A multi-layer conveying frame for silicon carbide wafer production

Abstract

The utility model relates to the field of silicon carbide wafer production and manufacturing technology discloses a multilayer conveying frame for silicon carbide wafer production, which comprises an adjusting assembly, a sliding groove arranged on a support frame, a clamping block slidingly connected to the sliding groove, a shell assembly, a limiting plate arranged on the sliding groove, a protective cover arranged on the sliding groove, a limiting column, the limiting column being slidingly connected to the protective cover and being locked with the limiting plate, an installation assembly, a positioning column arranged at the bottom of the sliding groove, a clamping ball slidingly connected to the support frame, the clamping ball being locked with the positioning column, an expansion assembly, a toolbox arranged on the inner side of the support frame, the protective cover being locked through the limiting column, the disc and spring one cooperation, the protection stability being enhanced, the label on the support frame and the inner side toolbox respectively improving the information identification efficiency and the tool convenience, and the safety and operation efficiency of the wafer conveying process being ensured.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide wafer manufacturing technology, specifically a multi-layer conveyor for silicon carbide wafer production. Background Technology

[0002] In the field of silicon carbide wafer manufacturing, wafer transport racks are key equipment for ensuring the stable transfer of wafers between various production processes, and their performance directly affects wafer production efficiency and product quality. Currently, existing silicon carbide wafer transport racks have many shortcomings and are unable to meet the production needs of high-precision, multi-specification wafers.

[0003] Most conveyor racks have fixed clamping and bearing structures, which can only accommodate silicon carbide wafers of a single size or thickness; some protective covers are made of opaque materials, making it impossible for staff to observe the internal wafer status in real time and making it difficult to detect wafer position deviations or component abnormalities in a timely manner; existing conveyor racks generally lack convenient auxiliary structures and do not have clear information labeling components, making it difficult for staff to quickly distinguish the purpose of the conveyor rack, the wafer specifications it is compatible with, and other key information.

[0004] In summary, the shortcomings of existing silicon carbide wafer transport racks in terms of adaptability, protection performance, ease of operation, and functionality have become important factors restricting the efficient and high-quality production of silicon carbide wafers. There is an urgent need for a multi-layer transport rack with multiple specifications, stable protection, and convenient operation to meet the actual needs of current silicon carbide wafer production and manufacturing. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a multi-layer conveyor for silicon carbide wafer production.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a multi-layer conveyor for silicon carbide wafer production, comprising: a base for supporting components; a support frame disposed on the base; an adjustment component including a slide groove disposed on the support frame, and a clamping block slidably connected to the slide groove; a housing component including a limiting plate disposed on the slide groove, a protective cover disposed on the slide groove, and a limiting post, wherein the limiting post is slidably connected to the protective cover and locks with the limiting plate; an installation component including a positioning post disposed at the bottom of the slide groove, and a retaining ball slidably connected to the support frame, wherein the retaining ball cooperates with the positioning post; and an extension component including a toolbox disposed inside the support frame.

[0007] As a further description of the above technical solution:

[0008] The adjustment assembly includes: a threaded rod, rotatably connected to the slide groove, with two sets of reverse threads symmetrically arranged on its surface, and threadedly connected to the clamping block; and a mounting groove, located inside the clamping block.

[0009] As a further description of the above technical solution:

[0010] The outer casing assembly includes: a disc, which is disposed on a limiting post and slidably connected to the protective cover; and a spring, one end of which is connected to the protective cover and the other end of which is connected to the disc.

[0011] As a further description of the above technical solution:

[0012] The mounting assembly includes: a second spring, one end of which is connected to the support frame and the other end of which is connected to the retaining ball.

[0013] As a further description of the above technical solution:

[0014] The extension component includes a label, which is mounted on the support frame.

[0015] As a further description of the above technical solution:

[0016] The slide is provided in three sets on the surface of the support frame, and the thickness of the internal mounting grooves in the three sets is different.

[0017] As a further description of the above technical solution:

[0018] The protective cover is made of acrylic sheet.

[0019] This utility model has the following beneficial effects:

[0020] By incorporating a sliding groove and mounting slots of varying thicknesses, combined with a threaded rod that drives the clamping block to slide, the system can accommodate silicon carbide wafers of different sizes and thicknesses. Simultaneously, the cooperation of the ball clamp and positioning post, along with the auxiliary reset of the spring, ensures precise installation and positioning, enhancing the versatility and positioning reliability of the conveyor for wafers of different specifications.

[0021] The protective cover, made of acrylic sheet, not only blocks dust and impurities to protect internal components but also allows for transparent observation of the internal condition. The protective cover is locked in place by a combination of limiting posts, a disc, and a spring, enhancing protective stability. Furthermore, the labels on the support frame and the toolbox inside improve information identification efficiency and tool accessibility, ensuring the safety and operational efficiency of the wafer transport process. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0023] Figure 2 This is a schematic diagram of the adjustment component of this utility model;

[0024] Figure 3 This is a schematic diagram of the outer shell assembly of this utility model;

[0025] Figure 4This is a schematic diagram of the installation components of this utility model.

[0026] Legend:

[0027] 1. Base; 2. Support frame; 3. Slide groove; 4. Threaded rod; 5. Clamping block; 6. Mounting groove; 7. Limiting plate; 8. Protective cover; 9. Limiting post; 10. Disc; 11. Spring 1; 12. Positioning post; 13. Clamping ball; 14. Spring 2; 15. Toolbox; 16. Label. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The utility model will be further described in detail below with reference to the accompanying drawings.

[0030] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0031] Example 1

[0032] like Figures 1 to 4As shown, this embodiment provides a multi-layer conveyor for silicon carbide wafer production, comprising: a base 1 for supporting components; a support frame 2 disposed on the base 1; an adjustment component including a slide 3 disposed on the support frame 2, and a clamping block 5 slidably connected to the slide 3; a housing component including a limiting plate 7 disposed on the slide 3, a protective cover 8 disposed on the slide 3, and a limiting post 9, wherein the limiting post 9 is slidably connected to the protective cover 8 and locks in cooperation with the limiting plate 7; an installation component including a positioning post 12 disposed at the bottom of the slide 3, and a retaining ball 13 slidably connected to the support frame 2, wherein the retaining ball 13 cooperates with the positioning post 12; and an extension component including a toolbox 15 disposed inside the support frame 2.

[0033] Understandable, Figure 1 The diagram only schematically illustrates some of the components included in the multi-layer conveyor system; the actual shape, size, location, and construction of these components are not subject to change. Figure 1 Due to limitations, multi-layer conveyor racks can also include, compared to Figure 1 More or fewer parts.

[0034] In addition, in this embodiment, the base 1 supports the overall assembly, and the support frame 2 carries each component; the adjustment component adjusts its position by sliding the clamping block 5 in the slide groove 3; the outer shell assembly locks the protective cover 8 by cooperating with the limiting post 9 and the limiting plate 7; the installation component achieves installation and positioning by cooperating with the positioning post 12 through the locking ball 13; the toolbox 15 is used to store related tools, realizing the basic support, component adjustment, outer shell locking, installation positioning and tool storage functions of the silicon carbide wafer transport rack, providing a basic structure for wafer transport.

[0035] Specifically, the adjustment assembly includes: a threaded rod 4, which is rotatably connected to the slide groove 3 and has two sets of reverse threads symmetrically arranged on its surface, and is threadedly connected to the clamping block 5; and a mounting groove 6, which is located inside the clamping block 5.

[0036] In this embodiment, rotating the threaded rod 4 causes the clamping block 5 to slide relative to or towards each other on the slide groove 3 because the threaded rod 4 is threadedly connected to the clamping block 5 and the surface threads are symmetrical. The mounting groove 6 moves with the clamping block 5. By adjusting the position of the clamping block 5, it can be adapted to silicon carbide wafers of different sizes. The mounting groove 6 provides space for placing the wafer.

[0037] Specifically, the outer shell assembly includes: a disc 10, which is disposed on the limiting post 9 and slidably connected to the protective cover 8; and a spring 11, one end of which is connected to the protective cover 8 and the other end of which is connected to the disc 10.

[0038] As a preferred implementation, when the limiting post 9 is pulled, the disc 10 slides on the protective cover 8 along with the limiting post 9 and stretches the spring 11. After the limiting post 9 is aligned with the limiting plate 7, the spring 11 resets and drives the disc 10 and the limiting post 9 to move, so that the limiting post 9 and the limiting plate 7 cooperate and lock, thereby enhancing the locking stability of the protective cover 8, preventing the protective cover 8 from loosening, and better protecting the internal components.

[0039] Example 2

[0040] Specifically, the mounting assembly includes: a second spring 14, one end of which is connected to the support frame 2, and the other end of which is connected to the retaining ball 13.

[0041] In this embodiment, when the positioning post 12 contacts the retaining ball 13, it squeezes the retaining ball 13, which compresses the spring 14 and slides. When the positioning post 12 reaches the designated position, the spring 14 resets and pushes the retaining ball 13 to cooperate with the positioning post 12, thereby improving the stability of the cooperation between the retaining ball 13 and the positioning post 12 and ensuring reliable positioning of the installation component.

[0042] Specifically, the extended component includes a tag 16, which is disposed on the support frame 2.

[0043] This setup allows for labeling of relevant information about the conveyor rack, such as the number of layers and its purpose, on label 16. This facilitates identification, enables staff to quickly understand the conveyor rack information, and improves operational convenience.

[0044] Example 3

[0045] Specifically, the slide groove 3 is provided in three sets on the surface of the support frame 2, and the thickness of the internal mounting groove 6 of the three sets is different.

[0046] Specifically, the protective cover 8 is made of acrylic sheet.

[0047] In actual use, the user pulls the device to the desired position and fixes it with the foot brake. The base 1 has both directional wheels and omnidirectional wheels at its bottom. Depending on the thickness of the wafer, the user can pull the limiting posts 9 to the sides to release the restriction on the limiting plate 7, thereby removing the protective cover 8. Then, the user can rotate the threaded rod 4 to move the clamping block 5 according to the size of the wafer. At this time, the user can place the wafer in the clamping block 5 using the remote-controlled robotic arm. When the movement distance is short, the foot brake can be released to move the device directly. When storage is required, the user can press the protective cover 8 down. One side of the limiting post 9 has a chamfer. When it is squeezed and reaches the position, it extends and locks. When wafers of the same thickness need to be transported, the user can pull the slide 3 upward to compress the locking ball 13 and compress the spring 14 to remove it. For installation, simply press down.

[0048] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A multi-layer conveyor for silicon carbide wafer production, characterized in that, include: Base (1), used to support components; Support frame (2) is set on base (1); The adjustment assembly includes a slide (3) disposed on the support frame (2) and a clamping block (5) slidably connected to the slide (3); The housing assembly includes a limiting plate (7) disposed on the slide (3), a protective cover (8) disposed on the slide (3), and a limiting post (9), wherein the limiting post (9) is slidably connected to the protective cover (8) and engages with the limiting plate (7) for locking. The mounting components include a positioning post (12) located at the bottom of the slide (3), and a retaining ball (13) slidably connected to the support frame (2), and the retaining ball (13) cooperates with the positioning post (12); The extension components include a toolbox (15) arranged inside the support frame (2).

2. The multi-layer conveyor for silicon carbide wafer production according to claim 1, characterized in that, The adjustment component includes: The threaded rod (4) is rotatably connected to the slide groove (3), and two sets of reverse threads are symmetrically arranged on its surface and threadedly connected to the clamping block (5). The mounting slot (6) is located inside the clamping block (5).

3. A multi-layer conveyor for silicon carbide wafer production according to claim 2, characterized in that, The housing assembly includes: The disc (10) is mounted on the limiting post (9) and is slidably connected to the protective cover (8); Spring 1 (11) is connected at one end to the protective cover (8) and at the other end to the disc (10).

4. A multi-layer conveyor for silicon carbide wafer production according to claim 3, characterized in that, The installation components include: Spring 2 (14) is connected at one end to the support frame (2) and at the other end to the ball (13).

5. A multi-layer conveyor for silicon carbide wafer production according to claim 4, characterized in that, The extended components include: Label (16) is set on support frame (2).

6. A multi-layer conveyor for silicon carbide wafer production according to claim 5, characterized in that, The slide (3) is provided in three sets on the surface of the support frame (2), and the thickness of the internal mounting groove (6) of the three sets is different.

7. A multi-layer conveyor for silicon carbide wafer production according to claim 6, characterized in that, The protective cover (8) is made of acrylic sheet.

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