Paddle structure, boat pushing device and processing equipment

Abstract

The application relates to the technical field of semiconductors or photovoltaics, in particular to a paddle structure, a push boat device and a processing equipment, so as to solve the problem that the paddle structure is prone to breakage and failure when subjected to impact or bending force, and prolong the service life of the paddle structure. The paddle structure comprises at least one base body and a reinforcing rib. The base body is provided with a mounting hole extending along the length direction of the base body. The base body is provided in an integrated structure, and the material of the base body comprises ceramic. The reinforcing rib is arranged in the mounting hole and connected with the base body. The material of the reinforcing rib comprises metal. By setting the material of the reinforcing rib to comprise metal, the impact resistance and bending resistance of the metal material are utilized, so that the paddle structure has good impact resistance and bending resistance, the risk of breakage and failure of the paddle structure is reduced, and the service life of the paddle structure is prolonged.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic technology, and in particular to a paddle structure, a boat-pushing device, and processing equipment. Background Technology

[0002] The processing of semiconductor or photovoltaic materials typically involves feeding sheet-like materials into a reactor and reacting them under specific temperature and pressure conditions. During this process, a paddle structure is usually used to transport the sheet-like materials to be processed; specifically, the paddle structure supports the boat structure, which in turn carries the sheet-like materials.

[0003] In related technologies, propeller structures are usually made of ceramic materials (such as silicon carbide), which have good high temperature resistance, corrosion resistance and wear resistance. However, ceramic materials are brittle and are prone to fracture and failure when subjected to impact or bending forces, resulting in a short service life of the propeller structure. Utility Model Content

[0004] In view of this, embodiments of this application provide a paddle structure, a boat-pushing device, and a processing equipment to solve the problem that the paddle structure is prone to breakage and failure when subjected to impact or bending forces, thereby extending the service life of the paddle structure.

[0005] In a first aspect, one embodiment of this application provides a propeller structure, which includes at least one base and a reinforcing rib. The base is provided with a mounting hole extending along its length direction. The base is configured as an integral structure and the material of the base includes ceramic. The reinforcing rib is embedded in the mounting hole and connected to the base. The material of the reinforcing rib includes metal.

[0006] In conjunction with the first aspect, in some embodiments of the first aspect, the wall of the mounting hole is provided with a first joint portion, and the outer peripheral surface of the reinforcing rib is provided with a second joint portion. One of the first joint portion and the second joint portion is a groove, and the other of the first joint portion and the second joint portion is a protrusion, which is embedded in the groove.

[0007] In conjunction with the first aspect, in some embodiments of the first aspect, there are multiple first joints and multiple second joints, with each first joint and the second joint corresponding to one another, and each protrusion being embedded in a corresponding groove.

[0008] In conjunction with the first aspect, in some embodiments of the first aspect, the paddle structure further includes a plug that is connected to the base and seals the opening of the mounting hole to cover the end of the reinforcing rib.

[0009] In conjunction with the first aspect, in some embodiments of the first aspect, the mounting hole includes a reinforcing section and a fixing section. In the length direction of the base, the fixing section is disposed on opposite sides of the reinforcing section, the opening of the mounting hole is disposed in the fixing section, the reinforcing rib is embedded in the reinforcing section, and the plug is inserted into the fixing section.

[0010] In conjunction with the first aspect, in some embodiments of the first aspect, the substrate includes a supporting body and a supporting edge connected to the supporting body. The supporting edge is disposed near the top of the supporting body. In the width direction of the substrate, the supporting edge is disposed on at least one side of the supporting body, and a reinforcing rib is disposed at the connection between the supporting body and the supporting edge.

[0011] In conjunction with the first aspect, in some embodiments of the first aspect, in the width direction of the base, the support edges are provided on opposite sides of the support body, and the connection between the support body and the support edges is provided with reinforcing ribs.

[0012] In conjunction with the first aspect, in some embodiments of the first aspect, the reinforcing rib and the base are configured as an integral structure.

[0013] Secondly, one embodiment of this application provides a boat-pushing device, including a paddle base and a paddle structure as described above, wherein the tail end of the paddle structure is connected to the paddle base.

[0014] Thirdly, one embodiment of this application provides a processing apparatus, including a reactor and any of the above-mentioned pusher devices, wherein the reactor is used to process sheet materials, and the pusher device is used to push the sheet materials into or out of the reactor.

[0015] The propeller structure provided in this embodiment includes a base and reinforcing ribs. The reinforcing ribs are embedded in the mounting holes of the base. The base is made of ceramic, which has the advantages of high temperature resistance, corrosion resistance, and wear resistance, giving the propeller structure good high temperature resistance, corrosion resistance, and wear resistance. The reinforcing ribs are made of metal, which has good impact resistance and bending resistance, giving the propeller structure good impact resistance and bending resistance, reducing the risk of propeller structure fracture failure and extending the service life of the propeller structure. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The image shown is a perspective view of a paddle structure provided in an embodiment of this application.

[0018] Figure 2 As shown Figure 1 Enlarged view of point A in the middle.

[0019] Figure 3 The image shown is a front view of a paddle structure provided in an embodiment of this application.

[0020] Figure 4 The image shown is a side view of a paddle structure provided in an embodiment of this application.

[0021] Figure 5 The image shown is a perspective view of a paddle structure provided in another embodiment of this application.

[0022] Figure 6 The image shown is a perspective view of a paddle structure provided in another embodiment of this application.

[0023] Figure 7 The image shown is a perspective view of the reinforcing ribs of a paddle structure provided in another embodiment of this application.

[0024] Figure 8 The diagram shown is a usage state diagram of the propeller structure provided in an embodiment of this application.

[0025] Figure 9 The diagram shown is a structural schematic of a processing device provided in an embodiment of this application.

[0026] Figure label:

[0027] 100. Processing equipment;

[0028] 10. Paddle structure;

[0029] 1. Base; 11. Mounting hole; 111. First joint; 101. Support body; 102. Support edge;

[0030] 2. Reinforcing rib; 21. Second joint;

[0031] 20. Boat structure;

[0032] 30. Reactor. Detailed Implementation

[0033] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0034] Silicon carbide materials are widely used in the manufacture of cantilever propellers and conveyor propellers in chemical, metallurgical, and energy fields due to their excellent properties such as high temperature resistance, corrosion resistance, high hardness, and good wear resistance. However, silicon carbide materials are relatively brittle and prone to fracture under impact or bending forces, especially in large propeller structures or complex operating environments, where their service life will be significantly shortened. To extend the service life of propeller structures, it is necessary to improve their impact and bending resistance while maintaining their high temperature resistance, corrosion resistance, and wear resistance.

[0035] To improve the mechanical properties of the propeller structure, related technologies employ methods such as increasing the thickness of the propeller structure or adding fibers to the silicon carbide material. However, increasing the thickness not only increases the weight and energy consumption of the propeller structure but also its volume and space requirements. Adding fibers to the silicon carbide material suffers from poor bonding between the fibers and the silicon carbide, as well as uneven fiber dispersion, resulting in limited reinforcement of the propeller structure.

[0036] The propeller structure provided in this application, while ensuring good high-temperature resistance, corrosion resistance, and wear resistance, improves the impact and bending resistance of the propeller structure and extends its service life by embedding metal reinforcing ribs within a ceramic matrix. Embodiments of the propeller structure of this application are described in detail below.

[0037] Figure 1 The image shown is a perspective view of a paddle structure provided in an embodiment of this application. Figure 2 As shown Figure 1 Enlarged view of point A in the middle. Figure 3 The image shown is a front view of a paddle structure provided in an embodiment of this application. Figure 4 The image shown is a side view of a paddle structure provided in an embodiment of this application. Figure 5 The image shown is a perspective view of a paddle structure provided in another embodiment of this application. Figure 6 The image shown is a perspective view of a paddle structure provided in an embodiment of this application. Figure 7 The image shown is a perspective view of the reinforcing ribs of a paddle structure provided in an embodiment of this application.

[0038] like Figures 1 to 7 As shown, the paddle structure 10 of this application includes at least one base 1 and a reinforcing rib 2. The base 1 has a mounting hole 11 extending along its length direction. The base 1 is configured as an integral structure, and the material of the base 1 includes ceramic. The reinforcing rib 2 is disposed in the mounting hole 11 and connected to the base 1. The material of the reinforcing rib 2 includes metal.

[0039] Among them, such as Figure 1 As shown, the propeller structure 10 may include a base 1; in this case, the propeller structure 10 is a single-propeller structure. For example... Figure 5 As shown, the propeller structure 10 may also include two bases 1, each base 1 having a mounting hole 11, and each mounting hole 11 having a reinforcing rib 2. In this case, the propeller structure is a dual-propeller structure.

[0040] The reinforcing rib 2 and the base 1 can be threaded together. For example, the reinforcing rib 2 has an external thread, and the wall of the mounting hole 11 has an internal thread. The external thread and the internal thread engage to achieve the connection between the reinforcing rib 2 and the base 1. The side of the reinforcing rib 2 can also directly fit against the wall of the mounting hole 11, utilizing the adhesion between the reinforcing rib 2 and the wall of the mounting hole 11 to achieve the connection between the reinforcing rib 2 and the base 1.

[0041] The propeller structure 10 of this application includes at least one base 1 and a reinforcing rib 2. The reinforcing rib 2 is disposed in the mounting hole 11 of the base 1 and connected to the base 1. The base 1 is made of ceramic, which has the advantages of high temperature resistance, corrosion resistance and wear resistance. This gives the propeller structure 10 good high temperature resistance, corrosion resistance and wear resistance. The reinforcing rib 2 is made of metal, which has good impact resistance and bending resistance. This gives the propeller structure 10 good impact resistance and bending resistance, reduces the risk of fracture failure of the propeller structure 10 and extends the service life of the propeller structure 10.

[0042] In some embodiments, such as Figure 6 and Figure 7 As shown, the wall of the mounting hole 11 is provided with a first joint 111, and the outer peripheral surface of the reinforcing rib 2 is provided with a second joint 21. One of the first joint 111 and the second joint 21 is a groove, and the other of the first joint 111 and the second joint 21 is a protrusion, which is embedded in the groove.

[0043] For example, the first joint portion 111 is a groove and the second joint portion 21 is a protrusion. Of course, the first joint portion 111 can also be a protrusion and the second joint portion 21 can be a groove.

[0044] By designing one of the first joint 111 and the second joint 21 as a groove and the other of the first joint 111 and the second joint 21 as a protrusion, and the protrusion being embedded in the groove, on the one hand, the connection area between the base 1 and the reinforcing rib 2 can be increased, thereby improving the adhesion between the base 1 and the reinforcing rib 2, improving the connection reliability between the base 1 and the reinforcing rib 2, and improving the reliability of the propeller structure 10; on the other hand, by using the protrusion embedded in the groove to prevent the protrusion from coming out of the groove, thereby preventing the reinforcing rib 2 from coming out of the mounting hole 11, improving the connection reliability between the base 1 and the reinforcing rib 2, and improving the reliability of the propeller structure 10.

[0045] Optionally, the longitudinal cross-sectional shape of the groove is semi-circular, and the longitudinal cross-sectional shape of the protrusion is consistent with the longitudinal cross-sectional shape of the groove.

[0046] The longitudinal section of the groove is the cross section of the groove cut by a plane parallel to the length direction of the base 1; the longitudinal section of the protrusion is the cross section of the protrusion cut by a plane parallel to the length direction of the base 1.

[0047] In other embodiments, the longitudinal cross-sectional shape of the groove may also be a fan shape, triangle, circle, rectangle, rhombus or other regular or irregular shape, and the longitudinal cross-sectional shape of the protrusion is consistent with the longitudinal cross-sectional shape of the groove.

[0048] In some embodiments, such as Figure 6 and Figure 7 As shown, there are multiple first joints 111 and multiple second joints 21. The first joints 111 and the second joints 21 correspond one-to-one, and each protrusion is embedded in the corresponding groove.

[0049] By setting the number of first joint 111 and second joint 21 to multiple, the connection reliability between the base 1 and the reinforcing rib 2 can be further improved, thereby improving the reliability of the paddle structure 10.

[0050] Figure 8 The diagram shown is a usage state diagram of the propeller structure provided in an embodiment of this application. Figure 9 The diagram shown is a structural schematic of a processing device provided in an embodiment of this application.

[0051] For example, such as Figure 8 and Figure 9 As shown, when the paddle structure 10 is used in the reactor 30, the temperature inside the reactor 30 is usually high. The metal reinforcing rib 2 is prone to releasing substances inside the reactor 30, contaminating the interior of the reactor 30 and the sheet materials inside the reactor 30, resulting in poor reliability of the paddle structure 10.

[0052] In some embodiments, the paddle structure 10 further includes a plug (not shown in the figure), which is connected to the base 1 and seals the opening of the mounting hole 11 to cover the end of the reinforcing rib 2.

[0053] By providing a plug to cover the end of the reinforcing rib 2, the reinforcing rib 2 can be prevented from releasing substances to the outside of the mounting hole 11 at high temperatures, thereby improving the reliability of the propeller structure 10.

[0054] For example, the material of the substrate 1 includes silicon carbide. The material of the reinforcing rib 2 is alloy steel, that is, the material of the reinforcing rib 2 includes carbon steel and one or more alloying elements to improve the strength and toughness of the reinforcing rib 2.

[0055] For example, the plug may be made of ceramic. The material of the plug may be the same as or different from the material of the substrate 1. For instance, the plug may be made of silicon carbide.

[0056] In some embodiments, the mounting hole 11 includes a reinforcing section and a fixing section. Along the length of the base 1, the fixing sections are disposed on opposite sides of the reinforcing section, and the opening of the mounting hole 11 is located in the fixing section. The reinforcing rib 2 is embedded within the reinforcing section, and the plug is inserted into the fixing section. That is, the plug is inserted into the opening of the mounting hole 11.

[0057] By designing the mounting hole 11 to include a reinforcing section and a fixing section, with the reinforcing rib 2 embedded in the reinforcing section and the plug inserted in the fixing section, the connection structure for connecting the base 1 and the plug can be avoided. This simplifies the structure of the propeller structure 10 and facilitates its manufacturing.

[0058] For example, the plug is bonded to the hole wall of the fixed section.

[0059] For example, the plug is bonded to the hole wall of the fixed section with high-temperature resistant adhesive. The choice of high-temperature resistant adhesive is determined by the materials of the substrate 1 and the plug, as well as the temperature at which the paddle structure 10 is used. It is necessary not only to ensure the bonding performance between the plug and the substrate 1, but also to ensure that the paddle structure 10 will not fail due to high temperature during use.

[0060] For example, such as Figure 8 and Figure 9 As shown, the top of the paddle structure 10 is used to support the boat structure 20, which is used to place sheet materials. The paddle structure 10 is used to push the sheet materials into or out of the reactor 30. The top of the paddle structure 10 mainly serves to support the boat structure 20 and the sheet materials. It will be subjected to a large bending force during use. Therefore, the top of the paddle structure 10 is the most vulnerable position to fracture failure.

[0061] In some embodiments, such as Figures 2 to 6 As shown, the base 1 includes a support body 101 and a support edge 102 connected to the support body 101, with the support edge 102 positioned near the top of the support body 101. In the width direction of the base 1, the support edge 102 is located on at least one side of the support body 101. A reinforcing rib 2 is provided at the connection between the support body 101 and the support edge 102.

[0062] As described above, the top of the support body 101 and the top of the support edge 102 are subjected to significant bending forces during use, making them the most vulnerable locations for fracture failure in the propeller structure 10. By placing reinforcing ribs 2 at the connection between the support body 101 and the support edge 102, these ribs can reinforce the most vulnerable locations of the propeller structure 10, further reducing the risk of fracture failure and extending the service life of the propeller structure 10.

[0063] In some embodiments, such as Figure 6 As shown, in the width direction of the base 1, the support edge 102 is provided on opposite sides of the support body 101, and the connection between the support body 101 and the support edge 102 is provided with reinforcing ribs 2.

[0064] By providing reinforcing ribs 2 at the connection between the support body 101 and the support edge 102, the connection between the support body 101 and the support edge 102 can be effectively strengthened, further reducing the risk of the propeller structure 10 breaking and failing, and extending the service life of the propeller structure 10.

[0065] For example, the top surface of the support body 101 and the top surface of the support edge 102 are in the same plane, and the top surface of the support body 101 and the top surface of the support edge 102 are used to support the boat structure 20.

[0066] To make the technical solution of this application easier to understand, the following description further illustrates the technical solution of this application, taking the length direction of the base 1 as consistent with the front-back direction, the width direction of the base 1 as consistent with the left-right direction, and the height direction of the base 1 as consistent with the top-bottom direction. The top-bottom, left-right, and front-back directions are shown in the figure.

[0067] For example, such as Figures 1 to 6 As shown, both the mounting hole 11 and the reinforcing rib 2 extend in the front-to-back direction. Both ends of the mounting hole 11 are provided with plugs (not shown in the figure), which are used to seal the front and back ends of the reinforcing rib 2. Support edges 102 are provided on the left and right sides of the support body 101, and are positioned close to the upper side of the support body 101. The upper surface of the support edges 102 and the upper surface of the support body 101 are used to support the boat structure 20.

[0068] In some embodiments, the reinforcing rib 2 and the base 1 are configured as an integral structure.

[0069] By making the reinforcing rib 2 and the base 1 an integral structure, the processing and manufacturing of the paddle structure 10 is facilitated.

[0070] For example, the manufacturing method of the paddle structure 10 is as follows: the reinforcing rib 2 is fixed in the molding mold, a slurry including ceramic material is injected into the molding mold, and the reinforcing rib 2 is wrapped by the slurry; after the slurry solidifies, a blank is formed; the blank is taken out from the molding mold, and then the blank is dried and sintered to obtain the paddle structure 10 including the reinforcing rib 2 and the substrate 1. The sintering process makes the reinforcing rib 2 and the substrate 1 tightly bonded. The slurry may include silicon carbide particles, sintering aids and binders, and the proportions of silicon carbide particles, sintering aids and binders are set as needed.

[0071] The embodiments of the paddle structure 10 of this application have been described in detail above. The embodiments of the boat-pushing device of this application are described in detail below. It should be understood that the description of the embodiments of the paddle structure 10 corresponds to the description of the embodiments of the boat-pushing device. Therefore, for any parts not described in detail, please refer to the previous embodiments of the paddle structure 10.

[0072] like Figure 8 As shown, the boat-pushing device includes a paddle holder and a paddle structure 10, with the tail end of the paddle structure 10 connected to the paddle holder. The paddle holder supports the paddle structure 10. The boat-pushing device also includes a drive mechanism connected to the paddle holder. The drive mechanism drives the paddle holder to move the paddle structure 10 to transport sheet material.

[0073] Exemplarily, the boat-pushing device includes a boat structure 20 disposed on a paddle structure 10, on which sheet material is placed. A drive mechanism is used to drive the paddle holder to move, thereby using the paddle holder to drive the paddle structure 10 to move, thus pushing the sheet material placed on the boat structure 20 into or out of the reactor 30, so that the sheet material can be chemically treated in the reactor 30, such as phosphorus diffusion, boron diffusion, plasma-enhanced chemical vapor deposition (PECVD), low-pressure chemical vapor deposition (LPCVD), etc.

[0074] The embodiments of the boat-pushing device of this application have been described in detail above. The embodiments of the processing equipment 100 of this application are described in detail below. It should be understood that the description of the embodiments of the boat-pushing device corresponds to the description of the embodiments of the processing equipment 100. Therefore, for parts not described in detail, please refer to the foregoing embodiments of the boat-pushing device.

[0075] like Figure 9 As shown, the processing equipment 100 includes a reactor 30 and a pusher device. The reactor 30 is used to process sheet materials, and the pusher device is used to push the sheet materials into or out of the reactor 30.

[0076] For example, the processing equipment 100 can be any equipment capable of performing processing on objects, such as a coating equipment.

[0077] For example, the processing equipment 100 may include a vapor deposition apparatus. For instance, the processing equipment 100 may include a physical vapor deposition (PVD) apparatus. For example, the processing equipment 100 may include a magnetron sputtering PVD apparatus. Specifically, the processing equipment 100 is used to deposit a film on a sheet material. The sheet material may include components or raw materials used to form photovoltaic modules. For example, the sheet material may be a silicon wafer, a solar cell, a crystal wafer, etc. The processing equipment 100 can also be used to prepare perovskite layers, electron transport layers, hole transport layers, encapsulation layers, and transparent electrodes for perovskite photovoltaic cells. The processing equipment 100 can also be used to prepare tandem solar cells.

[0078] The propeller structure 10 of this application incorporates a metal reinforcing rib 2 embedded within a ceramic substrate 1, extending from the head to the tail end of the substrate 1. The reinforcing rib 2 is made of a metal material with high strength and toughness, providing effective support for the propeller structure 10 under mechanical loads and enhancing its impact and bending resistance. The substrate 1 is made of a material with good corrosion and wear resistance, ensuring the propeller structure 10's corrosion and wear resistance. By providing a groove on one side of the substrate 1 and a protrusion on the other, with the protrusion embedded in the groove, a mechanical interlock is formed between the reinforcing rib 2 and the substrate 1, improving the bonding strength between them, preventing the reinforcing rib 2 from peeling off, and enhancing the reliability of the propeller structure 10. Furthermore, a plug is provided on the substrate 1 to seal the end face of the reinforcing rib 2, preventing the metal reinforcing rib 2 from releasing substances that contaminate the reaction chamber and the sheet material at high temperatures.

[0079] The propeller structure 10 of this application not only retains the excellent properties of high temperature resistance, wear resistance, and corrosion resistance of the propeller structure 10 in related technologies, but also has better impact resistance and bending resistance, and a wider range of applications. Furthermore, the manufacturing process of the propeller structure 10 is simple, which is conducive to industrial production, and it has good economic benefits and application prospects.

[0080] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0081] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “featuring,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0082] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0083] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0084] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A paddle structure, characterized in that, include: At least one substrate, the substrate having mounting holes extending along its length, the substrate being configured as a single-piece structure, and the substrate being made of ceramic; A reinforcing rib is disposed within the mounting hole and connected to the base body, and the material of the reinforcing rib includes metal.

2. The propeller structure according to claim 1, characterized in that, The mounting hole has a first joint on its wall and a second joint on its outer circumferential surface. One of the first joint and the second joint is a groove, and the other of the first joint and the second joint is a protrusion. The protrusion is embedded in the groove.

3. The propeller structure according to claim 2, characterized in that, There are multiple first joints and multiple second joints, with each first joint and each second joint corresponding to the other, and each protrusion is embedded in the corresponding groove.

4. The propeller structure according to claim 1, characterized in that, It also includes a plug, which is connected to the substrate and seals the opening of the mounting hole to cover the end of the reinforcing rib.

5. The propeller structure according to claim 4, characterized in that, The mounting hole includes a reinforcing section and a fixing section. In the length direction of the base, the fixing section is located on opposite sides of the reinforcing section, the opening of the mounting hole is located in the fixing section, the reinforcing rib is embedded in the reinforcing section, and the plug is inserted in the fixing section.

6. The propeller structure according to claim 1, characterized in that, The base includes a supporting body and a supporting edge connected to the supporting body. The supporting edge is disposed near the top of the supporting body. In the width direction of the base, the supporting edge is disposed on at least one side of the supporting body. The reinforcing rib is disposed at the connection between the supporting body and the supporting edge.

7. The propeller structure according to claim 6, characterized in that, In the width direction of the base, the supporting edge is provided on opposite sides of the supporting body, and the reinforcing rib is provided at the connection between the supporting body and the supporting edge.

8. The propeller structure according to any one of claims 1-7, characterized in that, The reinforcing rib and the base are configured as an integral structure.

9. A boat-pushing device, characterized in that, include: Paddle mount; The propeller structure according to any one of claims 1-8, wherein the tail end of the propeller structure is connected to the propeller mount.

10. A processing device, characterized in that, Used for processing sheet materials, including: A reaction furnace used for processing sheet materials; The boat-pushing device according to claim 9 is used to push the sheet material into or out of the reactor.

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