A test probe mounting jig for semiconductor package testing

Abstract

The utility model belongs to but is not limited to the semiconductor package test technical field, especially, relates to a kind of test claw mounting jig for semiconductor package test, left side is provided with test seat positioning block, for fixed test seat;Middle is provided with test claw piece limiting device, for limiting test claw test piece;Right side is provided with upper test claw limiting position device and lower test claw limiting position device;First test claw piece limiting device and third test claw piece limiting device cooperation limit test claw left test piece, third test claw piece limiting device and fourth test claw piece limiting device cooperation limit test claw middle test piece, fourth test claw piece limiting device and second test claw piece limiting device cooperation limit test claw right test piece.The utility model installation precision is high, saves test claw installation time simultaneously, improves test claw installation efficiency, shortens installation working hours.

Description

Technical Field

[0001] This utility model belongs to, but is not limited to, the field of semiconductor packaging and testing technology, and particularly relates to a test claw mounting fixture used for semiconductor packaging and testing. Background Technology

[0002] Currently, semiconductor through-hole MOS / IGBT product packaging testing uses test claws to contact the product. These test claws are consumable wear parts and need to be replaced periodically, with a lifespan of approximately 5 million contacts. Replacing the test claws requires readjusting the distances between them, which is time-consuming and results in low precision during manual installation.

[0003] To replace the test claws, you need to use calipers to measure the distance between each claw, the distance between the front and rear claws, and the horizontal straightness between the claws on the same plane. After determining the distance, use a hex wrench to tighten the test claw screws.

[0004] Test claws in existing technologies, such as Figure 1 As shown, the test socket is as follows Figure 2 As shown, the assembly diagram of the test claw and test seat is as follows: Figure 3 As shown.

[0005] When installing or replacing the test claws, use a vernier caliper to measure the distance between each test claw piece, ensuring that the distance between adjacent test claw pieces is between 0.95 and 1.05 mm. Figure 4 As shown, use vernier calipers to measure the dimensional distance between adjacent test claws 101 and 102 to be between 0.95 and 1.05 mm, and then use M3 screws to fix the test claws to the corresponding test seats.

[0006] When installing or replacing the test claws, use a vernier caliper to measure the distance between each test claw piece, ensuring that the distance between adjacent test claw pieces is between 0.95 and 1.05 mm. Figure 5 As shown, use vernier calipers to measure the dimensional distance between adjacent test claws 103 and 104 to be between 0.95 and 1.05 mm, and then use M3 screws to fix the test claws to the corresponding test seats.

[0007] When installing or replacing test claws, use calipers to measure the front-to-back distance between the upper and lower test claws. The distance should be between 2.2 and 2.3 mm, and the three claw segments of the upper test claw and the three claw segments of the lower test claw should be on the same straight plane. Then, use M3 screws to fix the test claws to the corresponding test mounts. Figure 6 As shown, use calipers to measure the size of 105 to be between 2.2-2.3mm, and then use M3 screws to fix the test claw to the corresponding test socket.

[0008] Disadvantages of existing installation methods: (1) When installing the test claw, multiple dimensions need to be measured and positioned, and the time required for replacement is relatively long.

[0009] (2) The distance between the test claws is difficult to control. It relies on manual adjustment and measurement and positioning with vernier calipers, resulting in low installation accuracy. Utility Model Content

[0010] To address the problems existing in the prior art, this utility model provides a test claw mounting fixture for semiconductor packaging testing.

[0011] This utility model is implemented as follows: a test claw mounting fixture for semiconductor packaging testing, wherein a test seat positioning block is provided on the left side for fixing the test seat; a test claw piece limiting device is provided in the middle for limiting the test claw test piece; and an upper test claw limiting position device and a lower test claw limiting position device are provided on the right side. The first and third test claw limiting devices work together to limit the left test piece of the test claw; the third and fourth test claw limiting devices work together to limit the middle test piece of the test claw; and the fourth and second test claw limiting devices work together to limit the right test piece of the test claw.

[0012] Furthermore, by using the first test claw limiting device, the second test claw limiting device, the third test claw limiting device, and the fourth test claw limiting device to limit the distance between adjacent test claw ports, the distance between them is maintained between 0.95 and 1.05 mm.

[0013] Furthermore, the upper test claw limiting position device limits the left test piece, middle test piece, and right test piece of the upper test claw to be on the same straight plane.

[0014] Furthermore, the lower test claw limiting position device limits the left test piece, middle test piece, and right test piece of the lower test claw to be on the same straight plane.

[0015] Furthermore, the upper test claw limiting position device and the lower test claw limiting position device work together to limit the distance between the upper test claw and the lower test claw, so that the distance between the upper test claw and the lower test claw is between 2.2-2.3mm.

[0016] Based on the above technical solutions and the technical problems solved, the advantages and positive effects of the technical solution to be protected by this utility model are as follows: This utility model designs and manufactures a set of test claw installation fixtures. The test claws are placed in the mechanical fixture, which has a limiting device. Through the mechanical limiting of the limiting device, all the dimensions required for the installation of the test claws can be positioned. Only by tightening the M3 screws to fix the test claws on the test base can the installation dimensions and accuracy between the claws be guaranteed, while shortening the installation time and improving work efficiency.

[0017] This invention utilizes a test claw mounting fixture to place the test base and test claws within the fixture according to a limiting device. The distance between each test claw is automatically fixed and limited according to standard dimensions. After positioning, only M3 screws need to be installed and tightened. This solution is convenient, simple, and has high installation accuracy. It also saves test claw installation time, improves test claw installation efficiency, and shortens installation time. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the test claw provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of the test stand provided in an embodiment of the present invention; Figure 3 This is a schematic diagram of the assembly of the test claw and the test seat provided in this embodiment of the utility model; Figure 4 This is a schematic diagram of the upper test claw plate provided in an embodiment of the present invention; Figure 5 This is a schematic diagram of the lower test claw provided in an embodiment of the present invention; Figure 6 This is a schematic diagram of the upper and lower test claws provided in this embodiment of the utility model; Figure 7 This is a structural diagram of the test claw mounting fixture used for semiconductor packaging testing provided in this embodiment of the utility model; Figure 8 This is a schematic diagram of the test claw mounting fixture provided in this embodiment of the utility model; Figure 9 This is a side view of the test claw mounting fixture provided in this embodiment of the utility model; In the diagram: 0. Test claw mounting fixture; 1. Test seat positioning block; 2. Test claw piece limiting device; 21. First test claw piece limiting device; 22. Second test claw piece limiting device; 23. Third test claw piece limiting device; 24. Fourth test claw piece limiting device; 3. Upper test claw limiting position device; 4. Lower test claw limiting position device; 5. Upper test claw; 6. Lower test claw; 7. Left test piece; 8. Middle test piece; 9. Right test piece; 10. Test seat. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this utility model clearer, the following detailed description is provided in conjunction with embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this utility model.

[0020] like Figure 1 As shown, this utility model embodiment provides a test claw mounting fixture for semiconductor packaging testing. A test seat positioning block 1 is provided on the left side for fixing the test seat 10; a test claw piece limiting device 2 is provided in the middle for limiting the test claw test piece; and an upper test claw limiting position device 3 and a lower test claw limiting position device 4 are provided on the right side. The first test claw limiting device 21 and the third test claw limiting device 23 cooperate to limit the left test piece of the test claw, the third test claw limiting device 23 and the fourth test claw limiting device 24 cooperate to limit the middle test piece of the test claw, and the fourth test claw limiting device 24 and the second test claw limiting device 22 cooperate to limit the right test piece of the test claw.

[0021] Furthermore, by using the first test claw limiting device 21, the second test claw limiting device 22, the third test claw limiting device 23, and the fourth test claw limiting device 24 to limit the distance between adjacent test claw ports, the distance is maintained between 0.95-1.05mm. Figure 2 As shown, the distance between 101, 102, 103, and 104 should be maintained between 0.95 and 1.05 mm.

[0022] Furthermore, the upper test claw limiting position device 4 can limit the left test piece 7, the middle test piece 8, and the right test piece 9 of the upper test claw 5 to be on the same straight plane.

[0023] Furthermore, the lower test claw limiting position device 5 can limit the left test piece 7, the middle test piece 8, and the right test piece 9 of the lower test claw 6 to be on the same straight plane.

[0024] Furthermore, the upper test claw limiting position device 3 and the lower test claw limiting position device 4 work together to limit the distance between the upper test claw 5 and the lower test claw 6, ensuring that the distance between them is between 2.2-2.3 mm. Figure 3 As shown, the distance between 105 is kept between 2.2-2.3 mm.

[0025] In the actual assembly process, the test claw mounting fixture of this utility model first uses the test base positioning block to precisely limit and fix the test base 10. This structure is integrally formed, which ensures the stability of the position of the test base during the entire assembly and debugging process, and prevents test errors or improper installation of the test claw due to displacement.

[0026] After the test seat is positioned, the test claw limiting devices located in the middle of the fixture spatially limit the multiple test pieces of the upper and lower test claws. Specifically, a fixing slot for the left test piece is formed between the first limiting device 21 and the third limiting device 23, and the positional accuracy of the piece is controlled by precision mechanical clearance. Correspondingly, the position of the middle test piece is limited between the third limiting device 23 and the fourth limiting device 24, while the position of the right test piece is restricted between the fourth limiting device 24 and the second limiting device 22, thereby completing a stable arrangement of a three-piece test structure.

[0027] By using the four sets of limiting devices described above, the port spacing between each test claw can be strictly controlled between 0.95 and 1.05 mm, ensuring consistency and uniformity of contact with the device under test and preventing poor contact or short circuits. This spacing adjustment is achieved through a fine-tuning structure and limiting process block manufacturing control, ensuring assembly consistency.

[0028] In addition, to prevent angular deviation of the test pieces in the vertical direction, the right side of the fixture is equipped with an upper test claw limiting position device and a lower test claw limiting position device, which are used to control the coplanarity of the upper and lower test claw assemblies on the horizontal axis. By limiting the left, middle and right test pieces to be on the same plane, they are able to apply force and make uniform contact in the working state, avoiding eccentric loading or local stress concentration.

[0029] Furthermore, the combined use of the upper and lower limit position devices allows for high-precision control of the overall vertical spacing of the test claws. Through height-registration and limiting, the two devices ensure that the vertical distance between the upper and lower test claws remains within the range of 2.2–2.3 mm. This distance is the optimal spacing required for the contact pressing of the package pins, effectively improving the stability and repeatability of electrical testing.

[0030] Ultimately, through the aforementioned multi-level limit design and height control, the test claw mounting fixture achieved the triple goals of structural standardization, rapid assembly, and consistent testing. This device can be reused in different batch packaging testing operations, greatly improving testing efficiency and yield, while reducing the reliance on operator experience during debugging.

[0031] When the fixture is activated, the operator first places the test base into the left positioning block 1, ensuring its bottom surface mates with the V-shaped positioning groove and its sides are close to the limiting shoulder, thus establishing a fixed reference zero position. Then, the three test claws slide sequentially into the stepped groove of the central limiting device 2: the first limiting block 21, the second limiting block 22, the third limiting block 23, and the fourth limiting block 24, guided by guide walls at 120° angles to each other, clamp the plate-shaped probe into a precise spacing grid, ensuring the port center distance remains within a tolerance range of 0.95–1.05 mm. Because the limiting blocks are made of hard aluminum alloy and anodized, the mating surfaces have sufficient rigidity and prevent scratches on the probe plating. After the limiting action is completed, the test claws are forced to form a one-to-one correspondence with the test base PAD, laying the foundation for subsequent crimping and positioning.

[0032] Next, the upper test claw 5 and the lower test claw 6 are introduced into the right-side limiting position devices 3 and 4. The devices employ a double set of wedge-shaped bosses in the vertical direction: one aligns with the tips of the three probes of the upper test claw, placing them on the same plane; the other aligns with the tip of the lower test claw probe, simultaneously controlling the gap between the two sets of claws to 2.2–2.3 mm. Fine-tuning screws are installed on the wedge-shaped bosses, allowing for correction of the crimping gap within a range of ±50µm, thereby offsetting deviations caused by probe elastic deformation. When the fixture is closed and locked, the test claw assembly remains coplanar with the pad array and has a uniform spacing. The probes achieve stable contact with the chip solder balls under constant pressure, avoiding the repetitive calibration and displacement drift of traditional manual sorting, significantly improving the consistency and reliability of batch electrical testing for high-density BGA packages.

[0033] Example 1: The fixture is used for electrical screening of 240-point BGA devices with a 0.5mm pitch. The base is precision milled from SUS420, with a surface flatness controlled within 5µm. The left positioning block is formed by EDM in one step during machining, and its dimensional reference is concentric with the center hole of the probe array PCB, so that the package automatically returns to the X, Y, θ zero position after molding. The four test claw limit blocks are made of Al7075 with secondary hard anodizing treatment. The limit groove depth is 1.20mm, and the surface roughness Ra of the plated contact with the φ50µm beryllium copper probe is ≤0.2µm. It can maintain the port center distance of 1.00±0.03mm after 300 repeated crimping cycles. The gap between the upper and lower test claws is adjusted by the differential screw of the right wedge block and finally locked at 2.25mm. When the constant voltage is 5N, the average measured DC contact resistance is 23mΩ, with a maximum drift of ±4mΩ.

[0034] Example 2: The fixture was modified for testing 77GHz packaged radar chips. The probes were replaced with gold-plated tungsten steel microwave probes, and coaxial return grounding springs were added. The limiting block material was upgraded to low dielectric constant PEEK to avoid additional load on high-frequency signals. The spacing of the central limiting slots remained at 0.95mm, but guide slots were added on both sides laterally to reduce parasitic capacitance. The upper and lower test claws were isolated by ceramic heat insulation sheets with a fixed spacing of 2.30mm, and nitrogen blowing cooling was used to suppress self-heating drift. Full-load frequency sweep testing showed that the S21 attenuation was less than 0.13dB in the 70–80GHz range, the return loss was better than -18dB, and no resonance spikes were observed in the fixture itself, meeting the calibration requirements for millimeter-wave mass production.

[0035] In the description of this utility model, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front end," "rear end," "head," "tail," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In addition, the terms "first," "second," "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0036] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any modifications, equivalent substitutions and improvements made by those skilled in the art within the technical scope disclosed in this utility model, and within the spirit and principles of this utility model, should be included within the protection scope of this utility model.

Claims

1. A test claw mounting fixture for semiconductor packaging testing, characterized in that, A test seat positioning block is provided on the left side to fix the test seat; a test claw limiting device is provided in the middle to limit the test claw test piece; and an upper test claw limiting device and a lower test claw limiting device are provided on the right side. The first and third test claw limiting devices work together to limit the left test piece of the test claw; the third and fourth test claw limiting devices work together to limit the middle test piece of the test claw; and the fourth and second test claw limiting devices work together to limit the right test piece of the test claw.

2. The test claw mounting fixture for semiconductor packaging testing as described in claim 1, characterized in that, By using the first test claw limiting device, the second test claw limiting device, the third test claw limiting device, and the fourth test claw limiting device to limit the distance between adjacent test claw ports, the distance between them is maintained between 0.95 and 1.05 mm.

3. The test claw mounting fixture for semiconductor packaging testing as described in claim 1, characterized in that, The upper test claw position limiting device limits the left test piece, middle test piece, and right test piece of the upper test claw to be on the same straight plane.

4. The test claw mounting fixture for semiconductor packaging testing as described in claim 1, characterized in that, The lower test claw limiting position device limits the left test piece, middle test piece, and right test piece of the lower test claw to be on the same straight plane.

5. The test claw mounting fixture for semiconductor packaging testing as described in claim 1, characterized in that, The upper test claw limiting position device and the lower test claw limiting position device work together to limit the distance between the upper test claw and the lower test claw, so that the distance between the upper test claw and the lower test claw is between 2.2-2.3mm.

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