Novel cooling device structure arrangement

Abstract

The utility model belongs to the technical field of cooling equipment, especially a novel cooling equipment structure device, including developing machine body, be used for placing wafer to be provided with the placing platform in the inner wall of developing machine body, the bottom end of placing platform is hollow setting, the bottom end of placing platform is connected with the exhaust fan, the outer wall of placing platform is equipped with the coil for radiating, one end of coil is connected with the control mechanism for controlling the switching of pipeline. The novel cooling equipment structure device, through the setting of control mechanism, can gradually reduce the drainage capacity of main pipeline and gradually increase the water inflow of standby pipeline when switching, so that the stability of cooling water entering the coil can be maintained all the time, avoiding the occurrence of water hammer effect and the delay of cooling water supply caused by sudden opening and closing, and through the setting of the exhaust fan, external normal temperature air can be sucked into the inside of the placing platform and discharged therefrom.

Description

Technical Field

[0001] This utility model relates to the field of cooling equipment technology, specifically a novel cooling equipment structure. Background Technology

[0002] In recent years, with the rapid development of emerging fields such as new energy vehicles, artificial intelligence, the Internet of Things, cloud computing, and 5G, the semiconductor manufacturing industry has experienced explosive expansion. The semiconductor manufacturing industry encompasses the manufacturing of semiconductor electronic components such as integrated circuits, discrete devices, optoelectronic devices, and sensors, all of which utilize similar semiconductor manufacturing processes. Among these, photolithography is the most precise and critical process. The development of the photoresist exposed after photolithography requires high-performance equipment and a stable supply. The manufacturing equipment is affected by factors such as pressure, flow rate, and temperature during supply and demand, which reduces product yield.

[0003] The existing technology has the following problems during use: In the process of using the existing equipment, the temperature of the developing section is precisely controlled by circulating cooling water through a single pipeline. However, the single pipeline setting means that the equipment cannot continue to be used when a fault occurs or maintenance is required, and it is inconvenient to continue production operation. Utility Model Content

[0004] The purpose of this utility model is to provide a novel cooling equipment structure to solve the problem of inconvenience for continuous production operation mentioned in the background art. To achieve the above objective, this utility model provides the following technical solution: a novel cooling equipment structure, including a developing machine body, wherein a placement stage for placing wafers is provided in the inner wall of the developing machine body, the bottom end of the placement stage is hollow, an exhaust fan is connected to the bottom end of the placement stage, and a heat dissipation coil is sleeved on the outer wall of the placement stage; One end of the coil is connected to a control mechanism for controlling pipeline switching.

[0005] Preferably, the control mechanism includes a connecting pipe fixed in the inner wall of the developing machine body, the connecting pipe communicating with the coil, a spare pipe connected to the top end of the connecting pipe, the spare pipe extending to the outer wall of the developing machine body, and a control component provided on the outer wall of the spare pipe; The front end of the connecting pipe is connected to a main pipe fixed in the inner wall of the developing machine body, and the external structure of the main pipe is the same as that of the spare pipe. The end of the coil furthest from the connecting pipe is connected to a discharge pipe.

[0006] Preferably, both the main pipeline and the backup pipeline are equipped with one-way valves at their ends, and the main pipeline and the backup pipeline are arranged horizontally.

[0007] Preferably, the control component includes a first switching valve installed on the main pipeline. The outer wall of the first switching valve has an installation groove. A control disc is rotatably connected to the inner groove of the installation groove. A plurality of limit posts are arranged in a circular array at equal intervals on the outer wall of the control disc. The rear end of the control disc is fixedly connected to the front end of the valve stem of the first switching valve. A control plate is inserted into the outer wall of the control disc. A pointed plate is fixedly connected to the side wall of the control plate. A connecting rod is slidably connected to the front end of the control plate via a spline. A compression spring is sleeved on the outer wall of the connecting rod. A driven gear is fixedly connected to the side wall of the connecting rod. A limit plate is rotatably connected to the side wall of the first switching valve via a torsion spring. The limit plate has a convex-shaped structure, and its inner side wall is fitted and connected to the right end of the limit post.

[0008] Preferably, the control component further includes a second switching valve installed on the backup pipeline. The structure of the second switching valve is the same as that of the first switching valve. A toggle gear meshes between the driven gears on the first and second switching valves. A closing sleeve is fixedly fitted on the bottom end of the second switching valve. The top end of the closing sleeve is fixedly connected to the top end of the first switching valve. Both driven gears and the toggle gear are rotatably connected to the inner wall of the closing sleeve. A handle rod is fixedly connected to the front end of the toggle gear, penetrating the inner wall of the closing sleeve. A grip is fixedly connected to the outer wall of the handle rod.

[0009] Preferably, the exhaust fan is fixed on the inner wall of the developing machine body, and an air inlet is provided on the outer wall of the placement table. The top of the air inlet is connected to a ventilation duct, and the right end of the ventilation duct is connected to an air outlet.

[0010] Compared with the prior art, the beneficial effects of this utility model are as follows: In this invention, by setting up a control mechanism, the drainage volume of the main pipeline can be gradually reduced and the water inlet volume of the backup pipeline can be gradually increased when switching between the main pipeline and the backup pipeline. This ensures that the stability of the cooling water entering the coil is always maintained, avoiding water hammer effect caused by sudden opening and closing, as well as delays in the supply of cooling water, which would affect the developing effect.

[0011] In this invention, an additional exhaust fan is provided to draw in ambient temperature air from outside through the placement platform and then exhaust it out, thereby increasing the temperature control effect and preventing overheating. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a cross-sectional view of the control component in this utility model; Figure 3 This is a schematic diagram of the control component structure in this utility model; Figure 4 This utility model Figure 3 Enlarged structural diagram at point A in the middle; Figure 5 This is a three-dimensional structural diagram of the control mechanism in this utility model; Figure 6 This is a cross-sectional view of the placement platform in this utility model.

[0013] In the diagram: 1. Developer body; 2. Placement table; 3. Exhaust fan; 4. Coil; 5. Control mechanism; 51. Connecting pipe; 52. Spare pipe; 53. Control components; 531. First switch valve; 532. Mounting slot; 533. Control panel; 534. Limiting post; 535. Control board; 536. Pointed plate; 537. Connecting rod; 538. Driven gear; 539. Limiting plate; 5310. Second switch valve; 5311. Actuating gear; 5312. Closing sleeve; 5313. Handle lever; 5314. Grip; 54. Main pipe; 55. Discharge pipe; 6. Air inlet; 7. Ventilation duct; 8. Air outlet. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0015] Please see Figures 1 to 6 This utility model provides a technical solution: a novel cooling equipment structure device, including a developing machine body 1, a placement platform 2 for placing wafers is provided in the inner wall of the developing machine body 1, the bottom end of the placement platform 2 is hollow, an exhaust fan 3 is connected to the bottom end of the placement platform 2, and a heat dissipation coil 4 is sleeved on the outer wall of the placement platform 2. One end of the coil 4 is connected to a control mechanism 5 for controlling the switching of the pipeline.

[0016] In this embodiment, as Figure 1 , Figure 2 , Figure 3 and Figure 5 As shown, the control mechanism 5 includes a connecting pipe 51 fixed in the inner wall of the developing machine body 1. The connecting pipe 51 is connected to the coil 4. The top end of the connecting pipe 51 is connected to a spare pipe 52. The spare pipe 52 extends to the outer wall of the developing machine body 1. A control component 53 is provided on the outer wall of the spare pipe 52. The front end of the connecting pipe 51 is connected to the main pipe 54 fixed in the inner wall of the developing machine body 1. The external structure of the main pipe 54 is the same as that of the spare pipe 52. The end of the coil 4 furthest from the connecting pipe 51 is connected to the drain pipe 55. With the main pipe 54 and the backup pipe 52, different pipes can be switched when the equipment water supply fails or needs maintenance, so as to avoid long-term equipment shutdown and affect production.

[0017] In this embodiment, as Figure 2 and Figure 5 As shown, both the main pipe 54 and the backup pipe 52 are equipped with one-way valves at their ends, and the main pipe 54 and the backup pipe 52 are set horizontally. The one-way valves prevent the backflow of cooling water when switching pipes, thus avoiding affecting the water flow rate.

[0018] In this embodiment, as Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, the control component 53 includes a first switching valve 531 installed on the main pipeline 54. The outer wall of the first switching valve 531 has an installation groove 532. A control disk 533 is rotatably connected to the inner groove of the installation groove 532. A number of limit posts 534 are arranged in a circular array at equal intervals on the outer wall of the control disk 533. The rear end of the control disk 533 is fixedly connected to the front end of the valve stem of the first switching valve 531. A control plate 535 is inserted into the outer wall of the control disk 533. A pointed plate 536 is fixedly connected to the side wall of the control plate 535. A connecting rod 537 is slidably connected to the front end of the control plate 535 through a spline. A compression spring is sleeved on the outer wall of the connecting rod 537. A driven gear 538 is fixedly connected to the side wall of the connecting rod 537. A limit plate 539 is rotatably connected to the side wall of the first switching valve 531 via a torsion spring. The limit plate 539 has a convex structure. The inner side wall of the limit plate 539 is attached to the right end of the limit post 534. With the setting of several limit posts 534, when the control plate 535 rotates, the limit posts 534 are locked by the limit plate 539, and the control plate 533 cannot rotate until the pointed plate 536 on the control plate 535 pushes the limit plate 539 open, allowing the control plate 533 to rotate. This continues until the next limit post 534 contacts the limit plate 539 and locks it again, waiting to be triggered again. This achieves intermittent rotation of the control plate 533, thereby intermittently driving the two switching valves to perform one-on-one opening and closing operations, avoiding excessively rapid switching that could affect the use of the equipment.

[0019] In this embodiment, as Figure 2 , Figure 3 , Figure 4 and Figure 5As shown, the control component 53 also includes a second switching valve 5310 installed on the backup pipeline 52. The structure of the second switching valve 5310 is the same as that of the first switching valve 531. A toggle gear 5311 meshes between the driven gears 538 on the first switching valve 531 and the second switching valve 5310. A closing sleeve 5312 is fixedly sleeved on the bottom end of the second switching valve 5310. The top end of the closing sleeve 5312 is fixedly connected to the top end of the first switching valve 531. The two driven gears 538 and the toggle gear 5311 are rotatably connected to the inner wall of the closing sleeve 5312. A handle 5313 that penetrates the inner wall of the closing sleeve 5312 is fixedly connected to the front end of the toggle gear 5311. A handle 5314 is fixedly connected to the outer wall of the handle 5313. The toggle gear 5311 drives the two driven gears 538 to rotate. The switching directions of the first switching valve 531 and the second switching valve 5310 are set in opposite directions, so as to achieve synchronous switching.

[0020] In this embodiment, as Figure 1 , Figure 5 and Figure 6 As shown, the exhaust fan 3 is fixed on the inner wall of the developing machine body 1, and the outer wall of the placement table 2 is provided with an air inlet 6. The top of the air inlet 6 is connected to a ventilation duct 7, and the right end of the ventilation duct 7 is connected to an air outlet 8. By setting the exhaust fan 3, the outside ambient temperature air can be drawn into the interior of the placement table 2 and discharged from it, thereby increasing the temperature control effect and avoiding overheating.

[0021] like Figures 1 to 6As shown, the working process of this novel cooling device is as follows: When switching pipe settings is required, the handle 5314 is rotated clockwise. The handle 5314 drives the actuating gear 5311 to rotate via the handle lever 5313, which in turn drives the two driven gears 538 to rotate counterclockwise. Then, the driven gears 538 drive the control plate 535 to rotate via the connecting rod 537. The control plate 535 is attached to the control disk 533 by a compression spring. However, the limiting post 534 is stuck on the inner wall of the limiting plate 539 at this time. At this time, the control disk 533 cannot rotate, and the control plate 535 rotates itself until the pointed plate 536 on the control plate 535 contacts the top of the limiting plate 539, thus stopping the limiting plate 539. 9. Pushing downwards causes the limiting post 534 to move away from the limiting plate 539. At this time, the control plate 533 is driven to rotate by the friction of the control plate 535 until the next limiting post 534 on the control plate 533 is locked with the limiting plate 539. The above operations are performed in sequence, causing the control plate 533 to drive the valve stem to rotate intermittently. Similarly, since the opening and closing directions of the first switching valve 531 and the second switching valve 5310 are set opposite to each other, when the first switching valve 531 is closed, the second switching valve 5310 is in the open state. By synchronously and intermittently opening and closing the two different valves, the pipeline is switched. The slow opening and closing can maintain the stable flow of cooling water in the coil 4 and avoid sudden opening and closing affecting the flow of cooling water. Finally, when the cooling water circulates through the coil 4, it can maintain the temperature of the placement platform 2. When the temperature is too high, the exhaust fan 3 can draw out the air inside the placement platform 2, so that the air outside the placement platform 2 can be moved out through the air inlet 6 along the ventilation channel 7 from the air outlet 8, and continuously ventilate the outer wall of the placement platform 2 to improve the cooling effect and facilitate temperature adjustment.

[0022] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A novel cooling equipment structure, comprising a developing machine body (1), wherein a placement stage (2) for placing wafers is provided in the inner wall of the developing machine body (1), the bottom end of the placement stage (2) is hollow, and an exhaust fan (3) is connected to the bottom end of the placement stage (2), characterized in that: The outer wall of the placement platform (2) is fitted with a heat dissipation coil (4); One end of the coil (4) is connected to a control mechanism (5) for controlling pipeline switching.

2. The novel cooling equipment structure according to claim 1, characterized in that: The control mechanism (5) includes a connecting pipe (51) fixed in the inner wall of the developing machine body (1), the connecting pipe (51) is connected to the coil (4), the top end of the connecting pipe (51) is connected to a spare pipe (52), the spare pipe (52) extends to the outer wall of the developing machine body (1), and a control component (53) is provided on the outer wall of the spare pipe (52). The front end of the connecting pipe (51) is connected to a main pipe (54) fixed in the inner wall of the developing machine body (1), and the external structure of the main pipe (54) is the same as that of the spare pipe (52). The end of the coil (4) away from the connecting pipe (51) is connected to the discharge pipe (55).

3. The novel cooling equipment structure according to claim 2, characterized in that: Both the main pipe (54) and the backup pipe (52) are equipped with one-way valves at their ends, and the main pipe (54) and the backup pipe (52) are arranged horizontally.

4. The novel cooling equipment structure according to claim 3, characterized in that: The control component (53) includes a first switching valve (531) installed on the main pipeline (54). The outer wall of the first switching valve (531) is provided with an installation groove (532). A control disk (533) is rotatably connected to the inner groove of the installation groove (532). A plurality of limit posts (534) are arranged in a circular array at equal intervals on the outer wall of the control disk (533). The rear end of the control disk (533) is fixedly connected to the front end of the valve stem of the first switching valve (531). A control plate (535) is inserted into the outer wall of the control disk (533). A pointed plate (536) is fixedly connected to the side wall of the control plate (535). A connecting rod (537) is slidably connected to the front end of the control plate (535) through a spline. A compression spring is sleeved on the outer wall of the connecting rod (537). A driven gear (538) is fixedly connected to the side wall of the connecting rod (537). A limiting plate (539) is rotatably connected to the side wall of the first switching valve (531) by a torsion spring. The limiting plate (539) is a convex-shaped structure. The inner side wall of the limiting plate (539) is attached to the right end of the limiting post (534).

5. The novel cooling equipment structure according to claim 4, characterized in that: The control component (53) also includes a second switch valve (5310) installed on the backup pipe (52). The structure of the second switch valve (5310) is the same as that of the first switch valve (531). A toggle gear (5311) meshes between the driven gears (538) on the first switch valve (531) and the second switch valve (5310). A closing sleeve (5312) is fixedly sleeved on the bottom end of the second switch valve (5310). The top end of the closing sleeve (5312) is fixedly connected to the top end of the first switch valve (531). Both driven gears (538) and the toggle gear (5311) are rotatably connected to the inner wall of the closing sleeve (5312). A handle (5313) that penetrates the inner wall of the closing sleeve (5312) is fixedly connected to the front end of the toggle gear (5311). A handle (5314) is fixedly connected to the outer wall of the handle (5313).

6. The novel cooling equipment structure according to claim 1, characterized in that: The exhaust fan (3) is fixed on the inner wall of the developing machine body (1), and an air inlet (6) is provided on the outer wall of the placement table (2). The top of the air inlet (6) is connected to a ventilation duct (7), and the right end of the ventilation duct (7) is connected to an air outlet (8).

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