A crystal cooling disc for crystal bar drawing
Patent Information
- Application Number
- CN202521795056.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-22
- Publication Date
- 2026-09-04
- Estimated Expiration
- 2035-08-22
AI Technical Summary
1、拉制时，圆形坩埚内的熔液存在温差，等温线由内向外呈圆环状分布，圆形拉制孔跨越的液面温度不均，但圆形拉制孔对拉制晶体冷却效果却相等，在晶体拉制时，因液面温差引发结晶不均等，进而导致拉制晶体侧弯及内应力增加等
本实用新型通过将晶棒冷却盘主体上的圆形晶棒提拉孔替换为扇形孔或其它异形孔，可以更好的实现调节晶棒提拉孔对拉制晶棒的冷却效果、合理分配炉腔内流氩气流的目的等，本实用新型具有结构简便，使用效果好等特点，适合大范围的推广和应用。
Smart Images
Figure CN224716709U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of artificial crystal preparation technology, and in particular to a crystal rod cooling plate for crystal rod pulling. Background Technology
[0002] In the entire production process of polycrystalline / monocrystalline silicon, the amount of silicon cores used is very large. To reduce the production cost of silicon cores, some companies have developed a technology that allows multiple crystal ingots to be pulled simultaneously. Through practical research, it has been found that the crystal ingot cooling plate is one of the key components when pulling multiple crystal ingots simultaneously. The shape of the crystal ingot lifting hole on the crystal ingot cooling plate is usually circular. Practical application has revealed that while circular crystal ingot lifting holes can achieve normal crystal ingot pulling, they also have the following shortcomings: 1. During the pulling process, there is a temperature difference in the molten liquid inside the circular crucible. The isotherms are distributed in a ring shape from the inside to the outside. The temperature of the liquid surface crossed by the circular pulling hole is uneven, but the cooling effect of the circular pulling hole on the pulled crystal is equal. During the crystal pulling process, the uneven crystallization caused by the temperature difference of the liquid surface leads to the side bending of the pulled crystal and an increase in internal stress.
[0003] 2. Circular drawing holes do not easily distribute the argon flow evenly within the furnace cavity, especially when drawing multiple crystal rods in multiple rings. This causes more argon to flow through the outer circular drawing holes, resulting in differences in the silicon core diameter in areas with weaker airflow.
[0004] 3. The cooling medium in the cooling pan has a high flow velocity on the front side of the round hole and a low flow velocity on the back side, resulting in uneven temperature distribution, which is not conducive to drawing, etc.
[0005] Therefore, how to solve the above-mentioned technical problems has become a long-term technical demand of those skilled in the art. Summary of the Invention
[0006] In order to achieve the aforementioned objective, this invention discloses a crystal rod cooling plate for crystal rod pulling. This invention can better achieve the purpose of adjusting the cooling effect of the crystal rod pulling hole on the pulled crystal rod and rationally distributing the argon flow in the furnace cavity.
[0007] To achieve the above-mentioned objectives, this utility model adopts the following technical solution: A crystal ingot cooling plate for crystal ingot pulling includes a cooling medium inlet pipe, a cooling medium outlet pipe, fan-shaped crystal ingot lifting holes, and a cooling plate body. A cavity is provided on the cooling plate body, forming a cooling medium channel for cooling the crystal ingot. At least one ring of fan-shaped crystal ingot lifting holes and a cooling medium inlet and outlet respectively communicating with the cavity are provided on the cooling plate body. The cooling medium inlet is connected to the lower end of the cooling medium inlet pipe, and the cooling medium outlet is connected to the lower end of the cooling medium outlet pipe. Each ring of fan-shaped crystal ingot lifting holes contains multiple fan-shaped crystal ingot lifting holes, which are spaced apart.
[0008] The crystal rod cooling plate used for crystal rod pulling has an outer edge surface shape that is either circular or polygonal.
[0009] The crystal rod cooling plate used for crystal rod pulling has rounded corners at the sharp corners of the fan-shaped crystal rod lifting holes.
[0010] The crystal rod cooling plate for crystal rod pulling, wherein the alternative structure of the fan-shaped crystal rod lifting hole is any one or any combination of two or more of the following: waist-shaped crystal rod lifting hole, triangular crystal rod lifting hole, octagonal crystal rod lifting hole, plum blossom-shaped crystal rod lifting hole, pentagonal star-shaped crystal rod lifting hole, racket-shaped crystal rod lifting hole, teardrop-shaped crystal rod lifting hole, quadrilateral crystal rod lifting hole, fan-shaped crystal rod lifting hole with rounded edges, square crystal rod lifting hole, conical crystal rod lifting hole with a large opening at the top and a small opening at the bottom, conical crystal rod lifting hole with a large opening at the bottom and a small opening at the top, trapezoidal crystal rod lifting hole, or stepped crystal rod lifting hole.
[0011] The crystal rod cooling plate for crystal rod pulling has at least one ring of islands on its main body, and each ring of islands is provided with a fan-shaped crystal rod pulling hole.
[0012] The crystal rod cooling plate for crystal rod pulling has its upper ends of the cooling medium inlet pipe and cooling medium outlet pipe connected to the upper outlet of the cooling medium below the lower flange and the upper inlet of the cooling medium below the lower flange of the crystal rod cooling device, respectively.
[0013] The crystal rod cooling plate for crystal rod pulling is provided with at least one cooling medium inlet pipe and one cooling medium outlet pipe.
[0014] By adopting the above technical solution, this utility model has the following beneficial effects: This invention replaces the circular crystal rod pulling hole on the main body of the crystal rod cooling plate with a fan-shaped hole or other irregularly shaped hole, which can better achieve the purpose of adjusting the cooling effect of the crystal rod pulling hole on the pulled crystal rod and rationally distributing the argon flow in the furnace cavity. This invention has the characteristics of simple structure and good performance, and is suitable for wide-ranging promotion and application. Attached Figure Description
[0015] Figure 1 This is a three-dimensional structural diagram of the first embodiment of the present utility model; Figure 2 yes Figure 1 A top-view structural diagram; Figure 3 This is a three-dimensional structural diagram of the second embodiment of the present invention; Figure 4 This is a three-dimensional structural diagram of the third embodiment of the present utility model; Figure 5 This is a three-dimensional structural diagram of the fourth embodiment of the present invention; Figure 6 This is a three-dimensional structural diagram of the fifth embodiment of the present utility model; Figure 7 This is a three-dimensional structural diagram of the sixth embodiment of the present utility model; Figure 8 This is a three-dimensional structural schematic diagram of the seventh embodiment of the present utility model; Figure 9 This is a three-dimensional structural diagram of the eighth embodiment of the present invention; Figure 10 This is a three-dimensional structural diagram of the ninth embodiment of this utility model; Figure 11 This is a three-dimensional structural diagram of the tenth embodiment of the present utility model; Figure 12 This is a three-dimensional structural diagram of the eleventh embodiment of the present utility model; Figure 13 This is a three-dimensional structural schematic diagram of the twelfth embodiment of the present utility model; Figure 14 This is a three-dimensional structural schematic diagram of the thirteenth embodiment of the present utility model; Figure 15 This is a three-dimensional structural schematic diagram of the fourteenth embodiment of the present utility model; Figure 16 yes Figure 15 A partial sectional view of the structure; Figure 17 This is a three-dimensional structural schematic diagram of the fifteenth embodiment of this utility model; Figure 18 yes Figure 17 A partial sectional view of the structure; Figure 19 This is a three-dimensional structural schematic diagram of the sixteenth embodiment of the present utility model; Figure 20 This is a three-dimensional structural schematic diagram of the seventeenth embodiment of the present utility model; Figure 21 yes Figure 20 A partial sectional view of the structure; Figure 22 This is a three-dimensional structural schematic diagram of the eighteenth embodiment of the present utility model; In the diagram: 1. Cooling medium inlet pipe; 2. Cooling medium outlet pipe; 3. Fan-shaped crystal rod pull-out hole; 4. Cooling plate body; 5. Rounded corner; 6. Waist-shaped crystal rod pull-out hole; 7. Triangular crystal rod pull-out hole; 8. Octagonal crystal rod pull-out hole; 9. Plum blossom-shaped crystal rod pull-out hole; 10. Pentagonal star-shaped crystal rod pull-out hole; 11. Paddle-shaped crystal rod pull-out hole; 12. Teardrop-shaped crystal rod pull-out hole; 13. Quadrilateral crystal rod pull-out hole; 14. Fan-shaped crystal rod pull-out hole with rounded edge; 15. Square crystal rod pull-out hole; 16. Conical crystal rod pull-out hole with large opening at the top and small opening at the bottom; 17. Conical crystal rod pull-out hole with large opening at the bottom and small opening at the top; 18. Trapezoidal crystal rod pull-out hole; 19. Stepped crystal rod pull-out hole; 20. Island. Detailed Implementation
[0016] The present application is described in detail below with reference to embodiments, but this does not imply any adverse limitations on the present application. The present application has been described in detail herein, and specific embodiments thereof have been disclosed. It will be apparent to those skilled in the art that various changes and modifications can be made to the specific implementations of the present application without departing from the spirit and scope thereof.
[0017] In the description of this utility model, it should be understood that the terms "center," "side," "length," "width," "height," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and "side," etc., indicate the orientation or positional relationship based on the appendix. Figure 1 The orientations or positional relationships shown are for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
[0018] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0019] Combined with appendix Figures 1-22The present invention discloses a crystal ingot cooling plate for crystal ingot pulling, comprising a cooling medium inlet pipe 1, a cooling medium outlet pipe 2, a fan-shaped crystal ingot lifting hole 3, and a cooling plate body 4. A cavity is provided on the cooling plate body 4, forming a cooling medium channel for cooling the crystal ingot. Furthermore, as... Figure 1 , 2 As shown, at least one ring of fan-shaped crystal rod lifting holes 3 is provided on the cooling plate body 4 (see appendix for specific shape). Figure 1 , 2 The cavity includes a cooling medium inlet and a cooling medium outlet, which are respectively connected to the cavity. The cooling medium inlet is connected to the lower end of the cooling medium inlet pipe 1, and the cooling medium outlet is connected to the lower end of the cooling medium outlet pipe 2. Each fan-shaped crystal rod lifting hole 3 contains multiple fan-shaped crystal rod lifting holes 3, and the multiple fan-shaped crystal rod lifting holes 3 are spaced apart.
[0020] In implementation, this invention changes the shape of the crystal rod pulling hole from a circle to a fan shape. Compared to a circular hole, this effectively utilizes the disk area, which is beneficial for pulling crystals with different diameters in the inner and outer rings (or different positions within the same ring). It also allows for adjustment of the crystal shape and surface quality in the inner and outer rings (or different positions within the same ring). By adjusting the cooling area, a temperature difference is created or controlled to improve the quality and cross-sectional shape of the crystal rod pulling. Furthermore, by adjusting the size and shape of the hole, the airflow direction within the furnace is altered, improving or avoiding defects during the crystal pulling process.
[0021] Furthermore, the upper ends of the cooling medium inlet pipe 1 and the cooling medium outlet pipe 2 are respectively connected to the upper outlet of the cooling medium below the lower flange of the crystal rod cooling device and the upper inlet of the cooling medium below the lower flange of the crystal rod cooling device.
[0022] Furthermore, the cooling medium inlet pipe 1 and the cooling medium outlet pipe 2 are configured to be at least one.
[0023] It should be noted that the focus of this utility model is the improvement of the shape of the crystal rod pulling hole. The internal structure of the cooling plate body 4 and the connection relationship between the cooling plate body 4 and other pulling components are not the focus of this utility model, and they are all prior art, so they will not be described in detail here.
[0024] When implementing, such as Figure 1 , 4As shown in Figure 22, the outer edge shape of the cooling plate body 4 can be either circular or polygonal. In practice, the cooling medium of the circular outer edge of the cooling plate body 4 flows spirally along the coil, resulting in a long travel distance and low flow velocity. Due to the absorption of heat and temperature rise during the flow, the local temperature of the cooling plate gradually increases along the flow direction, and the temperature difference in each direction affects the drawing stability. However, by setting the outer edge shape of the cooling plate body 4 to a polygon, the uniformity of the internal cooling water flow can be improved (practical application has shown that this can improve the original plate surface temperature difference from ±4℃ to ±1.5℃). Specifically, by changing the shape of the cooling plate (from a traditional circle to a polygon) and setting radial cooling channels from the center to the periphery (existing technology), the cooling medium enters and exits through multiple paths (existing technology), increasing the cooling medium flow rate, shortening the cooling medium travel distance, effectively reducing the plate surface temperature difference, and improving the drawing stability.
[0025] Furthermore, such as Figure 3 As shown, the sharp corners of the fan-shaped crystal rod lifting hole 3 are respectively provided with arc angles 5.
[0026] Furthermore, such as Figures 5-21 As shown, the replacement structure for the fan-shaped crystal rod lifting hole 3 is a waist-shaped crystal rod lifting hole 6 (e.g., Figure 5 (as shown) or triangular crystal rod pull-out hole 7 (as shown) Figure 6 (as shown) or octagonal crystal rod pull-out hole 8 (as shown) Figure 7 (as shown) or plum blossom-shaped crystal rod pull-out hole 9 (as shown) Figure 8 (as shown) or pentagram-shaped crystal rod pull-out hole 10 (as shown) Figure 9 (as shown) or racket-shaped crystal rod lifting hole 11 (as shown) Figure 10 (as shown) or teardrop-shaped crystal rod pull-out hole 12 (as shown) Figure 11 (as shown) or quadrilateral crystal rod pulling hole 13 (as shown) Figure 12 As shown, two corresponding sides of the quadrilateral can be set as straight segments or curved segments) or fan-shaped crystal rod pulling holes 14 with rounded edges (such as...). Figure 13 As shown, i.e., a fan-shaped inner circle with a small outer circle) or a square crystal rod with a lifting hole 15 (such as...). Figure 14 (as shown) or a tapered crystal rod with a large opening at the top and a small opening at the bottom, with a pull-out hole 16 (as shown). Figure 15 , 16 (as shown) or a tapered crystal rod with a large opening at the bottom and a small opening at the top, with a lifting hole 17 (as shown). Figure 17 , 18 (as shown) or trapezoidal crystal rod pull-out hole 18 (as shown) Figure 19 (as shown) or stepped crystal rod pull-out hole 19 (as shown) Figure 20 , 21As shown, in practice, the stepped hole configuration can also be replaced by any one or any combination of two or more of the following: a structure with a large opening at the top and a small opening at the bottom.
[0027] In practice, this utility model changes the shape of the crystal rod pulling holes on the main body 4 of the cooling plate, that is, from a circle to a fan shape, waist shape, triangle, polygon, etc., so that the number of pulling turns can be changed at will, and the size and spacing of each pulling hole can be adjusted individually, which has the following advantages: 1) Adjust the cooling effect of the ingot pulling hole on the pulled ingot. In areas where the molten surface temperature is low, increase / decrease the cooling amount of the ingot pulling hole. In areas where the molten surface temperature is high, decrease or increase the cooling amount closer to the ingot pulling hole to eliminate the temperature difference at the liquid surface and make the crystallization more uniform during pulling.
[0028] 2) Rationally distribute the argon flow within the furnace cavity. By changing the shape of the crystal rod pulling holes, the argon flow area can be adjusted, reducing the diameter where the argon partial pressure is high and increasing the diameter where the argon partial pressure is low. Using Boyle's Law (P1V1=P2V2), the argon flow rate through each crystal rod pulling hole on the cooling plate body can be effectively and evenly distributed within the furnace cavity, improving or avoiding defects in the crystal pulling process.
[0029] 3) By changing the shape of the crystal rod pulling hole and setting a continuous curved surface on the cooling path of the cooling medium, the cooling path gradually narrows / expands, delays the transition, and keeps the cooling medium in laminar flow when it flows, so as to maximize the consistency of the cooling effect on each crystal rod pulling hole and stabilize the pulling of the crystal rod.
[0030] Furthermore, such as Figure 22 As shown, the cooling plate body 4 is provided with at least one ring of islands 20, and each ring of islands 20 is provided with a fan-shaped crystal rod lifting hole 3.
[0031] During implementation, the cooling medium introduced into the cooling medium channel is cooling water, cooling oil, or cooling gas, such as liquid nitrogen.
[0032] Furthermore, the functions of the cooling medium inlet pipe 1 and the cooling medium outlet pipe 2 can be used interchangeably. For example, the cooling medium inlet pipe 1 can be used as an inlet pipe or as an outlet pipe.
[0033] This application is mainly applied to silicon core furnaces that use crushed silicon material to pull silicon cores.
[0034] The parts of this utility model not described in detail are all prior art.
[0035] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. For those skilled in the art, the above embodiments of the present utility model can be combined with each other, and the present utility model can have various modifications and variations. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A crystal rod cooling plate for crystal rod pulling, comprising a cooling medium inlet pipe (1), a cooling medium outlet pipe (2), a fan-shaped crystal rod lifting hole (3), and a cooling plate body (4), characterized in that: A cavity is provided on the cooling plate body (4) to form a cooling medium channel for cooling the crystal rod. At least one ring of fan-shaped crystal rod lifting holes (3) and a cooling medium inlet and a cooling medium outlet communicating with the cavity are provided on the cooling plate body (4). The cooling medium inlet is connected to the lower end of the cooling medium inlet pipe (1), and the cooling medium outlet is connected to the lower end of the cooling medium outlet pipe (2). Each ring of fan-shaped crystal rod lifting holes (3) contains multiple fan-shaped crystal rod lifting holes (3), and the multiple fan-shaped crystal rod lifting holes (3) are spaced apart.
2. The crystal rod cooling plate for crystal rod pulling as described in claim 1, characterized in that: The outer edge of the cooling plate body (4) can be either circular or polygonal.
3. The crystal rod cooling plate for crystal rod pulling as described in claim 1, characterized in that: The fan-shaped crystal rod lifting hole (3) is provided with rounded corners (5) at its sharp corners.
4. The crystal rod cooling plate for crystal rod pulling as described in claim 1, characterized in that: The alternative structure of the fan-shaped crystal rod lifting hole (3) is any one or any combination of two or more of the following: waist-shaped crystal rod lifting hole (6), triangular crystal rod lifting hole (7), octagonal crystal rod lifting hole (8), plum blossom-shaped crystal rod lifting hole (9), pentagonal star-shaped crystal rod lifting hole (10), racket-shaped crystal rod lifting hole (11), teardrop-shaped crystal rod lifting hole (12), quadrilateral crystal rod lifting hole (13), fan-shaped crystal rod lifting hole with rounded edge (14), square crystal rod lifting hole (15), conical crystal rod lifting hole (16) with a large opening at the top and a small opening at the bottom, conical crystal rod lifting hole (17) with a large opening at the bottom and a small opening at the top, trapezoidal crystal rod lifting hole (18), or stepped crystal rod lifting hole (19).
5. The crystal rod cooling plate for crystal rod pulling as described in claim 1, characterized in that: The cooling plate body (4) is provided with at least one ring of islands (20), and each ring of islands (20) is provided with a fan-shaped crystal rod lifting hole (3).
6. The crystal rod cooling plate for crystal rod pulling as described in claim 1, characterized in that: The upper ends of the cooling medium inlet pipe (1) and the cooling medium outlet pipe (2) are respectively connected to the upper outlet of the cooling medium below the lower flange of the crystal rod cooling device and the upper inlet of the cooling medium below the lower flange of the crystal rod cooling device.
7. The crystal rod cooling plate for crystal rod pulling as described in claim 1, characterized in that: The cooling medium inlet pipe (1) and cooling medium outlet pipe (2) are configured to be at least one.