A temperature control device

Abstract

The utility model provides a kind of temperature control equipment, it is related to semiconductor temperature control technical field.The temperature control equipment includes refrigeration system and circulation system, on the basis described above, circulation system further includes circulating pump, electric refrigerating sheet, load and switching valve.Switching valve is used to change the flow path of cooling liquid in circulation system, with the first conduction state of the cold end of electric refrigerating sheet in series and the second conduction state of the cold end of electric refrigerating sheet not in series.Through the design, the cold end of electric refrigerating sheet can precool or auxiliary cooling circulating cooling liquid, effectively reduce the refrigeration load of refrigeration system;At the same time, its hot end can be used to heat cooling liquid, realize temperature promotion or high-precision temperature compensation.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor temperature control technology, and more specifically, to a temperature control device. Background Technology

[0002] In existing semiconductor temperature control systems, in order to accurately control the liquid supply temperature to meet different process requirements, electric heaters need to be frequently intervened for temperature fine-tuning.

[0003] However, the inventors discovered that the electric heater is one of the main energy-consuming devices, resulting in high energy consumption for the entire temperature control system. Utility Model Content

[0004] Therefore, it is necessary to propose an alternative solution to address the problem of high energy consumption in temperature control systems caused by traditional high-energy-consuming electric heating devices in existing technologies, thereby reducing the overall power consumption of the temperature control system and improving energy efficiency.

[0005] This utility model provides a temperature control device, comprising: The refrigeration system includes a first side of a first heat exchange element; The circulation system includes a second side of a first heat exchange element, a circulation pump, an electric cooling chip, a load, and a switching valve; wherein the switching valve has a first conducting state and a second conducting state. When the switching valve is in the first conducting state, the load, the second side of the first heat exchange element, the circulation pump and the hot end of the electrothermal chip are connected in series to form the first coolant circulation loop. When the switching valve is in the second conducting state, the load, the cold end of the electrothermal chip, the second side of the first heat exchange element, the circulation pump, and the hot end of the electrothermal chip are connected in series to form a second coolant circulation loop.

[0006] The beneficial effects of the temperature control device provided in this embodiment of the utility model include: By utilizing the cold end of the electrothermal element to pre-cool or assist in cooling the circulating coolant, the load on the refrigeration system is effectively reduced. Simultaneously, its hot end is used to heat the coolant, achieving temperature increase or high-precision temperature compensation. Therefore, this invention fully utilizes the bidirectional thermoelectric characteristics of the electrothermal element to replace traditional high-energy-consuming electric heating devices, significantly reducing the overall system power consumption and achieving energy-saving, consumption-reducing, and energy-efficient technical effects. Attached Figure Description

[0007] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0008] Figure 1 This is a schematic diagram of the temperature control device provided in this embodiment; Figure 2 This is a schematic diagram of the switching valve in its first conducting state as provided in this embodiment; Figure 3 This is a schematic diagram of the switching valve in the second conducting state provided in this embodiment; Figure 4 This is a schematic diagram of the structure of the first refrigerant circulation loop provided in this embodiment; Figure 5 This is a schematic diagram of the second refrigerant circulation loop provided in this embodiment; Figure 6 This is a schematic diagram of the third refrigerant circulation loop provided in this embodiment.

[0009] Icons: 100-Temperature control equipment; 110-Refrigeration system; 130-Circulation system; 150-Process cooling water system; 1-Compressor; 2-Second temperature sensor; 3-Second pressure sensor; 4-Second heat exchange element; 5-Fourth temperature sensor; 6-Third throttling and pressure reducing element; 7-Second throttling and pressure reducing element; 8-First throttling and pressure reducing element; 9-First heat exchange element; 10-First temperature sensor; 11-First pressure sensor; 12-Circulation pump; 13-Electrically cooled refrigerating element; 14-Third temperature sensor; 15-Load; 16-Switching valve; 17-Expansion tank. Detailed Implementation

[0010] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0011] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0012] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0013] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0014] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0015] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0016] The following describes in detail the overall structure, working principle, and technical effects of the temperature control device provided by this utility model through embodiments and in conjunction with the accompanying drawings.

[0017] Please see Figure 1 This invention provides a temperature control device 100, which is applied in the field of semiconductor temperature control technology. The temperature control device 100 includes a refrigeration system 110 and a circulation system 130, which are thermally coupled through a common first heat exchange element 9.

[0018] Specifically, the refrigeration system 110 includes a first side of the first heat exchange element 9 for the flow of refrigerant; the circulation system 130 includes a second side of the first heat exchange element 9 for the flow of coolant. That is, the refrigerant and coolant flow on the first and second sides of the first heat exchange element 9 respectively, and exchange heat through the heat transfer wall, thereby achieving effective regulation of the coolant temperature in the circulation system 130.

[0019] Based on the above, the circulation system 130 also includes a circulation pump 12, an electrothermal cooling chip 13, a load 15, and a switching valve 16. The circulation pump 12 provides driving power to continuously circulate the coolant within the circulation system 130; the load 15 represents a semiconductor process component requiring temperature regulation, and the coolant absorbs the heat generated by the load 15 as it flows through, forming a high-temperature return liquid; the electrothermal cooling chip 13 is a thermoelectric cooling module, which cools at one end and heats at the other when energized, providing bidirectional thermal management capabilities; the switching valve 16 changes the flow path of the coolant in the circulation system, having a first conducting state and a second conducting state.

[0020] like Figure 2 As shown, when the switching valve 16 is in the first conducting state, the load 15, the second side of the first heat exchange element 9, the circulation pump 12, and the hot end of the electrothermal chip 13 are connected in series to form a first coolant circulation loop. In this mode, the high-temperature coolant from the load 15 first flows through the second side of the first heat exchange element 9, achieving cooling through heat exchange with the refrigerant on the first side; then, driven by the circulation pump 12, the coolant enters the hot end of the electrothermal chip 13, is rapidly heated to the target temperature, and returns to the load 15. Coarse adjustment of the coolant temperature is achieved through heat exchange between the second side and the first side of the first heat exchange element 9. Normally, the coolant temperature after flowing through the second side of the first heat exchange element 9 is slightly lower than the target temperature. Fine adjustment of the coolant temperature is achieved through the electrothermal chip 13 to reach the target temperature.

[0021] like Figure 3 As shown, when the switching valve 16 is in the second conducting state, the load 15, the cold end of the electrothermal chip 13, the second side of the first heat exchange element 9, the circulation pump 12, and the hot end of the electrothermal chip 13 are connected in series to form a second coolant circulation loop. In this mode, the high-temperature coolant from the load 15 first flows through the cold end of the electrothermal chip 13 and is forced to pre-cool to reduce its temperature; then it enters the second side of the first heat exchange element 9 for further heat dissipation, and after being transported by the circulation pump 12, it flows through the hot end of the electrothermal chip 13 for heating and regulation, finally reaching the set target supply temperature.

[0022] As can be seen from the above, the temperature control device 100 provided by this utility model fully utilizes the bidirectional thermoelectric characteristics of the electric cooling element 13, which heats at the hot end and cools at the cold end. Specifically, the cold end of the electric cooling element 13 can pre-cool or assist in cooling the circulating coolant, effectively reducing the cooling load of the refrigeration system 110; at the same time, its hot end can be used to heat the coolant, achieving temperature rise or high-precision temperature compensation, thereby replacing the traditional high-energy-consuming electric heating device.

[0023] Therefore, by working in tandem with the hot and cold ends of the electrothermal element 13, this utility model achieves efficient energy utilization for both cooling and heating functions, significantly reduces overall operating power consumption, and achieves the beneficial effects of energy saving, consumption reduction, and improved system energy efficiency.

[0024] Please refer to it again. Figure 1 The switching valve 16 is a three-way valve used to regulate the flow path of the coolant in the circulation system 130, enabling switching between different temperature control modes. Specifically, the three-way valve includes port a, port b, and port c. Port a of the three-way valve is connected to the outlet end of the load 15 to receive the high-temperature return liquid flowing out of the load 15. Port b of the three-way valve is connected to the cold end inlet of the electrothermal chip 13. In the second conducting state, ports a and b of the three-way valve are connected, allowing the high-temperature return liquid to enter the cold end of the electrothermal chip 13 for pre-cooling. Port c of the three-way valve is connected to the second side inlet of the first heat exchange element 9. In the first conducting state, ports a and c of the three-way valve are connected, allowing the high-temperature return liquid to flow directly into the first heat exchange element 9 for cooling.

[0025] During the operation of the temperature control equipment 100, the coolant undergoes frequent temperature changes due to the heating or cooling requirements of the process load 15, resulting in significant volume fluctuations due to thermal expansion and contraction. To address this, an expansion tank 17 is connected in series upstream of the second side of the first heat exchange element 9. This expansion tank 17 serves as a compensation device for coolant volume changes, absorbing or replenishing the increase or decrease in liquid volume caused by temperature variations to maintain stable system pressure.

[0026] Please see Figure 4 The refrigeration system 110 also includes a compressor 1, a first side of a second heat exchange element 4, and a first throttling and pressure reducing element 8. The compressor 1, the first side of the second heat exchange element 4, the first throttling and pressure reducing element 8, and the first side of the first heat exchange element 9 are connected in series to form a first refrigerant circulation loop.

[0027] In the first refrigerant cycle loop, the high-temperature, high-pressure gaseous refrigerant is discharged from the compressor 1 and enters the first side of the second heat exchange element 4. During this process, the refrigerant releases heat to the external environment and undergoes a phase change, condensing into a high-pressure liquid refrigerant. Subsequently, the liquid refrigerant flows through the first throttling and pressure-reducing element 8, undergoes a throttling and expansion process, and its pressure and temperature decrease significantly, transforming into a low-temperature, low-pressure refrigerant. Then, the low-temperature, low-pressure refrigerant flows into the first side of the first heat exchange element 9, where it absorbs heat from the coolant and evaporates into a low-temperature, low-pressure gaseous refrigerant. Finally, the gaseous refrigerant returns to the inlet of the compressor 1, completing a complete refrigeration cycle.

[0028] Please refer to it again. Figure 1The temperature control device 100 also includes a process cooling water system 150, which is thermally coupled to the refrigeration system 110 through a shared second heat exchange element 4. Specifically, the process cooling water system 150 is connected to the second side of the second heat exchange element 4.

[0029] Understandably, the second heat exchange element 4 serves as a key heat exchange interface between the refrigeration system 110 and the process cooling water system 150. Its first side participates in the first refrigerant circulation loop to circulate high-pressure, high-temperature gaseous refrigerant and achieve condensation and heat release. Its second side is connected to the process cooling water system 150 to circulate low-temperature cooling water or other suitable liquid cooling media, absorbing the condensation heat from the refrigerant and returning it to the external cooling facility.

[0030] In an optional embodiment of this utility model, the first throttling and pressure-reducing element 8 is an electronic expansion valve. When an electronic expansion valve is used as a throttling device, it can dynamically adjust the valve opening in real time according to the system operating status, and precisely control the refrigerant flow entering the first heat exchange element 9, thereby realizing closed-loop optimization management of cooling capacity.

[0031] In another alternative embodiment, the first throttling and pressure-reducing element 8 is a capillary tube. A capillary tube is a copper tube with a small inner diameter and a long length, which achieves passive throttling and pressure reduction of the refrigerant through frictional resistance along the friction and local contraction effect.

[0032] To further reduce the operating energy consumption of compressor 1, such as Figure 5 As shown, the refrigeration system 110 also includes a second throttling and pressure-reducing element 7, which is connected in series with the compressor 1 to form a second refrigerant circulation loop. Specifically, a branch of the high-temperature, high-pressure gaseous refrigerant discharged from the compressor 1 is throttled and pressure-reduced by the second throttling and pressure-reducing element 7, transforming it into a medium-temperature, medium-pressure refrigerant. Subsequently, this refrigerant is introduced to the suction side of the compressor 1, where it merges and mixes with the low-temperature gaseous refrigerant evaporated from the first heat exchange element 9, and returns to the compressor 1 for recompression, completing the cycle.

[0033] like Figure 6As shown, in another optional embodiment of this utility model, the refrigeration system 110 further includes a third throttling and pressure-reducing element 6, and the compressor 1, the first side of the first heat exchange element 9, and the third throttling and pressure-reducing element 6 are connected in series to form a third refrigerant circulation loop. Specifically, after the high-temperature and high-pressure gaseous refrigerant is discharged from the compressor 1, it directly enters the first side of the first heat exchange element 9. Here, part of the refrigerant is diverted to the third throttling and pressure-reducing element 6, undergoes a throttling and pressure-reducing process, and is converted into a medium-temperature and medium-pressure refrigerant. Subsequently, the refrigerant is introduced to the suction side of the compressor 1, and merges and mixes with the low-temperature gaseous refrigerant evaporated from the first heat exchange element 9, and returns to the compressor 1 for recompression to complete the cycle.

[0034] Optionally, the refrigeration system 110 is equipped with both a second throttling and pressure-reducing element 7 and a third throttling and pressure-reducing element 6, so that the refrigerants in the first, second, and third refrigerant circulation loops converge on the intake side of the compressor 1 and flow back to the compressor 1 together. With this configuration, the first, second, and third refrigerant circulation loops can operate independently or collaboratively according to operational requirements.

[0035] Furthermore, similar to the aforementioned first throttling and voltage-reducing element 8, the second throttling and voltage-reducing element 7 and the third throttling and voltage-reducing element 6 can all be selected from throttling structures such as electronic expansion valves or capillary tubes. The specific type can be adapted according to the actual application requirements for adjustment accuracy, response speed and cost.

[0036] In addition, a drying and filtering device can be connected in series upstream of the air inlet of the compressor 1 to ensure the long-term stable operation of the refrigeration system 110.

[0037] Please refer to it again. Figure 1 The refrigeration system 110 also includes a first temperature sensor 10 and a first pressure sensor 11. The first temperature sensor 10 and the first pressure sensor 11 are both connected in series upstream of the air inlet of the compressor 1 to monitor the temperature and pressure of the refrigerant before it enters the compressor 1 in real time.

[0038] Accordingly, the refrigeration system 110 also includes a second temperature sensor 2 and a second pressure sensor 3. The second temperature sensor 2 and the second pressure sensor 3 are both connected in series downstream of the outlet of the compressor 1 to monitor the temperature and pressure of the refrigerant flowing out of the compressor 1 in real time.

[0039] In addition, a fourth temperature sensor 5 may be provided downstream of the first outlet end of the second heat exchange element 4 to monitor the temperature of the refrigerant flowing out of the second heat exchange element 4 after condensation in real time.

[0040] Please refer to it again. Figure 1The circulation system 130 also includes a third temperature sensor 14, which is connected in series upstream of the inlet of the load 15 to monitor the liquid supply temperature before it enters the load 15 in real time.

[0041] Optionally, to further reduce the energy consumption of the temperature control device 100, the compressor 1 and the circulation pump 12 in the aforementioned embodiment are respectively a variable frequency compressor 1 and a variable frequency circulation pump 12.

[0042] Furthermore, it should be noted that in an optional embodiment of this utility model, if the first throttling and pressure reducing element 8, the second throttling and pressure reducing element 7, and the third throttling and pressure reducing element 6 are respectively adopted as the first electronic expansion valve, the second electronic expansion valve, and the third electronic expansion valve, then the operating frequency of the compressor 1 can be used as the main control variable to coordinate and control the opening degree of each electronic expansion valve and the power output of the electric cooling chip 13, thereby realizing the linkage adjustment between multiple actuators.

[0043] In this embodiment, the operating frequency of compressor 1 is continuously adjustable within the range of minimum value Fmin to maximum value Fmax, with an adjustable range ΔF = Fmax - Fmin. Correspondingly, the opening degree of the first electronic expansion valve can be adjusted between the minimum value E1min and the maximum value E1max, with an adjustable range ΔE1 = E1max - E1min; the opening degree of the second electronic expansion valve can be adjusted between the minimum value E2min and the maximum value E2max, with an adjustable range ΔE2 = E2max - E2min; the opening degree of the third electronic expansion valve can be adjusted between the minimum value E3min and the maximum value E3max, with an adjustable range ΔE3 = E3max - E3min; and the operating power of the electric cooling element 13 can be adjusted between the minimum value Hmin and the maximum value Hmax, with an adjustable range ΔH = Hmax - Hmin.

[0044] Based on this, if the current frequency of compressor 1 is F, then the current opening degree of the first electronic expansion valve is {E1min + (ΔE1 / ΔF)(F - Fmin)}; the current opening degree of the second electronic expansion valve is {E2min + (ΔE2 / ΔF)(F - Fmin)}; the current opening degree of the third electronic expansion valve is {E3min + (ΔE3 / ΔF)(F - Fmin)}; and the current output power of the electric cooling chip 13 is {Hmin + (ΔH / ΔF)(F - Fmin)}.

[0045] In summary, this utility model provides a temperature control device 100, which includes a refrigeration system 110 and a circulation system 130, which are thermally coupled through a shared first heat exchange element 9. Based on the above, the circulation system 130 also includes a circulation pump 12, an electrothermal element 13, a load 15, and a switching valve 16. The switching valve 16 is used to change the flow path of the coolant in the circulation system, having a first conducting state connected in series with the cold end of the electrothermal element 13 and a second conducting state not connected in series with the cold end of the electrothermal element 13. Through this design, the cold end of the electrothermal element 13 can pre-cool or assist in cooling the circulating coolant, effectively reducing the refrigeration load of the refrigeration system 110; simultaneously, its hot end can be used to heat the coolant, achieving temperature increase or high-precision temperature compensation. Therefore, this utility model fully utilizes the bidirectional thermoelectric characteristics of the electrothermal element 13 to replace traditional high-energy-consuming electric heating devices, significantly reducing the overall system power consumption and achieving the technical effects of energy saving, consumption reduction, and improved energy efficiency.

[0046] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A temperature control device, characterized in that, include: A refrigeration system (110) includes a first side of a first heat exchange element (9); The circulation system (130) includes a second side of the first heat exchange element (9), a circulation pump (12), an electric cooling chip (13), a load (15), and a switching valve (16); wherein the switching valve (16) has a first conducting state and a second conducting state. When the switching valve (16) is in the first conducting state, the load (15), the second side of the first heat exchange element (9), the circulation pump (12) and the hot end of the electrothermal chip (13) are connected in series to form a first coolant circulation loop. When the switching valve (16) is in the second conducting state, the load (15), the cold end of the electrothermal chip (13), the second side of the first heat exchange element (9), the circulation pump (12), and the hot end of the electrothermal chip (13) are connected in series to form a second coolant circulation loop.

2. The temperature control device according to claim 1, characterized in that, The refrigeration system (110) further includes a compressor (1), a first side of a second heat exchange element (4), and a first throttling and pressure reducing element (8); and the compressor (1), the first side of the second heat exchange element (4), the first throttling and pressure reducing element (8), and the first side of the first heat exchange element (9) are connected in series to form a first refrigerant circulation loop.

3. The temperature control device according to claim 2, characterized in that, The refrigeration system (110) further includes a second throttling and pressure-reducing element (7), and the second throttling and pressure-reducing element (7) is connected in series with the compressor (1) to form a second refrigerant circulation loop.

4. The temperature control device according to claim 2, characterized in that, The refrigeration system (110) further includes a third throttling and pressure-reducing element (6), and the compressor (1), the first side of the first heat exchange element (9), and the third throttling and pressure-reducing element (6) are connected in series to form a third refrigerant circulation loop.

5. The temperature control device according to claim 2, characterized in that, The first throttling and pressure-reducing element (8) is an electronic expansion valve or a capillary tube.

6. The temperature control device according to claim 2, characterized in that, The temperature control device (100) also includes a process cooling water system (150), which is connected to the second side of the second heat exchange element (4).

7. The temperature control device according to claim 2, characterized in that, The refrigeration system (110) also includes a first temperature sensor (10) and a first pressure sensor (11), both of which are connected in series upstream of the air inlet of the compressor (1).

8. The temperature control device according to claim 2, characterized in that, The refrigeration system (110) also includes a second temperature sensor (2) and a second pressure sensor (3), both of which are connected in series downstream of the outlet of the compressor (1).

9. The temperature control device according to any one of claims 1 to 8, characterized in that, The circulation system (130) also includes a third temperature sensor (14), which is connected in series upstream of the inlet of the load (15).

10. The temperature control device according to any one of claims 1 to 8, characterized in that, The switching valve (16) is a three-way valve, which includes port a, port b and port c; wherein, port a of the three-way valve is connected to the outlet end of the load (15), port b of the three-way valve is connected to the cold end inlet of the electrothermal chip (13), and port c of the three-way valve is connected to the second side inlet of the first heat exchange element (9); in the first conducting state, port a and port c of the three-way valve are connected; in the second conducting state, port a and port b of the three-way valve are connected.

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