Mechanical hand applicable to different length furnace tubes

Abstract

The utility model discloses a manipulator belongs to the furnace tube production technical field, specifically related to a kind of manipulator applicable to different length furnace tube, it include: crossbeam, lifting arm, hook and limiting component;The lifting arm is fixedly installed on the crossbeam using vertical mode, the hook is installed on the crossbeam using adjustable mode, the limiting component is fixedly installed on the both ends of the crossbeam;The limiting component includes: side baffle wheel, mounting plate and slide rail plate;The utility model uses stainless steel as internal structure, outer cladding anticorrosive material, effectively insulates the contact of chemical liquid and metal, prevent the corrosion of metal and the precipitation of metal ion, pollute furnace tube, lifting arm, hook and limiting component can be moved at arbitrary position on crossbeam simultaneously, position can be conveniently and quickly adjusted, can be applicable to different length furnace tube, improve the compatibility of equipment, the inclination sensor on crossbeam, as protection device, prevent mechanical arm excessive inclination, inverted furnace tube falls.

Description

Technical Field

[0001] This utility model discloses a robotic arm, belonging to the field of furnace tube production technology, specifically relating to a robotic arm applicable to furnace tubes of different lengths. Background Technology

[0002] Furnace tubes are widely used in semiconductor manufacturing processes for critical steps such as wafer diffusion, oxidation, annealing, and deposition. The furnace tube is a transparent quartz tube. During use, a resistance wire heating coil surrounds the outer edge of the furnace tube, slowly pulling the wafer boat (a device that carries the wafer, made of quartz) into the furnace tube for heat treatment.

[0003] Used furnace tubes need to be cleaned regularly to remove contaminants from the inner walls, preventing these contaminants from contaminating the wafers during subsequent chip manufacturing processes, thereby improving chip manufacturing success rates and product quality. Furnace tubes are typically cleaned chemically, by immersing them in a tank containing hydrofluoric acid or other chemical solutions to remove surface impurities and particles, followed by immersion in a pure water tank to remove the internal chemicals.

[0004] Depending on the requirements, multiple cleaning tanks are often configured, and a robotic arm is used to move the furnace tubes between these tanks. A typical robotic arm consists of a beam with two hooks and a stop on one side for positioning the furnace tube along its length. This structure is suitable for moving furnace tubes of a single length, but lacks adjustment capabilities for furnace tubes of multiple lengths. Utility Model Content

[0005] Purpose of the utility model: To provide a robotic arm applicable to furnace tubes of different lengths, thereby solving the aforementioned problems.

[0006] Technical solution: A robotic arm applicable to furnace tubes of different lengths, the robotic arm comprising: a crossbeam, a lifting arm, a hook, and a limiting assembly; The lifting arm is fixedly installed on the crossbeam in a vertical manner, the hook is installed on the crossbeam in an adjustable manner, and the limiting component is fixedly installed on both ends of the crossbeam; The limiting components include: side guard wheels, mounting plates, and slide rails.

[0007] In a further embodiment, the lifting arm is detachably fixed to the crossbeam via a pin seat and a cylindrical pin; The pin seat is mounted on the crossbeam, and the lifting arm is mounted on the pin seat. The lifting arm and the pin seat are fixedly mounted on the crossbeam by the cylindrical pin.

[0008] In a further embodiment, the lifting arm is provided with two arms and the lifting arm is driven by an upper servo motor to achieve vertical lifting.

[0009] In a further embodiment, the hook is fixedly installed on the crossbeam by a guide rail plate and a positioning pin; The guide rail plate is fixedly installed at the bottom of the crossbeam and has several pin holes arranged in an equidistant array on the plate. The hook has an installation groove above it, and the installation groove is inverted concave in shape. The hook is engaged with the crossbeam through the installation groove. The two sides of the installation groove have pin holes corresponding to the pin holes of the guide rail plate. The positioning pin connects the two pin holes to fix the hook and the guide rail plate to the crossbeam.

[0010] In a further embodiment, the hook is provided in two parts, and the center layer of the hook is laser-cut from a stainless steel plate, with PVC plates covering both sides; The bottom of the hook has a dovetail groove that mates with the contact surface of the furnace tube, and a sealing ring is provided on the surface.

[0011] In a further embodiment, the crossbeam is made of stainless steel and has a rectangular cross-section, and the outer layer of the crossbeam is covered with a PPS plastic sheet.

[0012] In a further embodiment, a tilt sensor is mounted on the crossbeam, and the tilt sensor is installed in a PPS box.

[0013] In a further embodiment, the side guard wheel is rotatably mounted on the bottom of the mounting plate, the slide rail plate is fixedly mounted on the lower end of the crossbeam, the top of the mounting plate is provided with a sliding groove that mates with the slide rail plate to allow the mounting plate to move freely on the slide rail plate, the slide rail plate is provided with a plurality of pin holes arranged in an equidistant array, the two ends of the sliding groove are provided with pin holes corresponding to the pin holes of the slide rail plate, and the two pin holes are connected by a positioning pin to fix the slide rail plate and the mounting plate to the crossbeam.

[0014] In a further embodiment, the limiting components are provided in two sets and are fixedly installed at both ends of the crossbeam in a symmetrical manner.

[0015] In a further embodiment, the positioning pin is a stainless steel cylindrical pin, covered with PFA anti-corrosion material, and has a step with a flat opening.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. The beams, hooks, and positioning pins are all constructed with stainless steel as the internal structure, covered with anti-corrosion material. This structure effectively isolates the chemical solutions from the metal, preventing metal corrosion and the release of metal ions, thus avoiding contamination of the furnace tubes. 2. The hooks and side rollers can move to any position on the crossbeam, allowing for convenient and quick position adjustments. They are suitable for furnace tubes of different lengths, improving the compatibility of the equipment.

[0017] 3. The hooks and side wheels are fixed to the crossbeam using locating pins, which is quick and reliable. Traditional robotic arms use bolts for locking, but metal bolts are at risk of corrosion and contamination, while the threads of plastic bolts are easily damaged during repeated disassembly and assembly.

[0018] 4. The tilt sensor on the crossbeam serves as a protective device to prevent the robotic arm from tilting excessively and causing the inverted furnace tube to fall. Attached Figure Description

[0019] Figure 1 This is an isometric drawing of this utility model.

[0020] Figure 2 This is the front view of this utility model.

[0021] Figure 3 This is a top view of the present invention.

[0022] Reference numerals in the attached drawings: 1. Crossbeam; 2. Lifting arm; 3. Hook; 4. Limiting assembly; 5. Side wheel; 6. Mounting plate; 7. Slide rail plate; 8. Pin seat; 9. Cylindrical pin; 10. Guide rail plate; 11. Positioning pin; 12. Tilt sensor; 13. Furnace tube; 14. Pin hole. Detailed Implementation

[0023] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0024] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0026] A robotic arm applicable to furnace tubes of different lengths includes: a crossbeam 1, a lifting arm 2, a hook 3, and a limiting assembly 4.

[0027] In one embodiment, such as Figures 1 to 3 As shown, the lifting arm 2 is fixedly installed on the crossbeam 1 in a vertical manner, the hook 3 is installed on the crossbeam 1 in an adjustable manner, and the limiting component 4 is fixedly installed on both ends of the crossbeam 1. The limiting component 4 includes: side guard wheel 5, mounting plate 6 and slide rail plate 7.

[0028] In one embodiment, such as Figures 1 to 3 As shown, the lifting arm 2 is detachably fixed to the crossbeam 1 via the pin seat 8 and the cylindrical pin 9; The pin seat 8 is installed on the crossbeam 1, and the lifting arm 2 is installed on the pin seat 8 and the lifting arm 2 and the pin seat 8 are fixedly installed on the crossbeam 1 by the cylindrical pin 9.

[0029] In one embodiment, such as Figures 1 to 3 As shown, the lifting arm 2 has two arms and is driven vertically by an upper servo motor.

[0030] In one embodiment, such as Figures 1 to 3 As shown, the hook 3 is fixedly installed on the crossbeam 1 by the guide rail plate 10 and the positioning pin 11; The guide rail plate 10 is fixedly installed at the bottom of the crossbeam 1 and has a number of pin holes 14 arranged in an equidistant array on the plate. The hook 3 has an installation groove above it and the installation groove is inverted concave in shape. The hook 3 is engaged with the crossbeam 1 through the installation groove. The two sides of the installation groove have pin holes 14 corresponding to the pin holes 14 of the guide rail plate 10. The positioning pin 11 connects the two pin holes 14 at the same time to fix the hook 3 and the guide rail plate 10 to the crossbeam 1.

[0031] In one embodiment, such as Figures 1 to 3 As shown, there are two hooks 3, and the center layer of the hook 3 is made of stainless steel plate by laser cutting, and the two sides are covered with PVC plate; The bottom of the hook 3 forms a dovetail groove that mates with the contact surface of the furnace tube 13, and a sealing ring is provided on the surface.

[0032] In one embodiment, such as Figures 1 to 3 As shown, the crossbeam 1 is made of stainless steel and has a rectangular cross-section. The outer layer of the crossbeam 1 is covered with PPS plastic sheet.

[0033] In one embodiment, such as Figures 1 to 3 As shown, an inclination sensor 12 is installed on the crossbeam 1, and the inclination sensor 12 is installed in the PPS box.

[0034] In one embodiment, such as Figures 1 to 3 As shown, the side guard wheel 5 is rotatably mounted on the bottom of the mounting plate 6, the slide rail plate 7 is fixedly mounted on the lower end of the crossbeam 1, the top of the mounting plate 6 is provided with a sliding groove that matches the slide rail plate 7 so that the mounting plate 6 can move freely on the slide rail plate 7, the slide rail plate 7 is provided with a plurality of pin holes 14 arranged in an equidistant array, the two ends of the sliding groove are provided with pin holes 14 corresponding to the pin holes 14 of the slide rail plate 7, and the two pin holes 14 are connected by a positioning pin 11 to fix the slide rail plate 7 and the mounting plate 6 to the crossbeam 1.

[0035] In one embodiment, such as Figures 1 to 3 As shown, the limiting component 4 is provided in two sets and is fixedly installed at both ends of the crossbeam 1 in a symmetrical manner.

[0036] In one embodiment, such as Figures 1 to 3 As shown, the positioning pin 11 is a stainless steel cylindrical pin 9, with an outer layer covered with PFA anti-corrosion material, and a step is made with a flat opening on the step.

[0037] Working Principle: This utility model uses a crossbeam 1 as support. The crossbeam 1 is made of stainless steel, with a square tube outer layer covered by PPS plastic sheet. Two pin seats 8 are installed below the crossbeam 1, connecting the crossbeam 1 to the two lifting arms 2 via cylindrical pins 9. The lifting arms 2 are driven vertically by an upper servo motor. Two guide rail plates 10 are installed at the lower end of the crossbeam 1, with pin holes 14 machined every 50 mm on the plates. An inclination sensor 12 is installed on the crossbeam 1 to monitor its tilt. The sensor is installed in a PPS box to prevent corrosion from acidic gases in the environment.

[0038] This utility model features two hooks 3. The center layer of each hook 3 is laser-cut from stainless steel, with PVC panels covering both sides. The mounting groove above each hook 3 is an inverted "U" shape, which fits snugly onto the crossbeam 1. Two pin holes 14, 50mm apart, are formed on the flat edges of the mounting groove. When the hook 3 is placed on the crossbeam 1, its flat edges are above the guide rail plate 10 of the crossbeam 1, allowing the hook 3 to move easily left and right on the crossbeam 1. When moved to the appropriate position, the pin holes 14 on the hook 3 align with the pin holes 14 on the guide rail plate 10 of the crossbeam 1, and are secured by positioning pins 11. A dovetail groove is machined on the contact surface between the hook 3 and the furnace tube 13, and a sealing ring is embedded therein to increase friction between the furnace tube 13 and the hook 3, preventing the furnace tube 13 from slipping.

[0039] This device is equipped with a positioning pin 11. The main body is a stainless steel cylindrical pin 9, with an outer layer covered with PFA anti-corrosion material and steps with flat openings for easy gripping.

[0040] Two sets of edge limiting components 4 are located on both sides of the crossbeam 1. The upper part of the mounting plate 6 has a groove-shaped structure, which is installed on the slide rail plate 7 and moves freely. The groove-shaped structure is provided with pin holes 14. When it moves to a suitable position, it aligns with the pin holes 14 on the guide rail plate 10 of the crossbeam 1, and the positioning pin 11 is inserted to fix the side guide wheel 5 on the crossbeam 1. The lower end of the side guide wheel 5 is a rotatable disc. Because the furnace tube 13 will roll at a uniform speed during the cleaning process, the disc can contact the edge of the furnace tube 13 and reduce friction as it rotates.

[0041] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A robotic arm applicable to furnace tubes of different lengths, characterized in that, The robotic arm includes: a crossbeam, a lifting arm, a hook, and a limiting assembly; The lifting arm is fixedly installed on the crossbeam in a vertical manner, the hook is installed on the crossbeam in an adjustable manner, and the limiting component is fixedly installed on both ends of the crossbeam; The limiting components include: side guard wheels, mounting plates, and slide rails.

2. The robotic arm applicable to furnace tubes of different lengths according to claim 1, characterized in that, The lifting arm is detachably fixed to the crossbeam by means of a pin seat and a cylindrical pin. The pin seat is mounted on the crossbeam, and the lifting arm is mounted on the pin seat. The lifting arm and the pin seat are fixedly mounted on the crossbeam by the cylindrical pin.

3. The robotic arm applicable to furnace tubes of different lengths according to claim 2, characterized in that, The lifting arm is provided with two arms, and the lifting arm is driven by an upper servo motor to achieve vertical lifting.

4. The robotic arm applicable to furnace tubes of different lengths according to claim 1, characterized in that, The hook is fixedly installed on the crossbeam by a guide rail plate and a positioning pin; The guide rail plate is fixedly installed at the bottom of the crossbeam and has several pin holes arranged in an equidistant array on the plate. The hook has an installation groove above it, and the installation groove is inverted concave in shape. The hook is engaged with the crossbeam through the installation groove. The two sides of the installation groove have pin holes corresponding to the pin holes of the guide rail plate. The positioning pin connects the two pin holes to fix the hook and the guide rail plate to the crossbeam.

5. The robotic arm applicable to furnace tubes of different lengths according to claim 4, characterized in that, The hook is provided in two parts, and the center layer of the hook is made of stainless steel plate laser-cut, with PVC plate covering both sides; The bottom of the hook has a dovetail groove that mates with the contact surface of the furnace tube, and a sealing ring is provided on the surface.

6. The robotic arm applicable to furnace tubes of different lengths according to claim 1, characterized in that, The crossbeam is made of stainless steel and has a rectangular cross-section. The outer layer of the crossbeam is covered with PPS plastic sheet.

7. The robotic arm applicable to furnace tubes of different lengths according to claim 1, characterized in that, An inclination sensor is installed on the crossbeam, and the inclination sensor is installed in the PPS box.

8. The robotic arm applicable to furnace tubes of different lengths according to claim 4, characterized in that, The side guard wheel is rotatably mounted on the bottom of the mounting plate, and the slide rail plate is fixedly mounted on the lower end of the crossbeam. The top of the mounting plate is provided with a sliding groove that matches the slide rail plate, allowing the mounting plate to move freely on the slide rail plate. The slide rail plate is provided with a plurality of pin holes arranged in an equidistant array. The two ends of the sliding groove are provided with pin holes corresponding to the pin holes of the slide rail plate. The two pin holes are connected by a positioning pin to fix the slide rail plate and the mounting plate to the crossbeam.

9. The robotic arm applicable to furnace tubes of different lengths according to claim 8, characterized in that, The limiting components are provided in two sets and are fixedly installed at both ends of the crossbeam in a symmetrical manner.

10. A robotic arm applicable to furnace tubes of different lengths according to any one of claims 4 or 8, characterized in that, The positioning pin is a stainless steel cylindrical pin, with an outer layer of PFA anti-corrosion material and a step with a flat opening.

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