boat pages and boat structures

Abstract

The application provides a boat page and a boat structure, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem that the side of a silicon wafer in a traditional graphite boat only contacts with a clamping point, which easily causes phenomena such as arc striking, high frequency and clamping point scorching. The boat page and the boat structure comprise: a base body which is vertically arranged, and the vertical surface of the base body is provided with at least one first groove; and at least one guide piece which is provided with a first contact part and at least one guide part. By arranging the first groove on the base body, the side of the product can be in contact with the groove wall of the first groove, so that the product has a larger contact area with the boat structure, the passing capacity of the large current of the plasma is improved, the problems such as arc striking and high frequency are reduced, and the film coating effect of the product is improved. Furthermore, by arranging the guide piece, the falling direction of the product can be guided when the product is transported to the surrounding of the guide part by the transport device, so that the product can be embedded into the first groove.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, specifically to a boat flap and boat structure. Background Technology

[0002] Semiconductor and photovoltaic materials are widely used in industries such as electronics and new energy. These materials typically require chemical processing before they can be applied to products. Chemical vapor deposition (CVD) is one such processing method. CVD technology is now widely used in semiconductor and photovoltaic material processing. Common processing equipment includes plasma-enhanced chemical vapor deposition (PECVD) equipment, low-pressure chemical vapor deposition (LPCVD) equipment, and atmospheric pressure chemical vapor deposition (APCVD) equipment. Currently, there are many related equipment available in the industry, and the appropriate equipment can be selected based on specific processing needs.

[0003] Semiconductor or photovoltaic products are typically processed by feeding the products into a reactor and reacting them under certain temperature and pressure conditions. During the processing of semiconductor or photovoltaic products, specific carriers are usually used to load or move the products to be processed, in the process of processing, or after processing. In the industry, such carriers are usually called boats, graphite boats, small boats, or flower baskets.

[0004] In related technologies, when processing silicon wafers using photovoltaic tube-type PECVD equipment, a vertically inserted graphite boat is typically used to support the silicon wafer. However, using this type of graphite boat presents a problem during the process: the silicon wafer is obstructed by the markings on the graphite boat, leading to uneven coating (such as uncoated areas or poor color difference at the markings). This is particularly problematic for cells with high requirements for coating uniformity, such as back contact (BC) cells. However, reducing the depth of the marking grooves to improve obstruction results in too small a contact area between the markings and the silicon wafer, leading to poor plasma current throughput and serious problems such as arcing, high frequency, and marking burn-out. Utility Model Content

[0005] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide a boat leaf and a boat structure.

[0006] In a first aspect, one embodiment of this application provides a boat-shaped leaf, comprising: a substrate, vertically disposed, the vertical surface of the substrate having at least one first groove, the first groove being configured to accommodate a product, the product having a first surface and a second surface disposed opposite to each other, and at least one side connecting the first surface and the second surface, the side of the product being capable of contacting the groove wall of the first groove so that current can flow through the groove wall of the first groove through the product; at least one guide member, the guide member having a first contact portion and at least one guide portion, the first contact portion being connected to the guide portion, the guide portion being located on one side of the first contact portion in a first horizontal direction and protruding from the vertical surface of the substrate in the first horizontal direction, the first horizontal direction intersecting the vertical surface of the substrate, and the included angle between the side wall of the guide portion near the first contact portion and the first contact portion being an acute angle.

[0007] In some embodiments, the first contact surface of the first contact portion is coplanar with the bottom of the first groove, and the first contact surface and the bottom of the first groove can jointly contact the first surface of the product. The guide further includes at least one second contact portion, which is disposed between the first contact portion and the guide portion. The second contact portion has a second contact surface, which is coplanar with the wall of the first groove, and the side of the product can contact the wall of the first groove and the second contact surface.

[0008] In some embodiments, there are multiple guide members, which are arranged around the edge region of the first groove.

[0009] In some embodiments, the shape of the first cross section of the second contact portion on a plane parallel to the first contact surface is a polygon, wherein the surface containing one side of the polygon serves as the second contact surface; or, the outline of the first cross section has at least one straight line segment and at least one arc segment, wherein the surface containing one straight line segment serves as the second contact surface.

[0010] In some embodiments, the bottom of the first groove has a hollow area, or the bottom of the first groove has a second groove, and the bottom of the second groove has at least one vent hole penetrating the substrate along a first horizontal direction.

[0011] In some embodiments, the substrate further has a receiving hole, at least a portion of which intersects with the edge region of the first groove, and a first contact portion is located in the receiving hole.

[0012] In some embodiments, the substrate has vertical surfaces on both sides of the first horizontal direction, and the first contact portion has a first contact surface on both sides of the first horizontal direction. Each first contact surface is coplanar with the bottom of the adjacent first groove. There are two second contact portions, which are respectively disposed on both sides of the first contact portion in the first horizontal direction. The second contact surface of each second contact portion is coplanar with the groove wall of the adjacent first groove. There are two guide portions, which are disposed in one-to-one correspondence with the two second contact portions. Each guide portion is located on the side of the corresponding second contact portion away from the first contact portion.

[0013] In some embodiments, the depth of the first groove in the first horizontal direction ranges from 0 mm to 3 mm; and / or, the first groove has a first groove wall and a second groove wall disposed opposite to each other, and a third groove wall and a fourth groove wall connecting the first groove wall and the second groove wall, the first groove wall and the second groove wall extending along a first direction, the third groove wall and the fourth groove wall extending along a second direction, the first direction intersecting the second direction, wherein the dimensions of the first groove wall and the second groove wall in the first direction are first dimensions, the dimensions of the side of the product near the first groove wall or the second groove wall in the first direction are second dimensions, the difference between the first dimension and the second dimension ranges from 0 mm to 1 mm, the dimensions of the third groove wall and the fourth groove wall in the second direction are third dimensions, the dimensions of the side of the product near the third groove wall or the fourth groove wall in the second direction are fourth dimensions, the difference between the third dimension and the fourth dimension ranges from 0 mm to 1 mm.

[0014] In some embodiments, the bottom wall of the first groove has an angle with the horizontal direction, the base extends along the second horizontal direction, the second horizontal direction intersects the first horizontal direction, and there are at least three guide members, the first guide member is disposed on one side of the first groove in the second horizontal direction, the second guide member is disposed on the other side of the first groove in the second horizontal direction, and the third guide member is disposed at the bottom of the first groove.

[0015] Secondly, one embodiment of this application provides a boat structure, including: a plurality of boat leaves according to any one of the first aspects above, the plurality of boat leaves being arranged sequentially along a first horizontal direction, the first horizontal direction intersecting the vertical surface of the substrate of the boat leaves, the boat leaves being configured to carry a product; and a connecting component configured to connect the plurality of boat leaves.

[0016] The boat-shaped leaf and boat structure proposed in this application embodiment, by providing a first groove in the substrate, allow the side of the product to contact the groove wall of the first groove, thereby providing a larger contact area between the side of the product and the boat structure, improving the plasma high current carrying capacity, reducing problems such as arcing and high frequency, and improving the coating effect of the product; furthermore, by providing a guide, the falling direction of the product can be guided when the transport device transports the product to the vicinity of the guide part, thereby allowing the product to be embedded in the first groove. Attached Figure Description

[0017] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 The image shown is a front view of a page provided in an exemplary embodiment of this application.

[0019] Figure 2 The diagram shown is a schematic diagram of the structure of a boat page provided in an exemplary embodiment of this application.

[0020] Figure 3 The image shown is an exemplary embodiment of this application. Figure 2 The image shown is a magnified view of a portion of area A.

[0021] Figure 4 The diagram shown is a schematic diagram of the structure of a guide member provided in an exemplary embodiment of this application.

[0022] Figure 5 The image shown is a side view of a guide provided in an exemplary embodiment of this application.

[0023] Figure 6 The diagram shown is a structural schematic of a product provided in an exemplary embodiment of this application.

[0024] Figure 7 The diagram shown is a schematic diagram of the boat structure provided in an exemplary embodiment of this application.

[0025] Figure 8 The diagram shown is a schematic diagram of a first cross section provided in an exemplary embodiment of this application.

[0026] Figure 9 The diagram shown is a schematic diagram of a second first cross section provided in an exemplary embodiment of this application.

[0027] Figure 10The diagram shown is a schematic diagram of a third first cross section provided in an exemplary embodiment of this application.

[0028] Figure label:

[0029] 100. Boat leaf; 110. Substrate; 111. First groove; 1111. Groove wall of the first groove; 11111. First groove wall; 11112. Second groove wall; 11113. Third groove wall; 11114. Fourth groove wall; 1112. Bottom of the first groove; 11121. Hollowed-out area; 1113. Edge area of ​​the first groove; 112. Vertical surface; 113. Receiving hole; 120. Guide; 121. 1211 First contact portion; 122 First contact surface; 122 Guide portion; 1221 Side wall of guide portion near the first contact surface; 12211 First side portion; 12212 Second side portion; 123 Second contact portion; 1231 Second contact surface; 1232 First cross section; 200 Product; 210 First surface; 220 Second surface; 230 Side edge; 300 Boat structure; 310 Connecting assembly. Detailed Implementation

[0030] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0031] Figure 1 The image shown is a front view of a boat page provided in an exemplary embodiment of this application. Figure 2 The diagram shown is a schematic representation of the structure of a boat-shaped page provided in an exemplary embodiment of this application. Figure 3 The image shown is an exemplary embodiment of this application. Figure 2 The image shown is a magnified view of a portion of region A. Figure 4 The diagram shown is a schematic representation of the structure of a guide member provided in an exemplary embodiment of this application. Figure 5 The image shown is a side view of a guide member provided in an exemplary embodiment of this application. Figure 6 The diagram shown is a structural schematic of a product provided in an exemplary embodiment of this application. Figure 7 The diagram shown is a schematic diagram of the boat structure provided in an exemplary embodiment of this application.

[0032] like Figures 1 to 7As shown in the figure, this application embodiment provides a boat-shaped page 100, which includes a base 110 and at least one guide member 120. The base 110 is vertically arranged (vertical direction as shown by Z in the figure). The vertical surface 112 of the base 110 has at least one first groove 111. The first groove 111 is configured to receive a product 200. The product 200 has a first surface 210 and a second surface 220 disposed opposite to each other, and at least one side 230 connecting the first surface 210 and the second surface 220. The side 230 of the product 200 can contact the groove wall 1111 of the first groove 111 (i.e., the product 200 can be embedded in the first groove 111) so that current can flow through the groove wall 1111 of the first groove 111 to the product 200 (conversely, current can also flow from the product 200 to the groove wall 1111 of the first groove 111). The guide member 120 has a first contact portion 121 and at least one guide portion 122. The first contact portion 121 is connected to the guide portion 122. The guide portion 122 is located on one side of the first contact portion 121 in a first horizontal direction (such as the X direction in the figure) and protrudes from the vertical surface 112 of the base 110 in the first horizontal direction. The first horizontal direction intersects (e.g., is perpendicular) the vertical surface 112 of the base 110. The angle between the side wall 1221 of the guide portion 122 near the first contact portion 121 and the first contact portion 121 is an acute angle.

[0033] The sidewall 1221 of the guide portion 122 near the first contact surface 1211 is configured such that after contact with the product 200, the product 200 falls along the sidewall 1221 of the guide portion 122 near the first contact surface 1211, thereby causing the first surface 210 to contact the bottom 1112 of the first groove 111 and the first contact surface 1211 of the guide member 120.

[0034] For example, product 200 may be a silicon wafer, a solar cell, a crystal wafer, or a glass substrate.

[0035] For example, the angle between the sidewall 1221 of the guide portion 122 near the first contact surface 1211 and the first contact surface 1211 is 30 degrees, 45 degrees or 60 degrees.

[0036] For example, such as Figure 5 As shown, the sidewall 1221 of the guide portion 122 near the first contact surface 1211 includes a first side portion 12211 and a second side portion 12212. The first included angle between the first side portion 12211 and the first contact surface 1211 is greater than the second included angle between the second side portion 12212 and the first contact surface 1211. For example, the first included angle is 60 degrees and the second included angle is 30 degrees.

[0037] For example, product 200 can be fully embedded in the first groove 111, or only partially embedded in the first groove 111.

[0038] For example, the guide 120 may partially contact the side 230 of the product 200 or may not contact the side 230 of the product 200.

[0039] For example, the depth direction of the first groove 111 is the first horizontal direction.

[0040] In the above embodiments, by providing a first groove 111 in the substrate 110, the side 230 of the product 200 can contact the groove wall 1111 of the first groove 111, thereby providing a larger contact area between the side 230 of the product 200 and the boat structure 300, improving the plasma high current transmission capacity, reducing problems such as arcing and high frequency, and improving the coating effect of the product 200; and by providing a guide member 120, the falling direction of the product 200 can be guided when the transport device (such as a robot, suction cup, etc.) transports the product 200 to the vicinity of the guide part 122, thereby enabling the product 200 to be embedded in the first groove 111.

[0041] In some embodiments, such as Figures 3-5 As shown, the first contact surface 1211 of the first contact portion 121 is coplanar with the bottom 1112 of the first groove 111. The first contact surface 1211 and the bottom 1112 of the first groove 111 can jointly contact the first surface 210 of the product 200. The guide member 120 also includes at least one second contact portion 123. The second contact portion 123 is disposed between the first contact portion 121 and the guide portion 122. The second contact portion 123 has a second contact surface 1231, which is coplanar with the groove wall 1111 of the first groove 111. The side 230 of the product 200 can contact the groove wall 1111 of the first groove 111 and the second contact surface 1231.

[0042] For example, the dimension of the second contact surface 1231 in the first horizontal direction is equal to the dimension of the groove wall 1111 of the first groove 111 in the first horizontal direction, thereby improving the aesthetics of the boat 100.

[0043] For example, the surface of the second contact portion 123 on one side in the first horizontal direction is coplanar with the surface of the other areas of the substrate 110, excluding the first groove 111, on one side in the first horizontal direction, thereby improving the aesthetics of the leaf 100.

[0044] In the above embodiments, by making the first contact surface 1211 of the first contact portion 121 coplanar with the bottom 1112 of the first groove 111, the product 200 can fit against the first contact surface 1211 and the bottom 1112, thus placing it stably. By providing the second contact portion 123, the side 230 of the product 200 can contact the second contact surface 1231, which can further increase the contact area between the side 230 of the product 200 and the boat structure 300, improve the plasma high current carrying capacity, thereby reducing problems such as arcing and high frequency, and improving the coating effect of the product 200.

[0045] In some embodiments, such as Figure 1 and Figure 2 As shown, there are multiple guide members 120, which are arranged around the edge region 1113 of the first groove 111.

[0046] For example, the number of guide members 120 may be one, two, three, or four.

[0047] For example, there are four guide members 120, which are distributed sequentially at the top, bottom and both sides of the first groove 111 in the second horizontal direction (see below), so that the product 200 can be placed into the first groove 111 in the first horizontal direction.

[0048] For example, each side 230 of product 200 may contact one or more guides 120.

[0049] In the above embodiments, by setting multiple guide members 120, the guiding effect on the product 200 can be improved, so that the product 200 can be accurately embedded into the first groove 111.

[0050] Figure 8 The diagram shown is a schematic representation of a first cross-section provided in an exemplary embodiment of this application. Figure 9 The diagram shown is a schematic representation of a second first cross-section provided in an exemplary embodiment of this application. Figure 10 The diagram shown is a schematic diagram of a third first cross section provided in an exemplary embodiment of this application.

[0051] In some embodiments, such as Figures 8-10 As shown, the shape of the first cross section 1232 of the second contact portion 123 on the plane parallel to the first contact surface 1211 is a polygon, wherein the surface where one side of the polygon is located serves as the second contact surface 1231; or, the outline of the first cross section 1232 has at least one straight line segment and at least one arc segment, wherein the surface where one straight line segment is located serves as the second contact surface 1231.

[0052] For example, the shape of the first section 1232 is a triangle, rectangle, pentagon or hexagon, etc.

[0053] For example, the profile of the first section 1232 has one straight line segment and one arc segment, or the profile of the first section 1232 has two straight line segments and one arc segment, or the profile of the first section 1232 has two straight line segments and two arc segments, etc.

[0054] Because errors may occur in the production and installation of the various components of the boat leaf 100, the second contact surface 1231 may not be coplanar with the groove wall 1111 of the first groove 111. In the above embodiment, by making the shape of the first cross section 1232 of the second contact portion 123 on the plane parallel to the first contact surface 1211 a polygon, the surface where one side of the polygon is located can be the second contact surface 1231. When the second contact surface 1231 cannot be coplanar with the groove wall 1111 of the first groove 111, the surface where the other side of the polygon is located can be used as the new second contact surface 1231, and the new second contact surface 1231 can be coplanar with the groove wall 1111 of the first groove 111. Similarly, by making the contour of the first cross section 1232 have at least two straight segments, and the surface where one of the straight segments is located is the second contact surface 1231, and the second contact surface 1231 cannot be coplanar with the groove wall 1111 of the first groove 111, the surface where the other straight segment is located can be used as the new second contact surface 1231, and the new second contact surface 1231 can be coplanar with the groove wall 1111 of the first groove 111.

[0055] In some embodiments, such as Figure 1 and Figure 2 As shown, the bottom 1112 of the first groove 111 has a hollow area 11121, or the bottom 1112 of the first groove 111 has a second groove, and the bottom of the second groove has at least one vent hole penetrating the substrate 110 along the first horizontal direction.

[0056] For example, the cutout area 11121 is located in the center region of the groove bottom 1112 of the first groove 111.

[0057] For example, the second groove is located in the central region of the groove bottom 1112 of the first groove 111.

[0058] For example, there may be multiple vents, such as 3, 4 or 5.

[0059] In the above embodiments, by providing a hollow area 11121, gas can enter between the product 200 and the bottom 1112 of the first groove 111 when the transport device takes the product 200 from the first groove 111, making it easier to remove the product 200. Similarly, by providing a second groove and a vent hole, gas can enter the second groove through the vent hole when the transport device takes the product 200 from the first groove 111, making it easier to remove the product 200.

[0060] In some embodiments, such as Figure 3 As shown, the substrate 110 also has a receiving hole 113, at least a portion of which intersects with the edge region 1113 of the first groove 111, and the first contact portion 121 is located in the receiving hole 113.

[0061] For example, a portion of the receiving hole 113 is located in the edge region 1113 of the first groove 111, and another portion is located in other regions of the base 110 other than the first groove 111.

[0062] In the above embodiments, the guide member 120 can be securely fixed by providing the receiving hole 113.

[0063] In some embodiments, the substrate 110 has vertical surfaces 112 on both sides in the first horizontal direction, such as Figure 5 As shown, the first contact portion 121 has a first contact surface 1211 on both sides in the first horizontal direction. Each first contact surface 1211 is coplanar with the bottom 1112 of the adjacent first groove 111. There are two second contact portions 123, which are respectively disposed on both sides of the first contact portion 121 in the first horizontal direction. The second contact surface 1231 of each second contact portion 123 is coplanar with the groove wall 1111 of the adjacent first groove 111. There are two guide portions 122, which are disposed one-to-one with the two second contact portions 123. Each guide portion 122 is located on the side of the corresponding second contact portion 123 away from the first contact portion 121.

[0064] In the above embodiment, since each vertical surface 112 has a first groove 111 capable of accommodating the product 200, the product 200 can be placed on both sides of the base 110 in the first horizontal direction. The product 200 on each side can be guided by the guide portion 122 on that side. The first surface 210 of the product 200 on each side can contact the bottom 1112 of the first groove 111 on that side and the first contact surface 1211 of the first contact portion 121 on that side. The side edge 230 of the product 200 on each side can contact the wall 1111 of the first groove 111 on that side and the second contact surface 1231 of the second contact portion 123 on that side. By providing one first contact portion 121, two second contact portions 123, and two guide portions 122 to the guide member 120, the guide member 120 can simultaneously guide and transmit current to the products 200 on both sides.

[0065] In some embodiments, the depth of the first groove 111 in the first horizontal direction ranges from 0 mm to 3 mm.

[0066] For example, the depth of the first groove 111 in the first horizontal direction is 0.3 mm, 1 mm, 2.5 mm or 3 mm.

[0067] In the above embodiments, if the first groove 111 has a larger size in the first horizontal direction, the groove wall 1111 of the first groove 111 can have a larger contact area with the side 230 of the product 200, thereby improving the plasma high current carrying capacity. However, the size of the first groove 111 in the first horizontal direction cannot be too large. If the size of the first groove 111 in the first horizontal direction is too large, it will form a strong shielding effect on the edge area of ​​the product 200, causing the particles generated after the process gas ionization to not fully contact the edge area of ​​the product 200, resulting in a poor coating effect on the edge area of ​​the product 200. Making the depth of the first groove 111 in the first horizontal direction less than 3mm can ensure that the edge area of ​​the product 200 still has a good coating effect. In addition, the size of the substrate 110 in the first horizontal direction is usually 3mm to 4mm, and the size of the first groove 111 in the first horizontal direction cannot exceed the size of the substrate 110 in the first horizontal direction.

[0068] In some embodiments, such as Figure 1As shown, the first groove 111 has a first groove wall 11111 and a second groove wall 11112 disposed opposite to each other, and a third groove wall 11113 and a fourth groove wall 11114 connecting the first groove wall 11111 and the second groove wall 11112. The first groove wall 11111 and the second groove wall 11112 extend along a first direction, and the third groove wall 11113 and the fourth groove wall 11114 extend along a second direction. The first direction and the second direction intersect. The dimension of the first groove wall 11111 and the second groove wall 11112 in the first direction is a first dimension (as shown by L in the figure). As shown in the figure, the dimension of the side 230 of the product 200 near the first groove wall 11111 or the second groove wall 11112 in the first direction is the second dimension, and the difference between the first dimension and the second dimension is 0mm to 1mm. The dimensions of the third groove wall 11113 and the fourth groove wall 11114 in the second direction are the third dimensions (as shown by W in the figure). The dimension of the side 230 of the product 200 near the third groove wall 11113 or the fourth groove wall 11114 in the second direction is the fourth dimension, and the difference between the third dimension and the fourth dimension is 0mm to 1mm.

[0069] For example, the difference between the first dimension and the second dimension is 0.1mm, 0.3mm, 0.5mm, 0.8mm, 1mm, etc.

[0070] For example, the difference between the third and fourth dimensions is 0.2mm, 0.3mm, 0.45mm, 0.7mm, 0.9mm, etc.

[0071] In the above embodiments, by making the first dimension slightly larger than the second dimension and the third dimension slightly larger than the fourth dimension, the product 200 can easily enter the first groove 111. Furthermore, under the high-temperature process environment, the product 200 will thermally expand. By making a certain gap between the groove wall 1111 and the side 230 of the product 200, excessive stress between the side 230 of the product 200 and the groove wall 1111 can be avoided, which could lead to damage to the product 200. At the same time, after the product 200 thermally expands, the side 230 of the product 200 will be able to make good contact with the multiple groove walls 1111 of the first groove 111, so that the large current in the plasma can flow between the product 200 and the boat 100.

[0072] In some embodiments, such as Figure 1 As shown, the bottom groove wall 1111 of the first groove 111 (as shown) Figure 1The fourth groove wall 11114 in the first groove has an angle with the horizontal direction. The base 110 extends along the second horizontal direction (as shown in the figure, the Y direction). The second horizontal direction intersects (e.g., is perpendicular to) the first horizontal direction. There are at least three guide members 120. The first guide member 120 is disposed on one side of the first groove 111 in the second horizontal direction, the second guide member 120 is disposed on the other side of the first groove 111 in the second horizontal direction, and the third guide member 120 is disposed at the bottom of the first groove 111.

[0073] In the above embodiments, this structure can stably support the product 200, effectively limit the position of the product 200 in the second horizontal direction, and guide the product 200 so that the product 200 is accurately and stably placed in the first groove 111.

[0074] In practical applications, taking product 200 as an example of a half-cell BC battery, the thickness of the half-cell BC battery is 130μm, and its length and width are 182mm × 105mm. The bottom side 230 of the half-cell BC battery (at a width of 105mm) has a large contact area with the bottom groove wall 1111 of the first groove 111 and the second contact surface 1231 of the guide member 120, which is approximately 130μm × 105mm = 13.65mm. 2 Even with a relatively large groove depth of 0.45mm, the traditional locking point's contact area with the bottom side 230 of the half-cell BC battery is at most only 0.9mm. 2 Therefore, the boat 100 provided in this application embodiment can significantly improve the ability of PECVD plasma high current to pass between the boat 100 and the product 200, and reduce the probability of abnormal phenomena such as arcing, high frequency, and point burning.

[0075] Based on the same concept, such as Figure 7 As shown in the illustration, this application also provides a boat structure 300, which includes a plurality of boat flaps 100 as described in the above embodiments and a connecting component 310. The plurality of boat flaps 100 are arranged sequentially along a first horizontal direction, which intersects the vertical surface 112 of the base 110 of the boat flaps 100. The boat flaps 100 are configured to carry the product 200. The connecting component 310 is configured to connect the plurality of boat flaps 100.

[0076] For example, the connecting component 310 may include a connecting rod, and the base 110 has at least one connecting hole extending in a first horizontal direction, with the connecting rod passing through the connecting hole of the base 110 of the plurality of leaf blades 100.

[0077] For example, the connecting component 310 may also include a spacer sleeved on the connecting rod and disposed between adjacent leaf blades 100.

[0078] Since the boat structure 300 includes the boat leaf 100, all the technical features and effects of the boat structure 300 including the boat leaf 100 will not be described in detail here.

[0079] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0080] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0081] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0082] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0083] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A type of boat leaf, characterized in that, include: A substrate, vertically arranged, has at least one first groove on its vertical surface, the first groove being configured to accommodate a product, the product having a first surface and a second surface disposed opposite to each other, and at least one side connecting the first surface and the second surface, the side of the product being able to contact the groove wall of the first groove so that current can flow through the groove wall of the first groove through the product; At least one guide member having a first contact portion and at least one guide portion, the first contact portion being connected to the guide portion, the guide portion being located on one side of the first contact portion in a first horizontal direction and protruding from the vertical surface of the substrate in the first horizontal direction, the first horizontal direction intersecting the vertical surface of the substrate, and the angle between the sidewall of the guide portion near the first contact portion and the first contact portion being an acute angle.

2. The boat leaf according to claim 1, characterized in that, The first contact surface of the first contact portion is coplanar with the bottom of the first groove, and the first contact surface and the bottom of the first groove can jointly contact the first surface of the product. The guide further includes: At least one second contact portion is disposed between the first contact portion and the guide portion. The second contact portion has a second contact surface that is coplanar with the groove wall of the first groove. The side of the product is able to contact the groove wall of the first groove and the second contact surface.

3. The boat leaf according to claim 1 or 2, characterized in that, There are multiple guide members, and the multiple guide members are arranged around the edge area of ​​the first groove.

4. The boat leaf according to claim 2, characterized in that, The shape of the first cross section of the second contact portion on a plane parallel to the first contact surface is a polygon, wherein the surface on which one side of the polygon is located serves as the second contact surface; Alternatively, the profile of the first cross section has at least one straight segment and at least one curved segment, wherein the surface containing one of the straight segments serves as the second contact surface.

5. The boat leaf according to claim 1 or 2, characterized in that, The bottom of the first groove has a hollow area, or the bottom of the first groove has a second groove, and the bottom of the second groove has at least one vent hole that penetrates the substrate along the first horizontal direction.

6. The boat leaf according to claim 1 or 2, characterized in that, The substrate also has a receiving hole, at least a portion of which intersects with the edge region of the first groove, and the first contact portion is located in the receiving hole.

7. The boat leaf according to claim 2, characterized in that, The substrate has vertical surfaces on both sides of the first horizontal direction. The first contact portion has first contact surfaces on both sides of the first horizontal direction. Each first contact surface is coplanar with the bottom of the adjacent first groove. There are two second contact portions, which are respectively disposed on both sides of the first contact portion in the first horizontal direction. The second contact surface of each second contact portion is coplanar with the wall of the adjacent first groove. There are two guide portions, which are disposed one-to-one with the two second contact portions. Each guide portion is located on the side of the corresponding second contact portion away from the first contact portion.

8. The boat leaf according to claim 1 or 2, characterized in that, The depth of the first groove in the first horizontal direction ranges from 0 mm to 3 mm; And / or, the first groove has a first groove wall and a second groove wall disposed opposite to each other, and a third groove wall and a fourth groove wall connecting the first groove wall and the second groove wall, the first groove wall and the second groove wall extending along a first direction, the third groove wall and the fourth groove wall extending along a second direction, the first direction intersecting the second direction, wherein, the dimension of the first groove wall and the second groove wall in the first direction is a first dimension, the dimension of the side of the product near the first groove wall or the second groove wall in the first direction is a second dimension, the difference between the first dimension and the second dimension is in the range of 0mm to 1mm, the dimension of the third groove wall and the fourth groove wall in the second direction is a third dimension, the dimension of the side of the product near the third groove wall or the fourth groove wall in the second direction is a fourth dimension, the difference between the third dimension and the fourth dimension is in the range of 0mm to 1mm.

9. The boat leaf according to claim 1 or 2, characterized in that, The bottom wall of the first groove has an angle with the horizontal direction. The base extends along the second horizontal direction, which intersects with the first horizontal direction. There are at least three guide members. The first guide member is located on one side of the first groove in the second horizontal direction, the second guide member is located on the other side of the first groove in the second horizontal direction, and the third guide member is located at the bottom of the first groove.

10. A boat structure, characterized in that, include: The plurality of boats as described in any one of claims 1 to 9, wherein the plurality of boats are arranged sequentially along a first horizontal direction, the first horizontal direction intersecting the vertical surface of the substrate of the boat, and the boats are configured to carry a product; A connection component is configured to connect multiple of the aforementioned pages.

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