A waste heat recovery device of a target sintering furnace

Abstract

The utility model relates to target material sintering equipment technical field, concretely relates to a kind of waste heat recovery device of target material sintering furnace, including sintering furnace, sintering furnace has air inlet and exhaust port, air inlet is set in the upper end side of sintering furnace, exhaust port is set in the upper end opposite side of sintering furnace, further include waste heat recovery subassembly, waste heat recovery subassembly includes filter member, heat exchanger, connecting pipe and induced draft fan, filter member is installed in the side of sintering furnace, and is communicated with exhaust port, heat exchanger is connected with sintering furnace by filter member, induced draft fan is communicated with heat exchanger by connecting pipe, and heat exchanger is away from the end of filter member, connecting pipe is installed between heat exchanger and induced draft fan, obtain the impurity of waste gas and carry out processing, and can recover heat energy, improve the effect of energy utilization efficiency.

Description

Technical Field

[0001] This utility model relates to the technical field of target sintering equipment, and in particular to a waste heat recovery device for a target sintering furnace. Background Technology

[0002] Target sintering is a technique used in semiconductor manufacturing to produce thin film materials. It involves placing a target preform (usually a mixture of metal or ceramic powders) into a sintering furnace and heating it to a high temperature, causing solid solution sintering and subsequent cooling to form the target material. Traditional target sintering involves introducing heating gas from the upper part of the sintering furnace. However, the hot gas has difficulty sinking within the furnace, resulting in uneven temperature distribution and requiring improvements in the uniformity of the target material.

[0003] Existing technology CN223179289U discloses a target sintering furnace, including a furnace body, a placement platform inside the furnace body, vertically arranged baffles evenly spaced around the placement platform, multiple placement plates for placing targets on the placement platform, and through-holes on the placement plates. An air inlet chamber is provided inside the side wall of the furnace body, and a heater is installed on the side wall of the air inlet chamber. An upper air outlet communicating with the air inlet chamber is provided on the upper part of the outer side of the furnace body. A lower air inlet and a middle air inlet communicating with the air inlet chamber are provided on the inner side wall of the furnace body. The lower air inlet is located below the middle air inlet, and its height is lower than the height of the through-holes. This invention ensures uniform temperature within the furnace body and improves the target yield.

[0004] However, the above technologies do not treat the impurities in the exhaust gas, and direct discharge not only causes energy waste and thermal pollution; now, a waste heat recovery device for a target sintering furnace is provided, which can recover its heat energy, improve energy utilization efficiency, and effectively filter impurities in the exhaust gas to avoid thermal pollution and impurity blockage and corrosion of pipelines and equipment. Utility Model Content

[0005] The purpose of this invention is to provide a waste heat recovery device for a target sintering furnace, which solves the problem in the prior art that the waste gas does not treat the impurities in the waste gas and is directly discharged, causing not only energy waste but also thermal pollution.

[0006] To achieve the above objectives, this utility model provides a waste heat recovery device for a target sintering furnace, comprising a sintering furnace having an air inlet and an exhaust outlet. The air inlet is located on one side of the upper end of the sintering furnace, and the exhaust outlet is located on the opposite side of the upper end of the sintering furnace. It also includes waste heat recovery components; The waste heat recovery assembly includes a filter element, a heat exchanger, a connecting pipe, and an induced draft fan. The filter element is installed on one side of the sintering furnace and communicates with the exhaust port. The heat exchanger is connected to the sintering furnace through the filter element. The induced draft fan is connected to the heat exchanger through the connecting pipe and ends at the end of the heat exchanger away from the filter element. The connecting pipe is installed between the heat exchanger and the induced draft fan.

[0007] The heat exchanger has an exhaust gas inlet, an exhaust gas outlet, a refrigerant inlet, and a heat medium outlet. The exhaust gas inlet is located at one end of the heat exchanger near the filter element and communicates with the outlet end of the filter element. The exhaust gas outlet is located at one end of the heat exchanger near the connecting pipe and cooperates with the connecting pipe. The refrigerant inlet is located at the bottom of the heat exchanger. The heat medium outlet is located at the top of the heat exchanger.

[0008] The filter component includes a filter housing, a filter element, and a sealing cap. The air inlet end of the filter housing is connected to the exhaust port of the sintering furnace, and the filter housing is located outside the sintering furnace. The filter element is snapped into the inner cavity of the filter housing. The sealing cap is threadedly connected to the filter housing.

[0009] The sealing cover also includes a handle and a sealing ring. The handle is fixedly connected to the sealing cover and is located at the top of the sealing cover; the sealing ring is fixedly connected to the sealing cover and is located at the bottom of the sealing cover.

[0010] The waste heat recovery assembly also includes a regulating valve, which is fixedly connected to the heat exchanger and installed at the refrigerant inlet.

[0011] This utility model discloses a waste heat recovery device for a target sintering furnace. High-temperature waste gas, after being discharged from the exhaust port of the sintering furnace, first enters the filter component. Dust and other impurities in the waste gas are intercepted by the filter component. The purified waste gas then enters the heat exchanger, where the heat from the high-temperature waste gas is transferred to the refrigerant entering through the refrigerant inlet. After being heated, it becomes a heat medium, flowing out from the heat medium outlet and being transported via an insulated pipe to the air inlet of the sintering furnace or external heat-using equipment. This achieves waste heat recovery and utilization. Furthermore, the waste heat recovery component treats impurities in the waste gas and recovers heat energy, improving energy utilization efficiency. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0013] Figure 1This is a schematic diagram of the waste heat recovery device for the target sintering furnace of this utility model.

[0014] Figure 2 This is a schematic diagram of the connection structure of the waste heat recovery component of this utility model.

[0015] Figure 3 This is a schematic diagram of the structure of the filter component of this utility model.

[0016] In the diagram: 101-Sintering furnace, 102-Air inlet, 103-Exhaust outlet, 104-Heat exchanger, 105-Connecting pipe, 106-Exhaust fan, 107-Waste gas inlet, 108-Waste gas outlet, 109-Refrigerant inlet, 110-Heating medium outlet, 111-Filter housing, 112-Filter element, 113-Sealing cover, 114-Turner, 115-Sealing ring, 116-Regulating valve. Detailed Implementation

[0017] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.

[0018] Please see Figures 1 to 3 ,in Figure 1 This is a schematic diagram of the waste heat recovery device for the target sintering furnace of this utility model. Figure 2 This is a schematic diagram of the connection structure of the waste heat recovery component of this utility model. Figure 3 This is a schematic diagram of the structure of the filter component of this utility model.

[0019] This utility model discloses a waste heat recovery device for a target sintering furnace, comprising a sintering furnace 101 and a waste heat recovery assembly. The waste heat recovery assembly includes a filter element, a heat exchanger 104, a connecting pipe 105, and an induced draft fan 106. The heat exchanger 104 has a waste gas inlet 107, a waste gas outlet 108, a refrigerant inlet 109, and a heat medium outlet 110. The filter element includes a filter housing 111, a filter element 112, and a sealing cover 113. The sealing cover 113 also includes a handle 114 and a sealing ring 115. The waste heat recovery assembly also includes a regulating valve 116. This solution addresses the problem in existing technologies where impurities in waste gas are not treated, leading to direct emissions that waste energy and cause thermal pollution. It is understood that the aforementioned solution can treat impurities in waste gas and recover heat energy through the waste heat recovery assembly, thereby improving energy utilization efficiency.

[0020] In this embodiment, the sintering furnace 101 has an air inlet 102 and an exhaust outlet 103. The air inlet 102 is located on one side of the upper end of the sintering furnace 101, and the exhaust outlet 103 is located on the opposite side of the upper end of the sintering furnace 101. A placement platform is provided inside the sintering furnace 101, and vertically arranged baffles are evenly spaced around the platform. Multiple placement plates for placing target materials are provided on the placement platform, and vertically penetrating ventilation holes are opened on the placement plates. An air inlet chamber is provided inside the side wall of the sintering furnace 101, and a heater is provided on the side wall of the air inlet chamber. Hot gas is introduced into the sintering furnace 101 through the air inlet 102, and waste gas generated during target sintering is output through the exhaust outlet 103. The height difference of the air inlets within the sintering furnace 101 ensures uniform temperature within the furnace, reduces temperature differences within the furnace, and improves the yield of the target materials.

[0021] The filter element is installed on one side of the sintering furnace 101 and communicates with the exhaust port 103. The heat exchanger 104 is connected to the sintering furnace 101 through the filter element. The induced draft fan 106 is connected to the heat exchanger 104 through the connecting pipe 105, and is located at the end of the heat exchanger 104 away from the filter element. The connecting pipe 105 is installed between the heat exchanger 104 and the induced draft fan 106. The exhaust gas inlet 107 is located at the end of the heat exchanger 104 near the filter element and communicates with the exhaust end of the filter element. The exhaust gas outlet 108 is located at the end of the heat exchanger 104 near the connecting pipe 105 and cooperates with the connecting pipe 105. The refrigerant inlet 109 is located at the bottom of the heat exchanger 104. The heat medium outlet 110 is located at the upper end of the heat exchanger 104. The filter element is connected to the sintering furnace 101 and the heat exchanger 104. The exhaust gas generated during target calcination in the sintering furnace 101 is output through the exhaust port 103 and enters the connected filter element. After being filtered by the filter element, the exhaust gas enters the heat exchanger 104 through the exhaust gas inlet 107. The refrigerant inlet 109 at the lower end of the heat exchanger 104 is connected to an external refrigerant, thus transferring the heat from the exhaust gas to the refrigerant entering through the refrigerant inlet 109. The heated refrigerant then flows out from the heat exchanger 104 through the heat exchanger outlet 110 at the upper end. The heat exchanger outlet 110 is connected to the air inlet 102 of the sintering furnace 101 or an external heating device via an insulated pipe, thereby enabling preheating and recycling. The exhaust gas outlet 108 of the heat exchanger 104 is connected through the... Pipe 105 connects to the induced draft fan 106, which guides the flow of exhaust gas, allowing it to pass more quickly through the filter element and the heat exchanger 104 for waste heat recovery. Therefore, after the high-temperature exhaust gas is discharged from the exhaust port 103 of the sintering furnace 101, it first enters the filter element, where dust and other impurities are intercepted. The purified exhaust gas then enters the heat exchanger 104, where the heat is transferred to the refrigerant entering through the refrigerant inlet 109. Heated, the refrigerant becomes a heat medium, flowing out from the heat medium outlet 110. The heat medium outlet 110 is then connected to an insulated pipe and transported to the air inlet 102 of the sintering furnace 101 or external heating equipment, achieving waste heat recovery and utilization. Furthermore, the waste heat recovery component treats impurities in the exhaust gas and recovers heat energy, improving energy efficiency.

[0022] Secondly, the air inlet of the filter housing 111 is connected to the exhaust port 103 of the sintering furnace 101, and the filter housing 111 is located outside the sintering furnace 101; the filter element 112 is snapped into the inner cavity of the filter housing 111; and the sealing cover 113 is threadedly connected to the filter housing 111. The filter housing 111 is a cylindrical structure with an inner cavity and an open top. An air inlet is located at its lower end near the sintering furnace 101 and is fixedly connected to the exhaust port 103. Waste gas generated in the sintering furnace 101 is output from the exhaust port 103 and enters the filter housing 111 through its air inlet. The inner cavity of the filter housing 111 has two clamping plates at its middle ends, allowing the filter element 112 to be clamped into the filter housing 111. An air outlet is located at the upper end of the other side of the filter housing 111. After the waste gas enters the filter housing 111 and is filtered by the filter element 112, it is output from the air outlet of the filter housing 111. The air outlet is connected to the waste gas inlet 107 of the heat exchanger 104, thereby allowing the filtered waste gas to enter the heat exchanger 104.

[0023] Meanwhile, the handle 114 is fixedly connected to the sealing cover 113 and located at the top of the sealing cover 113; the sealing ring 115 is fixedly connected to the sealing cover 113 and located at the bottom of the sealing cover 113. The handle 114 has a U-shaped structure and is vertically fixed to the top of the sealing cover 113. The handle 114 facilitates the rotation or lifting of the sealing cover 113. The sealing ring 115 is fixedly provided on the bottom outer ring of the sealing cover 113 to seal the threaded connection gap between the sealing cover 113 and the upper end of the filter housing 111, preventing exhaust gas from leaking out of the filter housing 111.

[0024] Then, the regulating valve 116 is fixedly connected to the heat exchanger 104 and installed in the refrigerant inlet 109. The regulating valve 116 is a solenoid valve, which is electrically connected to an external control module to intelligently control the through diameter of the refrigerant inlet 109, thereby controlling the refrigerant flow rate.

[0025] When using the waste heat recovery device for a target sintering furnace according to this utility model, after the high-temperature waste gas is discharged from the exhaust port 103 of the sintering furnace 101, it first enters the filter component. The dust and other impurities in the waste gas are intercepted by the filter component. After being filtered and purified, the waste gas then enters the heat exchanger 104, where the heat of the high-temperature waste gas is transferred to the refrigerant entering through the refrigerant inlet 109. After being heated, it becomes a heat medium and flows out from the heat medium outlet 110. The heat medium outlet 110 is connected to the heat-insulated pipe and transported to the air inlet 102 of the sintering furnace 101 or an external heat-using device to realize the recovery and utilization of waste heat. In addition, the waste heat recovery component can treat the impurities in the waste gas and recover heat energy, thereby improving energy utilization efficiency.

[0026] The above-disclosed embodiments are merely one or more preferred embodiments of this application and should not be construed as limiting the scope of this application. Those skilled in the art can understand that all or part of the processes for implementing the above embodiments and equivalent changes made in accordance with the claims of this application still fall within the scope of this application.

Claims

1. A waste heat recovery device for a target sintering furnace, comprising a sintering furnace having an air inlet and an exhaust outlet, the air inlet being disposed on one side of the upper end of the sintering furnace, and the exhaust outlet being disposed on the opposite side of the upper end of the sintering furnace, characterized in that, It also includes waste heat recovery components; The waste heat recovery assembly includes a filter element, a heat exchanger, a connecting pipe, and an induced draft fan. The filter element is installed on one side of the sintering furnace and communicates with the exhaust port. The heat exchanger is connected to the sintering furnace through the filter element. The induced draft fan is connected to the heat exchanger through the connecting pipe and ends at the end of the heat exchanger away from the filter element. The connecting pipe is installed between the heat exchanger and the induced draft fan.

2. The waste heat recovery device for the target sintering furnace as described in claim 1, characterized in that, The heat exchanger has an exhaust gas inlet, an exhaust gas outlet, a refrigerant inlet, and a heat medium outlet. The exhaust gas inlet is located at one end of the heat exchanger near the filter element and communicates with the outlet end of the filter element. The exhaust gas outlet is located at one end of the heat exchanger near the connecting pipe and cooperates with the connecting pipe. The refrigerant inlet is located at the bottom of the heat exchanger. The heat medium outlet is located at the top of the heat exchanger.

3. The waste heat recovery device for the target sintering furnace as described in claim 1, characterized in that, The filter component includes a filter housing, a filter element, and a sealing cap. The air inlet end of the filter housing is connected to the exhaust port of the sintering furnace, and the filter housing is located outside the sintering furnace. The filter element is snapped into the inner cavity of the filter housing. The sealing cap is threadedly connected to the filter housing.

4. The waste heat recovery device for the target sintering furnace as described in claim 3, characterized in that, The sealing cover also includes a throttle and a sealing ring. The throttle is fixedly connected to the sealing cover and is located at the top of the sealing cover; the sealing ring is fixedly connected to the sealing cover and is located at the bottom of the sealing cover.

5. The waste heat recovery device for the target sintering furnace as described in claim 2, characterized in that, The waste heat recovery assembly also includes a regulating valve, which is fixedly connected to the heat exchanger and installed at the refrigerant inlet.

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