A cross-section sample stage for an electron probe X-ray microanalyzer

Abstract

The utility model relates to material analysis equipment auxiliary device technical field especially is a kind of cross-section sample stage for electron probe X-ray microanalyzer, including table body, cross-section sample seat and guide plate. Table body bottom is equipped with assembly groove (preferably dovetail groove), and adaptive instrument slide rail is set;Upper portion is equipped with assembly slide along assembly groove extension direction. Cross-section sample seat is L type, and side plate T type groove is engaged with assembly slide and can slide, and bottom plate is equipped with guide rod (sleeve spring), and side plate is equipped with locking screw rod;Guide plate guide block is matched with side plate recess, and through hole is worn guide rod, and guide rod is equipped with limit nut and is adjusted clamping force. The utility model solves the problem that traditional conductive glue / epoxy resin fixed sample is unstable, and easy to damage sample, can stably hold sample, supports multiple sample parallel test, and it is convenient to operate, and adaptability is strong, effectively promotes test efficiency.

Description

Technical Field

[0001] This utility model relates to the technical field of auxiliary devices for material analysis equipment, and in particular to a cross-sectional sample stage for an electron probe X-ray microanalyzer. Background Technology

[0002] Electron probe X-ray microscopy is a precision instrument used for micro-area compositional analysis of materials. During analysis, samples must be stably fixed to ensure testing accuracy. For cross-sectional samples (such as corrosion layer sections and coating sections), traditional fixing methods have significant drawbacks: one method uses conductive adhesive to vertically attach the sample to the side of the sample stage; however, the conductive adhesive is prone to deformation in the instrument's vacuum environment, causing the sample to loosen or shift, affecting testing stability. Another method involves encapsulating the sample with epoxy resin and then grinding the cross-section, but the encapsulation process damages the original cross-sectional structure of the sample, and since epoxy resin is non-conductive, conductive adhesive is still required for auxiliary fixing, making the operation cumbersome and the fixing effect unsatisfactory. Therefore, there is an urgent need for a dedicated sample stage that can stably and conveniently fix cross-sectional samples to solve the problems of unstable sample fixation, complex operation, and easy sample damage in existing technologies. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model provides a cross-sectional sample stage for an electron probe X-ray microscopy analyzer, the specific technical solution of which is as follows:

[0004] A cross-sectional sample stage for an electron probe X-ray microscopy analyzer includes a stage body, a cross-sectional sample holder, and a guide plate. The stage body has assembly grooves at its bottom, the spacing of which is adapted to the width of the slide rail of the electron probe X-ray microscopy analyzer. An assembly slide is provided on the upper part of the stage body along the extension direction of the assembly grooves. The cross-sectional sample holder is L-shaped and includes a base plate, a side plate, a locking screw, a spring, and a guide rod. A T-shaped groove is provided on the lower part of the side plate, and the assembly slide is fitted into the T-shaped groove, allowing the cross-sectional sample holder to slide along the length of the assembly slide. The guide rod is vertically and fixedly mounted on the base plate, and the spring is sleeved on the guide rod. The guide plate has a guide through hole through which the guide rod passes. The spring pushes the guide plate to move towards the base plate. A protruding guide block is provided at the bottom of the guide plate. A guide groove that matches the guide block is provided on the side plate. The direction of the guide groove is the same as that of the guide rod. The guide plate can slide along the guide groove. A threaded through hole is provided on one side of the side plate. The threaded through hole connects to the T-slot. The locking screw is fitted in the threaded through hole. Rotating the locking screw can adjust its position in the threaded through hole. When the locking screw is tightened, it abuts against the assembly slide to lock the cross-sectional sample holder.

[0005] In some embodiments, two assembly slides are provided, and the two assembly slides are arranged parallel to each other on the upper surface of the platform.

[0006] In some embodiments, two guide rods are provided, which are arranged parallel to each other on the base plate. Two guide holes are provided on the guide plate, and the two guide rods pass through the two guide holes respectively.

[0007] In some embodiments, the guide rod is provided with an external thread, and a limiting nut that engages with the external thread is provided on the side of the guide rod away from the base plate. The spring is located between the guide plate and the limiting nut, and its position on the guide rod can be adjusted by rotating the limiting nut.

[0008] In some embodiments, the assembly groove is a dovetail groove.

[0009] In some embodiments, multiple cross-sectional sample holders are provided, and the multiple cross-sectional sample holders are respectively installed on the same and / or multiple assembly slides.

[0010] In some embodiments, the guide plate is generally square, and the length and width of the guide plate are the same as the length and width of the side plate of the cross-sectional sample holder. The width of the guide block is adapted to the width of the guide groove on the side plate.

[0011] Compared with the prior art, the present invention has the following beneficial effects:

[0012] Firstly, this solution achieves multiple stable fixation of the sample from the stage to itself through the fit between the T-slot and the assembly slide, the locking effect of the locking screw, and the elastic clamping structure of the guide plate and the spring, thus avoiding sample displacement caused by vacuum environment or instrument vibration.

[0013] Secondly, the sample clamping is achieved by the guide plate sliding along the guide rod and guide groove. After the position is adjusted, it can be fixed by simply rotating the locking screw, without relying on conductive glue or epoxy resin, which simplifies the operation process. Multiple sample holders can be installed at the same time, which greatly improves the testing efficiency.

[0014] Thirdly, this solution allows for adjustable clamping force via a limiting nut, adapting to cross-sectional samples of different thicknesses and materials; the design of two assembly slides and multiple sample holders meets the needs of parallel testing of multiple samples.

[0015] Fourthly, no sealing or pasting is required; the original cross-section of the sample is directly clamped, avoiding sample damage and ensuring the authenticity of the test results. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of the cross-sectional sample stage;

[0017] Figure 2 This is the front view of the cross-sectional sample stage;

[0018] Figure 3This is a cross-sectional view of the cross-sectional sample holder in the cross-sectional sample stage;

[0019] Figure 4 This is a schematic diagram showing the fit between the cross-sectional sample holder and the guide plate in the cross-sectional sample stage;

[0020] Figure 5 This is a schematic diagram of the guide plate in the cross-sectional sample stage.

[0021] Reference numerals: platform 1, assembly groove 11, assembly slide 12, cross-sectional sample holder 2, base plate 21, side plate 22, T-slot 221, guide groove 222, threaded through hole 223, locking screw 23, spring 24, guide rod 25, limit nut 251, guide plate 3, guide through hole 31, guide block 32. Detailed Implementation

[0022] The embodiments of this disclosure will be further described in detail below with reference to the accompanying drawings and examples. The detailed description of the embodiments and the accompanying drawings are used to illustrate the principles of this disclosure by way of example, but should not be used to limit the scope of this disclosure. This disclosure can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0023] These embodiments are provided to make the disclosure thorough and complete, and to fully express the scope of the disclosure to those skilled in the art. It should be noted that, unless otherwise specifically stated, the relative arrangement of components and steps, material composition, numerical expressions, and values ​​set forth in these embodiments should be interpreted as exemplary only and not as limiting.

[0024] It should be noted that, in the description of this disclosure, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," and "outer," etc., indicating orientation or positional relationship, are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0025] Furthermore, the terms "first," "second," and similar terms used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different parts. "Vertical" is not strictly vertical, but within the permissible margin of error. "Parallel" is not strictly parallel, but within the permissible margin of error. Terms such as "including" or "contains" mean that the element preceding the word encompasses the element listed after the word, and do not exclude the possibility of encompassing other elements as well.

[0026] It should also be noted that, in the description of this disclosure, unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this disclosure depending on the specific circumstances. When a particular device is described as being located between a first device and a second device, an intermediary device may or may not be present between the particular device and the first or second device.

[0027] All terms used in this disclosure have the same meaning as understood by one of ordinary skill in the art to which this disclosure pertains, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries should be interpreted as having meanings consistent with their meanings in the context of the relevant art, and not as idealized or highly formalized, unless expressly defined herein.

[0028] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, they should be considered part of the specification.

[0029] like Figures 1 to 5As shown, a cross-sectional sample stage for an electron probe X-ray microscopy analyzer includes a stage body 1, a cross-sectional sample holder 2, and a guide plate 3. The stage body 1 has an assembly groove 11 at its bottom, the spacing of which is adapted to the width of the slide rail of the electron probe X-ray microscopy analyzer. An assembly slide rail 12 is provided on the upper part of the stage body 1 along the extension direction of the assembly groove 11. The cross-sectional sample holder 2 is L-shaped and includes a base plate 21, a side plate 22, a locking screw 23, a spring 24, and a guide rod 25. A T-slot 221 is provided at the lower part of the side plate 22, and the assembly slide rail 12 fits into the T-slot 221, allowing the cross-sectional sample holder 2 to slide along the length of the assembly slide rail 12. The guide rod 25 is vertically and fixedly mounted on the base plate 21, and the spring 24 is sleeved on the guide rod 25. The guide plate... The guide plate 3 has a guide hole 31 through which the guide rod 25 passes. The spring 24 pushes the guide plate 3 to move toward the base plate 21. The bottom of the guide plate 3 has a protruding guide block 32. The side plate 22 has a guide groove 222 that matches the guide block 32. The direction of the guide groove 222 is the same as that of the guide rod 25. The guide plate 3 can slide along the guide groove 222. A threaded through hole 223 is provided on one side of the side plate 22. The threaded through hole 223 connects to the T-slot 221. The locking screw 23 is fitted in the threaded through hole 223. Rotating the locking screw 23 can adjust its position in the threaded through hole 223. When the locking screw 23 is locked, it abuts against the assembly slide 12 to lock the cross-sectional sample holder 2.

[0030] Furthermore, two assembly slides 12 are provided, and the two assembly slides 12 are arranged parallel to each other on the upper end surface of the platform 1, which can improve the installation stability of a single cross-section sample holder 2, and at the same time support the parallel installation of multiple cross-section sample holders 2.

[0031] Furthermore, two guide rods 25 are provided, which are arranged parallel to each other on the base plate 21. Two guide holes 31 are provided on the guide plate 3 respectively. The two guide rods 25 pass through the two guide holes 31 respectively, which can enhance the sliding stability of the guide plate 3 and avoid skewing when clamping the sample.

[0032] Furthermore, the guide rod 25 is provided with an external thread, and a limiting nut 251 that engages with the external thread is provided on the side of the guide rod 25 away from the base plate 21. The spring 24 is located between the guide plate 3 and the limiting nut 251. Rotating the limiting nut 251 can adjust its position on the guide rod 25. By changing the compression of the spring 24, the clamping force of the guide plate 3 on the sample can be adjusted to adapt to samples of different thicknesses or materials.

[0033] Furthermore, the assembly groove 11 is a dovetail groove, which forms a stable fit with the slide rail of the electron probe X-ray microscopy analyzer to prevent the stage 1 from shifting laterally during the test.

[0034] Furthermore, multiple cross-sectional sample holders 2 are provided, and the multiple cross-sectional sample holders 2 are respectively installed on the same and / or multiple assembly slides 12, which can realize the simultaneous testing of multiple samples and improve the analysis efficiency.

[0035] Furthermore, the guide plate 3 is generally square, and the length and width of the guide plate 3 are the same as the length and width of the side plate 22 of the cross-sectional sample holder 2. The width of the guide block 32 is adapted to the width of the guide groove 222 on the side plate 22, so as to ensure that the guide plate 3 slides accurately along the preset trajectory and ensures the verticality of the sample clamping.

[0036] Step 1: Basic assembly of stage 1 and electron probe instrument

[0037] First, align the sample stage 1 with the slide rail of the electron probe X-ray microscopy analyzer: the assembly groove 11 at the bottom of the stage 1 is precisely matched with the width and spacing of the instrument slide rail. Push the stage 1 along the slide rail to the preset position. The structure of the assembly groove 11 can prevent the stage 1 from shifting laterally or shaking during the test, ensuring the relative position of the stage 1 and the instrument is stable. This step provides a basic fixed frame for subsequent sample testing.

[0038] Step 2: Clamping and fixing the cross-sectional sample

[0039] Sample placement: Place the cross-sectional sample to be tested, such as the corrosion layer cross-section or coating cross-section, flat on the base plate 21 of the sample holder, ensuring that the test cross-section of the sample is flush with the edge of the base plate 21, so that the electron beam can accurately irradiate the cross-section during subsequent testing.

[0040] Installation and positioning of guide plate 3: Align the guide block 32 of guide plate 3 with the guide groove 222 of side plate 22, and at the same time, fit the guide through hole 31 on guide plate 3 into the guide rod 25 of bottom plate 21. The double guide rod 25 design can prevent guide plate 3 from tilting. Slowly push guide plate 3 downward.

[0041] Spring 24 compression and clamping force adjustment: During the downward movement of the guide plate 3, it will contact and compress the spring 24 until the lower surface of the guide plate 3 is completely in contact with the sample surface; at this time, the limiting nut 251 at the top of the rotating guide rod 25 is adapted to the external thread of the guide rod 25, so that the limiting nut 251 moves down to abut the guide plate 3. By adjusting the position of the limiting nut 251, the compression of the spring 24 can be changed. The greater the compression, the stronger the spring 24, thereby controlling the clamping force of the guide plate 3 on the sample, adapting to samples of different thicknesses such as 1~10mm or materials such as metal and ceramic, and avoiding sample damage or loosening due to pressure;

[0042] Clamping status check: Gently push the sample to confirm that there is no displacement and the guide plate 3 is not tilted, thus completing the clamping of a single sample.

[0043] Step 3: Assembly and fixing of the sample holder and stage 1

[0044] Sample holder flipping and docking: The sample holder 2 with the sample clamped is flipped 90° so that the originally horizontal sample cross section is facing upward, which is in line with the test direction of the electron probe. At this time, the T-slot 221 of the sample holder side plate 22 faces downward and is aligned with the assembly slide 12 on the stage 1.

[0045] Sliding positioning: Insert the T-slot 221 into the assembly slide 12, and push the sample holder along the length of the slide until the test section of the sample is aligned with the electron beam detection area of ​​the instrument. Positioning can be assisted by the observation window of the instrument.

[0046] Locking and fixing: Rotate the locking screw 23 on the sample holder side plate 22 clockwise. Since the threaded through hole 223 connects to the T-slot 221, the locking screw 23 will gradually extend into the T-slot 221 and abut against the "assembly slide 12" of the platform 1. Through the self-locking property of the threaded engagement, the pressure generated by the locking screw 23 will firmly fix the sample holder on the slide, preventing the sample holder from sliding during the test.

[0047] Step 4: Parallel setup of multiple samples

[0048] If multiple samples need to be tested simultaneously, repeat steps 3 to 4: assemble slides 12 in another set on the platform 1, for a total of 2 sets, set in parallel, install new cross-sectional sample holders 2, or install additional sample holders in the idle position of the same slide according to the slide length - each sample holder independently clamps the sample and locks it independently, without interfering with each other, to achieve parallel testing preparation of multiple samples.

[0049] Step 5: Final check before testing

[0050] Once you confirm that all sample holders are securely locked, samples are not shifted or tilted, and the stage 1 is not loose from the instrument rails, you can start the electron probe X-ray microscopy analyzer for testing.

[0051] The technical principles of this utility model have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of this utility model and should not be construed as limiting the scope of protection of this utility model in any way. Based on this explanation, those skilled in the art can readily conceive of other specific embodiments of this utility model without inventive effort, and these embodiments will all fall within the protection scope of the claims of this utility model.

Claims

1. A cross-sectional sample stage for an electron probe X-ray microscopy analyzer, characterized in that, The system includes a platform (1), a cross-sectional sample holder (2), and a guide plate (3). The platform (1) has an assembly groove (11) at its bottom and an assembly slide (12) along the extension direction of the assembly groove (11) at its upper part. The cross-sectional sample holder (2) is L-shaped and includes a base plate (21), a side plate (22), a locking screw (23), a spring (24), and a guide rod (25). The side plate (22) has a T-slot (221) at its lower part, and the assembly slide (12) fits into the T-slot (221). The cross-sectional sample holder (2) can slide along the length of the assembly slide (12). The guide rod (25) is vertically and fixedly installed on the base plate (21), and the spring (24) is sleeved on the guide rod (25). The guide plate (3) has a guide through hole (31), through which the guide rod (25) passes. The spring (24) pushes the guide plate (3) to move toward the base plate (21) through the hole (31); the bottom of the guide plate (3) is provided with a protruding guide block (32), and the side plate (22) is provided with a guide groove (222) that fits with the guide block (32). The setting direction of the guide groove (222) is the same as the setting direction of the guide rod (25). The guide plate (3) can slide along the guide groove (222); a threaded through hole (223) is opened on one side of the side plate (22). The threaded through hole (223) is connected to the T-slot (221). The locking screw (23) is fitted in the threaded through hole (223). Rotating the locking screw (23) can adjust its position in the threaded through hole (223). When the locking screw (23) is locked, it abuts against the assembly slide (12) to lock the cross-sectional sample holder (2).

2. The cross-sectional sample stage for an electron probe X-ray microscopy analyzer according to claim 1, characterized in that, Two assembly slides (12) are provided, and the two assembly slides (12) are arranged parallel to each other on the upper surface of the platform (1).

3. The cross-sectional sample stage for an electron probe X-ray microscopy analyzer according to claim 1, characterized in that, The guide rod (25) is set to two, and the two guide rods (25) are arranged parallel to each other on the base plate (21). The guide through hole (31) on the guide plate (3) is set to two, and the two guide rods (25) pass through the two guide through holes (31) respectively.

4. The cross-sectional sample stage for an electron probe X-ray microscopy analyzer according to claim 1, characterized in that, The guide rod (25) is provided with an external thread, and a limiting nut (251) that matches the external thread is provided on the side of the guide rod (25) away from the base plate (21). The spring (24) is located between the guide plate (3) and the limiting nut (251). Rotating the limiting nut (251) can adjust its position on the guide rod (25).

5. The cross-sectional sample stage for an electron probe X-ray microscopy analyzer according to claim 1, characterized in that, The assembly groove (11) is a dovetail groove.

6. The cross-sectional sample stage for an electron probe X-ray microscopy analyzer according to claim 1, characterized in that, Multiple cross-sectional sample holders (2) are provided, and the multiple cross-sectional sample holders (2) are respectively installed on the same and / or multiple assembly slides (12).

7. The cross-sectional sample stage for an electron probe X-ray microscopy analyzer according to claim 1, characterized in that, The guide plate (3) is square in shape. The length and width of the guide plate (3) are the same as the length and width of the side plate (22) of the cross-sectional sample holder (2). The width of the guide block (32) is matched with the width of the guide groove (222) on the side plate (22).

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