10, mounting base; 11, first axial drive component; 12, second axial drive component; 13, third axial drive component; 14, rotating base; 15, first crossed roller guide; 16, second crossed roller guide; 17, flat bearing; 18, sensor; 19, rotating seat; 20, drive motor; 21, first movable seat; 22, second movable seat. Detailed Implementation

[0016] The technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0017] It should be noted that if any directional indication (such as up, down, left, right, front, back, top, bottom, inside, outside, vertical, horizontal, longitudinal, counterclockwise, clockwise, circumferential, radial, axial, etc.) is involved in the embodiments of this utility model, the directional indication is only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0018] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," such descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0019] like Figures 1 to 3 As shown, a miniature UVW alignment platform includes a mounting base 10, a first axial drive 11, a second axial drive 12, a third axial drive 13, and a rotating base 14. The mounting base 10 is rectangular. The first axial drive 11, the second axial drive 12, and the third axial drive 13 are respectively disposed at the three corners of the mounting base 10. Each of the first axial drive 11, the second axial drive 12, and the third axial drive 13 has a drive end on its top. The rotating base 14 has three oppositely arranged mounting holes, through which it connects to the first axial drive 11, the second axial drive 12, and the third axial drive 13. By arranging the first axial drive 11, the second axial drive 12, and the third axial drive 13 on the mounting base 10, the rotating base 14 achieves rotation through the combined action of the first axial drive 11, the second axial drive 12, and the third axial drive 13, thereby reducing the footprint of the alignment platform while improving its rotational accuracy.

[0020] The first axial drive member 11 and the second axial drive member 12 have the same driving direction, and the third axial drive member 13 has a driving direction perpendicular to the driving direction of the first axial drive member 11. In this embodiment, the first axial drive member 11 and the second axial drive member 12 cooperate to realize the X-axis movement of the rotating base 14, and the third axial drive member 13 realizes the Y-axis movement of the rotating base 14.

[0021] The first axial drive component 11, the second axial drive component 12, and the third axial drive component 13 each include a drive motor 20, a first movable seat 21, and a second movable seat 22. A first crossed roller guide 15 is provided on the mounting base 10. The first movable seat 21 is movably mounted on the first crossed roller guide 15. The drive motor 20 is connected to the first movable seat 21 in a transmission connection. A second crossed roller guide 16 is provided at the upper end of the first movable seat 21. The second movable seat 22 is mounted on the second crossed roller guide 16. A rotating seat 19 is provided at the upper end of the second movable seat 22. When the rotating base 14 is assembled, the rotating seat 19 is located in the mounting hole. The extension direction of the first crossed roller guide 15 is perpendicular to the extension direction of the second crossed roller guide 16. In this embodiment, a first cross roller guide 15 is provided on the first movable seat 21, and a second cross roller guide 16 is provided on the second movable seat 22, so as to facilitate the connection between the rotating seat 19 and the mounting hole on the rotating base 14, so as to realize the axial movement or rotation of the rotating base 14.

[0022] A connecting groove is provided in the middle of the first movable seat 21, and the motor shaft end of the drive motor 20 is located in the connecting groove and is connected to the first movable seat 21 for transmission. In this embodiment, by providing a connection on the first movable seat 21, the motor shaft of the drive motor 20 is connected to the first movable seat 21 for transmission through the connecting groove, thereby reducing the space occupancy rate.

[0023] A planar bearing 17 is provided on the third axial drive member 13, and a bearing groove corresponding to the planar bearing 17 is provided on the rotating base 19, with the planar bearing 17 located within the bearing groove. In this embodiment, a planar bearing 17 is provided on the third axial drive member 13 to provide support for the fourth corner of the rotating base 14, thereby improving the stability of the rotating base 14 during movement.

[0024] Several sensors 18 are provided on the side wall of the mounting base 10, and the sensors 18 are correspondingly arranged with the first axial drive member 11, the second axial drive member 12, and the third axial drive member 13. In this embodiment, three sensors 18 are provided on the mounting base 10. The three sensors 18 cooperate with each other to accurately sense the moving position of the rotating base 14, thereby improving the moving accuracy.

[0025] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A miniature UVW alignment platform, comprising a mounting base, a first axial drive component, a second axial drive component, a third axial drive component, and a rotating base, characterized in that: The mounting base is rectangular in shape. The first axial drive, the second axial drive, and the third axial drive are respectively located on the three corners of the mounting base. Each of the first axial drive, the second axial drive, and the third axial drive has a drive end on its top. The rotating base has three oppositely arranged mounting holes, and the rotating base is connected to the first axial drive, the second axial drive, and the third axial drive through the mounting holes.

2. The miniature UVW alignment platform according to claim 1, characterized in that: The first axial drive member and the second axial drive member have the same driving direction, and the driving direction of the third axial drive member is perpendicular to the driving direction of the first axial drive member.

3. The miniature UVW alignment platform according to claim 1, characterized in that: The first axial drive component, the second axial drive component, and the third axial drive component each include a drive motor, a first movable seat, and a second movable seat. A first crossed roller guide is provided on the mounting base. The first movable seat is movably mounted on the first crossed roller guide. The drive motor is connected to the first movable seat in a transmission connection. A second crossed roller guide is provided at the upper end of the first movable seat. The second movable seat is mounted on the second crossed roller guide. A rotating seat is provided at the upper end of the second movable seat. When the rotating base is assembled, the rotating seat is located in the mounting hole.

4. The miniature UVW alignment platform according to claim 3, characterized in that: The extension direction of the first cross roller guide is perpendicular to the extension direction of the second cross roller guide.

5. A miniature UVW alignment platform according to claim 3, characterized in that: The first movable seat has a connecting groove in the middle, and the motor shaft end of the drive motor is located in the connecting groove and is connected to the first movable seat in a transmission manner.

6. A miniature UVW alignment platform according to claim 3, characterized in that: The third axial drive component is provided with a planar bearing, and the rotating seat is provided with a bearing groove corresponding to the planar bearing, with the planar bearing located in the bearing groove.

7. A miniature UVW alignment platform according to claim 1, characterized in that: Several sensors are provided on the side wall of the mounting base, and the sensors are arranged corresponding to the first axial drive, the second axial drive and the third axial drive.

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