Thickness measuring device and single-sided thinning apparatus

Abstract

The utility model relates to the technical field of semiconductor processing equipment, especially relates to thickness gauge and single surface thinning equipment. The thickness gauge in single surface thinning equipment includes platform, first height detection spare, second height detection spare, third height detection spare and angle adjusting assembly, and the platform is used for supporting product, and the third height detection spare is used for detecting the upper end surface height of platform, and first height detection spare and second height detection spare are respectively used for detecting the upper end surface height of product on the platform, and the range of second height detection spare is greater than the range of first height detection spare, and first height detection spare and second height detection spare are respectively selectively and cooperatively work with third height detection spare, and first height detection spare and third height detection spare are installed in the output end of angle adjusting assembly, and angle adjusting assembly can synchronously drive first height detection spare and third height detection spare to rotate around vertical shaft relative to second height detection spare.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to a thickness measuring device and a single-sided thinning device. Background Technology

[0002] Single-sided thinning machines can directly grind the etched and polished surfaces of products using fine-grit grinding wheels to reduce thickness deviations on the etched surfaces and improve their flatness.

[0003] After the product is thinned, its actual thickness needs to be measured. In existing technology, taking CN117128911A as an example, it includes a first measuring head and a second measuring head. When measuring the thickness of a wafer, the first measuring head measures the height of the wafer surface, and the second measuring head measures the height of the stage bearing surface. The thickness of the wafer is obtained by calculating the difference between the two heights. However, the measuring range of the first and second measuring heads in the above scheme is relatively small, and it can only measure wafers with smaller thicknesses, unable to measure larger ingots. To measure the thickness of a thinned ingot, an additional thickness measurement structure is required, which not only occupies extra workspace but also is cumbersome to operate.

[0004] Therefore, there is an urgent need to invent a thickness measuring device and a single-sided thinning equipment to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a thickness measuring device and a single-sided thinning equipment to enable thickness detection of products, which not only increases the measurement range but also saves installation space and meets actual testing needs.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] Thickness measuring device, including:

[0008] A platform, used to support products;

[0009] A first height detection element, a second height detection element, and a third height detection element are provided. The third height detection element is used to detect the height of the upper surface of the platform. The first and second height detection elements are used to detect the height of the upper surface of the product located on the platform. The measuring range of the second height detection element is greater than that of the first height detection element. The first and second height detection elements can selectively work in conjunction with the third height detection element.

[0010] An angle adjustment assembly is provided, wherein the first height detection element and the third height detection element are installed at the output end of the angle adjustment assembly, and the angle adjustment assembly is capable of synchronously driving the first height detection element and the third height detection element to rotate about a vertical axis relative to the second height detection element.

[0011] As an optional solution, the angle adjustment component includes:

[0012] Mounting base, on which both the first height detection element and the third height detection element are mounted;

[0013] Mounting column, the second height detection element is mounted on the mounting column;

[0014] The clamping structure includes a first mating part and a second mating part. The first mating part is fixedly connected to the mounting base and rotatably connected to the mounting column about the vertical axis. The second mating part and the first mating part together clamp and fix the mounting column.

[0015] As an optional solution, the angle adjustment component further includes:

[0016] A stop member is fixedly connected to the first mating part. The mounting post has a limiting groove extending about the vertical axis. The stop member is slidably engaged with the limiting groove. The stop member is configured to limit the extreme position of the first mating part relative to the mounting post about the vertical axis.

[0017] As an optional solution, the thickness measuring device further includes:

[0018] An angle detection component and an alarm component are communicatively connected. The angle detection component is used to detect whether the relative angle between the first mating part and the mounting post is less than a preset angle. When the relative angle between the first mating part and the mounting post is less than the preset angle, the alarm component issues an alarm.

[0019] As an optional solution, the angle detection component includes:

[0020] A sensing element, which is fixed to the outer peripheral wall of the first mating part in the vertical direction;

[0021] The transmitter is fixed on the outer peripheral wall of the mounting post along the vertical direction. The transmitter is communicatively connected to the alarm assembly. The transmitter has a transmitting end and a receiving end arranged opposite to each other. The transmitting end is configured to emit light toward the receiving end. The sensing plate is movable about the vertical axis between the transmitting end and the receiving end. The sensing plate is configured to block the light.

[0022] As an optional solution, the second height detection component includes a transition structure, the transition structure including a frame head and at least two connecting members, the frame head being used to clamp and fix the detection body of the second height detection component, all the connecting members being connected in sequence to form a connecting body, the connecting body being configured to connect the frame head and the mounting column.

[0023] As an optional solution, the thickness measuring device also includes;

[0024] The distance adjustment component is provided, and the first height detection element and the third height detection element are respectively installed with the distance adjustment component. The distance adjustment component can drive the first height detection element and the third height detection element to move in a preset direction in the horizontal plane independently.

[0025] As an optional solution, the thickness measuring device further includes:

[0026] A cooling assembly includes a mounting bracket and two delivery pipes. The mounting bracket is fixedly connected to the output end of the angle adjustment assembly. The two delivery pipes are mounted on the mounting bracket. The axial ends of any one of the delivery pipes are respectively connected to the liquid supply device and the detection end of the first height detection element. The axial ends of the other delivery pipe are respectively connected to the liquid supply device and the detection end of the third height detection element. The two delivery pipes are capable of delivering coolant to the detection ends of the first height detection element and the third height detection element, respectively.

[0027] A single-sided thinning device includes a thinning apparatus, a base, and a thickness measuring device as described above. The platform is disposed on the base, and the base has a first station and a second station arranged sequentially along a first direction. The platform is switchable between the first station and the second station. The thinning apparatus is configured to perform thinning processing on the product at the first station. The first height measuring element, the second height measuring element, and the third height measuring element are configured to measure the thickness of the product at the second station. The first direction is parallel to the horizontal plane.

[0028] As an optional embodiment, the base has a drive component and a guide rail. The first station and the second station are arranged at intervals along the first direction. The drive component is connected to the platform and can drive the platform to move along the first direction. The guide rail extends along the first direction, with a portion of the guide rail located at the first station and the remaining portion located at the second station. The platform has a guide slider, and the guide rail slides in cooperation with the guide slider.

[0029] The beneficial effects of this utility model are:

[0030] The thickness measuring device provided by this utility model, by setting a platform to support the product, can achieve positioning and fixation of the product before thickness measurement. It includes a third measuring element for measuring the height of the upper surface of the platform, and a first and second height measuring elements for measuring the height of the upper surface of the product located on the platform. The measuring range of the second height measuring element is greater than that of the first height measuring element. The first and second height measuring elements can selectively cooperate with the third height measuring element, and an angle adjustment component synchronously drives the first and third height measuring elements to rotate relative to the second height measuring element around a vertical axis. When performing thickness measurement on products (such as wafers, ceramic sheets, etc.) whose thickness does not exceed the measuring range of the first height measuring element, rotating the first and third height measuring elements allows for respectively aligning the measuring end of the first height measuring element with the product, aligning the measuring end of the third height measuring element with the platform, and separating the second height measuring element from the product, achieving [the desired effect]. The purpose of the first and third height detection components working together is to measure the height of the top surface of the product by the first height detection component and the height of the top surface of the platform by the third height detection component, and to calculate the thickness of the product by calculating the difference between the two heights. When measuring the thickness of a product (such as a crystal ingot) whose thickness exceeds the measuring range of the first height detection component, the first and third height detection components can be rotated to align the detection end of the second height detection component with the product and the detection end of the third height detection component with the platform, or to separate the detection end of the first height detection component from the product. This achieves the purpose of the second and third height detection components working together, with the second height detection component measuring the height of the top surface of the product and the third height detection component measuring the height of the top surface of the platform, and the thickness of the product by calculating the difference between the two heights. This integration of the first, second, and third height detection components increases the measuring range while saving installation space.

[0031] This utility model also provides a single-sided thinning device. By applying the above-mentioned height detection component, the thickness measurement range of the product can be increased, so as to quickly detect the thickness of the product after the single-sided thinning process is completed, thereby improving processing efficiency. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the thickness measuring device and base provided in this embodiment of the utility model;

[0033] Figure 2 This is a first structural schematic diagram of the thickness measuring device provided in this embodiment of the present invention;

[0034] Figure 3 This is a cross-sectional schematic diagram of the thickness measuring device provided in this embodiment of the utility model;

[0035] Figure 4 yes Figure 3 A magnified view of a section at point A in the middle;

[0036] Figure 5 This is a schematic diagram of the structure of the adapter post provided in this embodiment of the utility model;

[0037] Figure 6 This is a second structural schematic diagram of the thickness measuring device provided in this embodiment of the present invention;

[0038] Figure 7 yes Figure 6 A magnified view of a section at point B in the middle;

[0039] Figure 8 This is a third structural schematic diagram of the thickness measuring device provided in this embodiment of the present invention.

[0040] In the picture:

[0041] 100. First height inspection component;

[0042] 200. Second height detection component; 210. Adapter structure; 211. Frame head; 212. First connector; 213. Second connector; 214. Third connector; 215. Rib plate;

[0043] 300. Third-level height inspection component;

[0044] 400. Distance adjustment component;

[0045] 500, Angle adjustment assembly; 510, Mounting base; 520, Clamping structure; 521, First mating part; 5211, Threaded through hole; 522, Second mating part; 530, Mounting post; 531, Limiting groove; 540, Protective sleeve; 550, Stop;

[0046] 600. Angle detection component; 610. Sensor sheet; 620. Transmitter;

[0047] 700. Cooling assembly; 710. Delivery pipe; 720. Mounting bracket;

[0048] 800, platform;

[0049] 2000, base; 2100, guide rail; 2200, protective frame. Detailed Implementation

[0050] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar parts or parts having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0051] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0052] In the description of this utility model, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0053] Single-sided thinning machines can directly grind the etched and polished surfaces of a product using fine-grit grinding wheels to reduce thickness deviations and improve the flatness of the etched surface. After thinning, the actual thickness of the product needs to be measured. In existing technology, taking CN117128911A as an example, it includes a first measuring head and a second measuring head. When measuring the thickness of a wafer, the first measuring head measures the height of the wafer surface, and the second measuring head measures the height of the stage bearing surface. The thickness of the wafer is obtained by calculating the difference between the two heights. However, the measuring range of the first and second measuring heads in the above scheme is relatively small, only capable of measuring wafers with smaller thicknesses, and cannot measure larger ingots. To measure the thickness of a thinned ingot, an additional thickness measurement structure is required, which not only occupies extra workspace but also is cumbersome to operate.

[0054] To solve the above problems, such as Figure 1 and Figure 2As shown, this embodiment provides a thickness measuring device. The thickness measuring device includes a platform 800, a first height detection element 100, a second height detection element 200, a third height detection element 300, and an angle adjustment assembly 500. The platform 800 supports the product, the third height detection element 300 detects the height of the upper surface of the platform 800, the first height detection element 100 and the second height detection element 200 respectively detect the height of the upper surface of the product located on the platform 800, the measuring range of the second height detection element 200 is greater than that of the first height detection element 100, and the first height detection element 100 and the second height detection element 200 can selectively work in conjunction with the third height detection element 300. The first height detection element 100 and the third height detection element 300 are mounted on the output end of the angle adjustment assembly 500, which can synchronously drive the first height detection element 100 and the third height detection element 300 to rotate relative to the second height detection element 200 around a vertical axis.

[0055] This thickness measuring device, by setting up a platform 800 to support the product, can position and fix the product before thickness measurement. It incorporates a third height measuring element 300 for measuring the height of the upper surface of the platform 800, and a first height measuring element 100 and a second height measuring element 200 for measuring the height of the upper surface of the product located on the platform 800. The measuring range of the second height measuring element 200 is greater than that of the first height measuring element 100. The first height measuring element 100 and the second height measuring element 200 can selectively cooperate with the third height measuring element 300. Combined with the angle adjustment component 500, the first height detection element 100 and the third height detection element 300 are synchronously driven to rotate relative to the second height detection element 200 around the vertical axis. When performing thickness detection on products (such as wafers, ceramic sheets, etc.) whose thickness does not exceed the detection range of the first height detection element 100, rotating the first height detection element 100 and the third height detection element 300 can respectively align the detection end of the first height detection element 100 with the product, align the detection end of the third height detection element 300 with the stage 800, and separate the second height detection element 200 from the product, achieving [the desired effect]. The purpose of the first height detection element 100 and the third height detection element 300 working together is to measure the height of the upper surface of the product by the first height detection element 100 and the height of the upper surface of the stage 800 by the third height detection element 300, and to calculate the thickness of the product by calculating the difference between the two heights. When performing thickness detection on a product (such as a crystal ingot) whose thickness exceeds the measuring range of the first height detection element 100, by rotating the first height detection element 100 and the third height detection element 300, the detection end of the second height detection element 200 can be aligned with the product, and the detection end of the third height detection element 300 can be aligned with the product. The stage 800 is docked, and the detection end of the first height detection element 100 is separated from the product, so that the second height detection element 200 and the third height detection element 300 can work together. The second height detection element 200 measures the height of the upper surface of the product, and the third height detection element 300 measures the height of the upper surface of the stage 800. The thickness of the product is obtained by calculating the difference between the two heights. This achieves the goal of integrating the first height detection element 100, the second height detection element 200 and the third height detection element 300 together to work together, increasing the measurement range while saving installation space.

[0056] It should be noted that the detection structures and detection principles of the first height detection component 100, the second height detection component 200, and the third height detection component 300 are all existing technologies and will not be elaborated here.

[0057] As an optional solution, such as Figure 2 and Figure 3As shown, the angle adjustment assembly 500 includes a mounting base 510, a mounting post 530, and a clamping structure 520. The first height detection element 100 and the third height detection element 300 are both mounted on the mounting base 510, and the second height detection element 200 is mounted on the mounting post 530. The clamping structure 520 includes a first mating part 521 and a second mating part 522. The first mating part 521 is fixedly connected to the mounting base 510 and rotatably connected to the mounting post 530 about a vertical axis. The second mating part 522 and the first mating part 521 together clamp and fix the mounting post 530. By mounting the first height detection element 100 and the third height detection element 300 on the mounting base 510, and mounting the second height detection element 200 on the mounting column 530, and providing a clamping structure 520 including a first mating part 521 and a second mating part 522, the first mating part 521 is fixedly connected to the mounting base 510, and the first mating part 521 is rotatably connected to the mounting column 530 around the vertical axis. This allows for adjustment of the angle of the first height detection element 100 and the third height detection element 300 relative to the second height detection element 200 around the vertical axis. Combined with the second mating part 522 and the first mating part 521 clamping and fixing the mounting column 530, the positioning and fixing of the first height detection element 100 and the third height detection element 300 relative to the second height detection element 200 can be achieved, facilitating subsequent normal testing. It should be noted that, in this embodiment, the clamping structure 520 also includes a locking bolt, which threads the first mating part 521 and the second mating part 522 together and causes the first mating part 521 and the second mating part 522 to jointly clamp and fix the mounting column 530.

[0058] In one of the alternative solutions, such as Figure 4 and Figure 5 As shown, the angle adjustment assembly 500 also includes a stop 550, which is fixedly connected to the first mating part 521. The mounting post 530 has a limiting groove 531 extending about the vertical axis. The stop 550 is slidably engaged with the limiting groove 531. The stop 550 is configured to limit the extreme position of the first mating part 521 relative to the mounting post 530 about the vertical axis. By creating a limiting groove 531 extending around a vertical axis on the mounting post 530 and providing a stop 550 fixedly connected to the first mating part 521, the stop 550 slides into the limiting groove 531. This allows the stop 550 to abut against the limiting groove 531, limiting the rotation angle range of the first mating part 521 relative to the mounting post 530. This solves the problem of collisions between the first height detection element 100 and the third height detection element 300 and the second height detection element 200 when adjusting their positions relative to the second height detection element 200, thus improving the protection of the first height detection element 100, the second height detection element 200, and the third height detection element 300.

[0059] It should be noted that in this embodiment, the stop 550 is a bolt, and the first mating part 521 has a threaded through hole 5211. The bolt shank thread passes through the threaded through hole 5211 and extends downward into the limiting groove 531.

[0060] As an optional solution, the thickness measuring device also includes an angle detection component 600 and an alarm component. The angle detection component 600 and the alarm component are communicatively connected. The angle detection component 600 detects whether the relative angle between the first mating part 521 and the mounting post 530 is less than a preset angle. When the relative angle between the first mating part 521 and the mounting post 530 is less than the preset angle, the alarm component issues an alarm. By setting up the communicatively connected angle detection component 600 and alarm component, and having the angle detection component 600 detect whether the relative angle between the first mating part 521 and the mounting post 530 is less than the preset angle, and the alarm component issues an alarm when the relative angle between the first mating part 521 and the mounting post 530 is less than the preset angle, collisions between the first height detection element 100 and the third height detection element 300 and the second height detection element 200 can be further avoided.

[0061] like Figure 6 and Figure 7 As shown, the angle detection component 600 includes a sensing element 610 and a transmitter 620. The sensing element 610 is fixed to the outer peripheral wall of the first mating part 521 along the vertical direction, and the transmitter 620 is fixed to the outer peripheral wall of the mounting post 530 along the vertical direction. The transmitter 620 is communicatively connected to the alarm component. The transmitter 620 has a transmitting end and a receiving end arranged opposite to each other. The transmitting end is configured to emit light towards the receiving end. The sensing element 610 can move around a vertical axis between the transmitting end and the receiving end, and is configured to block the light. When the relative angle between the first mating part 521 and the mounting post 530 is less than a preset angle, the sensing element 610 extends between the transmitting end and the receiving end. At this time, the receiving end cannot receive the light emitted by the transmitting end, and thus transmits this information to the alarm component. The alarm component issues an alarm based on this information. It should be noted that the communication connection principle between the alarm component and the transmitter 620 is prior art and will not be described in detail here.

[0062] Optionally, such as Figure 8As shown, the second height detection component 200 includes a transition structure 210, which includes a frame head 211 and at least two connecting members. The frame head 211 is used to clamp and fix the detection body of the second height detection component 200. All the connecting members are connected in sequence to form a connecting body, which is configured to connect the frame head 211 and the mounting post 530. By providing the transition structure 210 in the second height detection component 200, the transition structure 210 includes a frame head 211 and at least two connecting members. All the connecting members are connected in sequence to form a connecting body, which connects the frame head 211 and the mounting post 530 respectively. Combined with the frame head 211 clamping and fixing the detection body of the second height detection component 200, the second height detection component 200 and the mounting post 530 are fixedly connected. It should be noted that, in this embodiment, the transition structure 210 includes a first connecting member 212, a second connecting member 213, and a third connecting member 214 connected in sequence. The first connecting member 212 is fixedly connected to the frame head 211, and the third connecting member 214 is fixedly connected to the mounting column 530. Furthermore, in this embodiment, a rib plate 215 is provided between the first connecting member 212 and the second connecting member 213 to improve the structural strength between them.

[0063] To meet the thickness measurement requirements of products with different diameters, the thickness measuring device also includes a distance adjustment component 400. The first height detection element 100 and the third height detection element 300 are each equipped with the distance adjustment component 400. The distance adjustment component 400 can independently drive the first height detection element 100 and the third height detection element 300 to move in a preset direction within the horizontal plane. When the diameter of the product on the stage 800 is small, and the detection end of the first height detection element 100 is located outside the product, the distance adjustment component 400 connected to the first height detection element 100 drives the first height detection element 100 to move in a preset direction towards the product, so that the detection end of the first height detection element 100 is located inside the product. When the diameter of the product on the stage 800 is large, and the detection end of the third height detection element 300 is located inside the product, the distance adjustment component 400 connected to the third height detection element 300 drives the third height detection element 300 to move in a preset direction away from the product, so that the detection end of the third height detection element 300 is located outside the product, thereby achieving the detection of the height of the upper surface of the stage 800. It should be noted that in this embodiment, the preset direction is the front-back direction, the distance adjustment component 400 is a docking slider, the mounting base 510 is provided with a slide groove extending in the front-back direction, the docking slider is fixed in the slide groove, and the position of the docking slider and the slide groove is adjustable in the front-back direction.

[0064] To further improve operational convenience, in practical applications, the thickness measuring device provided in this embodiment is mounted on a rotating shaft capable of rotating around a vertical axis. This shaft drives the entire thickness measuring device to rotate around the vertical axis, allowing the second height detection element 200 to adjust its relative position to the product around the vertical axis, thus improving applicability. Furthermore, in other embodiments, a distance adjustment component 400 can also be provided for the second height detection element 200; this embodiment does not impose specific limitations.

[0065] Optionally, the thickness measuring device further includes a cooling assembly 700, wherein the cooling assembly 700 includes a mounting bracket 720 and two delivery pipes 710. The mounting bracket 720 is fixedly connected to the mounting base 510. The two delivery pipes 710 are mounted on the mounting bracket 720. The axial ends of any one of the two delivery pipes 710 are respectively connected to the liquid supply device and the detection end of the first height detection element 100. The axial ends of the other one of the two delivery pipes 710 correspond to the liquid supply device and the detection end of the third height detection element 300, respectively. The two delivery pipes 710 can respectively deliver coolant to the detection end of the first height detection element 100 and the detection end of the third height detection element 300. By fixing the mounting bracket 720 to the mounting base 510, and clamping two delivery pipes 710 with the mounting bracket 720, the delivery pipes 710 deliver the coolant from the liquid supply device to the detection ends of the first height detection element 100 and the third height detection element 300, respectively. When the detection end of the first height detection element 100 is aligned with the product, the coolant can flow along the detection end of the first height detection element 100 to the detection position of the product, thereby cooling the detection position of the product. When the detection end of the third height detection element 300 is aligned with the platform 800, the coolant can flow along the detection end of the third height detection element 300 to the detection position of the platform 800, thereby cooling the detection position of the platform 800. This solves the problem of inaccurate detection structure caused by thermal expansion and contraction of the product and the platform 800. It should be noted that in this embodiment, the coolant is water. In addition, in other embodiments, an additional delivery pipe 710 may be provided in the cooling assembly 700 so that the delivery pipe 710 delivers coolant to the detection end of the second height detection element 200 to ensure the detection accuracy of the second height detection element 200.

[0066] Optionally, in this embodiment, as Figure 3 As shown, the angle adjustment assembly 500 also includes a protective sleeve 540, which is sleeved on the axial outer peripheral wall of the mounting post 530. The protective sleeve 540 is used to prevent coolant from flowing downward along the axial outer peripheral wall of the mounting post 530.

[0067] This embodiment also provides a single-sided thinning device. For example... Figure 1As shown, the single-sided thinning equipment includes a thinning device, a base 2000, and the aforementioned thickness measuring device. A stage 800 is mounted on the base 2000, which has a first station and a second station arranged sequentially along a first direction. The stage 800 can switch between the first and second stations. The thinning device is configured to perform thinning processing on the product at the first station. A first height measuring element 100, a second height measuring element 200, and a third height measuring element 300 are configured to measure the thickness of the product at the second station. The first direction is parallel to the horizontal plane. By applying the aforementioned thickness measuring device, this single-sided thinning equipment can increase the thickness measurement range of the product, enabling rapid thickness detection after single-sided thinning, thus improving processing efficiency. Furthermore, by setting a first station and a second station arranged sequentially along the first direction on the base 2000, the stage 800 can switch between the first station and the second station. The thinning device performs thinning processing on the product at the first station, and the first height detection component 100, the second height detection component 200 and the third height detection component 300 measure the thickness of the product at the second station. This enables continuous thinning processing and thickness measurement of the product, thereby improving work efficiency.

[0068] Specifically, the base 2000 has a drive unit and a guide rail 2100. A first station and a second station are arranged at intervals along a first direction. The drive unit is connected to the stage 800 and can drive the stage 800 to move along the first direction. The guide rail 2100 extends along the first direction, with a portion of the guide rail 2100 located at the first station and the remaining portion at the second station. The stage 800 has a guide slider, and the guide rail 2100 slides in cooperation with the guide slider. By providing a guide rail 2100 extending along the first direction within the base 2000, with a portion of the guide rail 2100 located at the first station and the remaining portion at the second station, and utilizing the guide slider within the stage 800 that slides in cooperation with the guide rail 2100, when the drive unit on the base 2000 drives the stage 800 to move along the first direction, the guide slider slides along the guide rail 2100, ensuring the movement accuracy of the stage 800 between the first and second stations.

[0069] In addition, the base 2000 is surrounded by a protective frame 2200, which is used to prevent coolant from splashing to the outside of the base 2000.

[0070] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A thickness measuring device, characterized in that, include: Platform (800) is used to support the product; A first height detection element (100), a second height detection element (200), and a third height detection element (300) are defined. The third height detection element (300) is used to detect the height of the upper surface of the platform (800). The first height detection element (100) and the second height detection element (200) are used to detect the height of the upper surface of the product located on the platform (800). The measuring range of the second height detection element (200) is greater than that of the first height detection element (100). The first height detection element (100) and the second height detection element (200) can selectively work in conjunction with the third height detection element (300). An angle adjustment assembly (500) is provided, wherein the first height detection element (100) and the third height detection element (300) are installed at the output end of the angle adjustment assembly (500), and the angle adjustment assembly (500) is capable of synchronously driving the first height detection element (100) and the third height detection element (300) to rotate about the vertical axis relative to the second height detection element (200).

2. The thickness measuring device according to claim 1, characterized in that, The angle adjustment component (500) includes: Mounting base (510), on which both the first height detection element (100) and the third height detection element (300) are mounted; Mounting post (530), the second height detection element (200) is mounted on the mounting post (530); The clamping structure (520) includes a first mating part (521) and a second mating part (522). The first mating part (521) is fixedly connected to the mounting base (510). The first mating part (521) is rotatably connected to the mounting column (530) around the vertical axis. The second mating part (522) and the first mating part (521) are clamped and fixed together with the mounting column (530).

3. The thickness measuring device according to claim 2, characterized in that, The angle adjustment assembly (500) also includes: A stop (550) is fixedly connected to the first mating part (521), and the mounting post (530) has a limiting groove (531) extending about the vertical axis. The stop (550) is slidably engaged with the limiting groove (531). The stop (550) is configured to limit the extreme position of the first mating part (521) relative to the mounting post (530) about the vertical axis.

4. The thickness measuring device according to claim 2, characterized in that, The thickness measuring device also includes: An angle detection component (600) and an alarm component are communicatively connected. The angle detection component (600) is used to detect whether the relative angle between the first mating part (521) and the mounting post (530) is less than a preset angle. When the relative angle between the first mating part (521) and the mounting post (530) is less than the preset angle, the alarm component issues an alarm.

5. The thickness measuring device according to claim 4, characterized in that, The angle detection component (600) includes: The sensing sheet (610) is fixed on the outer peripheral wall of the first mating part (521) in the vertical direction; The transmitter (620) is fixed on the outer peripheral wall of the mounting post (530) along the vertical direction. The transmitter (620) is communicatively connected to the alarm assembly. The transmitter (620) has a transmitting end and a receiving end arranged opposite to each other. The transmitting end is configured to emit light toward the receiving end. The sensing plate (610) is movable about the vertical axis between the transmitting end and the receiving end. The sensing plate (610) is configured to block the light.

6. The thickness measuring device according to claim 2, characterized in that, The second height detection component (200) includes a transition structure (210), which includes a frame head (211) and at least two connectors. The frame head (211) is used to clamp and fix the detection body of the second height detection component (200). All the connectors are connected in sequence to form a connecting body. The connecting body is configured to connect the frame head (211) and the mounting column (530).

7. The thickness measuring device according to any one of claims 1-6, characterized in that, The thickness measuring device also includes; The distance adjustment component (400) is installed on both the first height detection component (100) and the third height detection component (300). The distance adjustment component (400) can drive the first height detection component (100) and the third height detection component (300) to move in a preset direction in the horizontal plane, respectively.

8. The thickness measuring device according to any one of claims 1-6, characterized in that, The thickness measuring device also includes: A cooling assembly (700) includes a mounting bracket (720) and two delivery pipes (710). The mounting bracket (720) is fixedly connected to the output end of the angle adjustment assembly (500). The two delivery pipes (710) are mounted on the mounting bracket (720). The axial ends of any one of the two delivery pipes (710) are respectively connected to the liquid supply device and the detection end of the first height detection element (100). The axial ends of the other one of the two delivery pipes (710) are respectively connected to the liquid supply device and the detection end of the third height detection element (300). The two delivery pipes (710) can respectively deliver coolant to the detection end of the first height detection element (100) and the detection end of the third height detection element (300).

9. A single-sided thinning device, characterized in that, The device includes a thinning device, a base (2000), and a thickness measuring device as described in any one of claims 1-8. The stage (800) is disposed on the base (2000), the base (2000) having a first station and a second station arranged sequentially along a first direction. The stage (800) is switchable between the first station and the second station. The thinning device is configured to perform thinning processing on the product at the first station. The first height detection element (100), the second height detection element (200), and the third height detection element (300) are configured to measure the thickness of the product at the second station. The first direction is parallel to the horizontal plane.

10. The single-sided thinning device according to claim 9, characterized in that, The base (2000) has a drive member and a guide rail (2100). The first station and the second station are arranged at intervals along the first direction. The drive member is connected to the platform (800) and can drive the platform (800) to move along the first direction. The guide rail (2100) extends along the first direction. Part of the guide rail (2100) is located at the first station, and the remaining part of the guide rail (2100) is located at the second station. The platform (800) has a guide slider, and the guide rail (2100) slides in cooperation with the guide slider.

Images