Crystal bar positioning device and single crystal furnace

Abstract

The application provides a crystal bar positioning device and a single crystal furnace, and relates to the field of single crystal furnaces. The crystal bar positioning device comprises a fixed shell, a clamping assembly and a liquid cooling pipeline. The fixed shell is arranged in connection with the bottom of a secondary chamber. The fixed shell is located between a primary chamber and the secondary chamber. The fixed shell is provided with a through hole. The through hole is in communication with the primary chamber and the secondary chamber. The fixed shell is provided with a plurality of clamping assemblies. The clamping assemblies are arranged in a telescopic manner relative to the fixed shell and are used for clamping a crystal bar. The liquid cooling pipeline is arranged on the clamping assembly. The crystal bar positioning device can realize a cooling effect through the liquid cooling pipeline, avoids high-temperature damage to the crystal bar positioning device and prolongs the service life of the crystal bar positioning device.

Description

Technical Field

[0001] This application relates to the field of single crystal furnace technology, and in particular to a crystal rod positioning device and a single crystal furnace. Background Technology

[0002] A single-crystal furnace consists of a main chamber and a secondary chamber. The main chamber is used for forming single-crystal silicon rods, while the secondary chamber is used for transferring the single-crystal silicon rods. During the production process, the silicon rods need to be isolated as they enter the secondary chamber from the main chamber. Operations such as removing the silicon rods are achieved by raising and rotating the secondary chamber. During the raising and rotating process of the secondary chamber, the silicon rods may shake, and in severe cases, they may even fall off and damage the single-crystal furnace.

[0003] Existing single crystal furnaces are equipped with stabilizing devices to hold the crystal rod steady during the rise and rotation of the sub-chamber and prevent it from wobbling. However, when the stabilizing device is in direct contact with the crystal rod, excessively high temperatures can be transferred to the stabilizing device, which may damage it and reduce its service life. Utility Model Content

[0004] The purpose of this application is to solve the aforementioned technical problems by providing a crystal rod positioning device and a single crystal furnace, thereby preventing high-temperature damage to the crystal rod positioning device and extending its service life. To achieve the above objective, the technical solution of this application is as follows: In a first aspect, this application provides a crystal rod positioning device, including a fixed housing, clamping components, and liquid cooling pipelines; the fixed housing is configured to be connected to the bottom of the sub-chamber, the fixed housing is located between the main chamber and the sub-chamber, the fixed housing is provided with a through hole, the through hole connects the main chamber and the sub-chamber, a plurality of clamping components are provided on the fixed housing, the clamping components are telescopically configured relative to the fixed housing and are used to clamp the crystal rod, and the liquid cooling pipelines are provided on the clamping components to cool the clamping components.

[0005] In one possible implementation, the clamping assembly includes a connected driving part and a clamping part. The clamping part is located in a through hole to clamp the crystal rod, and the driving part passes through the fixed housing and is arranged to move radially along the fixed housing to drive the clamping part to move radially.

[0006] In one possible implementation, the liquid cooling pipeline includes a first internal circulation pipe and a second internal circulation pipe, which are separated inside the drive unit and connected inside the clamping unit.

[0007] In one possible implementation, the liquid cooling pipeline further includes a first external circulation pipe and a second external circulation pipe, both of which are connected to the outer wall of the drive unit. The first external circulation pipe is connected to the first internal circulation pipe, and the second external circulation pipe is connected to the second internal circulation pipe.

[0008] In one possible implementation, the drive unit has a first inner cavity, in which a first partition plate is arranged along its axial direction, and the first inner cavity is divided into a first liquid cooling cavity and a second liquid cooling cavity by the first partition plate.

[0009] In one possible implementation, the clamping part has a second inner cavity, the first liquid cooling cavity is connected to the second inner cavity to form a first inner circulation pipe, and the second liquid cooling cavity is connected to the second inner cavity to form a second inner circulation pipe.

[0010] In one possible implementation, the drive unit is provided with a baffle plate for closing the end of the first inner cavity away from the second inner cavity. The second inner cavity is provided with a second partition plate. One end of the first partition plate extends into the second inner cavity and is connected to the middle of the second partition plate. The other end of the first partition plate is connected to the baffle plate.

[0011] In one possible implementation, the two ends of the second partition plate are spaced apart from the inner wall of the second inner cavity. A third liquid cooling cavity is formed between the second partition plate and the side of the clamping part away from the driving part. A fourth liquid cooling cavity is formed between the second partition plate and the side of the clamping part facing the driving part. The fourth liquid cooling cavity is divided into a first sub-cavity and a second sub-cavity by the first partition plate. The first liquid cooling cavity and the first sub-cavity are connected by a gap between one end of the second partition plate and the inner wall of the second inner cavity. The second liquid cooling cavity and the second sub-cavity are connected by a gap between the other end of the second partition plate and the inner wall of the second inner cavity.

[0012] In one possible implementation, the two ends of the clamping part on the side away from the driving part abut against the outer wall of the crystal rod, and a gap is formed between the middle part of the clamping part and the outer wall of the crystal rod.

[0013] Secondly, this application provides a single crystal furnace, including a main chamber, a secondary chamber, and the aforementioned crystal rod positioning device disposed at the bottom of the secondary chamber.

[0014] Compared with existing technologies, the advantages of the crystal rod positioning device and single crystal furnace of this application are mainly reflected in: The clamping assembly is equipped with liquid cooling pipes. When the clamping assembly clamps and positions the crystal rod, the coolant in the liquid cooling pipes can effectively absorb the heat transferred from the crystal rod to the clamping assembly, preventing overheating damage, effectively cooling the clamping assembly, thereby protecting the crystal rod positioning device and extending its service life. Attached Figure Description

[0015] Figure 1 An installation schematic diagram of a crystal rod positioning device provided for an embodiment of this application; Figure 2 for Figure 1 The diagram shows a schematic representation of the crystal rod positioning device and furnace cover in one embodiment. Figure 3 for Figure 2The crystal rod positioning device and furnace cover shown are schematic front views of one embodiment. Figure 4 for Figure 2 The crystal rod positioning device and furnace cover shown are illustrated in a top view of one embodiment. Figure 5 for Figure 3 The crystal rod positioning device and furnace cover shown are schematic cross-sectional views (AA) of one embodiment. Figure 6 for Figure 5 The diagram shown is an enlarged structural schematic of one embodiment of the liquid cooling pipeline.

[0016] Figure label: Fixed housing 1, through hole 11, bracket 12, first sealing groove 13, screw hole 14, mounting hole 15; Clamping assembly 2, driving part 21, clamping part 22, driving body 23; Liquid cooling pipe 3, first internal circulation pipe 31, second internal circulation pipe 32, first external circulation pipe 33, second external circulation pipe 34; First inner cavity 41, first partition plate 42, first liquid cooling cavity 43, second liquid cooling cavity 44, baffle plate 45; Second inner cavity 51, second partition plate 52, third liquid cooling cavity 53, fourth liquid cooling cavity 54, first sub-cavity 55, second sub-cavity 56; Sub-compartment 6, First installation component 61; Furnace cover 7, valve body 71; Crystal rod 8. Detailed Implementation

[0017] To make the technical solutions and advantages of the embodiments of this application clearer, the exemplary embodiments of this application will be described in further detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not an exhaustive list of all embodiments. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other.

[0018] Example 1 This embodiment provides a crystal rod positioning device applied to a single crystal furnace. During the lifting and rotation of the auxiliary chamber, the crystal rod positioning device temporarily fixes the crystal rod 8 to prevent it from shaking and colliding with the inner wall of the auxiliary chamber, thus preventing the crystal rod 8 from falling. Because the production process of the crystal rod 8 involves high temperatures, the crystal rod positioning device directly contacts the crystal rod 8, and the heat from the crystal rod 8 is conducted to the crystal rod positioning device, reducing its service life.

[0019] like Figures 1-5As shown, the crystal rod positioning device includes a fixed housing 1, clamping components 2, and liquid cooling pipes 3. The fixed housing 1 is connected to the bottom of the auxiliary chamber 6 (not fully shown in the figure). The fixed housing 1 is located between the main chamber (not fully shown in the figure) and the auxiliary chamber 6. The fixed housing 1 is provided with a through hole 11, through which the main chamber and the auxiliary chamber are connected. Multiple clamping components 2 are provided on the fixed housing 1. The clamping components 2 are telescopically configurable relative to the fixed housing 1 and are used to clamp the crystal rod 8. The liquid cooling pipes 3 are provided on the clamping components 2 to cool the clamping components 2.

[0020] For example, the liquid cooling pipe 3 can be entirely located inside the clamping assembly 2, entirely located outside the clamping assembly 2, or partially located inside and partially located outside the clamping assembly 2; the liquid cooling pipe 3 is used to cool the clamping assembly 2; therefore, whether the liquid cooling pipe 3 is located inside or outside the clamping assembly 2 does not affect the cooling function of the liquid cooling pipe 3. This embodiment is illustrated by taking the example of the liquid cooling pipe 3 being partially located inside and partially located outside the clamping assembly 2.

[0021] In one embodiment, the clamping assembly 2 includes a driving part 21 and a clamping part 22. The clamping part 22 is located within the through hole 11, and the driving part 21 penetrates the fixed housing 1 and is arranged to move radially along the fixed housing 1. One end of the driving part 21 is connected to the clamping part 22, and the other end of the driving part 21 extends out of the fixed housing 1 and is connected to the driving body 23 (described in detail below). Two clamping assemblies 2 can be provided on the fixed housing 1. Specifically, the driving parts 21 located at both radial ends on the fixed housing 1 move relative to each other and move closer or further away. Three or more clamping assemblies 2 can also be provided on the fixed housing 1, located at equally spaced positions on the circumference. The three or more clamping assemblies 2 move centripetally closer or centrifugally further away.

[0022] For example, such as Figure 2 , Figure 4 As shown, the fixed housing 1 has a generally hollow cylindrical structure and a through hole 11. The through hole 11 connects the main chamber and the auxiliary chamber 6 and serves as a channel for the crystal rod 8 to transfer from the main chamber to the auxiliary chamber 6. The diameter of the through hole 11 is larger than the diameter of the crystal rod 8, allowing the crystal rod 8 to transfer and pass smoothly. After the auxiliary chamber is raised and lowered by the existing auxiliary chamber lifting drive mechanism, there is a certain distance between the valve body of the auxiliary chamber and the main chamber. The height of the fixed housing 1 is less than this certain distance, so that after the auxiliary chamber is raised by the existing auxiliary chamber lifting mechanism, the fixed housing 1 can detach from the valve body and rotate freely. Specifically, the height of the fixed housing 1 provided in the embodiment of this application is less than or equal to 0.5m, which can effectively adapt to the existing lifting stroke of the auxiliary chamber and the main chamber.

[0023] For example, such as Figure 1 , Figure 2As shown, a furnace cover 7 is provided on the top of the main chamber, and a secondary chamber 6 is located above the furnace cover 7. The bottom of the secondary chamber 6 is detachably connected to the fixed housing 1. Specifically, the lower edge of the secondary chamber 6 has a lower flange, and the lower flange is connected to the fixed housing 1 by a plurality of first mounting parts 61. The first mounting parts 61 can be bolts. The top of the fixed housing 1 is provided with a plurality of screw holes 14, and the first mounting parts 61 correspond one-to-one with the screw holes 14, thereby achieving a stable connection between the secondary chamber 6 and the fixed housing 1.

[0024] For example, the furnace cover 7 is connected to the main chamber; the auxiliary chamber 6 has a generally hollow cylindrical structure; a valve body 71 is provided on the top of the furnace cover 7. The valve body 71 can be a rotary valve or a flap valve. By controlling the opening and closing of the valve body 71, the main chamber and the auxiliary chamber 6 can be connected or closed; the diameter of the valve body 71 is adapted to the diameter of the fixed housing 1, and the bottom of the fixed housing 1 moves against the top of the valve body 71.

[0025] For example, such as Figure 2 As shown, a first sealing groove 13 is provided circumferentially on the top of the fixed housing 1, and the first sealing groove 13 is located radially inside the screw hole 14 along the fixed housing 1. A first sealing ring (not shown in the figure) is provided in the first sealing groove 13. When the auxiliary chamber 6 is connected to the fixed housing 1, the first sealing ring achieves a seal, ensuring that the functionality of the auxiliary chamber 6 is not affected after the fixed housing 1 is installed at the bottom of the auxiliary chamber 6, and the auxiliary chamber 6 can achieve sealed isolation from the main chamber. Correspondingly, a second sealing groove (not shown in the figure) is provided circumferentially on the bottom of the fixed housing 1, and a second sealing ring (not shown in the figure) is provided in the second sealing groove. When the fixed housing 1 abuts against the valve body 71, the second sealing ring achieves a press seal, ensuring the sealing performance when the auxiliary chamber 6 is connected to the main chamber.

[0026] For example, such as Figure 2 , Figure 5As shown, the other end of the drive unit 21 is connected to the drive body 23, which is used to drive the drive unit 21 to achieve telescopic movement. The drive body 23 can be electrically driven or pneumatically driven; for example, the drive body 23 can be a cylinder, and the corresponding drive unit 21 can be a cylinder push rod. A solenoid valve (not shown in the figure) is provided on the drive body 23 to control the movement of the drive unit 21. The travel stroke of the drive unit 21 is 10mm-50mm, which can be applied to the diameter of the through hole 11 in the fixed housing 1, or to other similar single crystal furnaces. The solenoid valve and valve body 71 are respectively connected to the control system (not shown in the figure). When the crystal rod 8 moves to the secondary chamber 6, the valve body 71 closes the main chamber, separating the main chamber from the secondary chamber 6. The control system receives the closing signal from the valve body 71 and transmits a start signal to the solenoid valve. The solenoid valve controls the drive unit 21 to perform an action according to the start signal, thereby moving the clamping part 22 relative to it to move closer to and clamp the crystal rod 8. Similarly, when the secondary chamber 6 is in the open limit position, the control system receives the open limit signal and transmits a closing signal to the solenoid valve. The solenoid valve controls the drive unit 21 to reset according to the closing signal, thereby moving away from the clamping part 22 relative to it and releasing the crystal rod 8.

[0027] For example, such as Figure 5 As shown, the clamping assembly 2 is equipped with a liquid cooling pipe 3 inside, which is connected to a liquid cooling system (not shown in the figure). The liquid cooling system can supply coolant to the liquid cooling pipe 3. The coolant can be water, and the temperature of the coolant is not higher than 55°C to achieve temperature control. The liquid cooling pipe 3 absorbs heat through the coolant. Specifically, both the drive unit 21 and the clamping unit 22 are equipped with liquid cooling pipes 3. When the clamping unit 22 contacts the crystal rod 8, the heat of the crystal rod 8 is circulated to the liquid cooling system through the liquid cooling pipe 3 using the coolant. This can effectively reduce the heat conducted by the crystal rod 8, thereby protecting the crystal rod positioning device and extending its service life.

[0028] In this embodiment, the working process of the crystal rod positioning device is as follows: When the auxiliary chamber 6 is docked with the furnace cover 7, the fixed housing 1 and the valve body 71 are sealed and abutted. During the crystal rod 8 drawing process, the valve body 71 is opened, and the crystal rod 8 enters the auxiliary chamber 6 from the main chamber. After the crystal rod 8 is completely lifted above the valve body 71, the valve body 71 is closed. The clamping parts 22 of the multiple clamping components 2 are driven to clamp the crystal rod 8, and the crystal rod 8 and the auxiliary chamber 6 are lifted together to the rising limit. After the auxiliary chamber 6 is rotated to the unscrewing limit, the clamping parts 22 slowly release the crystal rod 8. After the clamping parts 22 are completely reset, the rod can be removed. During the operation, the clamping components 2 continuously circulate coolant to the liquid cooling pipe 3, thereby effectively cooling the clamping components 2.

[0029] In one embodiment, the liquid cooling pipeline 3 includes a first internal circulation pipe 31 and a second internal circulation pipe 32. The first internal circulation pipe 31 and the second internal circulation pipe 32 are separated inside the drive unit 21, and the first internal circulation pipe 31 and the second internal circulation pipe 32 are connected inside the clamping unit 22.

[0030] For example, such as Figure 5 As shown, the first internal circulation pipe 31 extends from the inside of the drive unit 21 to the inside of the clamping unit 22, and the second internal circulation pipe 32 extends from the inside of the clamping unit 22 to the inside of the drive unit 21. Both the first internal circulation pipe 31 and the second internal circulation pipe 32 transmit coolant. The coolant can enter the inside of the clamping unit 22 along the first internal circulation pipe 31 and flow back from the inside of the clamping unit 22 to the second internal circulation pipe 32, thereby carrying away the heat of the clamping unit 22 and the drive unit 21 by the circulation of the coolant, achieving an effective cooling effect.

[0031] In one embodiment, the liquid cooling pipeline 3 further includes a first external circulation pipe 33 and a second external circulation pipe 34. Both the first external circulation pipe 33 and the second external circulation pipe 34 are connected to the outer wall of the drive unit 21. The first external circulation pipe 33 is connected to the first internal circulation pipe 31, and the second external circulation pipe 34 is connected to the second internal circulation pipe 32.

[0032] For example, such as Figure 5 As shown, one end of the first external circulation pipe 33 is connected to the first internal circulation pipe 31, and the other end of the first external circulation pipe 33 is connected to the liquid cooling system; one end of the second external circulation pipe 34 is connected to the second internal circulation pipe 32, and the other end of the second external circulation pipe 34 is connected to the liquid cooling system; the coolant enters the first internal circulation pipe 31 from the first external circulation pipe 33, enters the second internal circulation pipe 32 from the first internal circulation pipe 31, then flows back to the second external circulation pipe 34 from the second internal circulation pipe 32, and finally is sent back to the liquid cooling system from the second external circulation pipe 34. The coolant can be concentrated, heat exchanged, and distributed in the liquid cooling system to ensure that the coolant circulates normally in each clamping assembly 2.

[0033] Coolant can be introduced and delivered through the outer wall of the drive unit 21, and the first external circulation pipe 33 and the second external circulation pipe 34 are located in the external space of the fixed housing 1, which does not affect the normal extension and retraction of the drive unit 21. The first external circulation pipe 33 and the second external circulation pipe 34 can transfer the heat of the clamping component 2 to the liquid cooling system through the coolant, so as to achieve the effect of efficient circulation cooling.

[0034] In one embodiment, the drive unit 21 has a first inner cavity 41, in which a first partition plate 42 is arranged along its axial direction. The first inner cavity 41 is divided into a first liquid cooling cavity 43 and a second liquid cooling cavity 44 by the first partition plate 42. The clamping unit 22 has a second inner cavity 51. The first liquid cooling cavity 43 communicates with the second inner cavity 51 to form a first internal circulation pipe 31, and the second liquid cooling cavity 44 communicates with the second inner cavity 51 to form a second internal circulation pipe 32.

[0035] For example, such as Figure 5 As shown, the drive unit 21 has a generally hollow cylindrical structure. The first inner cavity 41 of the drive unit 21 is divided into a first liquid cooling cavity 43 and a second liquid cooling cavity 44, which can be used to transfer coolant. There is no need to arrange a complex coolant circulation path. The coolant flows directly along the inner wall of the first inner cavity 41 and the inner wall of the second inner cavity 51, which improves the heat absorption efficiency.

[0036] In one embodiment, one end of the drive unit 21 is connected to the middle of the clamping part 22, and the other end of the drive unit 21 is connected to the drive body 23. A baffle plate 45 is provided inside the drive unit 21 to close the end of the first inner cavity 41 facing away from the second inner cavity 51. The baffle plate 45 isolates the first inner cavity 41 from the drive body 23, preventing coolant in the first inner cavity 41 from flowing to the drive body 23. A second partition plate 52 is provided in the second inner cavity 51. One end of the first partition plate 42 extends into the second inner cavity 51 and is connected to the middle of the second partition plate 52, and the other end of the first partition plate 42 is connected to the baffle plate 45. The first external circulation pipe 33 and the second external circulation pipe 34 are both located between the baffle plate 45 and the fixed housing 1. Thus, the first inner cavity 41 is effectively isolated outside the drive body 23, thereby reducing the flow of coolant from the drive unit 21 to the drive body 23.

[0037] For example, the two ends of the second partition plate 52 are spaced apart from the inner wall of the second inner cavity 51. A third liquid cooling cavity 53 is formed between the second partition plate 52 and the side of the clamping part 22 away from the driving part 21. A fourth liquid cooling cavity 54 is formed between the second partition plate 52 and the side of the clamping part 22 facing the driving part 21. The fourth liquid cooling cavity 54 is divided into a first sub-cavity 55 and a second sub-cavity 56 by the first partition plate 42. The first liquid cooling cavity 43 and the first sub-cavity 55 are connected by a gap between one end of the second partition plate 52 and the inner wall of the second inner cavity 51. The second liquid cooling cavity 44 and the second sub-cavity 56 are connected by a gap between one end of the second partition plate 52 and the inner wall of the second inner cavity 51.

[0038] A second partition plate 52 is provided in the second inner cavity 51 to divide it into a third liquid cooling cavity 53 and a fourth liquid cooling cavity 54. The coolant flows from the fourth liquid cooling cavity 54 into the third liquid cooling cavity 53 and then back from the third liquid cooling cavity 53 to the fourth liquid cooling cavity 54. The coolant flows through both ends of the second partition plate 52, allowing the coolant to be distributed within the second inner cavity 51 and forming a buffer, thus ensuring uniform heat absorption and preventing excessively cold coolant from directly entering the second inner cavity 51 and adversely affecting the crystal rod. It is understandable that without the second partition plate 52, controlling the coolant temperature could still prevent excessively cold coolant from directly entering the second inner cavity 51; however, the lack of a guiding effect on the coolant flow would result in uneven heat absorption.

[0039] For example, such as Figure 5 , Figure 6 As shown, the clamping part 22 has an arc-shaped structure, which is adapted to the crystal rod 8. The opening of the arc-shaped structure is set towards the axis of the fixed housing 1. Correspondingly, the curvature of the second partition plate 52 is approximately the same as that of the clamping part 22, and the arrangement direction is the same. The coolant flows through the third liquid cooling cavity 53 and the fourth liquid cooling cavity 54, which can fully cool the inner wall of the second inner cavity 51. The first partition plate 42 is connected to the middle of the second partition plate 52, so that the fourth liquid cooling cavity 54 generates a flow divider, and the coolant can be evenly diverted in the first sub-cavity 55 and the second sub-cavity 56, thereby uniformly dissipating heat to the clamping part 22 with an arc-shaped structure, and the energy absorption effect is good.

[0040] Specifically, the coolant enters the first sub-cavity 55 from the first liquid cooling cavity 43, enters the third liquid cooling cavity 53 from the first sub-cavity 55 along one end of the second partition plate 52, enters the second sub-cavity 56 from the third liquid cooling cavity 53 along the other end of the second partition plate 52, and enters the second liquid cooling cavity 44 from the second sub-cavity 56; the coolant forms an effective cooling cycle inside the drive part 21 and inside the clamping part 22.

[0041] In one embodiment, a gap is formed between the middle part of the clamping part 22 and the outer wall of the crystal rod 8, and the two ends of the clamping part 22 on the side away from the driving part 21 abut against the outer wall of the crystal rod 8 respectively.

[0042] For example, the symmetrically arranged clamping parts 22 clamp the crystal rod 8. The clamping parts 22 can be made of polytetrafluoroethylene, which has good chemical corrosion resistance, extremely low coefficient of friction, wide temperature range and low thermal conductivity, reducing heat transfer to the clamping parts 22 when in contact with the crystal rod 8.

[0043] The clamping part 22 and the driving part 21 are connected by a second mounting member (not shown in the figure). The second mounting member can be a bolt. The clamping part 22 is provided with a countersunk hole (not shown in the figure). The second mounting member locks and fixes the clamping part 22 and the driving part 21 through the countersunk hole. The surface of the second mounting member is recessed into the surface of the clamping part 22, so that the second mounting member does not contact the crystal rod 8, avoiding the problem of the crystal rod 8 cracking due to contact between the metal second mounting member and the crystal rod 8. Figure 5 As shown, the length of the second mounting member is less than the thickness of the clamping part 22. For example, the thickness H of the clamping part 22 is approximately 15 mm, and the length of the second mounting member is approximately 10 mm, to prevent the second mounting member from being exposed on the surface of the clamping part 22 after installation. The clamping part 22 is sealed to the drive part 21 to ensure the transmission of coolant within the drive part 21 and the clamping part 22, thus preventing leakage.

[0044] For example, such as Figure 5 As shown, the opening of the clamping part 22 faces the axis of the crystal rod 8. There is a certain gap L between the middle of the clamping part 22 and the outer wall of the crystal rod 8, which ranges from 2mm to 3mm. Therefore, setting multiple clamping components 2 can more stably clamp and position the crystal rod 8. At the same time, the gap L can block some heat and reduce the heat transfer from the crystal rod 8 to the clamping components 2.

[0045] In one embodiment, the fixed housing 1 is provided with two sets of clamping components 2 in the circumferential direction. Each set of clamping components 2 consists of two clamping components 2 arranged radially along the fixed housing 1, and the straight lines of the two sets of clamping components 2 are perpendicular to each other.

[0046] For example, such as Figure 3 , Figure 4 As shown, the cross-section of the fixed housing 1 is annular, and four mounting holes 15 are equally spaced around the circumference of the fixed housing 1. The four mounting holes 15 are located on the same circle, and the lines connecting adjacent mounting holes 15 are perpendicular to the axis of the fixed housing 1. The mounting holes 15 are correspondingly arranged with the drive unit 21, and the drive unit 21 can move telescopically through the mounting holes 15. The two sets of clamping components 2 cooperate to stably clamp and position the crystal rod 8, effectively fixing the crystal rod 8 and preventing the crystal rod 8 from shaking.

[0047] For example, such as Figure 2 As shown, the mounting hole 15 is sealed to the drive unit 21, which does not affect the extension and retraction of the drive unit 21 through the mounting hole 15. Specifically, a third sealing ring (not shown in the figure) is provided in the mounting hole 15. The third sealing ring slides in contact with the outer wall of the drive unit 21 to ensure the sealing performance of the fixed housing 1.

[0048] In one embodiment, the crystal rod positioning device further includes a bracket 12, on which multiple clamping components 2 are disposed, and the bracket 12 is mounted on the outer wall of the fixed housing 1.

[0049] For example, such as Figure 2 As shown, the bracket 12 has a roughly circular structure, and both sets of clamping components 2 are mounted on the bracket 12; specifically, the bottom of the drive body 23 is connected to the top of the bracket 12, and the bottom of the bracket 12 is connected to the outer wall of the fixed housing 1 through a branch (not shown in the figure); the bracket 12 effectively supports multiple clamping components 2 to ensure stable operation of the clamping components 2.

[0050] Example 2 This embodiment provides a single crystal furnace, including the ingot positioning device, main chamber, and auxiliary chamber 6 as described in the above embodiment; the ingot positioning device is located between the main chamber and the auxiliary chamber 6 and is connected to the bottom of the auxiliary chamber 6. The single crystal furnace possesses the beneficial effects brought by the ingot positioning device, which will not be elaborated here.

[0051] In the description of this application, unless otherwise stated, directional terms such as "above" generally refer to the "above" of the corresponding component in the direction of gravity when it is in use. "Inner" and "outer" refer to "inner" and "outer" relative to the outline of the corresponding component itself.

[0052] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0053] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0054] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended embodiments are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0055] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of this application and its equivalents, this application also intends to include such modifications and variations.

Claims

1. A crystal rod positioning device, characterized in that: The device includes a fixed housing (1), a clamping assembly (2), and a liquid cooling pipeline (3). The fixed housing (1) is configured to be connected to the bottom of the sub-chamber. The fixed housing (1) is located between the main chamber and the sub-chamber. The fixed housing (1) is provided with a through hole (11) that connects the main chamber and the sub-chamber. Multiple clamping assemblies (2) are provided on the fixed housing (1). The clamping assembly (2) is telescopically configurable relative to the fixed housing (1) and is used to clamp the crystal rod (8). The liquid cooling pipeline (3) is provided on the clamping assembly (2) to cool the clamping assembly (2).

2. The crystal rod positioning device according to claim 1, characterized in that: The clamping assembly (2) includes a connected drive part (21) and a clamping part (22). The clamping part (22) is located in the through hole (11) to clamp the crystal rod (8). The drive part (21) passes through the fixed housing (1) and is arranged to move radially along the fixed housing (1) to drive the clamping part (22) to move radially.

3. The crystal rod positioning device according to claim 2, characterized in that: The liquid cooling pipeline (3) includes a first internal circulation pipe (31) and a second internal circulation pipe (32). The first internal circulation pipe (31) and the second internal circulation pipe (32) are separated inside the drive unit (21), and the first internal circulation pipe (31) and the second internal circulation pipe (32) are connected inside the clamping unit (22).

4. The crystal rod positioning device according to claim 3, characterized in that: The liquid cooling pipeline (3) further includes a first external circulation pipe (33) and a second external circulation pipe (34). The first external circulation pipe (33) and the second external circulation pipe (34) are both connected to the outer wall of the drive unit (21). The first external circulation pipe (33) is connected to the first internal circulation pipe (31), and the second external circulation pipe (34) is connected to the second internal circulation pipe (32).

5. The crystal rod positioning device according to claim 3, characterized in that: The drive unit (21) has a first inner cavity (41), in which a first partition plate (42) is arranged along its axial direction. The first inner cavity (41) is divided into a first liquid cooling cavity (43) and a second liquid cooling cavity (44) by the first partition plate (42).

6. The crystal rod positioning device according to claim 5, characterized in that: The clamping part (22) has a second inner cavity (51), the first liquid cooling cavity (43) and the second inner cavity (51) are connected to form the first inner circulation pipe (31), and the second liquid cooling cavity (44) and the second inner cavity (51) are connected to form the second inner circulation pipe (32).

7. The crystal rod positioning device according to claim 6, characterized in that: The drive unit (21) is provided with a baffle plate (45) for closing the end of the first inner cavity (41) away from the second inner cavity (51). The second inner cavity (51) is provided with a second partition plate (52). One end of the first partition plate (42) extends into the second inner cavity (51) and is connected to the middle of the second partition plate (52). The other end of the first partition plate (42) is connected to the baffle plate (45).

8. The crystal rod positioning device according to claim 7, characterized in that: The two ends of the second partition plate (52) are spaced from the inner wall of the second inner cavity (51). A third liquid cooling cavity (53) is formed between the second partition plate (52) and the side of the clamping part (22) away from the driving part (21). A fourth liquid cooling cavity (54) is formed between the second partition plate (52) and the side of the clamping part (22) facing the driving part (21). The fourth liquid cooling cavity (54) is divided into a first sub-cavity (55) and a second sub-cavity (56) by the first partition plate (42). The first liquid cooling cavity (43) and the first sub-cavity (55) are connected to the inner wall of the second inner cavity (51) through the gap between one end of the second partition plate (52). The second liquid cooling cavity (44) and the second sub-cavity (56) are connected to the inner wall of the second inner cavity (51) through the gap between the other end of the second partition plate (52).

9. The crystal rod positioning device according to claim 2, characterized in that: The two ends of the clamping part (22) on the side away from the driving part (21) respectively abut against the outer wall of the crystal rod (8), and a gap is formed between the middle part of the clamping part (22) and the outer wall of the crystal rod (8).

10. A single crystal furnace, characterized in that: It includes a main chamber, a secondary chamber, and a crystal rod positioning device as described in any one of claims 1-9, disposed at the bottom of the secondary chamber.

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