A semiconductor fluorine-containing wastewater recovery treatment system

Abstract

The utility model relates to a kind of semiconductor fluorine-containing wastewater recovery processing system, including including pipeline sequentially connected pretreatment unit, first-stage processing unit, second-stage processing unit;Between the pretreatment unit, with first-stage processing unit is provided with centrifugal water separating device A, and centrifugal water separating device A can also backflow to pretreatment unit;Between the first-stage processing unit, with first-stage processing unit is provided with centrifugal water separating device B, and centrifugal water separating device B can also backflow to first processing unit;The centrifugal water separating device A, centrifugal water separating device B structure is same, all including the tank body being set on ground, track walking mechanism being set on roof, at track walking mechanism spacing ground is provided with the stirring mechanism that can vertically extend and retract, water inlet pipe, the separation cylinder that can vertically extend and retract;The separation cylinder is inboard and is placed with negative pressure extraction pipe.The utility model reaches the beneficial effect is: filtering effect is good, and mutual interference is not easy to generate between each filtering device.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor fluoride-containing wastewater recovery technology, and in particular to a semiconductor fluoride-containing wastewater recovery and treatment system. Background Technology

[0002] When recycling semiconductor fluoride-containing wastewater, the typical treatment method is: fluoride-containing wastewater → pH adjustment to acidic → calcium salt precipitation → flocculation and precipitation → (supernatant → adsorption / membrane treatment → discharge to meet standards / reuse) / (sludge dewatering → hazardous waste treatment or resource recovery).

[0003] However, the typical treatment method is not very effective. Some companies have improved the typical treatment method. For example, TSMC chooses to add RO reverse osmosis after chemical precipitation. When our company uses the same method, the effect is still difficult to achieve the set target.

[0004] To maximize treatment efficiency, this solution employs a wastewater recycling and treatment system. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of the prior art and provide a semiconductor fluoride-containing wastewater recovery and treatment system to solve the problem that the treatment effect of the existing fluoride-containing wastewater recovery system is not ideal.

[0006] It should be noted that in order to improve the treatment effect of the fluoride-containing wastewater recovery system, our company has adopted a combination of multiple filtration devices. However, we have found that there is mutual interference between them. That is, if the wastewater is passed into the next filtration device without a certain amount of sedimentation after the previous filtration device has finished treating it, it will easily cause the latter filtration device to become clogged (requiring repeated cleaning every once in a while, which is detrimental to work efficiency); in particular, it is very easy to cause clogging of the RO reverse osmosis system.

[0007] Therefore, this solution uses a corresponding structural design to separate the water treated by a certain filtration device. The cleaner water flows into the next process, while the less clean water is treated again by the same filtration device, thus avoiding interference between multiple filtration devices.

[0008] The purpose of this utility model is achieved through the following technical solution: a semiconductor fluoride-containing wastewater recovery and treatment system, comprising a pretreatment unit, a first-stage treatment unit, and a second-stage treatment unit connected in sequence by pipelines; A centrifugal water separator A is provided between the pretreatment unit and the first-stage treatment unit, and the centrifugal water separator A can also return water to the pretreatment unit. A centrifugal water separator B is provided between the first-stage processing unit and the first-stage processing unit, and the centrifugal water separator B can also return water to the first-stage processing unit. The centrifugal water separation device A and centrifugal water separation device B have the same structure, both including a tank set on the ground and a track walking mechanism set on the roof. A vertically retractable stirring mechanism, a water inlet pipe, and a vertically retractable separation cylinder are set at intervals between the track walking mechanism. A negative pressure extraction pipe is placed inside the separation cylinder; When the track-walking mechanism is activated, the inlet pipe is positioned directly above the tank, allowing water to enter. The agitator is also positioned directly above the tank, enabling it to extend into the tank for centrifugal mixing. Furthermore, the separation cylinder is positioned directly above the tank, extending and resting against the bottom of the tank, forming a ring-shaped separation chamber. This allows the negative pressure extraction pipe to draw water from the separation cylinder to the next process, and the water from the separation chamber is returned to the corresponding treatment unit via the return pipe.

[0009] As a preferred technical solution of this application, the pretreatment unit includes a wastewater collection device and a pH adjustment device connected in sequence; an HSO4 / NaOH feeder is provided on the pH adjustment device.

[0010] As a preferred technical solution of this application, the first-stage processing unit includes an MMF filter device and an ACF filter device connected in sequence; the MMF filter device is connected to a backwash fan via an MM air wash pipeline.

[0011] As a preferred technical solution of this application, the second-stage treatment unit includes a security filter and an RO reverse osmosis device connected in sequence; the RO reverse osmosis device is also connected to a product water collection device via a product water pipeline, and the RO reverse osmosis device is also connected to a concentrate pipeline.

[0012] Furthermore, in the second-stage processing unit, a reducing agent dosing pipeline is installed at the water inlet pipe of the security filter.

[0013] Furthermore, the RO reverse osmosis device is connected to the cleaning filter via an RO cleaning inlet pipe, and the cleaning filter is connected to the cleaning water tank via a corresponding pipe; the RO reverse osmosis device is also connected to the cleaning water tank via an RO cleaning outlet pipe.

[0014] Furthermore, a pressure sensor is installed on the concentrate pipeline.

[0015] To facilitate understanding of this solution, its core innovative points are explained below: To improve filtration efficiency, this solution combines a pH adjustment device, an MMF filter, an ACF filter, a security filter, and an RO reverse osmosis device (the structures of these devices are existing technologies). Although the filtration effect is improved, it was found in actual production that the various filtration devices interfere with each other. That is, when water treated by one device flows into the next device, it can easily cause the next device to become clogged (because the previous device did not treat it properly). Due to the large number of devices in the entire system, cleaning is quite difficult. Therefore, this solution also employs a centrifugal water separation device. This device centrifuges the water, allowing flocculents and impurities to settle on the side wall of the tank. Then, the relatively clean water in the middle of the tank is pumped to the next process, while the water located on the side wall of the tank flows back to the previous process for reprocessing. This avoids mutual interference between the devices during operation.

[0016] This invention has the following advantages: good filtration effect, and the various filtration devices are not prone to mutual interference. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of a centrifugal water separator. In the diagram: 1-Wastewater collection device, 2-pH adjustment device, 3-Centrifugal water separator A, 4-MMF filter device, 5-ACF filter device, 6-Centrifugal water separator B, 7-Security filter, 8-RO reverse osmosis device, 9-Permeate water collector, 10-Backwash air device, 11-Cleaning water tank, 12-Cleaning filter, 13-pH adjustment dispenser, 14-Reducing agent dosing pipeline (RO system dosing pipeline), 15-Permeate water pipeline, 16-Concentrate pipeline, 17-MMF air washing pipeline, 18-RO cleaning inlet pipeline, 19-RO cleaning outlet pipeline, 20-Tank body, 2001-Return water pipe, 30-Railway walking mechanism, 31-Agitator mechanism, 3101-Telescopic cylinder A, 32-Inlet pipe, 3201-Auxiliary frame A, 33-Separation cylinder, 3301-Telescopic cylinder B, 34-Negative pressure extraction pipe, 3401-Auxiliary frame B. Detailed Implementation

[0018] The present invention will be further described below with reference to the accompanying drawings, but the scope of protection of the present invention is not limited to the following description.

[0019] It should be noted that the orientation or positional relationship indicated by terms such as "left" and "right" is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the product of this utility model is usually placed in during use, or the orientation or positional relationship that is commonly understood by those skilled in the art. Such terms are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0020] It should be noted that, unless otherwise specified, the embodiments and features and technical solutions in the present invention can be combined with each other.

[0021] like Figure 1 and Figure 2 As shown, a semiconductor fluoride-containing wastewater recovery and treatment system includes a pretreatment unit, a first-stage treatment unit, and a second-stage treatment unit connected in sequence by pipelines. Among them, a centrifugal water separator A3 is provided between the pretreatment unit and the first-stage treatment unit, and the centrifugal water separator A3 can also return to the pretreatment unit; in addition, a centrifugal water separator B6 is provided between the first-stage treatment unit and the first-stage treatment unit, and the centrifugal water separator B6 can also return to the first-stage treatment unit. Centrifugal water separators A3 and B6 have the same structure, both including a tank 20 installed on the ground and a track walking mechanism 30 installed on the roof. A vertically extendable stirring mechanism 31, a water inlet pipe 32, and a vertically extendable separation cylinder 33 are installed at intervals on the track walking mechanism 30. A negative pressure extraction tube 34 is placed inside the separation cylinder 32; When the track travel mechanism 30 is activated, the water inlet pipe 32 is positioned directly above the tank 20, allowing water to enter. When the track travel mechanism 30 is activated, the stirring mechanism 31 is positioned directly above the tank 20, allowing the stirring mechanism 31 to extend into the tank 20 for centrifugal stirring. When the track travel mechanism 30 is activated, the separation cylinder 33 is positioned directly above the tank 20. When the separation cylinder 33 extends outward, it rests against the bottom of the tank 20, forming an annular separation chamber with the tank 20. This allows the negative pressure extraction pipe 34 to extract the water from the separation cylinder 33 to the next process, and also allows the water in the separation chamber to flow back to the corresponding treatment unit via the return water pipe 2001.

[0022] It should be noted that the pretreatment unit mainly focuses on pH adjustment, so the centrifugal water separator A3 mainly serves as a buffer to prevent a large amount of water from entering the subsequent processes. The centrifugal water separator B6 centrifuges the water (after centrifugation, the water in the middle of tank 20 is relatively clean, while the water on the inner wall of tank 20 is not fully treated). The relatively clean water flows into the second-stage treatment unit for further processing, while the not fully treated water flows back to the first-stage treatment unit for further processing. (An easy way to avoid interference between devices is to let them settle, but this design improves the efficiency.)

[0023] Furthermore, although this solution only sets up corresponding centrifugal water separation devices between the first-stage treatment units and between the second-stage treatment units, if the first-stage treatment unit also has multiple filtration devices and the second-stage treatment unit also has multiple filtration devices, corresponding centrifugal water separation devices can also be set up between adjacent devices.

[0024] The structure of centrifugal water separator A3 and centrifugal water separator B6 will be further explained below.

[0025] See Figure 2 In the corresponding centrifugal water separation device, the telescopic stirring mechanism 31 includes a lower stirring rod, and a stirring motor is provided at the upper end of the stirring rod. The stirring motor is fixed on the base plate A. The base plate A is fixed on the track walking mechanism 30 via two telescopic cylinders 3101 (the track walking mechanism 30 includes a track fixed on the roof, and a base plate is suspended on the track by a tenon structure. The base plate is connected to the track by track wheels, and the track wheels are connected to the drive motor).

[0026] See Figure 2 In the corresponding centrifugal water distribution device, the inlet pipe 32 is fixed on the auxiliary frame A3201, which is fixed on the track traveling mechanism 30. The inlet end of the inlet pipe 32 is connected to a corresponding flexible hose. A switch valve is installed on the inlet pipe 32. The lower end of the inlet pipe 32 is higher than the upper end of the tank 20.

[0027] See Figure 2 In the corresponding centrifugal water separation device, the side lugs welded to both sides of the separation cylinder 33 are connected to the corresponding telescopic cylinder B3301, which is fixed on the track walking mechanism 30. The negative pressure extraction pipe 34 is set along the center of the separation cylinder 33, which is fixed on the track walking mechanism 30 via the auxiliary frame B3301. The negative pressure extraction pipe 34 and the corresponding hose are connected to the corresponding pump.

[0028] The preprocessing unit will be further explained below.

[0029] refer to Figure 1The pretreatment unit includes a wastewater collection device 1 and a pH adjustment device 2 connected in sequence. Wastewater collection device 1 receives fluoride-containing wastewater flowing from the semiconductor plant equipment (for wastewater collection and flow rate adjustment, and then pumps it into subsequent processes for further treatment). The pH adjustment device 2 is equipped with an H2SO4 / NaOH feeder 13, which adjusts the pH of the fluoride-containing wastewater by adding H2SO4 / NaOH.

[0030] The first-level processing unit will be further explained below.

[0031] refer to Figure 1 The first-stage treatment unit includes an MMF filter 4 and an ACF filter 5 connected in sequence. A backwash fan 10 is connected to the MMF filter 4 via an MM air-washing pipe 17. The MMF filter 4 removes colloidal substances and suspended solids such as silicon wafers and silica. The ACF filter removes small amounts of organic matter from the fluoride-containing wastewater.

[0032] The second-level processing unit will be further explained below.

[0033] See Figure 2 The second-stage treatment unit includes a security filter 7 and an RO reverse osmosis unit 8 connected in sequence; a reducing agent dosing pipeline 14 is installed at the inlet pipe of the security filter 7; the RO reverse osmosis unit 8 is also connected to the product water collection device 9 via the product water pipeline 15, and in addition, the RO reverse osmosis unit 8 is also connected to the concentrate pipeline 16. In addition, a conductivity analyzer is installed in the inlet pipe of the security filter 7 to detect the ACF permeate water in order to meet the inlet water requirements of the RO reverse osmosis unit 8. In addition, a pressure sensor and pressure switch are installed before the main inlet water pipe of the RO reverse osmosis unit 8. The internal pressure is detected and the pressure switch is used to control the RO reverse osmosis unit 8 to start working. In addition, a conductivity analyzer is installed on the concentrate pipe 16 of the RO reverse osmosis unit 8 to detect the quality of the permeate water from the RO reverse osmosis unit; and a pressure sensor is also installed on the concentrate pipe 16 to detect the permeate water pressure inside the RO reverse osmosis unit 8 and determine whether the unit is operating normally.

[0034] Further explanation is given for RO reverse osmosis unit 8.

[0035] See Figure 1 The RO reverse osmosis unit 8 is connected to the cleaning filter 12 via the RO cleaning inlet pipe 18, and the cleaning filter 12 is connected to the cleaning water tank 11 via a corresponding pipe; in addition, the RO reverse osmosis unit 8 is also connected to the cleaning water tank 11 via the RO cleaning outlet pipe 19.

[0036] It should be noted that the structure and principle of the above-mentioned devices are all existing technologies (except for the centrifugal water separation device). This solution simply combines the devices to improve the recycling and treatment effect of semiconductor fluoride-containing wastewater.

[0037] The process flow of this scheme is as follows: (1) Fluorine-containing wastewater is first lifted into pH adjustment device 2 by wastewater collection device 1, and acid / alkali is added to pH adjustment device 2 through H2SO4 / NaOH feeder 13 for pH adjustment; (2) After pH adjustment, it enters centrifugal water separator A3. After centrifugation, the relatively clean water in the center of the corresponding tank 20 is pumped to the next process (the water near the side wall of the corresponding tank 20 is returned to wastewater collection device 1); (3) The relatively clean water is pumped into MMF filter 4 and ACF filter 5 in sequence to remove larger particulate matter and colloids; (4) The water produced by ACF filter 5 enters Centrifugal water separator B6, after centrifugation, the relatively clean water in the center of the corresponding tank 20 is drawn to the next process (the water near the side wall of the corresponding tank 20 is returned to the MMF filter 4); (5) Then the effluent is pumped into the security filter 7 and RO reverse osmosis device 8 by high pressure pump for reverse osmosis treatment, and a reducing agent dosing pipeline is set in the pipeline before the water enters the security filter 7 to dosing to avoid damage to the RO reverse osmosis device 8 by oxidizing substances; (6) The product water of the reverse osmosis device 8 enters the product water collection device through the RO product water pipeline 15 for reuse, and the concentrated water produced by the reverse osmosis device 8 can be collected (for other uses).

[0038] The above embodiments only illustrate preferred implementation methods, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model.

Claims

1. A semiconductor fluoride-containing wastewater recovery and treatment system, characterized in that: It includes a pretreatment unit, a first-stage treatment unit, and a second-stage treatment unit connected in sequence by pipelines; A centrifugal water separator A (3) is provided between the pretreatment unit and the first-stage treatment unit, and the centrifugal water separator A (3) can also return water to the pretreatment unit; A centrifugal water separator B (6) is provided between the first-stage processing unit and the first-stage processing unit, and the centrifugal water separator B (6) can also return to the first-stage processing unit; The centrifugal water separator A (3) and centrifugal water separator B (6) have the same structure, both including a tank (20) set on the ground and a track walking mechanism (30) set on the roof. A vertically extendable stirring mechanism (31), a water inlet pipe (32), and a vertically extendable separation cylinder (33) are set at intervals on the track walking mechanism (30). A negative pressure extraction tube (34) is placed inside the separation cylinder (33); When the track walking mechanism (30) is activated, the water inlet pipe (32) can be positioned directly above the tank (20), at which time the water inlet action can be performed; when the track walking mechanism (30) is activated, the stirring mechanism (31) can be positioned directly above the tank (20), at which time the stirring mechanism (31) can be inserted into the tank (20) to perform centrifugal stirring action; when the track walking mechanism (30) is activated, the separation cylinder (33) can be positioned directly above the tank (20), at which time the separation cylinder (33) extends out and can abut against the bottom of the tank (20), so that the separation cylinder (33) and the tank (20) form an annular separation cavity, so that the negative pressure extraction pipe (34) can extract the water in the separation cylinder (33) to the next process, and also allow the separation cavity to flow back to the corresponding processing unit through the return water pipe (2001).

2. The semiconductor fluoride-containing wastewater recovery and treatment system according to claim 1, characterized in that: The pretreatment unit includes a wastewater collection device (1) and a pH adjustment device (2) connected in sequence; an H2SO4 / NaOH feeder (13) is installed on the pH adjustment device (2).

3. The semiconductor fluoride-containing wastewater recovery and treatment system according to claim 2, characterized in that: The first-stage processing unit includes an MMF filter device (4) and an ACF filter device (5) connected in sequence; a backwash fan (10) is connected to the MMF filter device (4) via an MM air wash pipeline (17).

4. The semiconductor fluoride-containing wastewater recovery and treatment system according to claim 3, characterized in that: The second-stage processing unit includes a security filter (7) and an RO reverse osmosis device (8) connected in sequence. The RO reverse osmosis device (8) is also connected to the product water collection device (9) via the product water pipeline (15), and the RO reverse osmosis device (8) is also connected to the concentrate pipeline (16).

5. The semiconductor fluoride-containing wastewater recovery and treatment system according to claim 4, characterized in that: In the second-stage treatment unit, a reducing agent dosing pipeline (14) is provided at the water inlet pipe of the security filter (7).

6. The semiconductor fluoride-containing wastewater recovery and treatment system according to claim 4, characterized in that: The RO reverse osmosis device (8) is connected to the cleaning filter (12) via the RO cleaning water inlet pipe (18), and the cleaning filter (12) is connected to the cleaning water tank (11) via the corresponding pipe; The RO reverse osmosis device (8) is also connected to the cleaning water tank (11) via the RO cleaning water outlet pipeline (19).

7. The semiconductor fluoride-containing wastewater recovery and treatment system according to claim 4, characterized in that: A pressure sensor is installed on the concentrated water pipe (16).

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