An adjustment mechanism for an etching apparatus lift

Abstract

The utility model discloses a kind of adjusting mechanism for etching equipment lifting device, the utility model relates to lifting technical field, including adjusting plate body, adjusting plate body includes mainly for the transmission mechanism of stable conveying adjustment equipment, the utility model has the advantages that: transmission mechanism is through the synchronous transmission design of double thread rod, gear and toothed belt, ensure that two moving blocks and upper mechanism along moving groove horizontal synchronous movement, guarantee the consistency of adjustment, the electric slide rail of moving mechanism can drive adjusting mechanism moves along the direction perpendicular to transmission mechanism, realize accurate positioning on two-dimensional horizontal plane, satisfy the multi-position requirement of etching equipment in horizontal direction, the telescopic motor of adjusting mechanism can directly drive workbench to lift, accurately control the height of etching equipment, second motor is rotated by rotating rod and arc plate and drives workbench, realize angle adjustment, adapt to the angle requirement of different etching operation, improve the versatility of device.

Description

Technical Field

[0001] This utility model relates to the field of lifting technology, specifically to an adjustment mechanism for a lifting device of an etching equipment. Background Technology

[0002] Etching equipment is a key piece of equipment in semiconductor manufacturing, microelectronics processing and other fields. Its core function is to precisely etch materials such as wafers and substrates using chemical or physical methods to form the required microscopic patterns or structures. In etching operations, the relative position of the equipment and the workpiece directly affects the etching accuracy, uniformity and process stability. Therefore, the lifting and position adjustment device of the etching equipment is a key component to ensure the quality of the operation.

[0003] Existing devices can only achieve horizontal movement in one direction, or lack synchronization when moving in multiple directions, which makes it difficult for the etching equipment to be accurately positioned on a two-dimensional horizontal plane and adapt to the multi-position requirements of complex etching operations. To address this, we propose an adjustment mechanism for the lifting device of etching equipment. Utility Model Content

[0004] The purpose of this invention is to provide an adjustment mechanism for the lifting device of an etching equipment.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an adjustment mechanism for a lifting device of an etching equipment, comprising an adjustment plate body, the adjustment plate body including a conveying mechanism mainly used for stabilizing and adjusting the equipment, a moving mechanism connected to the conveying mechanism, and an adjustment mechanism connected to the moving mechanism. The conveying mechanism includes a threaded rod, a gear, a toothed belt, and a first moving block. Moving grooves are provided on both sides of the top surface of the adjustment plate body, and the first moving block is slidably connected to the inner wall of the moving groove. Transmission rods are fixedly connected to both ends of the two threaded rods. Positioning holes adapted to the transmission rods are provided at both ends of the moving grooves. The ends of the two transmission rods away from the threaded rods are fixedly connected to the shaft of the gear. The outer sides of the two gears mesh with the inner walls of the toothed belt. The inner walls of the two first moving blocks are threadedly connected to the outer sides of the threaded rods.

[0006] As a further embodiment of this utility model: the moving mechanism includes an electric slide rail, a positioning block and a mounting plate. The bottom surfaces of the electric slide rail and the mounting plate are fixedly connected to the top surface of the positioning block, and the top surfaces of the two first moving blocks are provided with slots that are adapted to the positioning blocks.

[0007] As a further embodiment of this utility model: the first movable block has sliding grooves on both sides, and the inner wall of the sliding groove is slidably connected to the top surface of the adjusting plate body. The first movable block and the mounting plate are connected together by bolts.

[0008] As a further embodiment of this utility model: a placement plate is fixedly connected to the right side of the adjustment plate body, and a connecting groove is opened at the end of the two transmission rods away from the gear. A first motor is fixedly connected to the top surface of the placement plate, and the inner wall of one of the connecting grooves is adapted to the output end of the first motor.

[0009] As a further embodiment of this utility model: the adjustment mechanism includes a telescopic motor, an adjustment plate, and a worktable. The bottom end of the telescopic motor is fixedly connected to the output end of the electric slide rail. The bottom end of the adjustment plate is fixedly connected to the top end of the telescopic motor. An arc-shaped plate is fixedly connected to the bottom end of the worktable. Rotating rods are fixedly connected to both ends of the arc-shaped plate. The two ends of the rotating rods are rotatably connected to the inner wall of the adjustment plate. Threaded holes are provided around the top surface of the worktable.

[0010] As a further embodiment of this utility model: the bottom end of the telescopic motor is connected to an electric telescopic rod, the telescopic end of the electric telescopic rod is connected to a second moving block, the bottom end of the telescopic motor is connected to a positioning rail, two brake blocks are slidably connected to the side of the positioning rail, the sides of the two brake blocks are connected to a spring, the side of the second moving block is slidably connected to the side of the brake block, and the side of the brake block abuts against the inner wall of the electric slide rail.

[0011] As a further embodiment of this utility model: a second motor is fixedly connected to the top surface of the adjustment plate, and the output end of the second motor is fixedly connected to the rear end of the rotating rod.

[0012] Compared with the prior art, the beneficial effects of this utility model by adopting the above technical solution are as follows:

[0013] 1. The conveying mechanism of this utility model uses a synchronous transmission design of double threaded rod, gear and toothed belt to ensure that the two moving blocks and the upper mechanism move horizontally and synchronously along the moving groove, ensuring the consistency of adjustment. The electric slide rail of the moving mechanism can drive the adjustment mechanism to move in a direction perpendicular to the conveying mechanism, realizing precise positioning on the two-dimensional horizontal plane, meeting the multi-position requirements of the etching equipment in the horizontal direction. The telescopic motor of the adjustment mechanism can directly drive the worktable to lift and lower, accurately controlling the height of the etching equipment. The second motor drives the worktable to rotate through the rotating rod and the arc plate to realize angle adjustment, adapting to the angle requirements of different etching operations and improving the versatility of the device.

[0014] 2. In the transmission mechanism of this utility model, the meshing transmission of gears and toothed belts ensures synchronous rotation of the double threaded rods, preventing the moving block from shifting. The moving block is slidably connected to the adjusting plate body through a slide groove, limiting additional displacement and ensuring the stability of horizontal movement. The moving mechanism is firmly connected to the mounting plate through the cooperation of the positioning block and the slot, and the fixing connection of bolts, preventing loosening during operation. In the positioning structure, the electric telescopic rod pushes the moving block to squeeze the brake block, causing it to abut against the inner wall of the electric slide rail. The position of the adjusting mechanism is locked by friction, preventing displacement caused by vibration during operation and ensuring etching accuracy.

[0015] Other advantages, objectives and features of this invention will be set forth in part in the description which follows, and in part will be apparent to those skilled in the art from the following examination or study, or may be taught from the practice of this invention. Attached Figure Description

[0016] Figure 1 This is a first perspective view of an embodiment of the present utility model;

[0017] Figure 2 This is a second perspective view of an embodiment of the present utility model;

[0018] Figure 3 This is a first three-dimensional explosion diagram of an embodiment of the present invention;

[0019] Figure 4 for Figure 2 A magnified structural diagram of A in the middle;

[0020] Figure 5 This is a schematic diagram of the telescopic motor in an embodiment of the present utility model;

[0021] Figure 6 This is a schematic diagram of the movable block in an embodiment of the present utility model;

[0022] Figure 7 This is a schematic diagram of the brake block in an embodiment of the present invention.

[0023] In the diagram: 1. Adjusting plate body; 2. Transmission mechanism; 21. Threaded rod; 22. Gear; 23. Toothed belt; 24. First moving block; 25. Moving groove; 26. Transmission rod; 27. Placement plate; 28. First motor; 3. Moving mechanism; 31. Electric slide rail; 32. Positioning block; 33. Mounting plate; 34. Bolt; 4. Adjusting mechanism; 41. Telescopic motor; 42. Adjusting plate; 43. Workbench; 44. Arc plate; 45. Rotating rod; 46. Second motor; 5. Positioning structure; 51. Electric telescopic rod; 52. Brake block; 53. Positioning rail; 54. Spring; 55. Second moving block. Detailed Implementation

[0024] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that the description of these embodiments is for the purpose of helping to understand this utility model, but does not constitute a limitation on this utility model.

[0025] Furthermore, the technical features involved in the various embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0026] Please see the appendix Figure 1 - Appendix Figure 7 This utility model discloses an adjustment mechanism for a lifting device of an etching equipment, comprising an adjustment plate body 1. The adjustment plate body 1 includes a conveying mechanism 2 mainly used for stabilizing and adjusting the equipment, a moving mechanism 3 connected to the conveying mechanism 2, and an adjustment mechanism 4 connected to the moving mechanism 3. The conveying mechanism 2 includes a threaded rod 21, a gear 22, a toothed belt 23, and a first moving block 24. Moving grooves 25 are provided on both sides of the top surface of the adjustment plate body 1, and the first moving block 24 is slidably connected to the inner wall of the moving groove 25. Transmission rods 26 are fixedly connected to both ends of the two threaded rods 21. Positioning holes adapted to the transmission rods 26 are provided at both ends of the moving grooves 25. The ends of the two transmission rods 26 away from the threaded rods 21 are fixedly connected to the shaft of the gear 22. The outer sides of the two gears 22 mesh with the inner sides of the toothed belt 23. The inner walls of the two first moving blocks 24 are threadedly connected to the outer sides of the threaded rods 21.

[0027] In embodiment 1, the moving mechanism 3 includes an electric slide rail 31, a positioning block 32, and a mounting plate 33. The bottom surfaces of the electric slide rail 31 and the mounting plate 33 are fixedly connected to the top surface of the positioning block 32. The top surfaces of the two first moving blocks 24 are provided with slots that are adapted to the positioning blocks 32. The two sides of the first moving blocks 24 are provided with sliding grooves, and the inner walls of the sliding grooves are slidably connected to the top surface of the adjusting plate body 1. The first moving blocks 24 and the mounting plate 33 are connected together with bolts 34. The right side of the adjusting plate body 1 is fixedly connected to a placement plate 27. The ends of the two transmission rods 26 away from the gear 22 are provided with connecting grooves. The top surface of the placement plate 27 is fixedly connected to a first motor 28, and the inner wall of one of the connecting grooves is adapted to the output end of the first motor 28.

[0028] Specifically, the top surface of the first moving block 24 of the conveying mechanism 2 is provided with a slot, and the positioning block 32 is embedded in the slot to achieve the initial positioning of the moving mechanism 3 and the first moving block 24 and prevent horizontal deviation. The first moving block 24 is provided with sliding grooves on both sides, and the inner wall of the sliding groove is slidably connected to the top surface of the adjusting plate body 1 to further limit the movement trajectory of the first moving block 24 and ensure that it slides smoothly along the moving groove 25. The first moving block 24 and the mounting plate 33 are fastened by bolts 34 that are connected together, which rigidly fixes the moving mechanism 3 and the first moving block 24 of the conveying mechanism 2 to ensure that there is no relative displacement when the conveying mechanism 2 drives the moving mechanism 3 to move synchronously.

[0029] In embodiment two, the adjustment mechanism 4 includes a telescopic motor 41, an adjusting plate 42, and a worktable 43. The bottom end of the telescopic motor 41 is fixedly connected to the output end of the electric slide rail 31. The bottom end of the adjusting plate 42 is fixedly connected to the top end of the telescopic motor 41. An arc-shaped plate 44 is fixedly connected to the bottom end of the worktable 43. Rotating rods 45 are fixedly connected to both ends of the arc-shaped plate 44. The two ends of the rotating rods 45 are rotatably connected to the inner wall of the adjusting plate 42. Threaded holes are provided around the top surface of the worktable 43. An electric telescopic rod is connected to the bottom end of the telescopic motor 41. 51. The telescopic end of the electric telescopic rod 51 is connected to a second moving block 55. The bottom end of the telescopic motor 41 is connected to a positioning rail 53. Two brake blocks 52 are slidably connected to the side of the positioning rail 53. The sides of the two brake blocks 52 are connected to a spring 54. The side of the second moving block 55 is slidably connected to the side of the brake block 52. The side of the brake block 52 abuts against the inner wall of the electric slide rail 31. The top surface of the adjusting plate 42 is fixedly connected to a second motor 46. The output end of the second motor 46 is fixedly connected to the rear end of the rotating rod 45.

[0030] Specifically, the bottom of the worktable 43 is connected to the rotating rod 45 via an arc plate 44. The two ends of the rotating rod 45 are rotatably connected to the inner wall of the adjusting plate 42, forming a rotatable structure. The bottom end of the telescopic motor 41 is fixed to the output end of the electric slide rail 31, and the top end is connected to the adjusting plate 42. The telescopic motor 41 directly drives the adjusting plate 42 and the worktable 43 to rise and fall through the telescopic movement of the motor 41, thereby achieving height adjustment. The output end of the second motor 46 on the top surface of the adjusting plate 42 is fixed to the rear end of the rotating rod 45. When the motor starts, it drives the rotating rod 45 to rotate. The rotating rod 45 drives the worktable 43 to rotate around the axis of the rotating rod 45 through the arc plate 44, thereby achieving angle adjustment of the worktable 43 (such as tilt angle adjustment), meeting the multi-angle requirements of etching operations. The threaded holes around the top surface of the worktable 43 can be used to fix the etching equipment with bolts, adapting to the installation requirements of different specifications of equipment.

[0031] The bottom end of the telescopic motor 41 is connected to the positioning rail 53. Two brake blocks 52 are slidably connected on the positioning rail 53 and connected by a spring 54. The second moving block 55 is connected to the telescopic end of the electric telescopic rod 51 and its side is in sliding contact with the brake blocks 52. When the adjustment mechanism 4 moves into position, the electric telescopic rod 51 extends and pushes the second moving block 55 to slide. The second moving block 55 squeezes the two brake blocks 52 and separates them to both sides along the positioning rail 53 (the spring 54 is stretched). The side of the brake blocks 52 is in close contact with the inner wall of the electric slide rail 31. The friction locks the position of the adjustment mechanism 4 on the electric slide rail 31 to prevent displacement caused by vibration during operation and ensure etching accuracy. When the electric telescopic rod 51 retracts, the second moving block 55 returns to its original position. The spring 54 drives the two brake blocks 52 to return to their original position and separate from the inner wall of the electric slide rail 31. The adjustment mechanism 4 can then move again through the electric slide rail 31.

[0032] Working principle: First, the first motor 28 on the right side of the adjustment plate body 1, placed on the plate 27, is started. Its output end is inserted into the connecting slot of one of the transmission rods 26, driving the transmission rod 26 to rotate. The transmission rod 26 is fixed to the shaft of the gear 22. Therefore, the motor drives one gear 22 to rotate. The two gears 22 mesh through the toothed belt 23 to achieve synchronous and opposite rotation, thereby driving the other transmission rod 26 and the threaded rod 21 to rotate synchronously. The threaded rod 21 is threadedly connected to the first moving block 24, and the first moving block 24 is limited to the moving slot 25 of the adjustment plate body 1 (cannot rotate). Therefore, when the threaded rod 21 rotates, the first moving block 24 slides horizontally along the inner wall of the moving slot 25, ultimately driving the moving mechanism 3 connected above to move synchronously.

[0033] The positioning block 32 of the moving mechanism 3 is embedded in the slot of the first moving block 24, and the mounting plate 33 is fixed to the first moving block 24 by bolts 34. Therefore, when the first moving block 24 of the conveying mechanism 2 slides, it will drive the entire moving mechanism 3 to move synchronously. The electric slide rail 31 in the moving mechanism 3 is started, and its output end is directly connected to the telescopic motor 41 of the adjustment mechanism 4. Therefore, the electric slide rail 31 can drive the adjustment mechanism 4 to move horizontally along the slide rail itself (perpendicular to the moving direction of the conveying mechanism 2), so as to achieve precise positioning of the adjustment mechanism 4 on the two-dimensional horizontal plane.

[0034] When the telescopic motor 41 is started, its output end drives the top adjustment plate 42 to extend and retract up and down, thereby driving the worktable 43 to rise and fall synchronously to meet the height requirements of the etching equipment. The second motor 46 on the adjustment plate 42 is started, and its output end is fixed to the rotating rod 45 of the arc plate 44 at the bottom of the worktable 43. Therefore, the motor drives the rotating rod 45 to rotate. The two ends of the rotating rod 45 are limited to the inner wall of the adjustment plate 42. When rotating, the worktable 43 is driven to rotate around the axis of the rotating rod 45 through the arc plate 44, so as to realize the angle adjustment of the worktable 43 (to adapt to different etching operation angle requirements).

[0035] When the electric telescopic rod 51 at the bottom of the telescopic motor 41 is activated, its telescopic end pushes the second moving block 55 to slide. The second moving block 55 slides into contact with the side of the brake block 52, which will squeeze the two brake blocks 52 to move in opposite directions along the positioning rail 53, stretching the spring 54. Finally, the side of the brake block 52 is tightly abutted against the inner wall of the electric slide rail 31, and the position of the adjustment mechanism 4 on the electric slide rail 31 is locked by friction, ensuring stability during operation. At this point, the entire process is completed.

[0036] The terms "front," "back," "left," "right," "top," and "bottom" all refer to the figures in the accompanying drawings. Figure 1 Based on.

[0037] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this utility model.

[0038] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments.

[0039] For those skilled in the art, various changes, modifications, substitutions, and alterations to these embodiments without departing from the principles and spirit of this utility model will still fall within the protection scope of this utility model.

Claims

1. An adjustment mechanism for a lifting device of an etching equipment, comprising an adjustment plate body (1), characterized in that: The adjustment plate body (1) includes a conveying mechanism (2) mainly used for stabilizing the conveying and adjusting equipment, a moving mechanism (3) connected to the conveying mechanism (2), and an adjustment mechanism (4) connected to the moving mechanism (3). The conveying mechanism (2) includes a threaded rod (21), a gear (22), a toothed belt (23), and a first moving block (24). The top surface of the adjustment plate body (1) is provided with moving grooves (25) on both sides, and the inner wall of the moving groove (25) is slidably connected to the first moving block (24). The two ends of the two threaded rods (21) are fixedly connected with transmission rods (26). The two ends of the moving groove (25) are provided with positioning holes that are adapted to the transmission rods (26). The ends of the two transmission rods (26) away from the threaded rods (21) are fixedly connected to the shaft of the gear (22). The outer sides of the two gears (22) mesh with the inner walls of the toothed belt (23). The inner walls of the two first moving blocks (24) are threadedly connected to the outer sides of the threaded rods (21).

2. The adjustment mechanism for a lifting device of an etching equipment according to claim 1, characterized in that: The moving mechanism (3) includes an electric slide rail (31), a positioning block (32) and a mounting plate (33). The bottom surfaces of the electric slide rail (31) and the mounting plate (33) are fixedly connected to the top surface of the positioning block (32). The top surfaces of the two first moving blocks (24) are provided with slots that are compatible with the positioning block (32).

3. The adjustment mechanism for a lifting device of an etching equipment according to claim 2, characterized in that: The first movable block (24) has sliding grooves on both sides, and the inner wall of the sliding groove is slidably connected to the top surface of the adjustment plate body (1). The first movable block (24) and the mounting plate (33) are connected together by bolts (34).

4. The adjustment mechanism for a lifting device of an etching equipment according to claim 1, characterized in that: A placement plate (27) is fixedly connected to the right side of the adjustment plate body (1). A connecting groove is provided at the end of the two transmission rods (26) away from the gear (22). A first motor (28) is fixedly connected to the top surface of the placement plate (27). The inner wall of one of the connecting grooves is adapted to the output end of the first motor (28).

5. The adjustment mechanism for a lifting device of an etching equipment according to claim 2, characterized in that: The adjustment mechanism (4) includes a telescopic motor (41), an adjustment plate (42), and a workbench (43). The bottom end of the telescopic motor (41) is fixedly connected to the output end of the electric slide rail (31). The bottom end of the adjustment plate (42) is fixedly connected to the top end of the telescopic motor (41). An arc plate (44) is fixedly connected to the bottom end of the workbench (43). Rotating rods (45) are fixedly connected to both ends of the arc plate (44). The two ends of the rotating rods (45) are rotatably connected to the inner wall of the adjustment plate (42). Threaded holes are provided around the top surface of the workbench (43).

6. The adjustment mechanism for a lifting device of an etching equipment according to claim 5, characterized in that: The bottom end of the telescopic motor (41) is connected to an electric telescopic rod (51), the telescopic end of the electric telescopic rod (51) is connected to a second moving block (55), the bottom end of the telescopic motor (41) is connected to a positioning rail (53), two brake blocks (52) are slidably connected to the side of the positioning rail (53), and the sides of the two brake blocks (52) are connected to a spring (54). The side of the second moving block (55) is slidably connected to the side of the brake block (52), and the side of the brake block (52) abuts against the inner wall of the electric slide rail (31).

7. The adjustment mechanism for a lifting device of an etching equipment according to claim 5, characterized in that: The top surface of the adjusting plate (42) is fixedly connected to a second motor (46), and the output end of the second motor (46) is fixedly connected to the rear end of the rotating rod (45).

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