A precision platform precision detection device without vibration

Abstract

The utility model discloses a kind of precision platform precision detection equipment without vibration, it is related to precision detection equipment field, and the detection equipment includes: platform base, a plurality of vibration isolators, marble mesa, X-axis displacement mechanism, Y-axis displacement mechanism, Z-axis displacement mechanism, laser interferometer, reflector group and displacement table mounting plate;The vibration isolator is fixed on the platform base, and the marble mesa is fixed on the vibration isolator;The X-axis displacement mechanism is set on the marble mesa, and the Z-axis displacement mechanism is connected with the X-axis displacement mechanism.By setting vibration isolator on platform base and supporting marble mesa, it can dynamically filter vibration interference transmitted by ground, so that it can real-time cancel external vibration transmission, and then eliminate environmental vibration interference on detection process, so that the measurement stability of laser interferometer and other core components can be more effectively maintained, and the reliability and accuracy of displacement table precision detection are effectively improved.

Description

Technical Field

[0001] This utility model relates to the field of precision testing equipment technology, and in particular to a vibration-free precision platform precision testing device. Background Technology

[0002] In modern industrial manufacturing, especially in high-end manufacturing sectors such as semiconductor equipment, precision instruments, and aerospace components, the precision requirements for moving parts like displacement stages are becoming increasingly stringent. Precision testing equipment, as a key tool for ensuring the performance of these components, directly impacts the quality control of the final product through its testing stability, adjustment flexibility, and adaptability. With the development of industrial technology, the requirements for testing accuracy continue to increase; however, vibration interference from the external environment has become a major challenge. Ground vibration, equipment operation, or vibrations caused by other external factors can directly affect testing results, leading to decreased accuracy and consequently impacting product quality and lifespan.

[0003] In existing technologies, some precision testing equipment employs simple vibration isolation measures to address vibration interference, such as using rubber pads or base spring systems to reduce the impact of external vibrations. Additionally, some equipment maintains stability through fixed structural designs or uses unidirectional adjustment mechanisms to accommodate basic testing needs. While these methods may offer some improvement in general applications, they cannot completely eliminate high-frequency or low-frequency vibration interference, and their performance is particularly inadequate in precision testing scenarios.

[0004] However, existing precision testing equipment still has several shortcomings. First, it is severely affected by external environmental vibrations, making it impossible to fully guarantee the reliability and accuracy of the displacement stage, resulting in significant fluctuations in test results. Second, existing equipment typically cannot be adjusted in multiple directions, limiting its ability to adapt to different testing angles and positions and affecting its flexibility of use. Finally, these devices cannot be used across multiple specifications, meaning they cannot flexibly adapt to displacement stages of different sizes and types, leading to resource waste and inefficiency. Summary of the Invention

[0005] This invention overcomes the shortcomings of the prior art and provides a vibration-free precision platform accuracy testing device.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a vibration-free precision platform accuracy testing device, comprising: a platform base, multiple vibration isolators, a marble tabletop, an X-axis displacement mechanism, a Y-axis displacement mechanism, a Z-axis displacement mechanism, a laser interferometer, a reflector group, and a displacement stage mounting plate; The vibration isolator is fixed on the platform base, and the marble tabletop is fixed on the vibration isolator; the X-axis displacement mechanism is disposed on the marble tabletop, the Z-axis displacement mechanism is connected to the X-axis displacement mechanism and can move along the X-axis displacement mechanism, and the Y-axis displacement mechanism is connected to the Z-axis displacement mechanism and can move along the Z-axis displacement mechanism; The laser interferometer is mounted on the Y-axis displacement mechanism; the displacement stage mounting plate is fixed on the marble table surface for mounting the displacement stage to be tested; the reflector group is used to cooperate with the displacement stage to be tested and to work with the laser interferometer to achieve non-contact precision testing.

[0007] In a preferred embodiment of this utility model, the X-axis displacement mechanism includes an X-base plate and a linear guide rail. The linear guide rail is fixedly connected to the marble countertop, and the X-base plate is slidably engaged with the linear guide rail and can move along the extension direction of the linear guide rail.

[0008] In a preferred embodiment of this utility model, the Z-axis displacement mechanism includes a ball spline, a Z-screw assembly, and a large handwheel. The ball spline is fixedly connected to the X-axis displacement mechanism. The Z-screw assembly is disposed on the ball spline. The large handwheel is connected to one end of the Z-screw assembly and is used to drive the Y-axis displacement mechanism to move along the Z-axis direction. The ball spline is fixedly connected to the X-base plate of the X-axis displacement mechanism.

[0009] In a preferred embodiment of this utility model, the Y-axis displacement mechanism includes a Y-base plate, a Y-upper plate, a Y-screw assembly, and a small handwheel. The Y-upper plate is connected to the Y-base plate via the Y-screw assembly, and the small handwheel is connected to one end of the Y-screw assembly to drive the Y-upper plate to move relative to the Y-base plate along the Y-axis direction. The Y-base plate is fixedly connected to the ball spline, and the Y-base plate can be moved axially along the ball spline via the Z-screw assembly.

[0010] In a preferred embodiment of this utility model, the laser interferometer is fixed on the upper Y plate, and the detection optical path of the laser interferometer is correspondingly arranged with the reflector group.

[0011] In a preferred embodiment of this invention, the X-axis displacement mechanism, Y-axis displacement mechanism, and Z-axis displacement mechanism move in mutually perpendicular directions, which is used to adjust the position of the laser interferometer in the three spatial axes.

[0012] In a preferred embodiment of this utility model, the displacement stage mounting plate is provided with a plurality of mounting holes, the plurality of mounting holes having different hole positions and hole spacings, for adapting to displacement stages of different specifications to be tested.

[0013] In a preferred embodiment of this utility model, the number of vibration isolators is several, and the several vibration isolators are respectively arranged at the four corners of the platform base and are respectively connected to the bottom surface of the marble countertop.

[0014] This utility model solves the defects existing in the background technology, and has the following beneficial effects: (1) This utility model provides a vibration-free precision platform accuracy testing device. By setting a vibration isolator on the platform base and supporting a marble tabletop, the vibration isolator can dynamically filter the vibration interference transmitted from the ground by utilizing its real-time extension and retraction adjustment function, so that it can cancel the external vibration transmission in real time, thereby eliminating the interference of environmental vibration on the testing process. This can more effectively maintain the measurement stability of core components such as laser interferometers and effectively improve the reliability and accuracy of displacement stage accuracy testing.

[0015] (2) In this utility model, by integrating the X-axis displacement mechanism, the Y-axis displacement mechanism and the Z-axis displacement mechanism, a complete three-dimensional adjustment structure can be formed. The mechanical structure with independent adjustment of the three axes allows the laser interferometer to achieve multi-dimensional positioning in space, so as to meet the detection requirements under different postures, thereby improving the adaptability of the equipment to different detection angles and positions, and further realizing the flexibility and efficiency of the detection process.

[0016] (3) In this utility model, by setting mounting holes with different hole positions and hole spacing on the displacement stage mounting plate, the fixed interface of the displacement stage to be tested can be flexibly matched, and the fast clamping of displacement stages of various specifications can be realized. This avoids the cumbersome operation of replacing the entire component due to the fixed installation structure of traditional equipment, thus effectively expanding the scope of application of the equipment, thereby reducing the cost of users purchasing multiple special equipment and improving resource utilization efficiency. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments; Figure 1 This is a three-dimensional structural diagram of the detection device according to a preferred embodiment of the present invention; Figure 2 This is a structural diagram of the connection points of the X-axis displacement mechanism, Y-axis displacement mechanism, and Z-axis displacement mechanism according to a preferred embodiment of this utility model; In the diagram: 1. Platform base; 2. Vibration isolator; 3. Marble tabletop; 4. Displacement stage mounting plate; 5. Displacement stage; 6. X-axis displacement mechanism; 61. X-base plate; 62. Linear guide rail; 7. Y-axis displacement mechanism; 71. Y-base plate; 72. Y-top plate; 73. Y-screw assembly; 74. Small handwheel; 8. Z-axis displacement mechanism; 81. Ball spline; 82. Z-screw assembly; 83. Large handwheel; 9. Laser interferometer; 10. Reflector assembly. Detailed Implementation

[0018] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. These drawings are simplified schematic diagrams, which are only used to illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0019] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "setup," and "connection" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this application based on the specific circumstances.

[0020] like Figure 1 and Figure 2 As shown, a vibration-free precision platform accuracy testing device includes: a platform base 1, several vibration isolators 2, a marble tabletop 3, an X-axis displacement mechanism 6, a Y-axis displacement mechanism 7, a Z-axis displacement mechanism 8, a laser interferometer 9, a reflector group 10, and a displacement stage mounting plate 4.

[0021] It should be noted that the platform base 1, as the structural foundation of the entire equipment, is made of high-rigidity material, preferably QT450-10 ductile iron, and undergoes aging treatment to eliminate internal stress, ensuring overall stability. Vibration isolators 2 are arranged on the platform base 1 to support the marble tabletop 3. Furthermore, the vibration isolators 2 can be air-floating or active vibration isolators, preferably air spring vibration isolators, with built-in pressure sensors and electromagnetic control valves. They have a rated load of 500 kg, a working stroke of ±5 mm, and can sense ground vibrations in real time and cancel them out through telescopic movement, thus isolating the vibrations below the marble tabletop 3. The marble tabletop 3 has high flatness and stability, providing a precise reference surface for various mechanisms installed on top.

[0022] Preferably, there are four vibration isolators 2, which are fixed to the four corners of the platform base 1 by M12 bolts. Their tops are bonded to the bottom of the marble countertop 3 with epoxy resin and then locked with stainless steel pressure plates to ensure the rigidity of the connection.

[0023] In some embodiments, the X-axis displacement mechanism 6 is mounted on the marble tabletop 3 and includes an X-base plate 61 and a linear guide rail 62. The linear guide rail 62 is fixed to the marble tabletop 3 by screws, and the X-base plate 61 slides with the linear guide rail 62, allowing it to move along the X-axis. Specifically, the X-base plate 61 can be positioned manually or by a motor drive, used for coarse adjustment of the horizontal position of the laser interferometer 9.

[0024] It should be noted that this mechanism achieves unidirectional translation through the sliding engagement of the linear guide rail 62 and the X-base plate 61, resulting in a simple structure and good rigidity. During use, the operator can push or fine-tune the X-base plate 61 to initially align the laser interferometer 9 with the reflector group 10 on the displacement stage 5, thereby achieving flexible positioning of the detection element in the X-axis direction.

[0025] Optionally, the X-axis displacement mechanism 6 can also be driven by a ball screw and a servo motor to achieve higher precision automated position control.

[0026] In some embodiments, the Z-axis displacement mechanism 8 includes a ball spline 81, a Z-screw assembly 82, and a large handwheel 83. The ball spline 81 is connected to the X-base plate 61 of the X-axis displacement mechanism 6 via a flange. The Z-screw assembly 82 is installed inside the ball spline 81, and the large handwheel 83 is connected to one end of the Z-screw assembly 82 for driving the Y-axis displacement mechanism 7 to move up and down along the Z-axis.

[0027] It should be noted that the ball spline 81 transmits torque and bears radial loads, achieving precise vertical lifting in conjunction with the Z-screw assembly 82. During use, rotating the large handwheel 83 allows for fine adjustment of the height of the laser interferometer 9, ensuring its optical path is on the same horizontal plane as the reflector assembly 10. This structure enables high-precision positioning of the detection element in the Z-axis direction, effectively expanding the applicable detection range of the equipment.

[0028] Optionally, the Z-axis displacement mechanism 8 can also be equipped with an encoder or a linear scale to achieve closed-loop control and improve positioning accuracy and repeatability.

[0029] In some embodiments, the Y-axis displacement mechanism 7 includes a Y-base plate 71, a Y-upper plate 72, a Y-screw assembly 73, and a small handwheel 74. The Y-base plate 71 is fixedly connected to the ball spline 81, the Y-upper plate 72 is connected to the Y-base plate 71 through the Y-screw assembly 73, and the small handwheel 74 is connected to one end of the Y-screw assembly 73 for driving the Y-upper plate 72 to move along the Y-axis.

[0030] It should be noted that the Y-axis displacement mechanism 7 achieves precise linear movement through the Y-screw assembly 73. During operation, the operator can rotate the small handwheel 74 to fine-tune the laser interferometer 9 in the Y-axis direction, completing the final alignment of the optical path. This allows the equipment to flexibly adjust the position of the detection element in three-dimensional space, adapting to the detection needs of displacement stages with different installation postures.

[0031] Optionally, the Y-axis displacement mechanism 7 can also be driven by a linear motor to further improve response speed and motion smoothness.

[0032] In some embodiments, the laser interferometer 9 is fixed to the upper Y plate 72 by a bracket, and its detection optical path is correspondingly arranged with the mirror assembly 10 mounted on the displacement stage 5 to be tested. The mirror assembly 10 typically includes one or more mirrors for reflecting the laser beam back to the laser interferometer 9, and measuring the positioning accuracy of the displacement stage by the optical path difference.

[0033] It should be noted that this non-contact measurement method avoids errors introduced by mechanical contact and features a wide dynamic range and strong anti-interference capability. In use, the laser interferometer 9 works in conjunction with the reflector group 10 to acquire position data during the movement of the displacement stage in real time. This data is then analyzed and processed by the host computer software, thereby achieving reliable detection of the displacement stage's accuracy.

[0034] Understandably, the mirror assembly 10 can be configured as a single-axis, dual-axis, or triaxial measurement structure depending on the measurement dimension requirements.

[0035] In some embodiments, the displacement stage mounting plate 4 is fixed on the marble countertop 3, and has multiple mounting holes with different hole positions and hole spacings to accommodate displacement stages 5 of different specifications.

[0036] It should be noted that the multi-specification hole design on the displacement stage mounting plate 4 allows users to select appropriate fixing points according to the size of the displacement stage 5 base and quickly tighten them with bolts. During use, simply changing or adjusting the clamps on the mounting plate is sufficient to accommodate displacement stages of various sizes, without needing to replace the entire mounting platform, thus significantly improving the equipment's versatility and efficiency.

[0037] Furthermore, the displacement stage mounting plate 4 can be modularly designed, providing a variety of replaceable plates to accommodate a wider range of test objects.

[0038] When using this utility model, the displacement stage 5 to be tested is placed on the displacement stage mounting plate 4. The appropriate fixing interface is selected through the mounting holes with different positions and spacings on the displacement stage mounting plate 4. The displacement stage 5 is locked and fixed with bolts. Then, the reflector group 10 is installed on the moving part of the displacement stage 5 to be tested.

[0039] After the equipment is started, the vibration isolators 2 at the four corners of the platform base 1 begin to work. The built-in pressure sensors detect ground vibrations in real time and adjust the extension and contraction of the air springs through electromagnetic control valves to dynamically filter vibration interference transmitted from the ground, ensuring that the marble countertop 3 and the mechanism above it are in a stable state. The operator manually adjusts the X-base plate 61 of the X-axis displacement mechanism 6 to slide it along the linear guide rail 62 in the X-axis direction, achieving coarse positioning of the laser interferometer 9 in the horizontal direction. Then, the large handwheel 83 of the Z-axis displacement mechanism 8 is rotated to drive the Z-screw assembly 8 to move the ball spline 81 and the Y-axis displacement mechanism 7 up and down in the Z-axis direction, adjusting the height of the laser interferometer 9 so that it is on the same horizontal plane as the center of the reflector group 10. Then, the small handwheel 74 of the Y-axis displacement mechanism 7 is rotated, and the Y-screw assembly 73 pushes the Y-upper plate 72 to move in the Y-axis direction, completing the fine positioning of the laser interferometer 9 until the detection optical path of the laser interferometer 9 is precisely aligned with the reflector group 10. At this time, the laser beam emitted by the laser interferometer 9 is reflected back by the reflector group 10, forming a closed optical path. The host computer control software is activated, and the displacement stage 5 to be tested moves according to the preset program. The laser interferometer 9 collects the changes in optical path difference in real time and converts them into displacement data. The host computer analyzes and processes the data and finally outputs the accuracy detection result of the displacement stage 5. Throughout the process, the independent adjustment of the three-axis displacement mechanism ensures the flexible positioning of the detection system in space, the active damping function of the vibration isolator 2 ensures the stability of the measurement reference, and the multi-specification mounting hole design enables quick clamping of different displacement stages 5. Combined with non-contact laser interferometry technology, this improves the accuracy, reliability, and efficiency of the detection.

[0040] Based on the above description and the preferred embodiments of this utility model, it will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0041] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A vibration-free precision platform accuracy testing device, characterized in that, include: Platform base (1), multiple vibration isolators (2), marble tabletop (3), X-axis displacement mechanism (6), Y-axis displacement mechanism (7), Z-axis displacement mechanism (8), laser interferometer (9), mirror assembly (10), and displacement stage mounting plate (4); The vibration isolator (2) is fixed on the platform base (1), and the marble tabletop (3) is fixed on the vibration isolator (2); the X-axis displacement mechanism (6) is set on the marble tabletop (3), the Z-axis displacement mechanism (8) is connected to the X-axis displacement mechanism (6) and can move along the X-axis displacement mechanism (6), and the Y-axis displacement mechanism (7) is connected to the Z-axis displacement mechanism (8) and can move along the Z-axis displacement mechanism (8); The laser interferometer (9) is mounted on the Y-axis displacement mechanism (7); the displacement stage mounting plate (4) is fixed on the marble tabletop (3) for mounting the displacement stage (5) to be tested; the reflector group (10) is used to cooperate with the displacement stage (5) to be tested and to work together with the laser interferometer (9) to achieve non-contact precision testing.

2. The vibration-free precision platform accuracy testing equipment according to claim 1, characterized in that: The X-axis displacement mechanism (6) includes an X-base plate (61) and a linear guide rail (62). The linear guide rail (62) is fixedly connected to the marble countertop (3). The X-base plate (61) is slidably engaged with the linear guide rail (62) and can move along the extension direction of the linear guide rail (62).

3. The vibration-free precision platform accuracy testing equipment according to claim 2, characterized in that: The Z-axis displacement mechanism (8) includes a ball spline (81), a Z-screw assembly (82), and a large handwheel (83). The ball spline (81) is fixedly connected to the X-axis displacement mechanism (6). The Z-screw assembly (82) is disposed on the ball spline (81). The large handwheel (83) is connected to one end of the Z-screw assembly (82) and is used to drive the Y-axis displacement mechanism (7) to move along the Z-axis direction. The ball spline (81) is fixedly connected to the X-base plate (61) of the X-axis displacement mechanism (6).

4. The vibration-free precision platform accuracy testing equipment according to claim 3, characterized in that: The Y-axis displacement mechanism (7) includes a Y-base plate (71), a Y-upper plate (72), a Y-screw assembly (73), and a small handwheel (74). The Y-upper plate (72) is connected to the Y-base plate (71) through the Y-screw assembly (73). The small handwheel (74) is connected to one end of the Y-screw assembly (73) and is used to drive the Y-upper plate (72) to move relative to the Y-base plate (71) along the Y-axis direction. The Y-base plate (71) is fixedly connected to the ball spline (81), and the Y-base plate (71) can move along the axial direction of the ball spline (81) through the Z-screw assembly (82).

5. The vibration-free precision platform accuracy testing equipment according to claim 4, characterized in that: The laser interferometer (9) is fixed on the upper plate (72) of Y, and the detection optical path of the laser interferometer (9) is set in correspondence with the reflector group (10).

6. The vibration-free precision platform accuracy testing equipment according to claim 1, characterized in that: The X-axis displacement mechanism (6), Y-axis displacement mechanism (7) and Z-axis displacement mechanism (8) are perpendicular to each other and are used to adjust the position of the laser interferometer (9) in the three spatial axes.

7. The vibration-free precision platform accuracy testing equipment according to claim 1, characterized in that: The displacement stage mounting plate (4) is provided with a number of mounting holes, which have different hole positions and hole spacings to adapt to displacement stages (5) of different specifications.

8. The vibration-free precision platform accuracy testing equipment according to claim 1, characterized in that: The number of vibration isolators (2) is several, and several vibration isolators (2) are respectively set at the four corners of the platform base (1) and respectively connected to the bottom surface of the marble countertop (3).

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