High voltage electrostatic chuck mounting structure

Abstract

The utility model relates to the technical field of semiconductor manufacturing equipment, especially to a high -voltage electrostatic chuck mounting structure, including two sliding slots and two fastening screws, two sliding slots are arranged at the opposite sides of high -voltage electrostatic chuck respectively, and the sliding slot is configured to be able to with the several base screws preinstalled on adapter base as guide rail and carry out sliding installation, the outermost side of two sliding slots is opened with two sliding slot screw holes respectively, and two sliding slot screw holes and two base screw holes preopened on adapter base are respectively aligned and locked through two fastening screws when high -voltage electrostatic chuck is installed in place. Through the utilization four base screws preinstalled on existing adapter base as natural guide rail, and the locking is completed through two fastening screws on the most easily operated sliding slot outside, need not touch the equipment inside narrow space, can directly carry out the individual replacement of high -voltage electrostatic chuck under the condition that adapter base is not disassembled integrally, avoids the complicated machine under electricity and the machine calibration process of re -entering.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to a high-voltage electrostatic chuck mounting structure. Background Technology

[0002] In semiconductor dry etching processes, the high-voltage electrostatic chuck (ESC HV) is a core component for wafer support and temperature control. It generates an electrostatic field by applying high voltage to attract and fix the wafer, while simultaneously serving as an electrode in the radio frequency circuit for plasma excitation. To ensure process stability and uniformity, the ESC HV must possess high mounting accuracy and mechanical stability.

[0003] Currently, mainstream designs in the industry generally use multiple screws to rigidly fix the high-voltage electrostatic chuck. Taking the TEL Jin etching machine as an example, such as... Figures 1-2 As shown, the bottom plate 11 of the high-voltage electrostatic chuck 10 has two flat edges, each edge having three threaded holes. At the same time, the matching base 20 (Lower Match) also has corresponding threaded holes. The high-voltage electrostatic chuck 10 is fixed to the matching base 30 by six fixing screws 30, and then the whole assembly is installed on the main unit 40.

[0004] This traditional fixing method has revealed the following drawbacks in actual equipment maintenance:

[0005] 1) Poor maintainability and low operational accessibility: Because the high-voltage electrostatic chuck 10 is located deep within the cavity of the main unit 40, and is tightly surrounded by critical components such as RF feed lines and cooling pipes, the physical space is extremely limited. When the high-voltage electrostatic chuck 10 needs to be replaced due to its lifespan or failure, it is difficult for operators to directly access and remove all six screws. This "blind operation" is not only inefficient, but also highly susceptible to damage to surrounding precision components due to improper tool handling.

[0006] 2) Complex replacement process leading to prolonged equipment downtime: Due to the aforementioned structure, existing technology cannot replace the high-voltage electrostatic chuck 10 separately. During maintenance, the entire matching base 20, along with the high-voltage electrostatic chuck 10, must be removed from the main unit 40. This process requires the main unit 40 to be completely powered off, and the entire replacement process takes tens of hours, causing prolonged equipment downtime and requiring PM to restart the machine. This is time-consuming and labor-intensive, severely impacting the continuous operation and capacity of the production line.

[0007] In summary, the existing method of directly fixing the equipment with multiple screws has become a key bottleneck restricting the improvement of overall equipment efficiency and the control of maintenance costs. Therefore, there is an urgent need in this field for a new type of high-voltage electrostatic chuck fixing structure, which aims to achieve rapid and convenient individual replacement, minimize maintenance time, avoid unnecessary power-offs and downtime of the main unit, and thus improve the availability and economy of semiconductor manufacturing equipment. Utility Model Content

[0008] The purpose of this utility model is to provide a high-voltage electrostatic chuck fixing structure to solve the problems of poor maintainability and complicated replacement process of the current high-voltage electrostatic chuck using multiple screws.

[0009] To achieve the above objectives, this utility model provides a high-voltage electrostatic chuck fixing structure, including two sliding grooves and two fastening screws. The two sliding grooves are respectively arranged on opposite sides of the high-voltage electrostatic chuck, and the sliding grooves are configured to slide and install using a number of base screws pre-installed on the matching base as guide rails.

[0010] Two slide groove screw holes are respectively opened on the outermost side of the two slide grooves. When the high voltage electrostatic chuck is installed in place, the two slide groove screw holes are aligned with the two base screw holes pre-opened on the matching device base and locked by the two fastening screws.

[0011] Optionally, the two grooves are symmetrically arranged on opposite sides of the edge of the high-voltage electrostatic chuck.

[0012] Optionally, the cross-sectional shape of the groove is in sliding fit with the screw portion of the base screw.

[0013] Optionally, the cross-sectional shape of the chute is an inverted U-shape or a C-shape.

[0014] Optionally, the groove screw hole is a countersunk hole.

[0015] Optionally, the base screws are four.

[0016] Optionally, the four base screws are arranged in a matrix on the matching base.

[0017] Optionally, the slide is welded to the base plate of the high-voltage electrostatic chuck.

[0018] Optionally, the slide groove is integrally formed with the base plate of the high-voltage electrostatic chuck.

[0019] Optionally, the groove is made of stainless steel.

[0020] The high-voltage electrostatic chuck fixing structure provided by this utility model has at least one of the following beneficial effects:

[0021] 1) Quick disassembly and assembly, convenient maintenance: By using the four base screws pre-installed on the existing matching base as natural guide rails, during installation, simply align the sliding grooves on both sides of the high-voltage electrostatic chuck with the base screws and push them in the direction for initial positioning. Then, complete the final locking with two fastening screws on the outside of the most easily operated sliding groove, without having to touch the narrow space inside the equipment.

[0022] 2) No power-off required, reducing downtime: The high-voltage electrostatic chuck can be replaced directly without disassembling the entire matching unit base, avoiding the complicated machine power-off and recalibration process, and greatly shortening maintenance time.

[0023] 3) Stable structure, reliable and durable: Two sliding grooves are symmetrically arranged on both sides of the high-voltage electrostatic chuck to ensure uniform force distribution and smooth sliding;

[0024] 4) High compatibility: It makes full use of the original six screw holes on the matching base, without the need to modify the existing matching base, which has strong compatibility and low modification cost. Attached Figure Description

[0025] Those skilled in the art will understand that the accompanying drawings are provided to better understand the present invention and do not constitute any limitation on the scope of the present invention. Wherein:

[0026] Figure 1 This is a schematic diagram of an existing TEL Jin etching machine.

[0027] Figure 2 for Figure 1 A schematic diagram of the installed medium- and high-voltage electrostatic chuck 10;

[0028] Figure 3 This is a left view of a high-voltage electrostatic chuck fixing structure provided in an embodiment of the present invention;

[0029] Figure 4 This is a top view of a high-voltage electrostatic chuck fixing structure provided in an embodiment of the present invention.

[0030] in:

[0031] 10-High voltage electrostatic chuck; 11-Base plate; 20-Matching unit base; 30-Fixing screw; 40-Main unit;

[0032] 100-Slide groove; 200-Fasting screw; 300-High voltage electrostatic chuck; 310-Base plate. Detailed Implementation

[0033] To make the objectives, advantages, and features of this utility model clearer, the following detailed description is provided in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are in a very simplified form and use non-precise proportions, intended only to facilitate and clearly illustrate the purpose of the embodiments of this utility model. Please refer to the accompanying drawings for a clearer understanding of the objectives, features, and advantages of this utility model. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for illustrative purposes and to enable those skilled in the art to understand and read the content disclosed in the specification. They are not intended to limit the implementation conditions of this utility model. Any modifications to the structure, changes in proportions, or adjustments to the size, provided they produce the same or similar effects and achieve the same objectives as this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0034] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects unless otherwise expressly indicated. As used in this invention, the term “or” is generally used to include “and / or” unless otherwise expressly indicated. As used in this invention, the term “a number” is generally used to include “at least one” unless otherwise expressly indicated. As used in this invention, the term “at least two” is generally used to include “two or more” unless otherwise expressly indicated. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature.

[0035] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0036] Please refer to Figures 3-4 This embodiment provides a high-voltage electrostatic chuck fixing structure, including two slide grooves 100 and two fastening screws 200. The two slide grooves 100 are respectively arranged on opposite sides of the high-voltage electrostatic chuck 300. The slide grooves 100 are configured to slide and install using a number of base screws pre-installed on the matching base as guide rails.

[0037] Two slide grooves 100 are respectively provided on the outermost side of the two slide grooves. When the high voltage electrostatic chuck 300 is installed in place, the two slide groove screw holes are aligned with the two base screw holes pre-drilled on the matching base and locked by two fastening screws 200.

[0038] By utilizing the four base screws pre-installed on the existing matching base as natural guide rails, during installation, simply align the sliding grooves 100 on both sides of the high-voltage electrostatic chuck 300 with the base screws and push it in the direction for initial positioning. Then, finally lock it in place using two fastening screws 200 on the outermost side of the most easily operated sliding groove 100. This eliminates the need to access the narrow space inside the equipment, allowing the high-voltage electrostatic chuck 300 to be replaced directly without disassembling the matching base as a whole. This avoids the complicated process of powering off and recalibrating the machine, greatly shortening maintenance time.

[0039] Preferably, the two slides 100 are symmetrically arranged on opposite edges of the high-voltage electrostatic chuck 300. This symmetrical layout allows the center of gravity and the forces (such as gravity, vibration, and screw tightening force) of the high-voltage electrostatic chuck 300 to be evenly distributed on the slides 100 on both sides, and then transmitted to the matching base through the slides 100. This effectively prevents unilateral wear, jamming, or installation deformation caused by uneven force distribution, ensuring long-term mechanical stability. Furthermore, only the edge of the base plate 310 of the existing high-voltage electrostatic chuck 300 needs to be improved, changing the original planar design to a slide design. The symmetrically arranged slides 100 slide into the original four inner base screws, making full use of the positions of the original six screw holes on the matching base. There is no need to modify the existing matching base, resulting in strong compatibility and low modification costs.

[0040] It should be noted that, Figures 3-4 The schematic diagram shows that the slide groove 100 and the high-voltage electrostatic chuck 300 have a gap, but the present invention does not limit the size of the gap, and the gap can even be eliminated according to the actual situation, that is, the slide groove 100 and the side wall of the high-voltage electrostatic chuck 300 directly abut against each other. The present invention does not limit this.

[0041] Preferably, the cross-sectional shape of the groove 100 forms a sliding fit with the threaded portion of the base screw. Here, "sliding fit" means that the internal dimensions of the groove 100 are adapted to the outer diameter of the threaded portion of the base screw, avoiding both an overly tight "interference fit" (which would jam) and an overly loose "clearance fit" (which would wobble). This ensures that the high-voltage electrostatic chuck 300 can be easily pushed in and pulled out, greatly reducing the force required for installation and disassembly, making operation simple and quick. Simultaneously, the clearance is controlled within a very small range, ensuring that once installed, the high-voltage electrostatic chuck 300 will not exhibit significant loosening or displacement in either the horizontal or vertical directions, providing a solid foundation for subsequent screw tightening.

[0042] Preferably, the cross-sectional shape of the slide groove 100 is an inverted U-shape or a C-shape. The four base screws form a precise "guide rail" in pairs. The inverted U-shaped or C-shaped slide groove 100 design can enclose the base screws, ensuring that the high-voltage electrostatic chuck 300 can only move along a preset straight path, solving the problem of blind alignment difficult deep within the cavity. Furthermore, the downward-opening design of the inverted U-shape or C-shape allows for simple installation: align the slide groove 100 with the screws and then insert it into the guide rail to begin sliding. For disassembly, simply remove the two outermost fastening screws 200, slide in the opposite direction to the end, and then lift directly upwards. The entire process requires no additional rotation or twisting action, and the operating space requirement is extremely small.

[0043] Preferably, the screw hole in the slide groove is a countersunk hole to ensure that the head of the fastening screw 200 will not protrude after being tightened, and will be flush with the surface of the slide groove 100 to form a complete smooth plane.

[0044] In this embodiment, there are four base screws, which are arranged in a matrix on the matching device base. These four screws are paired up to form two parallel guide rails. The sliding grooves 100 on both sides of the high-voltage electrostatic chuck 300 are respectively embedded in these two guide rails, ensuring the linearity and stability of the movement. At the same time, it makes full use of the positions of the original six screw holes on the matching device base, without changing the existing matching device base, which has strong compatibility and low modification cost.

[0045] In some embodiments, the slide 100 and the base plate 310 of the high-voltage electrostatic chuck 300 are welded together. In other embodiments, the slide 100 and the base plate 310 of the high-voltage electrostatic chuck 300 can also be integrally formed, such as being directly manufactured from a single blank through precision machining (e.g., CNC milling) or precision casting. In these cases, they are a natural whole without any subsequent connection interface.

[0046] Preferably, the material of the slide 100 is stainless steel. Stainless steel has good machinability, corrosion resistance, strength and wear resistance, making it a better choice, but this utility model is not limited thereto.

[0047] During installation, first align the openings of the slide grooves 100 on both sides of the high-voltage electrostatic chuck 300 with the two guide rails formed by the four base screws arranged in a matrix on the matching base. Gently push the high-voltage electrostatic chuck 300 horizontally, allowing it to slide in along the four base screws until it reaches the predetermined working position. Then, use a tool to tighten the fastening screws 200 located in the two countersunk holes on the outermost side of the slide groove 100 to securely lock the high-voltage electrostatic chuck 300 onto the matching base. The disassembly process is the reverse of the installation process. Simply loosen the two outermost fastening screws 200 and slide the high-voltage electrostatic chuck 300 horizontally out along the slide groove 100 to remove it.

[0048] In summary, this utility model embodiment provides a high-voltage electrostatic chuck fixing structure. By utilizing the four base screws pre-installed on the existing matching base as natural guide rails, during installation, it is only necessary to align the sliding grooves 100 on both sides of the high-voltage electrostatic chuck 300 with the base screws and push it in the direction for initial positioning. Then, the final locking is completed by using two fastening screws 200 on the outermost side of the most easily operated sliding groove 100. It is not necessary to touch the narrow space inside the equipment. The high-voltage electrostatic chuck 300 can be replaced directly without disassembling the matching base as a whole, avoiding the complicated machine power-down and recalibration process, and greatly shortening the maintenance time.

[0049] Furthermore, it should be understood that although the present invention has been disclosed above with reference to preferred embodiments, these embodiments are not intended to limit the present invention. For any person skilled in the art, many possible variations and modifications can be made to the present invention's technical solutions using the disclosed technical content, or equivalent embodiments can be modified accordingly, without departing from the scope of the present invention's technical solutions. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention, without departing from the content of the present invention's technical solutions, shall still fall within the protection scope of the present invention's technical solutions.

Claims

1. A high-voltage electrostatic chuck mounting structure, characterized in that, It includes two slides and two fastening screws. The two slides are respectively arranged on opposite sides of the high-voltage electrostatic chuck. The slides are configured to slide on a number of base screws pre-installed on the matching base as guide rails. Two slide groove screw holes are respectively opened on the outermost side of the two slide grooves. When the high voltage electrostatic chuck is installed in place, the two slide groove screw holes are aligned with the two base screw holes pre-opened on the matching device base and locked by the two fastening screws.

2. The high-voltage electrostatic chuck mounting structure according to claim 1, characterized in that, The two grooves are symmetrically arranged on the opposite edges of the high-voltage electrostatic chuck.

3. The high-voltage electrostatic chuck mounting structure according to claim 1, characterized in that, The cross-sectional shape of the groove forms a sliding fit with the screw portion of the base screw.

4. The high-voltage electrostatic chuck mounting structure according to claim 1 or 3, characterized in that, The groove has an inverted U-shaped or C-shaped cross-section.

5. The high-voltage electrostatic chuck mounting structure according to claim 1, characterized in that, The groove screw hole is a countersunk hole.

6. The high-voltage electrostatic chuck mounting structure according to claim 1, characterized in that, The base has four screws.

7. The high-voltage electrostatic chuck mounting structure according to claim 6, characterized in that, The four base screws are arranged in a matrix on the matching base.

8. The high-voltage electrostatic chuck mounting structure according to claim 1, characterized in that, The slide is welded to the base plate of the high-voltage electrostatic chuck.

9. The high-voltage electrostatic chuck mounting structure according to claim 1, characterized in that, The slide groove is integrally formed with the base plate of the high-voltage electrostatic chuck.

10. The high-voltage electrostatic chuck mounting structure according to claim 1, characterized in that, The chute is made of stainless steel.

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