A quasi-circular supporting table structure for square substrate coating

Abstract

The utility model belongs to the technical field of semiconductor equipment, concretely is a kind of quasi-round piece table structure for square substrate gluing, including connecting shaft, piece table.The lower end of connecting shaft is used to connect with corresponding external driving motor, and the upper end of connecting shaft is connected with piece table, and the top surface middle part of piece table is provided with square embedding slot, and corresponding square substrate is embedded and placed in square embedding slot.The utility model can make square substrate be embedded and placed in square embedding slot, and when piece table is driven to rotate, square substrate can be limited and blocked by square embedding slot inner side and not easy to separate from piece table, effectively avoid the risk of fragment and cause the damage of cavity internal component.The utility model is equipped with the setting of protrusion and edge limiting protrusion, can greatly reduce contact area when supporting and limiting square substrate, reduce the risk of producing mark or scratch.The utility model can also effectively reduce the problem of uneven wind speed of four corners of square substrate when high-speed rotating.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor equipment technology, specifically a pseudo-circular substrate support structure for coating square substrates. Background Technology

[0002] The photoresist coating process is a crucial step in the entire integrated circuit manufacturing process. In the photoresist coating process, the substrate needs to be placed on a stage, which is connected to a rotary motor to rotate at high speed. At this time, the photoresist coated on the substrate is evenly spread and spun dry by centrifugal force to complete the film formation process. In the past, most solutions involved the substrate sitting directly on the stage plane. The stage's bearing area was generally smaller than that of the substrate. The stage fixed the substrate by vacuum adsorption, and then carried out subsequent process steps such as applying adhesive and spun dry.

[0003] Existing technologies generally involve direct planar contact between the substrate and the stage, with the back of the substrate being vacuum-adsorbed. However, this method is not suitable for processes that require careful attention to the contact marks on the substrate. Furthermore, vacuum adsorption is not entirely reliable for thicker square substrates, as the substrate is prone to detaching from the stage during high-speed rotation, posing a risk of fragmentation and damage to internal components. Utility Model Content

[0004] To address the aforementioned problems, the purpose of this utility model is to provide a pseudo-circular support structure for coating square substrates.

[0005] The objective of this utility model is achieved through the following technical solution: A pseudo-circular substrate support structure for coating square substrates includes a connecting shaft and a substrate support. The lower end of the connecting shaft is connected to a corresponding external drive motor, and the substrate support is connected to the upper end of the connecting shaft. A square groove is formed in the center of the top surface of the substrate support, and the corresponding square substrate is embedded in the square groove. Drainage notches are formed at the four corners of the outer periphery of the substrate support and the four corners of the corresponding square substrate. Each drainage notch is connected to the square groove. The outer periphery of the substrate support, except for the drainage notches, lies on the same circle A. The projection of the center of circle A onto the horizontal plane coincides with the projection of the center point of the square groove onto the horizontal plane.

[0006] The lower end of the connecting shaft has a connecting shaft hole.

[0007] A flange is formed on the outer periphery of the upper end of the connecting shaft, and the flange of the connecting shaft is fixed to the bottom end of the support plate by screws.

[0008] The bottom surface of the square groove and the four corners of the bottom surface of the corresponding square substrate are respectively provided with mounting protrusions, and the top surface of each mounting protrusion is used to directly support the corresponding square substrate.

[0009] When the square substrate is supported by the protrusions on the bottom surface of the square groove, the top surface of the square substrate is flush with the top surface of the support platform.

[0010] The outer contour shape of each of the top surfaces with protrusions is projected onto a vertical plane as an upwardly convex arc shape.

[0011] The square groove has two edge limiting protrusions evenly distributed on each of its four sides, that is, a total of eight edge limiting protrusions. The two edge limiting protrusions on each side of the square groove are used to abut and limit the same side of the square substrate.

[0012] The top surface of each edge limiting protrusion gradually slopes downward from the side facing the square substrate to the side away from the square substrate, and the projection of the outer contour shape of the end of each edge limiting protrusion facing the square substrate on the horizontal plane is an arc protruding towards the square substrate.

[0013] The bottom surface of the square groove is uniformly provided with substrate back rinsing ports along the circumference. Each substrate back rinsing port has openings at both the top and bottom. The upper openings of all substrate back rinsing ports are located on the bottom surface of the square groove. The center points of all substrate back rinsing ports on the bottom surface of the square groove are located on the same circle B. The center of circle B coincides with the center of circle A. The lower openings of all substrate back rinsing ports are located on the bottom surface of the substrate support platform.

[0014] The upper opening of each of the back flushing ports of the substrate is located on the side further away from the center point of the square groove relative to the lower opening of the back flushing port of the substrate. The bottom surface of the substrate support protrudes downward to form a liquid-gathering ring protrusion. The liquid-gathering ring protrusion is located outside the lower opening of all the back flushing ports of the substrate. The lower part of the inner circumferential surface of the liquid-gathering ring protrusion has a liquid-guiding slope, which gradually slopes downward from the outside to the inside.

[0015] The advantages and positive effects of this utility model are as follows: 1. By setting a support platform with a square groove, this utility model can prevent the square substrate from easily falling off the support platform when the support platform is rotated after the square substrate is inserted into the square groove. This effectively avoids the risk of fragmentation and damage to the internal components of the cavity.

[0016] 2. By incorporating protrusions and edge limiting protrusions, this utility model can significantly reduce the contact area when supporting and limiting the square substrate, thereby reducing the risk of imprints or scratches. Furthermore, it can make the top surface of the square substrate flush with the top surface of the support platform, thus effectively reducing the problem of uneven wind speed at the four corners of the square substrate when it rotates at high speed.

[0017] 3. This utility model, with its liquid-coating ring protrusions and the rinsing port on the back of the substrate, can be used in situations where the back of a square substrate needs to be cleaned, making it convenient to use. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a top view of the structure of this utility model; Figure 3 This is a cross-sectional structural diagram of the present invention; Figure 4 for Figure 1 Enlarged view of point A; Figure 5 for Figure 3 Enlarged view of point B.

[0019] In the diagram: 1 is the connecting shaft, 101 is the connecting shaft hole, and 102 is the flange. 2 is the substrate support platform, 201 is the square groove, 202 is the drain notch, 203 is the back flushing port of the substrate, 204 is the liquid collection ring protrusion, and 2041 is the liquid guiding bevel. 3 is the mounting protrusion, and 4 is the edge limiting protrusion. Detailed Implementation

[0020] The following is in conjunction with the appendix Figures 1-5 The present invention will be described in further detail.

[0021] A pseudo-circular substrate support structure for coating square substrates, such as Figures 1-5As shown, this embodiment includes a connecting shaft 1 and a substrate support 2. The lower end of the connecting shaft 1 is connected to a corresponding external drive motor. The substrate support 2 is connected to the upper end of the connecting shaft 1. A square groove 201 is formed in the center of the top surface of the substrate support 2, and a corresponding square substrate is embedded in the square groove 201. Drainage notches 202 are formed at the four corners of the outer periphery of the substrate support 2 and the corresponding square substrate, respectively. Each drainage notch 202 is connected to the square groove 201. The outer periphery of the substrate support 2, except for the drainage notches 202, lies on the same circle A. The projection of the center of circle A onto the horizontal plane coincides with the projection of the center point of the square groove 201 onto the horizontal plane. The connection method between the external drive motor and the connecting shaft 1 adopts the prior art. The external drive motor drives the entire assembly of the connecting shaft 1 and the substrate support 2 to rotate. The square grooves 201 on the substrate support 2 prevent the square substrate from easily detaching from the support 2 when the substrate support 2 is rotated after being inserted into the square grooves 201, effectively avoiding the risk of fragmentation and damage to internal components. The drainage notches 202 are designed to drain liquid that falls into the square grooves 201 and also provide space at the four corners of the square substrate for placement.

[0022] Specifically, such as Figure 3 As shown, in this embodiment, the lower end of the connecting shaft 1 is provided with a connecting shaft hole 101 to facilitate insertion with an external drive motor and subsequent connection and fixation through other common methods. The outer periphery of the upper end of the connecting shaft 1 forms a flange portion 102, which is fixed to the bottom end of the bearing platform 2 by screws. The bottom end of the bearing platform 2 is provided with a threaded hole for screw connection, which facilitates the assembly and disassembly of the connecting shaft 1 and the bearing platform 2.

[0023] Specifically, in this embodiment, a mounting protrusion 3 is provided on the bottom surface of the square groove 201 and at the four corners of the bottom surface of the corresponding square substrate, that is, a total of four mounting protrusions 3; the top surface of each mounting protrusion 3 is used to directly support the corresponding square substrate. When the square substrate is supported by the mounting protrusions 3 on the bottom surface of the square groove 201, the top surface of the square substrate is flush with the top surface of the support platform 2. When the projection of the center of the aforementioned circle A on the horizontal plane coincides with the projection of the center point of the square groove 201 on the horizontal plane, this can effectively reduce the problem of uneven wind speed at the four corners when the square substrate rotates at high speed. In this embodiment, each mounting protrusion 3 can be integrated with the support platform 2, or it can be fixedly connected to the support platform 2 in a common detachable form. Each mounting protrusion 3 can be replaced according to the different thicknesses of the square substrate, so that the top surface of the square substrate after falling into the square groove 201 is flush with the top surface of the support platform 2. In this embodiment, the outer contour shape of the top surface of each mounting protrusion 3 is projected onto the vertical plane as an upwardly protruding arc shape. When the square substrate is supported by each mounting protrusion 3, the mounting protrusion 3 and the square substrate are close to forming point contact, which can greatly reduce the contact area and reduce the risk of scratches on the square substrate.

[0024] Specifically, in this embodiment, each of the four sides of the square groove 201 is evenly provided with two edge limiting protrusions 4, that is, a total of eight edge limiting protrusions 4. The two edge limiting protrusions 4 on each side of the square groove 201 are used to abut and limit the same side of the square substrate. For example Figure 4 As shown, the top surface of each edge limiting protrusion 4 gradually slopes downwards from the side facing the square substrate to the side away from the square substrate, so that the square substrate falling onto the top surface of the edge limiting protrusion 4 can slide into the square groove 201. The outer contour shape of the end of each edge limiting protrusion 4 facing the square substrate is a circular arc protruding towards the square substrate in the horizontal plane, which can make each edge limiting protrusion 4 and the square substrate close to form a line contact, which can greatly reduce the contact area and reduce the risk of scratches on the square substrate. In this embodiment, each edge limiting protrusion 4 can be integrated with the substrate support 2, or it can be fixedly connected to the substrate support 2 in a common detachable form. Each edge limiting protrusion 4 can be replaced according to the different sizes of the square substrate.

[0025] Specifically, such as Figure 5As shown, in this embodiment, the bottom surface of the square groove 201 is uniformly provided with substrate back rinsing ports 203 along the circumference. Each substrate back rinsing port 203 has openings at both the top and bottom ends. The upper openings of all substrate back rinsing ports 203 are located on the bottom surface of the square groove 201. The center points of all substrate back rinsing ports 203 on the bottom surface of the square groove 201 are located on the same circle B. The center of circle B coincides with the center of circle A. The lower openings of all substrate back rinsing ports 203 are located on the bottom surface of the substrate support platform 2. The upper opening of each substrate back rinse port 203 is located further away from the center point of the square groove 201 than the lower opening of the substrate back rinse port 203. A liquid-collecting annular protrusion 204 protrudes downwards from the bottom surface of the substrate support platform 2, located outside the lower opening of all substrate back rinse ports 203. A liquid-guiding inclined portion 2041 is formed on the lower part of the inner circumferential surface of the liquid-collecting annular protrusion 204, gradually sloping downwards from the outside to the inside. With the above structure, several back rinse nozzles, separate from the substrate support platform 2, can be provided on the lower side of the substrate support platform 2. The back rinse nozzles are arranged using existing technology, with the liquid ejection end of each back rinse nozzle facing the inside of the liquid-collecting annular protrusion 204 and capable of spraying cleaning liquid into the inside of the liquid-collecting annular protrusion 204. As the substrate stage 2 rotates, the cleaning fluid sprayed from each back-wash nozzle onto the liquid-coating annular protrusion 204 flows smoothly along the liquid-guiding inclined surface 2041 within the liquid-coating annular protrusion 204 due to centrifugal force to the back-washing port 203 of each substrate, and then is sprayed onto the back of the square substrate through the back-washing port 203 of each substrate, thus completing the rinsing of the corresponding position on the back of the square substrate.

Claims

1. A pseudo-circular substrate support structure for coating square substrates, characterized in that: The assembly includes a connecting shaft (1) and a substrate support (2). The lower end of the connecting shaft (1) is used to connect to the corresponding external drive motor. The substrate support (2) is connected to the upper end of the connecting shaft (1). A square groove (201) is provided in the middle of the top surface of the substrate support (2). The corresponding square substrate is embedded in the square groove (201). Drainage notches (202) are provided at the four corners of the outer periphery of the substrate support (2) and the corresponding square substrate. Each drainage notch (202) is connected to the square groove (201). The outer periphery of the substrate support (2), except for each drainage notch (202), is located on the same circle A. The projection of the center of circle A on the horizontal plane coincides with the projection of the center point of the square groove (201) on the horizontal plane.

2. The pseudo-circular support structure for coating square substrates according to claim 1, characterized in that: The lower end of the connecting shaft (1) is provided with a connecting shaft hole (101).

3. The pseudo-circular support structure for coating square substrates according to claim 1, characterized in that: A flange (102) is formed on the outer periphery of the upper end of the connecting shaft (1), and the flange of the connecting shaft (1) is fixed to the bottom end of the bearing platform (2) by screws.

4. The pseudo-circular support platform structure for coating square substrates according to claim 1, characterized in that: The bottom surface of the square groove (201) and the four corners of the bottom surface of the corresponding square substrate are respectively provided with mounting protrusions (3), and the top surface of each mounting protrusion (3) is used to directly support the corresponding square substrate.

5. A pseudo-circular support platform structure for coating square substrates according to claim 4, characterized in that: When the square substrate is supported by the mounting protrusions (3) on the bottom surface of the square groove (201), the top surface of the square substrate is flush with the top surface of the support platform (2).

6. The pseudo-circular support platform structure for coating square substrates according to claim 4, characterized in that: The outer contour shape of the top surface of each of the protrusions (3) is projected onto the vertical plane as an upwardly protruding arc.

7. The pseudo-circular support platform structure for coating square substrates according to claim 1, characterized in that: The square groove (201) has two edge limiting protrusions (4) evenly provided on each of its four sides, that is, a total of eight edge limiting protrusions (4). The two edge limiting protrusions (4) on each side of the square groove (201) are used to abut and limit the same side of the square substrate.

8. A pseudo-circular support platform structure for coating square substrates according to claim 7, characterized in that: The top surface of each of the edge limiting protrusions (4) gradually slopes downward from the side facing the square substrate to the side away from the square substrate, and the projection of the outer contour shape of the end of each of the edge limiting protrusions (4) facing the square substrate on the horizontal plane is an arc shape protruding towards the square substrate.

9. A pseudo-circular support platform structure for coating square substrates according to claim 1, characterized in that: The bottom surface of the square groove (201) is uniformly provided with substrate back flushing ports (203) along the circumferential direction. Each substrate back flushing port (203) has openings at both the top and bottom ends. The upper opening of all substrate back flushing ports (203) is located on the bottom surface of the square groove (201). The center point of all substrate back flushing ports (203) on the bottom surface of the square groove (201) is located on the same circle B. The center of circle B coincides with the center of circle A. The lower opening of all substrate back flushing ports (203) is located on the bottom surface of the substrate support platform (2).

10. A pseudo-circular support platform structure for coating square substrates according to claim 9, characterized in that: The upper opening of each of the substrate back flushing ports (203) is located on the side further away from the center point of the square groove (201) relative to the lower opening of the substrate back flushing port (203). A liquid-gathering ring protrusion (204) is formed on the bottom surface of the substrate support (2). The liquid-gathering ring protrusion (204) is located outside the lower opening of all the substrate back flushing ports (203). A liquid-guiding inclined surface (2041) is formed on the lower part of the inner peripheral surface of the liquid-gathering ring protrusion (204). The liquid-guiding inclined surface (2041) gradually slopes downward from the outside to the inside.

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