Wafer baking rack with automatic drop lock

Abstract

The utility model provides a kind of wafer baking frame with automatic lock, including the frame body of inside hollow, the side of frame body is open setting, the other side is set to block structure, the inside wall of frame body is arrayed to set several No. 1 rest body along its length direction, the area for wafer flat is formed between adjacent No. 1 rest body;Wherein, in the side of frame body opening, each setting baffle strip on both sides, baffle strip activity direction is frame body length direction, the inside wall of baffle strip is arrayed to set several blocking body along its length direction;Baffle strip stationary state, blocking body on it and No. 1 rest body form stagger, baffle strip active state, blocking body on it and No. 1 rest body can be aligned.The utility model baffle strip stationary state, blocking body and rest body staggered arrangement, form physical block on the opening side of wafer storage area, effectively prevent wafer from opening side accidental slip out and fall due to jolt or tilt, greatly improve the operation safety, reduce wafer breakage risk.

Description

Technical Field

[0001] This utility model relates to the field of wafer manufacturing technology, specifically, it demonstrates a wafer baking rack with automatic locking mechanism. Background Technology

[0002] Wafers are the basic semi-finished products of current semiconductor components. During the wafer production process, wafers often need to be placed in a baking device. The appropriate temperature of the baking tray is used to perform physical or chemical transformations on the photoresist and other materials on the wafer, such as thermal curing.

[0003] Since wafers are fragile, they need to be placed in a wafer baking basket before being put into the oven, such as the wafer high-temperature baking fixture connection structure disclosed in Chinese utility model patent CN 214123850 U, and then the fixture is put into the oven.

[0004] However, existing baking fixtures have the following drawbacks: because one side of the baking fixture is open, which was originally intended to facilitate the insertion and removal of wafers, due to personnel shaking or slightly poor oven stability, the wafers inside the baking fixture can easily slide out from the open side during the process of removing and placing the baking fixture, causing the wafers to fall out accidentally and resulting in loss. Utility Model Content

[0005] The purpose of this invention is to provide a wafer baking rack with automatic locking, which effectively protects the wafers inside the baking rack.

[0006] The technical solution is as follows: A wafer baking rack with automatic locking includes a hollow frame, one side of which is open and the other side is sealed. Several first-order shelves are arranged in an array along the length of the inner wall of the frame, and the adjacent first-order shelves form an area for placing wafers flat. Among them, a stop bar is set on each side of one side of the frame opening. The movement direction of the stop bar is the length direction of the frame. Several blocking bodies are arranged in an array along the length direction on the inner side wall of the stop bar. When the stop bar is stationary, the blocking bodies on it are staggered with the first shelf. When the stop bar is in motion, the blocking bodies on it can be aligned with the first shelf.

[0007] In addition, the above embodiments of this utility model may also have the following additional technical features: According to one embodiment of this utility model, the frame includes two opposing substrates, with a pair of mirror-symmetrical side plates disposed between the two substrates. The two side plates are installed face-to-face, and a plurality of the first-order supports are arrayed along the length of the side plates on the inner sidewalls of the side plates. The sealing structure is disposed on the common side of the two side plates. The substrate and side plate structure form a hollow area, which helps hot air to circulate around the wafer during baking and ensures baking uniformity.

[0008] Based on the above scheme, the sealing structure includes a pair of mirror-symmetrical limiting strips. The two limiting strips are arranged laterally, and the intersection of their central axes is located between the two side plates. The gap between the two limiting strips is smaller than the gap between the two side plates. The main function of the limiting strips is to prevent the wafer from sliding out from the non-opening side.

[0009] Furthermore, a plurality of second-order supports are arrayed along the length of the inner wall of the limiting strip, with each second-order support arranged side-by-side with the first-order support. The second-order supports on the limiting strip provide a support point at the rear end of the wafer (away from the opening end) at the same height as the front end (first-order support), ensuring that the wafer is uniformly and stably supported along its entire length, thus avoiding wafer bending, stress concentration, or unstable sliding caused by the rear end being suspended or unevenly supported.

[0010] Based on the above scheme, the upper and lower ends of the baffle strip respectively movably penetrate through the two substrates, and both ends of the baffle strip are provided with retaining plates. When the baffle strip is stationary, only one retaining plate is in contact with the substrate. The upper and lower ends of the baffle strip penetrate through the substrate, providing a linear guide for the movement of the baffle strip, ensuring that its movement is smooth and does not become skewed, and ensuring that the blocking body and the resting body can accurately intersect or align.

[0011] Based on the above scheme, several perforations are formed on the side walls of both side plates. The perforations allow hot air inside the baking oven to flow more freely into the rack and contact the wafer surface, while also facilitating the exhaust of internal air. Based on the above design, handles are provided on the outer surfaces of both side panels. This makes lifting, carrying, and placing the baking rack more convenient, stable, and safe.

[0012] Based on the above solution, several through slots are constructed on the substrate located below. This allows heat to be conducted directly upwards from the bottom or hot air to enter the housing from below, solving the problem of insufficient heating of the bottom wafer. Furthermore, a plurality of pads are provided at the bottom end of the substrate located below, and the pads are distributed in a rotationally symmetrical manner. The pads lift the bottom of the baking rack away from the bottom surface of the oven, and also create a channel for hot air to circulate at the bottom of the baking rack.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. When the baffle is stationary (i.e., when the wafer is stored normally), the baffle and the shelf are arranged alternately to form a physical barrier on the opening side of the wafer storage area. This effectively prevents the wafer from accidentally sliding out and falling from the opening side due to shaking or tilting, greatly improving operational safety and reducing the risk of wafer breakage. 2. The baffle is movable. When it is necessary to put in or take out the wafer, move the baffle to make it active (the baffle is aligned with the shelf). At this time, the baffle no longer blocks the path in front of the wafer storage area. The wafer can slide into or out of its storage position without obstruction along the shelf, making the operation convenient. 3. The barrier is set on the inner wall of the baffle, located outside the wafer storage area (near the edge of the opening), without occupying the storage space of the wafer itself, thus maintaining the original loading capacity of the baking rack. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of a wafer baking rack with automatic locking, according to Embodiment 1 of this utility model; Figure 2 This is a side view of the frame in Embodiment 1 of this utility model; Figure 3 This is a bottom view of the substrate in Embodiment 1 of this utility model; Figure 4 This is a schematic diagram of the sealing structure in Embodiment 2 of this utility model; The relevant markings in the attached diagram are: 1-frame, 2-blocking structure, 3-first shelf, 4-stop bar; 11-base plate, 12-side plate, 13-cutout, 14-handle, 15-through slot, 16-pad; 21-limiting strip, 22-second shelf; 41-blocking body, 42-card plate. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] Example 1 See Figure 1As shown, this utility model embodiment proposes a wafer baking rack with automatic locking, including a hollow frame 1. One side of the frame 1 is designed to be open, and the other side is provided with a sealing structure 2. That is to say, the wafer can be put into the frame 1 from the open side, and the wafer will be blocked by the sealing structure 2 as it continues to move. Several first-order shelves 3 are arranged in an array along the length direction on the inner side wall of the frame 1. The adjacent first-order shelves 3 form an area for the wafer to be laid flat. That is to say, a lot of wafers can be put into the frame 1 at one time.

[0017] In this design, baffles 4 are installed on both sides of the opening of the frame 1. The baffles 4 are movably connected to the frame 1, meaning that the baffles 4 move in the direction of the length of the frame 1. Several blocking bodies 41 are arranged in an array along the length of the inner wall of the baffles 4, with each pair of blocking bodies 41 spaced apart. When the baffles 4 are stationary, the blocking bodies 41 on them intersect with the first shelf 3, forming a "fence" to prevent wafers from entering or exiting between adjacent first shelves. When the baffles 4 are in motion, the blocking bodies 41 on them can be aligned with the first shelf 3, and the gaps between adjacent blocking bodies 41 and the gaps between adjacent first shelves 3 are interconnected, facilitating the entry and exit of wafers between adjacent first shelves 3.

[0018] See Figure 2 As shown, the frame 1 includes two base plates 11 facing each other vertically, and a pair of mirror-symmetrical side plates 12 are arranged between the two base plates 11. The two side plates 12 are installed face to face. Several first-order supports 3 are arranged in an array along the length direction of the side plates 12 on the inner side wall of the side plates 12. A sealing structure 2 is provided on the common side of the two side plates 12.

[0019] The first shelf is directly set on the inner wall of the side plate, with a clear position, providing a stable and reliable support point for the wafer. The hollow area formed by the substrate and side plate structure helps hot air to circulate around the wafer during the baking process, ensuring baking uniformity.

[0020] The upper and lower ends of the stop bar 4 are respectively movable through the two base plates 11, and each end of the stop bar 4 is provided with a locking plate 42. When the stop bar 4 is stationary (i.e. locked), only one locking plate 42 is in contact with the base plate 11, and the stop bar hangs down naturally under the action of gravity. The upper and lower ends of the stop bar penetrate the base plates, providing a straight guide for the movement of the stop bar, ensuring that its movement is smooth and does not tilt, and ensuring that the blocking body and the resting body can accurately intersect or align. When it is necessary to move the stop bar, simply lift the stop bar upward. The simple contact between the locking plate and the base plate achieves the limiting and self-locking, without the need for additional complex spring or locking mechanisms.

[0021] See Figure 2As shown, several perforations 13 are formed on the side walls of both side plates 11. The perforations allow hot air inside the oven to flow more freely into the rack and contact the wafer surface, while also facilitating the exhaust of internal air.

[0022] In addition, handles 14 are provided on the outer surfaces of both side plates 11, providing gripping points for operators, making it more convenient, stable and safe to lift, move and place the baking rack. The handles are located on the outside, so the hands are less likely to touch the wafer or the baffle mechanism when gripping, reducing the possibility of contamination or accidental activation.

[0023] See Figure 3 As shown, a number of through slots 15 are constructed on the substrate 11 located below. These through slots allow heat to be conducted directly upward from the bottom or hot air to enter the interior of the rack from below, solving the problem of insufficient heating of the bottom wafer and helping to improve the uniformity of wafer baking temperature in the entire baking rack.

[0024] The bottom of the substrate 11 is provided with several pads 16. The pads 16 are distributed in a rotationally symmetrical manner. The pads lift the bottom of the baking rack away from the bottom surface of the oven. The raised space creates a channel for hot air to circulate at the bottom of the baking rack, which further enhances the heating effect and uniformity of the wafer (especially the bottom wafer) from below. The pads provide stable support points. The rotationally symmetrical distribution (such as three-point or four-point symmetry) ensures the stability of the baking rack. Even if the baking tray is slightly uneven, the rack can be kept basically level, reducing the risk of wafer slippage due to tilting.

[0025] Example 2 The technical solution in this embodiment is based on the above embodiment 1.

[0026] See Figure 4 As shown, the sealing structure 2 includes a pair of mirror-symmetrical limiting strips 21. The two limiting strips 21 are arranged laterally, and the intersection of their central axes is located between the two side plates 12. The gap between the two limiting strips 21 is smaller than the gap between the two side plates 12. The main function of the limiting strips is to prevent the wafer from sliding out from the non-opening side. The lateral arrangement of the limiting strips and the intersection of their axes inside the frame create a "V" or wedge-shaped channel between the two limiting strips that gradually narrows inward (away from the opening). When the wafer is placed, this structure automatically guides the wafer to slide towards the center and eventually rest between the limiting strips, providing auxiliary positioning and centering, ensuring the wafer is placed neatly and avoiding skewing. The gap between the limiting strips is smaller than the wafer diameter (because it is smaller than the distance between the two side plates, which is usually slightly larger than the wafer diameter for easy handling), ensuring that the rear end of the wafer is reliably confined inside the limiting strips and cannot slide out from the rear end of the frame.

[0027] The inner wall of the limiting strip 21 is arrayed with several second supports 22 along its length, with each second support 22 arranged side-by-side with the first support 3. The second supports on the limiting strip provide a support point at the rear end of the wafer (away from the opening end) with the same height as the front end (first support), ensuring that the wafer is uniformly and stably supported along its entire length, thus avoiding wafer bending, stress concentration, or unstable sliding caused by the rear end being suspended or unevenly supported.

[0028] The above descriptions are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and all such modifications and improvements fall within the protection scope of this utility model.

Claims

1. A wafer baking rack with automatic locking mechanism, characterized in that, The frame (1) is hollow inside. One side of the frame (1) is open and the other side is sealed with a structure (2). Several first-order shelves (3) are arranged in an array along the length of the inner wall of the frame (1). The adjacent first-order shelves (3) form an area for placing wafers flat. Among them, a baffle (4) is provided on each side of the opening of the frame (1). The baffle (4) moves in the direction of the length of the frame (1). Several blocking bodies (41) are arranged in an array along the length of the inner wall of the baffle (4). When the baffle (4) is stationary, the blocking bodies (41) on it intersect with the first shelf (3). When the baffle (4) is active, the blocking bodies (41) on it can be aligned with the first shelf (3).

2. A wafer baking rack with automatic locking as described in claim 1, characterized in that, The frame (1) includes two opposing base plates (11), a pair of mirror-symmetrical side plates (12) are provided between the two base plates (11), the two side plates (12) are installed face to face, a plurality of the first shelf (3) are arranged in an array along the length direction of the side plate (12) on the inner side wall of the side plate (12), and the sealing structure (2) is provided on the common side of the two side plates (12).

3. A wafer baking rack with automatic locking as described in claim 2, characterized in that, The sealing structure (2) includes a pair of mirror-symmetrical limiting strips (21), each of the two limiting strips (21) is arranged laterally and the intersection of the central axes of the two limiting strips (21) is located between the two side plates (12), and the interval between the two limiting strips (21) is smaller than the interval between the two side plates (12).

4. A wafer baking rack with automatic locking as described in claim 3, characterized in that, Several second-order supports (22) are arranged in an array along the length direction on the inner side wall of the limiting strip (21), and the second-order supports (22) are arranged side by side with the first-order supports (3).

5. A wafer baking rack with automatic locking as described in claim 2, characterized in that, The upper and lower ends of the baffle (4) are respectively movable through the two substrates (11), and both ends of the baffle (4) are provided with a retaining plate (42). When the baffle (4) is stationary, only one retaining plate (42) is in contact with the substrate (11).

6. A wafer baking rack with automatic locking according to claim 2, characterized in that, Several perforations (13) are made on the side walls of both side plates (12).

7. A wafer baking rack with automatic locking according to claim 2, characterized in that, Each of the two side panels (12) is provided with a handle (14) on its outer side surface.

8. A wafer baking rack with automatic locking according to claim 2, characterized in that, A plurality of through slots (15) are formed on the substrate (11) located below.

9. A wafer baking rack with automatic locking according to claim 8, characterized in that, A plurality of pads (16) are provided at the bottom end of the substrate (11) located below, and the pads (16) are distributed in a rotationally symmetrical manner.

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