Wafer cleaning equipment metal connecting structure convenient to disassemble

Abstract

The utility model discloses a wafer cleaning equipment metal connecting structure convenient to disassemble relates to wafer cleaning technical field. The utility model discloses a base, and the upper surface of base is fixed with support frame, and one end of support frame is fixed with installation shell, and the inside connection of installation shell has installation ware, and installation ware includes the casing, and one end of casing is fixed with support frame, and the inner ring of support frame is fixed with a plurality of extension plate, and a plurality of protection blocks are fixed to the top of extension plate, and the inside fixed of casing has support plate, and the both sides of support plate are fixed with telescopic link. The utility model discloses the effect through installation ware, and the inside of casing of installation ware passes through support plate, telescopic link, first spring and clamping lever and constitutes elastic clamping structure, and clamping lever can be fixed through the realization of installation shell mounting hole of shell through hole and installation shell, and only need to press the handle when disassembling, and can remove the fixing through the extrusion of push rod and clamping lever, need not complex tool, can take out installation ware from installation shell fast, is convenient for the cleaning or replacement of support frame, and can save maintenance time greatly.

Description

Technical Field

[0001] This utility model belongs to the field of wafer cleaning technology, and in particular relates to a metal connection structure for wafer cleaning equipment that is easy to disassemble. Background Technology

[0002] In the semiconductor manufacturing industry, wafer cleaning is a critical process for ensuring wafer processing accuracy and finished product yield. The metal connection structure in wafer cleaning equipment, as a core support component, primarily functions to fix key components such as the support frame and positioning ring, ensuring the wafer maintains a stable posture during cleaning and preventing uneven cleaning or wafer scratches due to misalignment. As the semiconductor industry's requirements for wafer size and cleanliness continue to increase, components such as the support frame need frequent disassembly for cleaning and maintenance. On the one hand, residual cleaning fluid and tiny impurities detached from the wafer surface can easily adhere to the extension plate and protective block surface of the inner ring of the support frame; if not cleaned promptly, this can contaminate subsequent wafers. On the other hand, the protective block, due to prolonged contact with the wafer edge, is prone to wear and requires periodic replacement to ensure positioning accuracy.

[0003] Existing wafer cleaning equipment generally suffers from poor disassembly and ease of use due to its metal connection structure, making it difficult to meet the needs of efficient maintenance. Most of these systems rely on bolted fastening, with multiple sets of bolts securing the support frame to the main body of the equipment. Disassembly requires specialized tools such as wrenches and screwdrivers to loosen each bolt individually, which is not only cumbersome but also limits the use of tools due to the typically limited internal space, severely reducing maintenance efficiency.

[0004] To address these issues, we provide a metal connection structure for wafer cleaning equipment that is easy to disassemble. Utility Model Content

[0005] The purpose of this utility model is to provide a metal connection structure for wafer cleaning equipment that is easy to disassemble. Through the action of the installer, the internal housing of the installer forms an elastic locking structure with a support plate, a telescopic rod, a first spring, and a locking rod. The locking rod can pass through the through hole of the housing and the mounting hole of the mounting shell to achieve fixation. During disassembly, only the handle needs to be pressed, and the locking rod can be released by pushing the push rod. No complicated tools are required, and the installer can be quickly removed from the mounting shell, which facilitates the cleaning or replacement of the support frame and greatly saves maintenance time. This solves the problem that existing structures mostly use bolt fastening, which use multiple sets of bolts to fix the support frame to the mounting shell of the equipment body. During disassembly, special tools such as wrenches and screwdrivers are needed to loosen the bolts one by one. This is not only cumbersome, but also the internal installation space of the equipment is usually relatively small, which restricts the use of tools and seriously reduces maintenance efficiency.

[0006] To solve the above technical problems, this utility model is achieved through the following technical solution: This utility model is a metal connection structure for a wafer cleaning equipment that is easy to disassemble, including a base, a support frame fixed on the upper surface of the base, and a mounting shell fixed at one end of the support frame;

[0007] An installer is connected inside the mounting housing, and the installer includes a housing.

[0008] A support frame is fixed to one end of the housing, and several extension plates are fixed to the inner circle of the support frame.

[0009] Several protective blocks are fixed to the top of the extension plate;

[0010] A support plate is fixed inside the housing, and telescopic rods are fixed on both sides of the support plate. A first spring is sleeved on the outside of the telescopic rods.

[0011] A connecting plate is fixed to one end of the telescopic rod, and a locking rod is fixed to one end of the connecting plate;

[0012] The housing has through holes on both sides, and the locking rod passes through the through holes;

[0013] The mounting housing has mounting holes on both sides, and the clamp rod passes through the mounting holes.

[0014] The present invention is further configured such that: one end of the first spring is fixedly connected to the support plate, and the other end of the first spring is fixedly connected to the connecting plate.

[0015] The present invention is further configured such that: both sides of the mounting shell are fixed with fixing plates, and the surface of the fixing plates is provided with adjustment holes;

[0016] A tension spring is fixed to the side of the mounting plate near the mounting shell.

[0017] The present invention is further configured such that: one end of the tension spring is fixed with a movable plate, and one end of the movable plate is fixed with a push rod;

[0018] The push rod and the locking rod are coaxial.

[0019] The present invention is further configured such that: an adjusting rod is fixed at one end of the movable plate, and the adjusting rod passes through the adjusting hole;

[0020] The adjusting rod has a handle fixed at the end away from the push rod.

[0021] The present invention is further configured such that: a pad is fixed on the upper surface of the base, and a motor is fixed at one end of the pad;

[0022] The motor output shaft is fixed with a suction cup.

[0023] The present invention is further configured such that: a bracket is fixed on the upper surface of the base, a water outlet pipe is fixed at one end of the bracket, and a plurality of nozzles are fixed at one end of the water outlet pipe;

[0024] A cleaning plate is fixed to one side of the bracket, and a second spring is fixed to the bottom of the cleaning plate;

[0025] A movable plate is fixed to one end of the second spring, and a cleaning brush is fixed to one side of the movable plate;

[0026] A limit rod is fixed to one side of the movable plate, and the limit rod penetrates the cleaning plate.

[0027] This utility model has the following beneficial effects:

[0028] 1. This utility model utilizes the function of the installer. The interior of the installer's housing consists of a support plate, a telescopic rod, a first spring, and a locking rod, forming an elastic locking structure. The locking rod can pass through the housing's through hole and the mounting hole of the mounting shell for fixation. During disassembly, simply press the handle and push the locking rod with the push rod to release the fixation. No complicated tools are required, allowing the installer to be quickly removed from the mounting shell, facilitating the cleaning or replacement of the support frame and significantly saving maintenance time. The first spring inside the housing has a reset function. During installation, align the installer's housing with the mounting shell and insert it. The first spring automatically pushes the locking rod into the mounting hole of the mounting shell, achieving automatic locking and fixation of the installer. There is no need to manually adjust the position of the locking rod, and the structure is stable after locking, preventing the installer from loosening during cleaning and affecting the cleaning effect.

[0029] 2. This utility model utilizes the function of nozzles, which are fixed at one end of the water outlet pipe and number in number. By reasonably distributing them to cover the wafer surface, the cleaning fluid can be stably delivered to the rotating wafer surface during cleaning. Combined with the uniform rotation of the wafer within the protective block, it achieves all-round, no-dead-angle rinsing of the wafer surface stains, laying the foundation for subsequent deep cleaning and avoiding local stain residue. Attached Figure Description

[0030] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 This is a schematic diagram of the metal connection structure of a wafer cleaning device that is easy to disassemble, according to the present invention.

[0032] Figure 2 This is a schematic diagram of the front view structure of this utility model.

[0033] Figure 3This is a side view structural diagram of the present invention.

[0034] Figure 4 This is a top-view structural diagram of the present invention.

[0035] Figure 5 For the present utility model Figure 4 Enlarged view of a portion of point A in the middle.

[0036] Figure 6 This is a schematic diagram of the support frame structure of this utility model.

[0037] Figure 7 For the present utility model Figure 6 Enlarged view of section B in the middle.

[0038] The attached diagram lists the components represented by each number as follows:

[0039] 1-Base, 2-Support frame, 3-Mounting shell, 4-Installer, 5-Shell, 6-Support frame, 7-Extension plate, 8-Protective block, 9-Support plate, 10-Telescopic rod, 11-First spring, 12-Connecting plate, 13-Clamping rod, 14-Through hole, 15-Mounting hole, 16-Fixed plate, 17-Adjusting hole, 18-Tension spring, 19-Moving plate, 20-Push rod, 21-Adjusting rod, 22-Handle, 23-Pad plate, 24-Motor, 25-Suction cup, 26-Bracket, 27-Water outlet pipe, 28-Nozzle, 29-Cleaning plate, 30-Second spring, 31-Moving plate, 32-Cleaning brush, 33-Limiting rod. Detailed Implementation

[0040] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0041] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0042] In this utility model, unless otherwise stated, the orientations used, such as "up" and "down", usually refer to the direction shown in the accompanying drawings, or to the vertical, perpendicular, or gravitational direction; similarly, for ease of understanding and description, "left" and "right" usually refer to the left and right shown in the accompanying drawings; "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model. Specific Implementation Example 1

[0044] Please see Figures 1-7This utility model relates to a metal connection structure for a wafer cleaning device that is easy to disassemble. It includes a base 1, a support frame 2 fixed to the upper surface of the base 1, and a mounting shell 3 fixed to one end of the support frame 2. An installer 4 is connected inside the mounting shell 3, and the installer 4 includes a housing 5. A support frame 6 is fixed to one end of the housing 5, and several extension plates 7 are fixed to the inner ring of the support frame 6. Several protective blocks 8 are fixed to the top of the extension plates 7. A support plate 9 is fixed inside the housing 5, and telescopic rods 10 are fixed to both sides of the support plate 9. A first spring 11 is sleeved on the outer side of the telescopic rods 10. A connecting plate 12 is fixed to one end of the telescopic rods 10, and a locking rod 13 is fixed to one end of the connecting plate 12. Through holes 14 are opened on both sides of the housing 5, and the locking rod 13 passes through the through holes 14. Mounting holes 15 are opened on both sides of the mounting shell 3, and the locking rod 13 passes through the mounting holes 15.

[0045] Specifically, one end of the first spring 11 is fixedly connected to the support plate 9, and the other end of the first spring 11 is fixedly connected to the connecting plate 12.

[0046] Furthermore, fixing plates 16 are fixed on both sides of the mounting shell 3, and adjustment holes 17 are opened on the surface of the fixing plates 16; a tension spring 18 is fixed on the side of the fixing plate 16 near the mounting shell 3; a movable plate 19 is fixed to one end of the tension spring 18, and a push rod 20 is fixed to one end of the movable plate 19; the push rod 20 is coaxial with the locking rod 13; an adjustment rod 21 is fixed to one end of the movable plate 19, and the adjustment rod 21 passes through the adjustment hole 17; a handle 22 is fixed to the end of the adjustment rod 21 away from the push rod 20.

[0047] The operation process of this embodiment is as follows: When using this device, first confirm that the extension plate 7 of the inner ring of the support frame 6 is in a horizontal state. The protective block 8 on the top of the extension plate 7 is used to limit the rotation range of the wafer and prevent it from shifting. The protective blocks 8 are evenly distributed. Place the wafer to be cleaned stably on the suction cup 25 fixed to the output shaft of the motor 24. Gently rotate the wafer so that the edge of the wafer is slightly in contact with the inner side of the protective block 8 in the support frame 6, ensuring that the center of the wafer is aligned with the center of the suction cup 25 to prevent uneven cleaning or wafer damage caused by placement deviation. When it is necessary to disassemble the support frame 6, first turn off the power of the motor 24, then close the water inlet valve of the water outlet pipe 27, and hold the fixing plates 16 on both sides of the mounting shell 3 with both hands. Press the handle 22 horizontally towards the mounting housing 3; the handle 22 drives the adjusting rod 21 to slide inward along the adjusting hole 17 of the fixed plate 16, the adjusting rod 21 pulls the movable plate 19 to compress the tension spring 18, and at the same time the movable plate 19 drives the push rod 20 to move towards the locking rod 13, the push rod 20 squeezes the locking rod 13, and after being squeezed by the push rod, the locking rod 13 moves into the housing 5, during which the first spring 11 on one side of the connecting plate 12 is compressed, and at the same time the telescopic rod 10 retracts until the locking rod 13 is completely disengaged from the mounting hole 15 of the mounting housing 3 and retracts into the housing 5; at this time, pull the support frame 6 vertically upward, driving the installer 4 to be removed from the inside of the mounting housing 3, completing the disassembly of the support frame. Disassemble and clean the disassembled support frame 6, extension plate 7, and protective block 8. If the protective block 8 is severely worn, replace it with a new support frame assembly. Align the housing 5 of the installer 4 with the internal cavity of the mounting housing 3, ensuring that the through holes 14 on both sides of the housing 5 are on the same horizontal line as the mounting holes 15 on both sides of the mounting housing 3. Slowly insert the housing 5 downwards until the bottom of the housing 5 is in contact with the inner bottom surface of the mounting housing 3. Release the pressing handle 22, and the tension spring 18 on the fixing plate 16 will return to its original deformation, pulling the movable plate 19, adjusting rod 21, and handle 22 back to their original positions. The push rod 20 will disengage from the locking rod 13. At the same time, the first spring 11 inside the housing 5 will regain its elasticity, pushing the connecting plate 12 and locking rod 13 outwards. After the lateral movement, the locking rod 13 passes through the through hole 14 of the housing 5 and is embedded in the mounting hole 15 of the mounting shell 3, realizing the automatic locking and fixing of the installer 4. At this time, the support frame 6 can be gently pulled to confirm that there is no looseness, and the installation is complete. In this device, the housing 5 of the installer 4 forms an elastic locking structure with the locking rod 13 through the support plate 9, the telescopic rod 10, the first spring 11, and the locking rod 13. The locking rod 13 can pass through the through hole 14 of the housing 5 and the mounting hole 15 of the mounting shell 3 to achieve fixation. When disassembling, only the handle 22 needs to be pressed, and the locking rod 13 can be released by pushing the push rod 20. No complicated tools are required, and the installer 4 can be quickly removed from the mounting shell 3, which is convenient for cleaning or replacing the support frame 6 and greatly saves maintenance time.The first spring 11 inside the housing 5 has a reset function. During installation, the housing 5 of the installer 4 is aligned with the mounting housing 3 and inserted. The first spring 11 automatically pushes the locking rod 13 into the mounting hole 15 of the mounting housing 3, achieving automatic locking and fixing of the installer 4. No manual adjustment of the locking rod position is required, and the structure is stable after locking, preventing the installer 4 from loosening during cleaning and affecting the cleaning effect. Specific Implementation Example 2

[0049] Please see Figures 1-3 Based on the first specific embodiment, a pad 23 is fixed on the upper surface of the base 1, and a motor 24 is fixed at one end of the pad 23; a suction cup 25 is fixed on the output shaft of the motor 24.

[0050] Specifically, a bracket 26 is fixed on the upper surface of the base 1, a water outlet pipe 27 is fixed at one end of the bracket 26, and several nozzles 28 are fixed at one end of the water outlet pipe 27; a cleaning plate 29 is fixed on one side of the bracket 26, and a second spring 30 is fixed at the bottom of the cleaning plate 29; a moving plate 31 is fixed at one end of the second spring 30, and a cleaning brush 32 is fixed on one side of the moving plate 31; a limiting rod 33 is fixed on one side of the moving plate 31, and the limiting rod 33 passes through the cleaning plate 29.

[0051] The operation process of this embodiment is as follows: When using this device, the motor 24 is turned on, and the motor 24 drives the suction cup 25 to rotate at a constant speed, thereby driving the wafer to rotate stably within the area enclosed by the protective block 8 of the support frame 6. The water inlet valve of the water outlet pipe 27 is opened, and the cleaning fluid is delivered to the nozzle 28 through the water outlet pipe 27. The nozzle 28 sprays the cleaning fluid onto the rotating wafer surface to achieve initial rinsing of the dirt on the wafer surface. As the wafer rotates, the second spring 30 under the cleaning plate 29 on one side of the bracket 26 generates a downward elastic force, pushing the moving plate 31 closer to the wafer along the direction of the limiting rod 33, so that the cleaning brush 32 on one side of the moving plate 31 is in close contact with the upper surface of the wafer. When the wafer rotates, the cleaning brush 32 generates relative friction with the wafer surface, which, together with the rinsing fluid, achieves deep cleaning of stubborn dirt. The limiting rod 33 can prevent movement. The offset of plate 31 ensures that cleaning brush 32 cleans the wafer. In this device, nozzles 28 are fixed to one end of water outlet pipe 27 and there are several of them. They can cover the wafer surface by reasonable distribution. During cleaning, the cleaning fluid can be stably delivered to the rotating wafer surface. With the uniform rotation of the wafer in the protective block 8, the surface stains of the wafer can be rinsed in an all-round and thorough manner, laying the foundation for subsequent deep cleaning and avoiding local stain residue. The cleaning brush 32 is connected to the second spring 30 at the bottom of the cleaning plate 29 through the moving plate 31. The elasticity of the second spring 30 can push the cleaning brush 32 closer to the wafer and maintain appropriate pressure. This can ensure that the cleaning brush 32 is in close contact with the wafer surface, effectively removing stubborn stains, while avoiding excessive pressure that could damage the wafer. It is adapted to the slight undulations of the wafer surface, ensuring the cleaning effect and wafer integrity.

[0052] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0053] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A metal connection structure for a wafer cleaning device that is easy to disassemble, comprising a base (1), characterized in that: A support frame (2) is fixed on the upper surface of the base (1), and a mounting shell (3) is fixed at one end of the support frame (2); The mounting housing (3) is internally connected to an installer (4), and the installer (4) includes a housing (5); One end of the housing (5) is fixed with a support frame (6), and several extension plates (7) are fixed in the inner ring of the support frame (6); Several protective blocks (8) are fixed to the top of the extension plate (7); A support plate (9) is fixed inside the housing (5), and telescopic rods (10) are fixed on both sides of the support plate (9). A first spring (11) is sleeved on the outside of the telescopic rods (10). One end of the telescopic rod (10) is fixed with a connecting plate (12), and one end of the connecting plate (12) is fixed with a locking rod (13); The housing (5) has through holes (14) on both sides, and the locking rod (13) passes through the through holes (14); The mounting housing (3) has mounting holes (15) on both sides, and the clamping rod (13) passes through the mounting holes (15).

2. The metal connection structure of the wafer cleaning apparatus according to claim 1, wherein One end of the first spring (11) is fixedly connected to the support plate (9), and the other end of the first spring (11) is fixedly connected to the connecting plate (12).

3. The metal connection structure of the wafer cleaning apparatus according to claim 1, wherein The mounting shell (3) is fixed with fixing plates (16) on both sides, and the fixing plates (16) have adjustment holes (17) on their surfaces; A tension spring (18) is fixed to the side of the fixing plate (16) near the mounting shell (3).

4. The metal connection structure of the wafer cleaning apparatus according to claim 3, wherein One end of the tension spring (18) is fixed with a movable plate (19), and one end of the movable plate (19) is fixed with a push rod (20); The push rod (20) and the locking rod (13) are coaxial.

5. The metal connection structure of the wafer cleaning apparatus according to claim 4, wherein An adjusting rod (21) is fixed to one end of the movable plate (19), and the adjusting rod (21) passes through the adjusting hole (17); The adjusting rod (21) has a handle (22) fixed at the end away from the push rod (20).

6. The metal connection structure of the wafer cleaning apparatus according to claim 1, wherein A pad (23) is fixed on the upper surface of the base (1), and a motor (24) is fixed at one end of the pad (23); The output shaft of the motor (24) is fixed with a suction cup (25).

7. The metal connection structure of the wafer cleaning apparatus according to claim 1, wherein A bracket (26) is fixed on the upper surface of the base (1), and a water outlet pipe (27) is fixed at one end of the bracket (26), and a plurality of nozzles (28) are fixed at one end of the water outlet pipe (27). A cleaning plate (29) is fixed to one side of the bracket (26), and a second spring (30) is fixed to the bottom of the cleaning plate (29); A movable plate (31) is fixed to one end of the second spring (30), and a cleaning brush (32) is fixed to one side of the movable plate (31); A limiting rod (33) is fixed on one side of the movable plate (31), and the limiting rod (33) passes through the cleaning plate (29).

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