A sample holding structure for sampling of vacuum equipment

Abstract

The utility model provides a kind of for vacuum equipment sampling sample structure, it is related to vacuum equipment sampling technical field, including support, the upper surface of the support is fixedly installed with reaction tank and vacuum pump, the side of the support is equipped with sampling box, the side of the reaction tank is fixedly connected with connecting pipe one, and one end of connecting pipe one is fixedly connected with flange one.The utility model is positioned installation by setting detachable sampling plate in sampling box, and the positioning of sampling plate is realized using the sliding fit of plug block and slot, and the locking is completed by the automatic insertion of limiting rod in limiting hole under the action of tension spring in cooperation quick release mechanism, so that the installation and disassembly of sampling plate do not need to use tool, easy and fast operation, when needing sampling analysis, just pull limiting rod out of limiting hole by pulling plate, sampling plate with dust particle attached can be taken out in whole, subsequent component detection is facilitated, and the efficiency and convenience of sample operation are significantly improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum equipment sampling technology, and in particular to a sample retention structure for vacuum equipment sampling. Background Technology

[0002] Vacuum equipment sampling refers to devices used for material processing, physical experiments, or industrial production in environments below atmospheric pressure. It is widely used in semiconductor manufacturing, vacuum coating, electron microscopy, particle accelerators, vacuum heat treatment, and other fields. Its core components, such as vacuum pumps, valves, and sensors, have extremely high requirements for the cleanliness of the working environment. During system operation, small solid impurities such as dust, metal shavings, and oxide particles generated externally or internally may enter the vacuum pipeline with the airflow and deposit inside the equipment during the pumping process, especially on the rotor, blades, or seals of the vacuum pump. This can lead to equipment wear, jamming, performance degradation, or even failure, seriously affecting the equipment's lifespan and process stability.

[0003] In the existing technology, most vacuum systems are not equipped with specially designed sample retention structures and usually rely on temporary measures (such as filter paper, open containers) to collect samples. This not only easily leads to sample contamination, but may also cause sample loss or damage due to improper operation. In addition, most existing sampling devices are fixed or welded, which has low disassembly and assembly efficiency. Disassembly requires the use of wrenches and other tools to loosen the bolts one by one, which cannot meet the needs of high-frequency sampling or emergency maintenance, and therefore improvement is needed. Utility Model Content

[0004] The purpose of this invention is to solve the problems in the existing technology where sampling devices are difficult to disassemble and assemble quickly, and the system operation needs to be interrupted when replacing or cleaning them, which is time-consuming, labor-intensive, and affects production efficiency. Therefore, this invention proposes a sample retention structure for vacuum equipment sampling.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a sample retention structure for vacuum equipment sampling, comprising a support, a reaction vessel and a vacuum pump fixedly mounted on the upper surface of the support, a sampling box provided on the side of the support, a connecting pipe 1 fixedly connected to the side of the reaction vessel, a flange 1 fixedly connected to one end of the connecting pipe 1, a flange 2 fixedly mounted on the surface of the sampling box, a valve 1 provided on the surface of the connecting pipe 1, a connecting pipe 2 fixedly connected to the side of the sampling box, a flange 3 fixedly connected to one end of the connecting pipe 2, a flange 4 fixedly mounted on the input end of the vacuum pump, a valve 2 provided on the surface of the connecting pipe 2, a sampling plate provided on the inner side of the sampling box, a sealing ring fixedly connected to the surface of the sampling plate, a sealing groove provided on the inner side of the sampling box, an insert fixedly connected to the side of the sampling plate, a slot provided on the inner side of the sampling box, and a quick-release mechanism provided on the side of the sampling box; The quick-release mechanism includes a limiting sleeve, a limiting rod slidably connected inside the limiting sleeve, a limiting hole opened on the side of the insert block, a limiting plate fixedly installed on the surface of the limiting rod, a tension spring sleeved on the surface of the limiting rod, and a pull plate fixedly installed at one end of the limiting rod.

[0006] Preferably, flange one and flange two are sealed together, and flange three and flange four are sealed together.

[0007] Preferably, flange one and flange two, and flange three and flange four are all fixedly connected by bolts.

[0008] Preferably, the sealing ring is made of nitrile rubber, and the sealing ring is fitted into the sealing groove.

[0009] Preferably, the insert and the slot are slidably connected.

[0010] Preferably, the limiting rod and the limiting hole are slidably connected.

[0011] Preferably, one end of the tension spring is fixedly connected to the side of the limiting plate, and the other end of the tension spring is fixedly connected to the inner side of the limiting sleeve.

[0012] Compared with the prior art, the advantages and positive effects of this utility model are as follows: 1. In this utility model, a detachable sampling plate is set inside the sampling box, and the sampling plate is positioned and installed by the sliding cooperation of the insert block and the slot. With the limit rod in the quick release mechanism automatically inserted into the limit hole under the action of the tension spring to complete the locking, the installation and removal of the sampling plate can be done without tools, making the operation simple and quick. When sampling and analysis are required, simply pull the pull plate to make the limit rod exit the limit hole, and the sampling plate with dust particles attached can be taken out as a whole, which is convenient for subsequent component detection, and significantly improves the efficiency and convenience of sample retention operation.

[0013] 2. In this utility model, by setting a sealing ring made of nitrile rubber around the sampling plate and embedding it into the sealing groove inside the sampling box, a good sealing structure is formed between the sampling plate and the sampling box after installation, preventing gas from leaking from the bypass during the sampling process, ensuring the stability of the sampling process and the representativeness of the sample. At the same time, the sampling box is connected to the reaction vessel and vacuum pump through the pipeline via a flange, and can be independently disassembled and installed without affecting the operation of the main system, which is convenient for maintenance and replacement, and improves the practicality and reliability of the equipment. Attached Figure Description

[0014] Figure 1 A three-dimensional structural diagram of a sample retention structure for vacuum equipment sampling is provided for this utility model; Figure 2A cross-sectional view of a sample retention structure for vacuum equipment sampling is provided for this utility model; Figure 3 This utility model provides a partial structural diagram of a sampling box, sampling plate, and quick-release mechanism for a sampling retention structure used in vacuum equipment sampling. Figure 4 This invention proposes a sample retention structure for sampling in vacuum equipment. Figure 3 Enlarged view of point A in the middle.

[0015] Legend: 1. Support; 2. Reaction vessel; 3. Vacuum pump; 4. Sampling box; 5. Connecting pipe one; 601. Flange one; 602. Flange two; 7. Valve one; 8. Connecting pipe two; 901. Flange three; 902. Flange four; 10. Valve two; 11. Sampling plate; 12. Sealing ring; 13. Sealing groove; 14. Insert block; 15. Slot; 16. Quick release mechanism; 161. Limit sleeve; 162. Limit rod; 163. Limit hole; 164. Limit plate; 165. Tension spring; 166. Pull plate. Detailed Implementation

[0016] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0017] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0018] Example 1: As Figures 1-4As shown, this utility model provides a technical solution: a sample retention structure for vacuum equipment sampling, including a support 1. A reaction vessel 2 and a vacuum pump 3 are fixedly installed on the upper surface of the support 1. A sampling box 4 is provided on the side of the support 1. A connecting pipe 5 is fixedly connected to the side of the reaction vessel 2. A flange 601 is fixedly connected to one end of the connecting pipe 5. A flange 602 is fixedly installed on the surface of the sampling box 4. A valve 7 is provided on the surface of the connecting pipe 5. A connecting pipe 8 is fixedly connected to the side of the sampling box 4. A flange 901 is fixedly connected to one end of the connecting pipe 8. A flange 902 is fixedly installed at the input end of the vacuum pump 3. A valve 10 is provided on the surface of the connecting pipe 8. A sampling plate 11 is provided inside the sampling box 4. A sealing ring 12 is fixedly connected to the surface of the sampling plate 11. A sealing groove 13 is opened inside the sampling box 4. An insert 14 is fixedly connected to the side of the sampling plate 11. A slot 15 is opened inside the sampling box 4. A quick-release mechanism is provided on the side of the sampling box 4. Structure 16, quick-release mechanism 16 includes a limiting sleeve 161, a limiting rod 162 is slidably connected inside the limiting sleeve 161, a limiting hole 163 is opened on the side of the insert block 14, a limiting plate 164 is fixedly installed on the surface of the limiting rod 162, a tension spring 165 is sleeved on the surface of the limiting rod 162, a pull plate 166 is fixedly installed at one end of the limiting rod 162, flange 1 601 and flange 2 602 are sealed together, flange 3 901 and flange 4 902 are sealed together. Next, flange 1 601 and flange 2 602, and flange 3 901 and flange 4 902 are all fixedly connected by bolts. The sealing ring 12 is made of nitrile rubber and is fitted with the sealing groove 13. The insert block 14 is slidably connected with the slot 15. The limiting rod 162 is slidably connected with the limiting hole 163. One end of the tension spring 165 is fixedly connected to the side of the limiting plate 164, and the other end of the tension spring 165 is fixedly connected to the inside of the limiting sleeve 161.

[0019] In this embodiment, a detachable sampling plate 11 is installed inside the sampling box 4. The sampling plate 11 is positioned and installed by the sliding engagement of the insert block 14 and the slot 15. The limiting rod 162 in the quick-release mechanism 16 automatically inserts into the limiting hole 163 under the action of the tension spring 165 to complete the locking. This makes the installation and removal of the sampling plate 11 tool-free, and the operation simple and quick. When sampling and analysis are required, simply pull the pull plate 166 to make the limiting rod 162 exit the limiting hole 163, and the sampling plate 11 with dust particles attached can be taken out as a whole, which is convenient for subsequent component analysis. The method significantly improves the efficiency and convenience of sample retention operations. By setting a nitrile rubber sealing ring 12 around the sampling plate 11 and embedding it into the sealing groove 13 inside the sampling box 4, a good sealing structure is ensured between the sampling plate 11 and the sampling box 4 after installation, preventing gas leakage from the bypass during sampling, ensuring the stability of the sampling process and the representativeness of the samples. At the same time, the sampling box 4 is connected to the reaction vessel 2 and the vacuum pump 3 through a flange, and can be independently disassembled and installed without affecting the operation of the main system, which is convenient for maintenance and replacement, and improves the practicality and reliability of the equipment.

[0020] The working principle of this embodiment is as follows: In use, firstly, the sampling box 4 is sealed and connected to the flange 601 of the connecting pipe 5 via flange 2 602, and fixed with bolts. Simultaneously, the flange 901 of the connecting pipe 8 is sealed and connected to the flange 902 at the input end of the vacuum pump 3, and fixed with bolts, completing the series installation of the sampling structure between the reaction vessel 2 and the vacuum pump 3. Next, valves 7 and 10 are opened, allowing the gas in the reaction vessel 2 to flow through the sampling box 4 under the suction of the vacuum pump 3. Solid particles such as dust carried in the gas adhere to the surface of the sampling plate 11 due to airflow disturbance or inertial impact as they pass through the sampling box 4. The sampling plate 11 slides into the sampling box 4 through the insertion block 14 along the slot 15. When the insertion block 14 is fully inserted, the limiting rod 162 automatically engages with the limiting hole 163 on the side of the insertion block 14 under the elastic force of the tension spring 165, achieving rapid locking. Simultaneously, the sampling... The sealing ring 12 on the sample plate 11 is embedded in the sealing groove 13 inside the sampling box 4 to form a reliable seal, preventing gas short circuits and ensuring that all airflow passes through the sampling plate 11 area, thereby improving particle capture efficiency. When the equipment has been running for a period of time and the sample needs to be taken out for analysis, valve 7 and valve 10 are closed to cut off the gas path between the reaction vessel 2 and the vacuum pump 3. The pull plate 166 of the quick release mechanism 16 is pulled outward, which drives the limit rod 162 to overcome the elastic force of the tension spring 165, causing its end to exit from the limit hole 163, releasing the lock on the insert block 14. Then, the sampling plate 11, along with the attached particles, is horizontally extracted from the sampling box 4 and sent to the laboratory for component analysis. When a new or cleaned sampling plate 11 is replaced, it is reinserted and automatically locked by the limit rod 162, thus restoring the system operation. This process is simple to operate and does not require disassembling the entire pipeline, effectively improving the efficiency and safety of sample retention.

[0021] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A sample retention structure for vacuum equipment sampling, comprising a support (1), characterized in that: The upper surface of the support (1) is fixedly mounted with a reaction vessel (2) and a vacuum pump (3). A sampling box (4) is provided on the side of the support (1). A connecting pipe (5) is fixedly connected to the side of the reaction vessel (2). A flange (601) is fixedly connected to one end of the connecting pipe (5). A flange (602) is fixedly mounted on the surface of the sampling box (4). A valve (7) is provided on the surface of the connecting pipe (5). A connecting pipe (8) is fixedly connected to the side of the sampling box (4). A flange is fixedly connected to one end of the connecting pipe (8). Three (901), the input end of the vacuum pump (3) is fixedly installed with flange four (902), the surface of the connecting pipe two (8) is provided with valve two (10), the inner side of the sampling box (4) is provided with sampling plate (11), the surface of the sampling plate (11) is fixedly connected with sealing ring (12), the inner side of the sampling box (4) is provided with sealing groove (13), the side of the sampling plate (11) is fixedly connected with insert block (14), the inner side of the sampling box (4) is provided with slot (15), and the side of the sampling box (4) is provided with quick release mechanism (16). The quick-release mechanism (16) includes a limiting sleeve (161), a limiting rod (162) is slidably connected inside the limiting sleeve (161), a limiting hole (163) is opened on the side of the insert block (14), a limiting plate (164) is fixedly installed on the surface of the limiting rod (162), a tension spring (165) is sleeved on the surface of the limiting rod (162), and a pull plate (166) is fixedly installed at one end of the limiting rod (162).

2. The sample retention structure for vacuum equipment sampling according to claim 1, characterized in that: The flange one (601) and flange two (602) are sealed together, and the flange three (901) and flange four (902) are sealed together.

3. The sample retention structure for vacuum equipment sampling according to claim 1, characterized in that: The flange one (601) and flange two (602), and flange three (901) and flange four (902) are all fixedly connected by bolts.

4. The sample retention structure for vacuum equipment sampling according to claim 1, characterized in that: The sealing ring (12) is made of nitrile rubber, and the sealing ring (12) is fitted into the sealing groove (13).

5. The sample retention structure for vacuum equipment sampling according to claim 1, characterized in that: The insert (14) is slidably connected to the slot (15).

6. The sample retention structure for vacuum equipment sampling according to claim 1, characterized in that: The limiting rod (162) is slidably connected to the limiting hole (163).

7. The sample retention structure for vacuum equipment sampling according to claim 1, characterized in that: One end of the tension spring (165) is fixedly connected to the side of the limiting plate (164), and the other end of the tension spring (165) is fixedly connected to the inside of the limiting sleeve (161).

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