A mask storage machine power supply circuit with multiple protections

Abstract

A kind of photomask storage machine platform power supply circuit with multiple protection, it includes input power supply, drive circuit, control circuit, protection circuit.The drive circuit includes servo motor, robot control box.The control circuit includes circuit controller, power terminal.Compared with prior art, the utility model discloses by setting the drive circuit, five groups of servo motor are powered, the opening and closing of switch are controlled by the circuit controller, to control the rotation of the material bin of equipment and the opening of loading and unloading window, and by the power supply to the robot control box.At the same time by setting the circuit controller, the opening and closing of switch are controlled using inductor on manipulator, when product position is offset, switch is opened, so that machine platform is down, avoid product to fall, can effectively realize the protection of product.At the same time, the relay with circuit protection function is set in front of each equipment, can effectively prevent the motor from being burnt due to short circuit in the use process of equipment.

Description

Technical Field

[0001] This utility model relates to the field of circuit structure technology, and in particular to a power supply circuit for a photomask storage device with multiple protections. Background Technology

[0002] In the semiconductor manufacturing industry, a Reticle POD (Photomask Box) is a piece of equipment used in semiconductor manufacturing, primarily to protect wafers or photomasks from particle contamination during packaging and testing. A Reticle POD Stocker is a storage device used to store these photomask boxes. The core structure of a typical semiconductor automated storage and retrieval system (AS / RS) mainly includes a main frame, storage system, transfer interface, and a stacker crane for automated storage and transfer of wafer boxes.

[0003] Current semiconductor automated storage and retrieval systems (AS / RS) require a cleanroom environment for photomask boxes. Due to the large quantity stored and the retrieval process, retrieving a single photomask box typically takes a considerable amount of time. Simultaneously, it's crucial to prevent damage from vibrations or drops during retrieval. Therefore, robotic arms are commonly used in semiconductor equipment to grasp and transport photomask boxes. This necessitates circuit design to enable multi-axis movement of the robotic arms and manual control of their start and stop. Furthermore, since the base includes a rotating platform for the material storage and the opening and closing of loading / unloading windows, a short circuit could cause damage to precision instruments and motors. Summary of the Invention

[0004] In view of this, the present invention provides a power supply circuit for a photomask storage device with multiple protections to solve the above-mentioned technical problems.

[0005] A power supply circuit for a photomask storage machine with multiple protections includes an input power supply, a drive circuit connected to the input power supply, a control circuit disposed between the input power supply and the drive circuit, and a protection circuit disposed between the input power supply and the control circuit. The drive circuit connects and supplies power to various power modules of the photomask storage machine in the semiconductor wafer fab of this application, including five servo motors for controlling the movement of the equipment, and a robot control box disposed between the servo motors and the input power supply. Multiple electronic components are disposed between each group of servo motors and the robot control box, namely, a circuit breaker, a receiver, and a thermal relay, sequentially from the robot control box to the servo motor. The control circuit is disposed between the robot control box and the input power supply, including a circuit controller connected in series on the N and L1 lines, and a power terminal set connected in parallel with the circuit controller. The circuit controller is connected in series on the N and L1 lines of the power supply, and a transformer converts 220V AC power to 24V DC power, which is then connected through a port. The protection circuit includes a safety relay connected in series with the input power supply through a transformer. Two signal controllers, one active and one standby, are also provided between the protection circuit and the control circuit.

[0006] Furthermore, the input power supply is 380V and is connected to the drive circuit using a 3-phase 5-wire system, including one neutral (N) line and three phase lines L1, L2, and L3.

[0007] Furthermore, the five parallel circuits are respectively connected to the five servo motors.

[0008] Furthermore, the robot control box is connected to the N line and L1 line of the power supply.

[0009] Furthermore, a set of circuit controllers is also provided between the robot control box and the control circuit, with one in use and one as a backup, and the opening and closing are controlled by sensors on the robotic arm.

[0010] Furthermore, the power supply terminal is connected in parallel with the circuit controller and is a 220V power supply terminal. The power supply terminal is electrically connected to the N line and L1 line of the input power supply through a relay connected in series.

[0011] Furthermore, a set of relays is provided between the input power supply and the circuit controller.

[0012] Furthermore, a set of relays is provided between the input power supply and the safety relay.

[0013] Compared with existing technologies, the power supply circuit for the photomask storage machine with multiple protections provided by this utility model supplies power to five sets of servo motors through the drive circuit. The circuit controller controls the opening and closing of switches to connect and disconnect the circuit, thereby controlling the rotation of the hopper and the opening of the loading and unloading windows. It also supplies power to the robot control box, enabling the robot control box to control the movement and gripping of the robotic arm. Simultaneously, by setting up the circuit controller, sensors on the robotic arm control the opening and closing of switches. When the product position deviates, the switch opens, causing the machine to shut down and preventing the product from falling, effectively protecting the product. Furthermore, relays with circuit protection functions are installed before each piece of equipment to effectively prevent motor burnout due to short circuits during use. Attached Figure Description

[0014] Figure 1 This utility model provides a circuit framework diagram of a photomask storage machine for a semiconductor wafer fab.

[0015] Figure 2 for Figure 1 The circuit diagram of the power supply circuit for a photomask storage device with multiple protections.

[0016] Figure 3 for Figure 1 The circuit structure diagram of the circuit controller of the power supply circuit of the photomask storage machine with multiple protections.

[0017] Figure 4 for Figure 1 The circuit diagram of the safety relay in the power supply circuit of the photomask storage device with multiple protections. Detailed Implementation

[0018] The specific embodiments of this utility model are described in further detail below. It should be understood that the description of the embodiments of this utility model herein is not intended to limit the scope of protection of this utility model.

[0019] like Figures 1 to 4 The diagram shown is a schematic representation of the power supply circuit for a photomask storage device with multiple protections provided by this invention. The power supply circuit includes an input power supply 10, a drive circuit 20 connected to the input power supply 10, a control circuit 30 disposed between the input power supply 10 and the drive circuit 20, and a protection circuit 40 disposed between the input power supply 10 and the control circuit 30. It is conceivable that the power supply circuit for the photomask storage device with multiple protections also includes other functional modules, such as electrical connection components, various electronic components, and indicating components, etc., which are technologies well known to those skilled in the art and will not be described in detail here.

[0020] The input power supply 10 is used to provide power to the device, that is, to the drive circuit 20. In this embodiment, the input power supply 10 is 380V and is connected to the drive circuit 20 using a 3-phase 5-wire system to power the device. Figure 2 As shown, in this embodiment, the input power supply 10 includes a neutral (N) line and three phase lines L1, L2, and L3. A set of manual switches 001JA and a set of circuit breakers 002JA are provided between the input power supply 10 and the protection circuit 40. The manual switch 001JA is the main switch for operator control of the circuit. The circuit breaker 002JA can be an air switch or a residual current device (RCD). When a severe overload or short-circuit fault occurs in the circuit, the circuit breaker 002JA disconnects, thereby providing short-circuit protection for the circuit. This is prior art and should be well known to those skilled in the art; therefore, it is only briefly described here.

[0021] The drive circuit 20 is electrically connected to and supplies power to each power module of the photomask storage machine. The power modules can be rotating bases of the hopper, moving components of the loading / unloading windows, etc. In this embodiment, the drive circuit 20 includes five servo motors 21 that control the movement of the power modules, and a robot control box 22 disposed between the servo motors 21 and the input power supply 10.

[0022] The five sets of servo motors 21 are used to control the movement of each electrical module, including but not limited to the rotation of the hopper and the opening and closing of the loading and unloading windows. Figure 2 As shown, in this embodiment, the drive circuit 20 has five sets of parallel circuits, which are respectively connected to five sets of servo motors 21, numbered 014CE, 015CE, 016CE, 017CE and 018CE. Each set of servo motors 21 is provided with multiple electronic components between it and the robot control box 22, namely, a circuit breaker, a receiver and a thermal relay from the robot control box 22 to the servo motor 21.

[0023] In this embodiment, the servo motor 014CE is connected in series with lines L1, L2, and L3. A circuit breaker 004JA, a receiver 004UJ, and a thermal relay 004XS are connected in series at the front end of the servo motor 014CE. The circuit breaker 004JA is a protective device to prevent short circuits; it automatically disconnects the circuit when a short circuit occurs. The receiver 004UJ is a switch that receives electrical signals to control the opening and closing of the circuit; specifically, it is controlled by the circuit controller 31. The thermal relay 004XS is used for overload protection of the equipment and circuit; it melts and disconnects the circuit when a severe overload occurs, preventing equipment damage. The circuit breaker, receiver, and thermal relay described above are all common technologies in the field of circuit connection technology, and therefore only briefly described here.

[0024] The robot control box 22 is electrically connected to the N and L1 lines of the input power supply 10. The robot control box 22 serves as the control box for the robotic arm, controlling its movement along three axes and its gripping of products. Specific stroke control is existing technology and will not be described in detail here. Furthermore, a circuit breaker 012JA is connected in series between the robot control box 22 and the input power supply 10, with a maximum voltage capacity of 10A. A circuit breaker is a switching device capable of closing, carrying, and interrupting current under abnormal circuit conditions within a specified time, used to protect power lines and motors. When the robot control box 22 experiences overload, short circuit, or undervoltage faults, the circuit breaker 012JA automatically disconnects the circuit to protect the robot control box 22. The function of the circuit breaker 012JA is equivalent to a combination of a fuse switch and an over / under-temperature relay. The circuit breaker 012JA in this embodiment is used for conventional household appliances (such as televisions, computers, etc.), with a power carrying capacity of approximately 2200W and is equipped with 2.5 square millimeter copper wire. It should be a common technology in the field of circuit connection technology, so it is only briefly described here.

[0025] In addition, a set of circuit controllers 23, numbered 010UJ and 011UJ in the figure, are also provided between the robot control box 22 and the control circuit 30, forming a one-in-use and one-in-standby configuration. The opening and closing are controlled by sensors on the robotic arm. When the sensors on the robotic arm detect a deviation in the position of the gripped product, the switch is turned off, the circuit is broken, and the servo motor 21 stops moving, causing the machine to shut down and preventing the product from falling.

[0026] The control circuit 30 is located between the robot control box 22 and the input power supply 10. It includes a set of circuit controllers 31 connected in series on the N line and L1 line, and a set of power terminals 32 connected in parallel with the circuit controllers 31.

[0027] The circuit controller 31 is connected in parallel to the N line and L1 line of the power supply. A transformer (020AL) converts 220V AC power to 24V DC power, which is then connected via ports (005BN, 006BN, 007BN, and 008BN) to supply power to the circuit controller 31. The circuit controller 31 is a master control device that controls the starting, speed regulation, braking, and reversing of the motor by changing the wiring of the main circuit or control circuit and altering the resistance values ​​in the circuit according to a predetermined sequence. Furthermore, a set of relays (010JA) is installed between the input power supply 10 and the circuit controller 31. These relays (010JA) provide short-circuit protection for the circuit controller 31; when a short-circuit fault occurs in the equipment or line, the relay automatically disconnects the circuit. The circuit controller 31 can also be controlled by a PLC; in this embodiment, a safety controller is used for more stable control. A safety controller, also known as a safety PLC or safety programmable system, is a programmable controller that conforms to safety standards such as ENISO 13849-1 and IEC 61508. It is specifically designed to respond correctly and cut off the output in the event of a system failure. As it is existing technology, it will only be briefly described here. Specifically, the circuit controller 31 is used to control the opening and closing of signal receivers 004UJ, 005UJ, 006UJ, 007UJ, and 008UJ connected in series with the servo motor 21.

[0028] The power terminal 32 is connected in parallel with the circuit controller 31 and is a 220V power supply terminal, thereby supplying power to components such as the warning lights and electronic alarms of the photomask storage machine. The power terminal 32 is electrically connected to the N and L1 lines of the input power supply 10 through a relay 011JA in series. When the electronic equipment electrically connected to the power terminal 32 experiences a fault such as an open circuit or short circuit, the power supply to the input power supply 10 is shut off to protect its circuit.

[0029] The protection circuit 40 includes a safety relay 41 connected in parallel to the N and L3 lines of the power supply. A transformer (numbered 022AL) converts 220V AC to 24V DC, and the power is supplied to the circuit controller 31 via ports (numbered 015BN and 016BN). Additionally, a relay (numbered 009JA) is installed between the input power supply 10 and the safety relay 41 to provide short-circuit protection for the safety relay 41. The safety relay 41 is an electromagnetic relay, which generates electromagnetic force in the electromagnet core through an input signal (voltage, current), attracting an armature and thus actuating the contacts to open, close, or switch control. A manually controlled emergency stop button is connected to the safety relay 41; when the operator presses the emergency stop button, the circuit is disconnected.

[0030] In addition, two sets of signal controllers 003UJ and 009UJ are provided between the protection circuit 40 and the control circuit 30. Each set of signal controllers 003UJ and 009UJ is a standby signal receiver controller, one in use and one in reserve, and their opening and closing are controlled by the safety relay 41. Specifically, as... Figure 4 The diagram shows the circuit of a standard safety relay commonly found on the market. Button 002TO is a normally closed button, and button 001TO is a manual power-on button. When button 001TO is pressed while the equipment is running, the circuit is connected and power is supplied. When a short circuit occurs in the equipment, the current increases rapidly, causing the relay to quickly engage and disconnect the circuit.

[0031] Compared with existing technologies, the power supply circuit for the photomask storage machine with multiple protections provided by this utility model supplies power to the five sets of servo motors 21 through the drive circuit 20. The circuit controller 31 controls the opening and closing of switches to connect and disconnect the circuit, thereby controlling the rotation of the hopper and the opening of the loading and unloading windows. It also supplies power to the robot control box 22, enabling the robot control box 22 to control the movement and gripping of the robotic arm. Simultaneously, by setting up the circuit controller 23, sensors on the robotic arm control the opening and closing of switches. When the product position deviates, the switch opens, causing the machine to shut down and preventing the product from falling, effectively protecting the product. Furthermore, relays with circuit protection functions are installed before each piece of equipment to effectively prevent motor burnout due to short circuits during use.

[0032] The above are merely preferred embodiments of the present utility model and are not intended to limit the scope of protection of the present utility model. Any modifications, equivalent substitutions or improvements within the spirit of the present utility model are covered within the scope of the claims of the present utility model.

Claims

1. A power supply circuit for a photomask storage device with multiple protections, characterized in that: The power supply circuit for the photomask storage machine with multiple protections includes an input power supply, a drive circuit connected to the input power supply, a control circuit disposed between the input power supply and the drive circuit, and a protection circuit disposed between the input power supply and the control circuit. The drive circuit connects to and supplies power to the various power modules of the photomask storage machine in the semiconductor wafer fab of this application, including five servo motors for controlling the movement of the equipment, and a robot control box disposed between the servo motors and the input power supply. Multiple electronic components are disposed between each group of servo motors and the robot control box. The control box to the servo motor consists of a circuit breaker, a receiver, and a thermal relay in sequence. The control circuit is located between the robot control box and the input power supply, including a set of circuit controllers connected in series on the N line and L1 line, and a set of power terminals connected in parallel with the circuit controllers. The circuit controllers are connected in series on the N line and L1 line of the power supply. A transformer converts 220V AC power to 24V DC power and connects it through a port. The protection circuit includes a safety relay connected in series with the input power supply through a transformer. Two sets of signal controllers, one active and one standby, are also provided between the protection circuit and the control circuit.

2. The power supply circuit for a photomask storage device with multiple protections as described in claim 1, characterized in that: The input power supply is 380V and is connected to the drive circuit using a 3-phase 5-wire system, including one neutral (N) line and three phase lines: L1, L2, and L3.

3. The power supply circuit for a photomask storage device with multiple protections as described in claim 1, characterized in that: The five parallel circuits are respectively connected to the five servo motors.

4. The power supply circuit for a photomask storage device with multiple protections as described in claim 2, characterized in that: The robot control box is connected to the N line and L1 line of the power supply.

5. The power supply circuit for a photomask storage device with multiple protections as described in claim 1, characterized in that: A set of circuit controllers is also provided between the robot control box and the control circuit, with one controller in use and one as a backup. The opening and closing are controlled by sensors on the robotic arm.

6. The power supply circuit for a photomask storage device with multiple protections as described in claim 1, characterized in that: The power supply terminal is connected in parallel with the circuit controller and is a 220V power supply terminal. The power supply terminal is electrically connected to the N line and L1 line of the input power supply through a relay connected in series.

7. The power supply circuit for a photomask storage device with multiple protections as described in claim 1, characterized in that: A set of relays is installed between the input power supply and the circuit controller.

8. The power supply circuit for a photomask storage device with multiple protections as described in claim 1, characterized in that: A set of relays is installed between the input power supply and the safety relay.

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