Multi-stage elastic probe assembly and testing device
Patent Information
- Application Number
- CN202521848025.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-28
- Publication Date
- 2026-09-04
- Estimated Expiration
- 2035-08-28
AI Technical Summary
虽然通过增加弹性件在一定程度上能有效地改善刚性探针与小极柱的接触间隙，但是改善的效果并不很理想，仍存在批量测试误判率较高的问题
[0021]1)由于各所述探针活动设置于所述针套内，每一所述探针通过相对应的所述弹性导向件与所述第一驱动器的驱动端连接；使第一驱动器能驱动相对应的弹性导向件进行往返运动，从而带动相对应的探针活动；同时配合着弹性导向件的使用，使多个探针能很好接触贴合于小极柱的表面，有效地增加了与小极柱的接触点，以较好地适配小极柱表面的微观不平整度，有效地减少刚性探针与小极柱的接触间隙，并且弹性导向件能为小极柱提供较好的受力缓冲，有效减少小极柱受力不均而导致接触贴合不良的问题，进而有效地降低批量测试误判率，起到较好的改善效果。
Smart Images
Figure CN224720105U_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to the field of small electrode cell testing technology, and in particular to a multi-stage elastic probe assembly and testing device. Background Technology
[0002] Currently, because small-pole batteries can provide higher energy density within a limited space, meeting the demands of miniaturized, high-performance electronic devices, their applications span across various packaging forms such as steel shells, aluminum shells, and pouch cells, as well as process routes such as lamination / winding. During the production of small-pole batteries, batch testing of the formed cells is typically required. Due to the microscopic unevenness on the surface of each small pole, some poles cannot properly adhere to the rigid probe, resulting in a contact gap between the rigid probe and the pole. This often leads to abnormal test data, resulting in a high misjudgment rate in batch testing.
[0003] To address this, some scholars have attempted to utilize commercially available multi-stage buffer test probes, adding elastic elements to effectively reduce the contact gap between the rigid probe and the small electrode, thereby lowering the false positive rate in batch testing. While adding elastic elements can effectively improve the contact gap between the rigid probe and the small electrode to some extent, the improvement is not ideal, and the problem of a high false positive rate in batch testing still exists. Utility Model Content
[0004] The purpose of this disclosure is to overcome the shortcomings of the prior art and provide a multi-level elastic probe assembly and testing device that can effectively increase the contact points with the small electrode post to better adapt to the microscopic unevenness of the small electrode post surface; and can provide multi-level elastic buffer for the small electrode post to effectively reduce the misjudgment rate of batch testing, especially suitable for batch testing of small electrode post cells with a diameter of less than 2mm.
[0005] The purpose of this disclosure is achieved through the following technical solution:
[0006] A multi-stage elastic probe assembly, comprising:
[0007] Mounting base;
[0008] The elastic probe module includes a fixing plate, a needle sleeve, multiple probes, multiple elastic guides, and multiple first drivers; the fixing plate is slidably disposed on the mounting base, the needle sleeve is disposed at one end of the fixing plate, and each probe is movably disposed within the needle sleeve; each probe is connected to the driving end of the first driver through a corresponding elastic guide.
[0009] The floating module includes a floating connector and a second driver; the floating connector is movably disposed at one end of the fixed plate away from the needle sleeve; the driving end of the second driver is connected to the floating connector.
[0010] In one embodiment, the sum of the areas of the contact points of each probe is not less than 80% of the surface area of a single pin.
[0011] In one embodiment, the diameter of the probe is 10 μm to 20 μm; the number of probes is 100 to 200, and the spacing between the probes is 0.02 mm to 0.10 mm; and / or,
[0012] The probe is a nanoscale tungsten-copper alloy probe; and / or
[0013] The probes are arranged in a matrix.
[0014] In one embodiment, the elastic guide includes a first spring and a positioning member. The probe is connected to the driving end of the first driver through the positioning member. The first spring is sleeved on the positioning member and connected to both the probe and the driving end of the first driver.
[0015] In one embodiment, the floating module further includes an elastic element, and the floating connector is connected to the fixed plate via the elastic element. In one embodiment, a buffer cavity is formed at the end of the fixed plate away from the needle sleeve, and the elastic element is disposed within the buffer cavity; the floating connector is movably connected to the side wall of the buffer cavity via the elastic element, and the floating connector at least partially protrudes from the buffer cavity.
[0016] In one embodiment, the floating joint includes a first limiting member, a movable rod, and a second limiting member; the movable rod is movably disposed within the buffer cavity and at least partially protrudes from the buffer cavity; the first limiting member is disposed at a first end of the movable rod located within the buffer cavity, and the first limiting member is connected to the side wall of the buffer cavity through the elastic member; the second limiting member is disposed at a second end of the movable rod protruding from the buffer cavity; the second limiting member is connected to the driving end of the second driver.
[0017] In one embodiment, the fixing plate further forms a limiting cavity communicating with the buffer cavity; a pressure gauge is disposed in the limiting cavity, and the elastic element extends into the limiting cavity and is connected to the pressure gauge.
[0018] In one embodiment, the multi-stage elastic probe assembly further includes a tracheal connector; a plurality of cavities are formed inside the needle sheath, and each probe is movably disposed in a corresponding cavity; a through hole is formed on one side of the needle sheath, the through hole being connected to each cavity and forming an airflow channel; a mounting hole is formed on the protrusion of one side of the fixing plate, and the tracheal connector passes through the mounting hole and the through hole in sequence.
[0019] A testing apparatus comprising the multi-stage elastic probe assembly described in any of the preceding embodiments.
[0020] Compared with the prior art, this disclosure has at least the following advantages:
[0021] 1) Since each probe is movably disposed within the needle sleeve, each probe is connected to the driving end of the first driver through a corresponding elastic guide; this allows the first driver to drive the corresponding elastic guide to reciprocate, thereby moving the corresponding probe; simultaneously, in conjunction with the use of the elastic guide, multiple probes can make good contact with and adhere to the surface of the small electrode post, effectively increasing the contact points with the small electrode post, better adapting to the microscopic unevenness of the small electrode post surface, effectively reducing the contact gap between the rigid probe and the small electrode post, and the elastic guide can provide better force buffering for the small electrode post, effectively reducing the problem of poor contact and adhesion caused by uneven force on the small electrode post, thereby effectively reducing the misjudgment rate of batch testing and achieving a good improvement effect.
[0022] 2) Since the floating connector is movably located at the end of the fixed plate away from the needle sleeve; the driving end of the second driver is connected to the floating connector, enabling the second driver to drive the fixed plate to reciprocate along the mounting base, so that the added floating connector can better buffer and adjust the force on the multiple probes of the fixed plate and the needle sleeve; further reducing the problem of poor contact and adhesion caused by uneven force on the small pole piece, further reducing the misjudgment rate of batch testing, especially suitable for batch testing of small pole piece cells with a diameter of less than 2mm. Attached Figure Description
[0023] To more clearly illustrate the technical solutions of the embodiments of this disclosure, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this disclosure and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0024] Figure 1 This is a schematic diagram of a one-direction structure of a multi-stage elastic probe assembly according to an embodiment of the present invention;
[0025] Figure 2 for Figure 1 A cross-sectional view of the multi-stage elastic probe assembly shown in one direction;
[0026] Figure 3 for Figure 1 A schematic diagram of the multi-stage elastic probe assembly from another direction is shown.
[0027] Figure 4 for Figure 3 A magnified view of the area shown at point A in the middle.
[0028] Reference numerals: 10, Multi-stage elastic probe assembly; 100, Mounting base; 200, Elastic probe module; 210, Fixing plate; 211, Buffer cavity; 212, Extension stage; 213, Limiting cavity; 214, Mounting hole; 220, Needle sleeve; 221, Cavity; 222, Through hole; 230, Probe; 240, Elastic guide; 241, First spring; 242, Positioning element; 250, First actuator; 300, Floating module; 310, Elastic element; 320, Floating connector; 321, First limiting element; 322, Movable rod; 323, Second limiting element; 330, Second actuator; 400, Pressure gauge; 500, Air tube connector; 510, Adapter; 520, Hose. Detailed Implementation
[0029] To facilitate understanding of this disclosure, a more complete description will be given below with reference to the accompanying drawings, which illustrate preferred embodiments of the present disclosure. However, this disclosure can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure.
[0030] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly attached to the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.
[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of this disclosure. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.
[0032] To better understand the technical solutions and beneficial effects of this disclosure, the following detailed description is provided in conjunction with specific embodiments:
[0033] Please see Figures 1 to 3One embodiment of the multi-stage elastic probe assembly 10 includes a mounting base 100, an elastic probe module 200, and a floating module 300. The elastic probe module 200 includes a fixing plate 210, a needle sleeve 220, multiple probes 230, multiple elastic guides 240, and multiple first drivers 250. The fixing plate 210 is slidably disposed on the mounting base 100. The needle sleeve 220 is disposed at one end of the fixing plate 210. Each probe 230 is movably disposed within the needle sleeve 220. Each probe 230 is connected to the driving end of the first driver 250 through a corresponding elastic guide 240. The device 250 can drive the corresponding elastic guide 240 to reciprocate, thereby driving the corresponding probe 230 to move. At the same time, with the use of the elastic guide 240, multiple probes 230 can make good contact with the surface of the small pole, effectively increasing the contact points with the small pole to better adapt to the micro-unevenness of the small pole surface, effectively reducing the contact gap between the rigid probe 230 and the small pole. Furthermore, the elastic guide 240 can provide better force buffer for the small pole, effectively reducing the problem of poor contact and adhesion caused by uneven force on the small pole, thereby effectively reducing the misjudgment rate of batch testing and achieving a good improvement effect.
[0034] Furthermore, since the floating module 300 includes a floating connector 320 and a second driver 330; the floating connector 320 is movably disposed at the end of the fixed plate 210 away from the needle sleeve 220, and the driving end of the second driver 330 is connected to the floating connector 320, the second driver 330 can drive the fixed plate 210 to reciprocate along the mounting base 100, so that the added floating connector 320 can better buffer and adjust the force on the multiple probes 230 of the fixed plate 210 and the needle sleeve 220; further reducing the problem of poor contact and adhesion caused by uneven force on the small electrode post, and further reducing the misjudgment rate of batch testing, especially suitable for batch testing of small electrode post cells with a diameter of less than 2mm.
[0035] In this embodiment, the steps of the multi-stage elastic probe assembly 10 to test a small electrode cell are as follows: First, the second driver 330 drives the fixing plate 210 to press down on the small electrode, so that the multiple probes 230 on the needle sleeve 220 can abut against the surface of the small electrode; then, by adjusting the first driver 250, the multiple probes 230 can fit well against the surface of the small electrode, effectively reducing the contact gap between the multiple probes 230 and the small electrode; when the contact area between the multiple probes 230 and the small electrode reaches more than 80%, the contact between the multi-stage elastic probe assembly 10 and the small electrode is deemed qualified, and testing can be carried out.
[0036] In one embodiment, the end of the probe 230 facing away from the first driver 250 is a contact point to ensure that the contact point of the probe 230 can make contact with the surface of the small pole piece to conduct electricity, thereby ensuring the normal operation of the test.
[0037] In one embodiment, the sum of the contact areas of each of the probes 230 is not less than 80% of the surface area of a single micropole, so as to ensure that the contact points of the multiple probes 230 can divide the surface area of a single micropole into multiple test points, thereby ensuring that the contact points of the multiple probes 230 can well adapt to the micro-irregularity of the micropole surface and effectively reduce the contact gap between the rigid probe 230 and the micropole.
[0038] In one embodiment, the probes 230 are arranged in a matrix to ensure that the multiple matrices of probes 230 can well adapt to the microscopic unevenness of the micro-terminal surface, effectively reducing the contact gap between the rigid probes 230 and the micro-terminal. (See also...) Figure 3 .
[0039] It should be noted that in practical applications, during batch testing of battery cells with small terminals less than 2mm in diameter, the smaller surface area of these terminals makes them prone to uneven stress during batch testing, leading to poor contact and a high false positive rate. Therefore, this application divides the surface area of a single small terminal into multiple test points. This ensures that the stress required for a single batch test is met, while also ensuring relatively uniform stress distribution on the small terminals, effectively preventing damage or poor contact caused by uneven stress on individual terminals during batch testing.
[0040] In one embodiment, the diameter of the probe 230 is 10μm to 20μm; the number of probes 230 is 100 to 200; the spacing between the probes 230 is 0.02mm to 0.10mm; and the diameter of a single micropole is less than 2mm, so as to ensure that the sum of the contact areas of multiple probes 230 can better adapt to the batch testing of a single micropole with a diameter of less than 2mm.
[0041] In one embodiment, the probe 230 is a nanoscale tungsten-copper alloy probe 230.
[0042] In one embodiment, a diamond layer and a silver-graphene composite conductive layer are sequentially formed on the surface of the nano-tungsten-copper alloy probe 230. Since the diamond layer has high wear resistance, it can improve the service life of the nano-tungsten-copper alloy probe 230; and since the silver-graphene composite conductive layer has good conductivity, it can ensure the normal operation of the test.
[0043] like Figure 3 and Figure 4As shown, in one embodiment, the elastic guide 240 includes a first spring 241 and a positioning member 242. The probe 230 is connected to the driving end of the first driver 250 through the positioning member 242. The first spring 241 is sleeved on the positioning member 242 and is connected to the driving ends of the probe 230 and the first driver 250 respectively, so that the first driver 250 can drive the corresponding probe 230 to move when driving the positioning member 242 to move, so as to realize the individual movement of a single probe 230, ensuring that multiple probes 230 can well adapt to the micro-unevenness of the small electrode surface, and effectively ensuring good contact and fit between multiple probes 230 and the small electrode.
[0044] In one embodiment, the first actuator 250 is a miniature electric cylinder or a miniature motor.
[0045] In one embodiment, the floating module 300 further includes an elastic element 310, through which the floating connector 320 is connected to the fixed plate 210; the added elastic element 310 can buffer the force on the fixed plate 210 and the multiple probes 230 of the needle sleeve 220. In one embodiment, a buffer cavity 211 is formed at the end of the fixed plate 210 away from the needle sleeve 220, and the elastic element 310 is disposed in the buffer cavity 211; the floating connector 320 is movably connected to the side wall of the buffer cavity 211 through the elastic element 310, and the floating connector 320 at least partially protrudes from the buffer cavity 211 to achieve an elastic connection between the floating connector 320 and the fixed plate 210, so as to ensure that the elastic element 310 can better buffer the force on the fixed plate 210 and the multiple probes 230, effectively reducing the problem of poor contact and fit caused by uneven force on the small electrode posts.
[0046] like Figure 1 and Figure 4 As shown, in one embodiment, the fixing plate 210 is formed with an extension platform 212, and the needle sleeve 220 is disposed on the extension platform 212 to ensure that the multiple probes 230 on the extension platform 212 can make good contact with and fit the surface of the small electrode post, so as to better adapt to the micro-unevenness of the surface of the small electrode post.
[0047] like Figure 3As shown, in one embodiment, the floating connector 320 includes a first limiting member 321, a movable rod 322, and a second limiting member 323. The movable rod 322 is movably disposed within the buffer cavity 211 and at least partially protrudes from the buffer cavity 211. The first limiting member 321 is disposed at the first end of the movable rod 322 located within the buffer cavity 211 and is connected to the side wall of the buffer cavity 211 via the elastic member 310. The second limiting member 323 is disposed at the second end of the movable rod 322 protruding from the buffer cavity 211. The second limiting member 323 is connected to the driving end of the second driver 330 to ensure that the floating connector 320 can reliably and stably move within the buffer cavity 211 under the action of the second driver 330, thereby allowing the elastic member 310 to effectively buffer the forces on the adjusting fixing plate 210 and the multiple probes 230.
[0048] In one embodiment, the first limiting member 321 and the second limiting member 323 are larger than the movable opening of the buffer cavity 211 to ensure that the floating joint 320 can reliably and stably move within the buffer cavity 211 without falling off.
[0049] like Figure 1 and Figure 3 As shown, in one embodiment, the fixed plate 210 further forms a limiting cavity 213 communicating with the buffer cavity 211; the pressure gauge 400 is disposed in the limiting cavity 213, and the elastic member 310 extends into the limiting cavity 213 and is connected to the pressure gauge 400, so as to realize the independent setting of the pressure gauge 400 and the floating joint 320, thereby effectively ensuring that the pressure gauge 400 and the floating joint 320 do not interfere with each other during operation.
[0050] like Figure 1 As shown, in one embodiment, the elastic element 310 is a second spring, the limiting cavity 213 is formed with a through hole, the limiting cavity 213 is connected to the buffer cavity 211 through the through hole, the second spring passes through the through hole and extends into the limiting cavity 213, and is connected to the pressure gauge 400, so as to realize the connection of the pressure gauge 400, the elastic element 310 and the floating joint 320.
[0051] like Figure 3 and Figure 4As shown, in one embodiment, the multi-stage elastic probe assembly 10 further includes a tracheal connector 500; a plurality of cavities 221 are formed within the needle sleeve 220, and each probe 230 is movably disposed within a corresponding cavity 221 to achieve movable placement of the plurality of probes 230 within the needle sleeve 220; furthermore, a through hole 222 is formed on one side of the needle sleeve 220, the through hole 222 respectively connecting to each cavity 221 and forming an airflow channel; the extension of one side of the fixing plate 210 The platform 212 has a mounting hole 214. The air pipe connector 500 passes through the mounting hole 214 and the through hole 222 in sequence. When the air pipe connector 500 is connected to an external air supply device, the gas can enter the through hole 222 through the air pipe connector 500, and then enter the cavity 221 through the through hole 222. Finally, it flows out through the airflow channel, which can effectively blow away the metal debris or electrolyte remaining on the surface of the small electrode post, thereby ensuring good contact and adhesion between the multiple probes 230 and the small electrode post, and thus ensuring the accuracy of the test.
[0052] In one embodiment, the first actuator 250 is disposed on one side of the cavity 221. For example... Figure 4 As shown, in one embodiment, the endotracheal connector 500 includes a connected adapter 510 and a flexible tube 520. The adapter 510 passes through the mounting hole 214 and the through hole 222 in sequence to achieve communication between the adapter 510 and the fixing plate 210 and the needle sleeve 220.
[0053] This application also provides a testing apparatus, including the multi-stage elastic probe assembly 10 described in any of the above embodiments. There are multiple multi-stage elastic probe assemblies 10 and multiple small electrode cells, with each multi-stage elastic probe assembly 10 corresponding to one of the small electrode cells.
[0054] When testing a batch of small-pole cells, each multi-stage elastic probe assembly 10 corresponds to one small-pole cell. This can be achieved by simultaneously activating the second driver 330 of the multi-stage elastic probe assembly 10, so that the multiple probes 230 of each multi-stage elastic probe assembly 10 can contact the surface of the corresponding small pole. Then, by adjusting the first driver 250 of the multi-stage elastic probe assembly 10, the multiple probes 230 of each multi-stage elastic probe assembly 10 can fit well against the surface of the corresponding small pole. When the contact area between the multiple probes 230 of each multi-stage elastic probe assembly 10 and the small pole reaches more than 80%, the contact between the multi-stage elastic probe assembly 10 and the corresponding small pole is deemed qualified, and batch testing of multiple small-pole cells can be initiated, thus completing the batch testing operation of the small-pole cells. Since the multiple probes 230 of each multi-stage elastic probe assembly 10 can well adapt to the micro-unevenness of the small pole surface, the contact gap between the rigid probe 230 and the small pole is effectively reduced, thereby effectively reducing the misjudgment rate of batch testing and achieving a good improvement effect.
[0055] Compared with the prior art, this disclosure has at least the following advantages:
[0056] 1) Since each probe 230 is movably disposed within the needle sleeve 220, each probe 230 is connected to the driving end of the first driver 250 through the corresponding elastic guide 240; this allows the first driver 250 to drive the corresponding elastic guide 240 to reciprocate, thereby driving the corresponding probe 230 to move; at the same time, with the use of the elastic guide 240, multiple probes 230 can make good contact with and adhere to the surface of the small electrode post, effectively increasing the contact points with the small electrode post, so as to better adapt to the microscopic unevenness of the surface of the small electrode post, effectively reducing the contact gap between the rigid probe 230 and the small electrode post, and the elastic guide 240 can provide better force buffer for the small electrode post, effectively reducing the problem of poor contact and adhesion caused by uneven force on the small electrode post, thereby effectively reducing the misjudgment rate of batch testing and achieving a good improvement effect.
[0057] 2) Since the floating connector 320 is movably disposed at the end of the fixed plate 210 away from the needle sleeve 220; the driving end of the second driver 330 is connected to the floating connector 320, so that the second driver 330 can drive the fixed plate 210 to reciprocate along the mounting base 100, so that the added floating connector 320 can better buffer and adjust the force on the multiple probes 230 of the fixed plate 210 and the needle sleeve 220; further reduce the problem of poor contact and adhesion caused by uneven force on the small pole, further reduce the misjudgment rate of batch testing, especially suitable for batch testing of small pole cells with a diameter of less than 2mm.
[0058] The embodiments described above are merely illustrative of several implementations of this disclosure, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the disclosed patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this disclosure, and these all fall within the protection scope of this disclosure. Therefore, the protection scope of this patent should be determined by the appended claims.
Claims
1. A multi-stage elastic probe assembly, characterized in that, include: Mounting base (100); The elastic probe module (200) includes a fixing plate (210), a needle sleeve (220), multiple probes (230), multiple elastic guides (240), and multiple first drivers (250); the fixing plate (210) is slidably disposed on the mounting base (100), the needle sleeve (220) is disposed at one end of the fixing plate (210), and each probe (230) is movably disposed within the needle sleeve (220); each probe (230) is connected to the driving end of the first driver (250) through the corresponding elastic guide (240); The floating module (300) includes a floating connector (320) and a second driver (330); the floating connector (320) is movably disposed at one end of the fixed plate (210) away from the needle sleeve (220); the driving end of the second driver (330) is connected to the floating connector (320).
2. The multi-stage elastic probe assembly according to claim 1, characterized in that, The sum of the contact areas of each of the probes (230) is not less than 80% of the surface area of a single micropole.
3. The multi-stage elastic probe assembly according to claim 2, characterized in that, The diameter of the probe (230) is 10μm to 20μm; the number of probes (230) is 100 to 200, and the spacing between the probes (230) is 0.02mm to 0.10mm; and / or, The probe (230) is a nanoscale tungsten-copper alloy probe (230); and / or, The probes (230) are arranged in a matrix.
4. The multi-stage elastic probe assembly according to claim 1, characterized in that, The elastic guide (240) includes a first spring (241) and a positioning member (242). The probe (230) is connected to the driving end of the first driver (250) through the positioning member (242). The first spring (241) is sleeved on the positioning member (242) and is connected to the driving end of the probe (230) and the first driver (250) respectively.
5. The multi-stage elastic probe assembly according to claim 1, characterized in that, The floating module (300) also includes an elastic element (310), and the floating joint (320) is connected to the fixed plate (210) through the elastic element (310).
6. The multi-stage elastic probe assembly according to claim 5, wherein a buffer cavity (211) is formed at one end of the fixed plate (210) away from the needle sleeve (220), and the elastic element (310) is disposed in the buffer cavity (211); the floating connector (320) is movably connected to the side wall of the buffer cavity (211) through the elastic element (310), and the floating connector (320) at least partially protrudes from the buffer cavity (211).
7. The multi-stage elastic probe assembly according to claim 6, characterized in that, The floating connector (320) includes a first limiting member (321), a movable rod (322), and a second limiting member (323). The movable rod (322) is movably disposed within the buffer cavity (211) and at least partially protrudes from the buffer cavity (211). The first limiting member (321) is disposed at the first end of the movable rod (322) located within the buffer cavity (211), and the first limiting member (321) is connected to the side wall of the buffer cavity (211) through the elastic member (310). The second limiting member (323) is disposed at the second end of the movable rod (322) protruding from the buffer cavity (211). The second limiting member (323) is connected to the driving end of the second driver (330).
8. The multi-stage elastic probe assembly according to any one of claims 6-7, characterized in that, The fixing plate (210) also forms a limiting cavity (213) communicating with the buffer cavity (211); the pressure gauge (400) is disposed in the limiting cavity (213), and the elastic element (310) extends into the limiting cavity (213) and is connected to the pressure gauge (400).
9. The multi-stage elastic probe assembly according to claim 8, characterized in that, The multi-stage elastic probe assembly also includes a tracheal connector (500); a plurality of cavities (221) are formed inside the needle sleeve (220), and each probe (230) is movably disposed in the corresponding cavity (221); a through hole (222) is formed on one side of the needle sleeve (220), and the through hole (222) is connected to each cavity (221) and forms an airflow channel; an extension platform (212) on one side of the fixing plate (210) is formed with a mounting hole (214), and the tracheal connector (500) passes through the mounting hole (214) and the through hole (222) in sequence.
10. A testing apparatus, characterized in that, The multi-stage elastic probe assembly includes any one of claims 1-9.