Laser scribing device

Abstract

The utility model relates to a kind of laser scribing device, comprising: laser, for emitting laser;Splitting mechanism, located the propagation path of the laser, to the laser is divided into at least two mutually parallel outgoing light of emitting;Adjustment module, with the number of outgoing light equal and one-to-one correspondence setting, the adjustment module is located the outgoing path of the outgoing light;Wherein, each the adjustment module includes one of beam-splitting optical lens and shaping optical lens, the beam-splitting optical lens is used to divide the outgoing light into multiple beams, the shaping optical lens is used to adjust the shape of the outgoing light.The above-mentioned laser scribing device, outgoing light is formed by splitting mechanism and is emitted after adjustment module adjustment, since adjustment module can split beam outgoing light or can adjust the shape of outgoing light, that is, relative to prior art, adjustment module can further adjust the outgoing light formed after splitting, can satisfy the processing demand of different products.

Description

Technical Field

[0001] This utility model relates to the field of laser marking technology, and in particular to a laser marking device. Background Technology

[0002] Laser cutting or scribing is an important method for processing products and is widely used in various fields. For example, in the fabrication of perovskite solar cells, a laser beam is used to scribble multiple lines on the perovskite solar cell substrate to form the perovskite solar cell. The laser beam is generated by a laser scribing device.

[0003] Laser scribing devices typically include a beam splitting module and a focusing module. The beam split by the beam splitting module is directly directed to the focusing module and then to the product. Because this type of laser scribing device cannot further adjust the split beam, it cannot meet the processing requirements of the product. Utility Model Content

[0004] Therefore, it is necessary to provide a laser marking device that can improve upon the aforementioned problems.

[0005] A laser marking device, comprising:

[0006] A laser, used to emit laser light;

[0007] A beam splitting mechanism is located in the propagation path of the laser to split the laser into at least two beams of light that are emitted in parallel to each other.

[0008] An adjustment module is set up in a one-to-one correspondence with the number of emitted light beams, and the adjustment module is located on the emission path of the emitted light beams;

[0009] Each of the adjustment modules includes one of a beam-splitting optical lens and a shaping optical lens. The beam-splitting optical lens is used to split the emitted light into multiple beams, and the shaping optical lens is used to adjust the shape of the emitted light.

[0010] In the aforementioned laser scribing device, the outgoing light generated by the beam splitting mechanism is adjusted by the adjustment module before being emitted. Since the adjustment module can split the outgoing light beam or adjust the shape of the outgoing light, compared with the prior art, the adjustment module can further adjust the outgoing light generated after beam splitting, which can meet the processing needs of different products.

[0011] In one embodiment, the adjustment module corresponding to a portion of the emitted light includes the beam-splitting optical lens, and the adjustment module corresponding to the remaining portion of the emitted light includes the shaping optical lens;

[0012] The shaping optical lens is used to shape Gaussian light into flat-top light.

[0013] In one embodiment, the multiple beams of emitted light are distributed in an odd-even order;

[0014] The adjustment module corresponding to all the emitted light in one of the odd-numbered and even-numbered positions includes the beam-splitting optical lens, and the adjustment module corresponding to all the emitted light in the other position includes the shaping optical lens.

[0015] In one embodiment, the laser scribing device further includes an adjustment mechanism connected to at least a portion of the beam splitting mechanism to adjust the relative position of at least a portion of the beam splitting mechanism, thereby adjusting the spacing between the emitted beams.

[0016] In one embodiment, the adjustment module including the beam-splitting optical lens further includes a rotation module. The beam-splitting optical lens is connected to the rotation module, and the rotation module drives the beam-splitting optical lens to rotate around the center in its plane to adjust the spacing of the beams formed by the beam-splitting optical lens.

[0017] In one embodiment, the laser scribing device further includes a focusing lens that corresponds one-to-one with the emitted light, and the focusing lens is located downstream of the adjustment module.

[0018] In one embodiment, the laser marking device further includes a beam expander located between the laser and the beam splitter.

[0019] In one embodiment, the beam-splitting mechanism includes:

[0020] The first beam splitter is located in the propagation path of the laser and is used to split the laser into a first reflected light and a first transmitted light.

[0021] A first transmission module, located on the propagation path of the first reflected light, is used to cause the first reflected light to form at least one beam of outgoing light;

[0022] The second transmission module is located on the propagation path of the first transmitted light and is used to make the first transmitted light form at least one beam of the emitted light.

[0023] In one embodiment, the first transmission module includes at least one second beam splitter. When the first transmission module includes at least two second beam splitters, the second transmitted light formed by the upstream second beam splitter is directed toward the downstream second beam splitter, and the second reflected light formed by the beam splitter forms the outgoing light.

[0024] and / or

[0025] The second transmission module includes at least one third beam splitter. When the second transmission module includes at least two third beam splitters, the third transmitted light formed by the upstream third beam splitter is directed toward the downstream third beam splitter, and the third reflected light formed by the beam splitter forms the outgoing light.

[0026] In one embodiment, the first transmission module includes at least two second beam splitters, and the second transmission module includes at least two third beam splitters;

[0027] All the second beam splitters and all the third beam splitters are arranged alternately in sequence;

[0028] or

[0029] All of the second beam splitters are located on one side of all of the third beam splitters. Attached Figure Description

[0030] Figure 1 This is a structural diagram of a laser scribing device provided in an embodiment of this application;

[0031] Figure 2 Optical path diagram of a laser scribing device provided in another embodiment of this application;

[0032] Figure 3 Optical path diagram of a laser scribing device provided in another embodiment of this application;

[0033] Figure 4 The laser scribing device provided in the embodiments of this application forms the laser spot pattern;

[0034] Figure 5 The laser scribing device provided in the embodiments of this application forms the laser spot pattern;

[0035] Figure 6 This is a structural diagram of the adjustment module of a laser scribing device provided in another embodiment of this application.

[0036] Explanation of reference numerals in the attached figures:

[0037] 100. Laser marking device; 10. Laser; 20. Beam splitting mechanism; 21. First beam splitter; 22. First transmission module; 221. Second beam splitter; 222. First reflector; 23. Second transmission module; 231. Third beam splitter; 232. Second reflector; 30. Adjustment module; 31. Beam splitting optical lens; 32. Rotation module; 40. Beam expander; 50. Focusing lens; 60. Third reflector; 200. Outgoing beam. Detailed Implementation

[0038] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0039] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0040] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0041] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0042] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0043] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0044] See Figure 1 One embodiment of this application provides a laser scribing device 100 for cutting or scribing lines on a product, thereby processing the product. Specifically, the laser scribing device 100 is used to scribble lines on a solar cell substrate to fabricate a solar cell. In other embodiments, the type of product cut or scribed by the laser scribing device 100 is not limited.

[0045] In one specific embodiment, the solar cell is a perovskite solar cell. The perovskite solar cell production process involves three processes requiring scribing: P1, P2, and P3. The aforementioned laser scribing device 100 can scribble lines on the product from the P1 and P2 processes, or from the product from the P1, P2, and P3 processes. In other embodiments, the laser scribing device 100 can also be used to clean the edges of the solar cell; this is not limited to these specific embodiments.

[0046] See Figure 2 and Figure 3 The laser marking device 100 includes a laser 10 and a beam splitting mechanism 20. The laser 10 is used to emit laser light; the type of laser 10 is not limited here. The beam splitting mechanism 20 is located in the propagation path of the laser to split the laser into at least two parallel beams 200. Specifically, the beams 200 are both emitted along a first direction and are spaced apart sequentially along a second direction. The first direction intersects the second direction. More specifically, the first direction is perpendicular to the second direction. Figure 2 The X direction is the second direction, and the Y direction is the first direction.

[0047] In some specific embodiments, the beam splitting mechanism 20 can divide the laser into eight beams 200, all of which are emitted along a first direction, and the beams 200 are arranged sequentially along a second direction. It is conceivable that in other specific embodiments, the number of beams formed by the beam splitting mechanism 20 is not limited, such as dividing the laser into 2, 3, 4, 5, 6 or 7 beams, etc., which are not limited here.

[0048] Continue reading Figures 1-3 The laser marking device 100 also includes adjustment modules 30. The number of adjustment modules 30 is equal to the number of emitted light beams 200 and they are arranged in a one-to-one correspondence. The adjustment modules 30 are located on the emission path of the corresponding emitted light beam 200. Each adjustment module 30 includes one of a beam-splitting optical lens 31 and a shaping optical lens. The beam-splitting optical lens 31 is used to split the emitted light beam 200 into multiple beams, and the shaping optical lens is used to adjust the shape of the emitted light beam 200. That is, each adjustment module 30 may only include a beam-splitting optical lens 31 for splitting the emitted light beam 200 into multiple beams, or it may only include a shaping optical lens for adjusting the shape of the emitted light beam 200.

[0049] In some specific embodiments, a portion of the adjustment modules 30 includes a beam-splitting optical lens 31, while the remaining portion includes a shaping optical lens. That is, a portion of the adjustment modules 30 is used for shaping the emitted light 200, and the remaining portion is used for beam splitting the emitted light 200. In other specific embodiments, all adjustment modules 30 include a beam-splitting optical lens 31. That is, all adjustment modules 30 are used for beam splitting the emitted light 200. In still other specific embodiments, all adjustment modules 30 include a shaping optical lens. That is, all adjustment modules 30 are used for shaping the emitted light 200.

[0050] The laser scribing device 100 provided in this application embodiment has an output light 200 formed by beam splitting by beam splitting mechanism 20, which is then adjusted by adjustment module 30 before being emitted. Since adjustment module 30 can split the output light 200 or adjust the shape of the output light 200, compared with the prior art, adjustment module 30 can further adjust the output light 200 formed after beam splitting, which can meet the processing needs of different products.

[0051] In some embodiments, see further reference. Figures 1-3 The laser marking device 100 also includes a beam expander 40, which is located between the laser 10 and the beam splitting mechanism 20. After passing through the beam expander 40, the laser beam enters the beam splitting mechanism 20 for beam splitting. The beam expander 40 is used to change the diameter and divergence angle of the laser beam. The beam expander 40 can be mounted upright to enlarge the beam waist size, or it can be mounted upside down to reduce the beam waist size.

[0052] In some embodiments, the beam splitting mechanism 20 includes a first beam splitter 21, a first transmission module 22, and a second transmission module 23. The first beam splitter 21 is located in the propagation path of the laser and is used to split the laser into a first reflected light and a first transmitted light. The first transmission module 22 is located in the propagation path of the first reflected light and is used to cause the first reflected light to form at least one outgoing beam 200. The second transmission module 23 is located in the propagation path of the first transmitted light and is used to cause the first transmitted light to form at least one outgoing beam 200.

[0053] With the above configuration, the laser beam is split into at least two outgoing beams 200 by the combined action of the first beam splitter 21, the first transmission module 22 and the second transmission module 23.

[0054] It is conceivable that in other embodiments, the beam splitting mechanism 20 may be configured in other ways, as long as it can split the laser into multiple beams of output light 200, which is not limited here.

[0055] Furthermore, the first transmission module 22 includes at least one second beam splitter 221. When the first transmission module 22 includes at least two second beam splitters 221, each second beam splitter 221 is arranged sequentially along the second direction. The second transmitted light formed by the upstream second beam splitter 221 is directed to the downstream second beam splitter 221, and the second reflected light formed by the second beam splitter 221 forms the outgoing light 200.

[0056] The second transmission module 23 includes at least one third beam splitter 231. When the second transmission module 23 includes at least two third beam splitters 231, each third beam splitter 231 is arranged sequentially along the second direction. The third transmitted light formed by the upstream third beam splitter 231 is directed to the downstream third beam splitter 231, and the third reflected light formed by the beam splitter 231 forms the outgoing light 200.

[0057] By configuring the first transmission module 22 to include at least one second beam splitter 221 and the second transmission module 23 to include at least one third beam splitter 231, at least two outgoing beams 200 can be formed.

[0058] The total number of the second beam splitter 221 and the third beam splitter 231 is equal to the number of beams of the emitted light 200. That is, when it is necessary to split the emitted light 200 into several beams, the number of second beam splitters 221 and third beam splitters 231 is set accordingly. For example, in some specific embodiments, the beam splitting mechanism 20 can split the laser into 8 beams of emitted light 200, in which case the number of second beam splitters 221 and third beam splitters 231 can be set to 4 each.

[0059] Of course, in other embodiments, the first conduction module 22 and the second conduction module 23 may be configured in other ways, which are not limited here.

[0060] Specifically, each beam splitter is a polarizing beam splitter (PBS). The polarizing beam splitter can split the incident unpolarized light into two perpendicular linearly polarized beams. The P-polarized beam passes through completely to form transmitted light, while the S-polarized beam is reflected at a 45° angle to form reflected light. The outgoing direction forms a 90° angle with the P beam.

[0061] For some specific implementation methods, please refer to [link / reference]. Figure 3 The first transmission module 22 includes at least two second beam splitters 221, and the second transmission module 23 includes at least two third beam splitters 231. All the second beam splitters 221 and the third beam splitters 231 are arranged alternately along the second direction to make reasonable use of space.

[0062] For other specific implementations, please refer to [link / reference]. Figure 2 The first transmission module 22 includes at least two second beam splitters 221, and the second transmission module 23 includes at least two third beam splitters 231. All the second beam splitters 221 are located on one side of all the third beam splitters 231. That is, all the second beam splitters 221 are arranged adjacent to each other, all the third beam splitters 231 are arranged adjacent to each other, and all the second beam splitters 221 are located on one side of all the third beam splitters 231 along the second direction.

[0063] Further reading Figures 1-3 The first transmission module 22 further includes at least one first reflector 222, which is disposed between the first beam splitter 21 and the second beam splitter 221 to guide the first reflected light toward the upstream second beam splitter 221. The second transmission module 23 further includes at least one second reflector 232, which is disposed between the first beam splitter 21 and the third beam splitter 231 to guide the first transmitted light toward the upstream third beam splitter 231.

[0064] There may be one, two, or more than two first reflectors 222, and there may also be one, two, or more than two second reflectors 232. The number of first reflectors 222 and second reflectors 232 is not limited.

[0065] In other embodiments, see further description. Figure 1 In order to guide the laser emitted by the laser 10 into the beam expander 40, the laser marking device 100 also includes a third reflector 60. The laser emitted by the laser 10 is reflected into the beam expander 40 by the third reflector 60.

[0066] There may be one, two, or more than two third reflectors 60; the number of third reflectors 60 is not limited.

[0067] Studies have found that Gaussian lasers are easy to control for scribing depth in perovskite materials, but they also create a steeper cross-sectional slope and a greater thermal impact at the edges, which can cause edge chipping in perovskite products. Using flat-top lasers for laser etching of perovskite products can reduce edge thermal impact and chipping, and can better control the flatness of the scribing interior.

[0068] The P2 process requirements for perovskite materials are as follows:

[0069] The scribing width needs to be appropriately increased, and the ITO film layer needs to be penetrated in the middle of the line width to increase light transmittance and improve the photoelectric conversion efficiency of the product. Simultaneously, a flat-top beam needs to be used to reduce the thermal impact of the crater and edges to achieve a good scribing effect. However, a flat-top beam cannot penetrate the ITO film layer.

[0070] In some embodiments, the adjustment module 30 corresponding to a portion of the emitted light 200 includes a beam-splitting optical lens 31, while the adjustment module 30 corresponding to the remaining portion of the emitted light 200 includes a shaping optical lens. Optionally, the shaping optical module is used to shape the Gaussian light into a flat-top light. Thus, the beam-splitting optical lens 31 and the shaping optical lens are used in combination to meet usage requirements.

[0071] Optionally, the multiple emitted beams 200 are distributed sequentially along the second direction in an odd-even order. The adjustment module 30 corresponding to all emitted beams 200 at one of the odd-numbered positions includes a beam-splitting optical lens 31, while the adjustment module 30 corresponding to all emitted beams 200 at the other position includes a shaping optical lens. That is, when located at an odd-numbered position (e.g., ... Figure 2 As shown, when the adjustment module 30 corresponding to the emitted light 200 (positions 1, 3, 5, and 7, counting from left to right) includes a beam-splitting optical lens 31, then the even-numbered positions (e.g., ...) Figure 2 As shown, from left to right, the adjustment modules 30 corresponding to the emitted light 200 at positions 2, 4, 6, and 8 include shaping optical lenses. When the adjustment module 30 corresponding to the emitted light 200 at odd-numbered positions includes a shaping optical lens, then the adjustment module 30 corresponding to the emitted light 200 at even-numbered positions includes a beam-splitting optical lens 31. This arrangement allows the beam-splitting optical lens 31 to work in conjunction with the shaping optical lens to meet the product's processing requirements.

[0072] Specifically, when the laser scribing device 100 described above is used to perform the P2 process on perovskite material, the middle part of the perovskite material is formed by Gaussian light generated by beam splitting optical lens 31, and the edge part is formed by flat-top light generated by shaping optical lens. That is, the superposition of Gaussian light and flat-top light can effectively ensure the processing effect.

[0073] See Figure 4During processing, the size of the flat-top beam can be controlled so that its spot diameter is larger than that of the Gaussian beam. Figure 4 The square box represents the spot of the flat-top beam, and the circle represents the spot of the Gaussian beam. In this case, the flat-top beam etches first, and the Gaussian beam etches within the linewidth range of the flat-top beam. Alternatively, see [link to relevant documentation]. Figure 5 Make the diameter of the flat-top light spot smaller than or equal to the diameter of the Gaussian light spot. Figure 5 The square box represents the light spot of the flat-top light, and the circle represents the light spot of the Gaussian light. At this time, you can use the flat-top light to etch and scribing on both sides, and then use the Gaussian light to fill in the middle.

[0074] Optionally, the beam-splitting optical lens 31 is a beam-splitting DOE, and the shaping optical lens is a shaping DOE. DOE is short for Diffractive Optical Elements, also known as binary optical devices. Among them, the beam-splitting DOE can be a DOE with a split ratio of 1 to 2, 1 to 4, 1 to 6, 1 to 8, etc., and is not limited here.

[0075] In one specific implementation, the beam splitting DOE adopts a 1-to-6 DOE, so that when processing perovskite materials, one beam of emitted light 200 is transformed into six beams of Gaussian light after passing through the adjustment module 30.

[0076] In some embodiments, see Figure 6 The adjustment module 30, which includes the beam-splitting optical lens 31, also includes a rotation module 32. The beam-splitting optical lens 31 is connected to the rotation module 32. The rotation module 32 drives the beam-splitting optical lens 31 to rotate around the center in its plane to adjust the spacing of the beams formed by the beam splitting optical lens 31. This allows it to adapt to different processing requirements.

[0077] In some embodiments, the laser scribing device 100 further includes an adjustment mechanism (not shown) connected to at least a portion of the beam splitting mechanism 20 to adjust the relative position of at least a portion of the beam splitting mechanism 20, thereby adjusting the spacing between the emitted beams 200 in the second direction to adapt to different processing requirements.

[0078] Specifically, the adjustment mechanism includes a multi-moving linear motor. Each second beam splitter 221 and each third beam splitter 231 are connected to the multi-moving linear motor. The multi-moving linear motor can change the distance between the second beam splitter 221 and the third beam splitter 231, thereby adjusting the distance between the emitted beams 200.

[0079] It is conceivable that in other embodiments, the adjustment mechanism may be configured in other ways, which are not limited here.

[0080] Continue reading Figures 1-3The laser marking device 100 also includes a focusing lens 50 that corresponds one-to-one with the emitted light 200. The focusing lens 50 is located downstream of the adjustment module 30, and the light adjusted by the adjustment module 30 is emitted through the focusing lens 50.

[0081] Furthermore, the focusing lens 50 is connected to the adjustment mechanism, which can also adjust the spacing of each focusing lens 50 in the second direction to match the spacing of each beam splitter. Specifically, each focusing lens 50 is also connected to the aforementioned multi-moving linear motor, which can change the spacing between each focusing lens 50, thereby adjusting the spacing of the light ultimately directed at the product.

[0082] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0083] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A laser scribe apparatus, characterized by, include: Laser (10), used to emit laser light; A beam splitting mechanism (20) is located in the propagation path of the laser to split the laser into at least two beams of outgoing light (200) that are emitted in parallel to each other. The number of adjustment modules (30) is equal to and corresponds one-to-one with the number of the emitted light (200), and the adjustment modules (30) are located on the emission path of the emitted light (200); Each of the adjustment modules (30) includes one of a beam splitting optical lens (31) and a shaping optical lens. The beam splitting optical lens (31) is used to split the emitted light (200) into multiple beams, and the shaping optical lens is used to adjust the shape of the emitted light (200).

2. The laser scribe apparatus of claim 1, wherein, The adjustment module (30) corresponding to part of the emitted light (200) includes the beam splitting optical lens (31), and the adjustment module (30) corresponding to the remaining part of the emitted light (200) includes the shaping optical lens; The shaping optical lens is used to shape Gaussian light into flat-top light.

3. The laser scribe apparatus of claim 2, wherein, The multiple beams of emitted light (200) are distributed in an odd-even order; The adjustment module (30) corresponding to all the outgoing light (200) located in one of the odd-numbered and even-numbered positions includes the beam-splitting optical lens (31), and the adjustment module (30) corresponding to all the outgoing light (200) located in the other position includes the shaping optical lens.

4. The laser scribe apparatus of claim 1, wherein, The laser marking device further includes an adjustment mechanism connected to at least a portion of the beam splitting mechanism (20) to adjust the relative position of at least a portion of the beam splitting mechanism (20), thereby adjusting the spacing between the emitted beams (200).

5. The laser scribe apparatus of claim 1, wherein, The adjustment module (30) including the beam splitting optical lens (31) also includes a rotation module (32). The beam splitting optical lens (31) is connected to the rotation module (32). The rotation module (32) drives the beam splitting optical lens (31) to rotate around the center in its plane to adjust the spacing of the beams formed by the beam splitting optical lens (31).

6. The laser scribe apparatus of claim 1, wherein, The laser marking device also includes a focusing lens (50) that corresponds one-to-one with the emitted light (200), and the focusing lens (50) is located downstream of the adjustment module (30).

7. The laser scribe apparatus of claim 1, wherein, The laser marking device also includes a beam expander (40), which is located between the laser (10) and the beam splitter (20).

8. The laser scribing apparatus of any one of claims 1-7, wherein, The beam splitting mechanism (20) includes: The first beam splitter (21) is located on the propagation path of the laser and is used to split the laser into a first reflected light and a first transmitted light; The first transmission module (22) is located on the propagation path of the first reflected light and is used to make the first reflected light form at least one beam of the outgoing light (200); The second transmission module (23) is located on the propagation path of the first transmitted light and is used to make the first transmitted light form at least one beam of the emitted light (200).

9. The laser scribe apparatus of claim 8, wherein, The first conducting module (22) comprises at least one second light splitter (221), when the first conducting module (22) comprises at least two second light splitters (221), the second transmitted light formed by the upstream second light splitter (221) is projected to the downstream second light splitter (221), and the second reflected light formed by the second light splitter (221) is split to form the exit light (200); And / or The second conducting module (23) comprises at least one third light splitter (231), when the second conducting module (23) comprises at least two third light splitters (231), the third transmitted light formed by the upstream third light splitter (231) is projected to the downstream third light splitter (231), and the third reflected light formed by the third light splitter (231) is split to form the exit light (200).

10. The laser scribe apparatus of claim 9, wherein, The first conducting module (22) comprises at least two second light splitters (221), and the second conducting module (23) comprises at least two third light splitters (231); All the second light splitters (221) and all the third light splitters (231) are arranged in an alternating manner; or All the second light splitters (221) are located on one side of all the third light splitters (231).

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