Ion source cleaning apparatus

Abstract

The utility model discloses an ion source cleaning device, and the cleaning device includes the spray gun, and the spray gun second spout, first spout optional opening or closing, be equipped with the article net and the liquid collecting funnel in the spray washing bin, the liquid collecting funnel bottom connection liquid outlet pipe, and the liquid outlet pipe is connected with the liquid inlet pipe of spray gun of conveying pipeline. The utility model discloses through the multi -gear design of spray gun, cooperate the switching of first spout and second spout, can accurately clean the surface, inner wall and small hole of ion source part, realizes the cleaning effect of all -round, simultaneously, combining spray washing bin, conveying pipeline and so on structure, realizes the recycling of alumina slurry, and the whole cleaning process does not need manual wiping, and the cleaning time is shortened to 30~40 minutes, has improved cleaning efficiency significantly, has reduced the harm risk of volatile organic solvent to the health of analysis personnel, has effectively solved the low cleaning efficiency, not thorough and the health threat of operator in the prior art.

Description

Technical Field

[0001] This utility model belongs to the field of analytical instrument maintenance technology, and relates to an ion source cleaning device, especially suitable for the cleaning and maintenance of ion sources of gas chromatography-mass spectrometry (GC-MS) instruments. It aims to improve cleaning efficiency, reduce the risk of manual operation, and ensure the cleaning effect, so as to maintain the stability and reliability of instrument performance. Background Technology

[0002] Gas chromatography-mass spectrometry (GC-MS) is a crucial instrument for the separation and qualitative and quantitative analysis of complex mixtures. Its ion source is the core component that ionizes neutral molecules separated by chromatography. The performance of the ion source directly determines the sensitivity, resolution, and detection limit of the mass spectrometer. In actual analysis, especially when processing samples with complex compositions and severe matrix interference (such as wastewater and soil extracts), the ion source inevitably accumulates contaminants such as non-volatile salts, oils, and pigments. These contaminants can lead to decreased instrument sensitivity, increased background noise, mass spectrum distortion, and even tuning failure, severely affecting the accuracy and reliability of the analytical results.

[0003] Therefore, regular cleaning of the ion source is a crucial and indispensable part of routine GC-MS maintenance. Currently, the manual physical grinding cleaning method is widely used in laboratories. The typical steps are as follows: chromatographically pure alumina powder is mixed with water in a ratio (e.g., 1:3) to form a paste. Analysts use cotton swabs or non-woven fabric to apply the paste to all metal components of the ion source (such as the ion source body and lenses) and vigorously wipe them, paying particular attention to cleaning small pores and inner walls on the surface of the components. The wiping process usually lasts 1 to 1.5 hours. After the initial cleaning, repeated rinsing with organic solvents such as methanol and ultrasonic cleaning are required to remove residual alumina powder and contaminants. Finally, the source is dried.

[0004] In the process of developing this utility model, the inventors discovered that traditional manual cleaning methods have at least one of the following significant drawbacks: a. Time-consuming and labor-intensive: The entire cleaning and drying process takes about 2 hours and requires manual operation by the analysts, which is labor-intensive and inefficient.

[0005] b. Inconsistent cleaning results: The cleaning effect largely depends on the analyst's experience and the level of detail in the operation, making it difficult to guarantee the consistency and reliability of the cleaning quality each time. Thorough cleaning is particularly challenging for internal pores and areas with complex geometries.

[0006] c. Health hazards: The cleaning process requires the use of large amounts of volatile organic solvents such as methanol, dichloromethane, and acetone. These solvents pose potential health hazards to humans, and long-term exposure can threaten the safety of analysts.

[0007] d. Resource waste: Manual cleaning methods make it difficult to precisely control the use of alumina slurry and solvents, which may lead to unnecessary waste. Utility Model Content

[0008] Therefore, the purpose of this utility model is to provide an efficient, thorough, standardized, and personnel-protective automated ion source cleaning device and method.

[0009] Through long-term exploration and experimentation, and continuous reform and innovation, the inventor of this utility model has provided a solution to the above-mentioned technical problems: an ion source cleaning device, comprising: A spray gun for spraying alumina slurry onto an ion source component, the spray gun including a housing and a nozzle, a slide bar axially slidable and rotatable within the housing, and a stop groove on the housing; The nozzle has a first nozzle at its front end, the slide rod has a cylindrical end that slides with the first nozzle at its front end, a second nozzle is provided on the axis of the end, and a liquid inlet is provided in the middle of the end, which is connected to the second nozzle. The stop lever is connected to the slide rod, and the stop lever slides in the gear slot. The stop lever is operated to drive the slide rod to switch between different positioning positions in the gear slot, thereby correspondingly achieving the blocking of all nozzles, the opening of the second nozzle, or the opening of the first nozzle. A spray cleaning chamber is used to hold the ion source components to be cleaned. The spray cleaning chamber is equipped with a storage net and a liquid collection funnel. The bottom of the liquid collection funnel is connected to an outlet pipe. A delivery pipe connects the outlet pipe to the inlet pipe of the spray gun.

[0010] Compared with the prior art, the beneficial effects of this utility model are as follows: This invention utilizes a multi-level spray gun design, combined with the switching between the first and second nozzles, to precisely clean the surface, inner walls, and small holes of the ion source components, achieving a comprehensive cleaning effect. Simultaneously, by incorporating a spray chamber and delivery pipelines, it enables the recycling of alumina slurry. The entire cleaning process eliminates the need for manual wiping, not only shortening cleaning time and improving efficiency but also reducing the health risks posed by volatile organic solvents to analysts. This effectively solves the problems of low cleaning efficiency, incomplete cleaning, and health threats to operators present in existing technologies.

[0011] Based on the above technical solution, the present invention can be further improved as follows: Furthermore, it also includes a nitrogen supply unit for blowing nitrogen into the ion source components.

[0012] Compared with the existing technology, the beneficial effects of adopting the above-mentioned further technical solution are as follows: This invention, by adding a nitrogen supply unit, enables the rapid and effective removal of residual alumina slurry from the surface of ion source components after cleaning with sprayed alumina slurry. This reduces cleaning agent residue, improves the thoroughness and accuracy of cleaning, further enhances cleaning efficiency, reduces potential interference from cleaning agent residue on subsequent analysis results, and strengthens the reliability and stability of the entire cleaning process.

[0013] Based on the above technical solution, the present invention can be further improved as follows: Furthermore, the liquid outlet pipe, liquid inlet pipe, and nitrogen supply unit are connected in the same set of delivery pipelines through a switching valve, which is used to switch between supplying alumina slurry or nitrogen to the spray gun.

[0014] Compared with the existing technology, the beneficial effects of adopting the above-mentioned further technical solution are as follows: By integrating the liquid outlet pipe, liquid inlet pipe, and nitrogen supply unit into the same delivery pipeline and using a switching valve to uniformly regulate the delivery medium, convenient switching and precise control of the cleaning process are achieved, which greatly improves the continuity and overall efficiency of the cleaning operation. It avoids the cumbersome operation and time waste caused by frequent pipe replacement or equipment switching, ensuring that the cleaning process is carried out efficiently and stably, and further improving the practicality and reliability of the device.

[0015] Based on the above technical solution, the present invention can be further improved as follows: Furthermore, a pump is installed between the outlet pipe and the switching valve to drive the flow of alumina slurry.

[0016] Compared with the existing technology, the beneficial effects of adopting the above-mentioned further technical solution are as follows: The pump provides power for the stable delivery and circulation of alumina slurry throughout the cleaning circuit, ensuring the continuity of the spray gun's working pressure, thereby guaranteeing the continuity of the cleaning process and the consistency of the cleaning effect.

[0017] Based on the above technical solution, the present invention can be further improved as follows: Furthermore: the gear slot includes three positioning positions: When the stop lever is in the fine orifice position, the second nozzle opens; When the stop lever is in the large orifice position, the first nozzle opens. When the stop lever is in the sealed position, the sealing surface of the slide rod end is in contact with the first nozzle, and all nozzles are closed.

[0018] Compared with the existing technology, the beneficial effects of adopting the above-mentioned further technical solution are as follows: This multi-level design allows the spray gun to flexibly switch cleaning modes according to different needs, achieving precise cleaning of different parts of the ion source components, while avoiding waste and leakage of alumina slurry, effectively improving the consistency of cleaning efficiency and results.

[0019] Based on the above technical solution, the present invention can be further improved as follows: Furthermore, the spray gun also includes an elastic element, which is used to apply an axial force to the slide bar to stabilize the stop bar at the selected positioning position in the gear slot.

[0020] Compared with the existing technology, the beneficial effects of adopting the above-mentioned further technical solution are as follows: By incorporating elastic elements, the baffle is ensured to remain stable at the selected position, preventing deviation due to vibration or improper operation, thereby improving the stability and reliability of the cleaning process.

[0021] Based on the above technical solution, the present invention can be further improved as follows: Furthermore, the diameter of the first nozzle is 4.5~6mm, and the diameter of the second nozzle is 1.2~1.8mm.

[0022] Compared with the existing technology, the beneficial effects of adopting the above-mentioned further technical solution are as follows: The orifice design of the first and second nozzles can provide appropriate cleaning power and range for different parts, effectively improving cleaning effect and efficiency.

[0023] Based on the above technical solution, the present invention can be further improved as follows: Furthermore, it also includes a drive mechanism for driving the relative movement of the spray gun or the ion source component, wherein the drive mechanism is a robotic arm.

[0024] Compared with the existing technology, the beneficial effects of adopting the above-mentioned further technical solution are as follows: The application of robotic arms enables precise and stable relative movement between the spray gun and the ion source components, improving cleaning accuracy and achieving automated operation.

[0025] This utility model also provides an ion source cleaning method, which uses the aforementioned ion source cleaning device and includes the following steps: Place the ion source component on the storage net in the spray chamber, and spray alumina slurry onto the ion source component through the spray gun; Operate the lever to switch to the fine orifice position in the gear slot to select and open the second nozzle to process the small orifice on the ion source component; Operate the lever to switch to the large hole position in the gear slot to select and open the first nozzle to process the surface and inner wall of the ion source component; The conveying medium is switched to nitrogen by switching valve, and nitrogen is sprayed into the ion source component to remove the alumina paste on the ion source component; Collect and recycle alumina slurry; After cleaning, the ion source components are dried.

[0026] Compared with the prior art, the beneficial effects of this utility model are as follows: The cleaning method of this invention achieves efficient and thorough cleaning of ion source components through the multi-level design of an automated spray gun, combined with nitrogen blowing and alumina slurry recycling. This significantly shortens the cleaning time, reduces the risk of manual operation, reduces the use of organic solvents, protects the health of analysts, and improves the consistency and reliability of the cleaning effect.

[0027] Based on the above technical solution, the present invention can be further improved as follows: Furthermore, the spraying of alumina slurry and the blowing of nitrogen are carried out alternately, with a total cleaning time of 30 to 40 minutes.

[0028] Compared with the existing technology, the beneficial effects of adopting the above-mentioned further technical solution are as follows: By alternating between spraying alumina slurry and blowing nitrogen, this invention significantly shortens the cleaning time to 30-40 minutes while ensuring thoroughness and efficiency of cleaning, further reducing the intensity of manual operation and the risk of exposure to organic solvents. Attached Figure Description

[0029] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0030] Figure 1 This is a front view schematic diagram of the spray gun in a preferred embodiment of the ion source cleaning device of this utility model.

[0031] Figure 2 yes Figure 1 A schematic diagram of the structure viewed from below.

[0032] Figure 3 yes Figure 1 A schematic diagram of the three-dimensional structure.

[0033] Figure 4 yes Figure 1 The cross-sectional view of the middle AA shows that both the first and second nozzles are in a closed state.

[0034] Figure 5 This is a partial cross-sectional schematic diagram of the first nozzle in the open state.

[0035] Figure 6 This is a partial cross-sectional view of the second nozzle in the open state.

[0036] Figure 7 This is a schematic diagram of the partial three-dimensional structure of the end.

[0037] Figure 8 This is a three-dimensional structural diagram of the spray chamber in a preferred embodiment of the ion source cleaning device of this utility model.

[0038] Figure 9 This is a schematic diagram of the connection structure of a preferred embodiment of the ion source cleaning device of this utility model.

[0039] The markings in the diagram are as follows: 100 spray guns, 110 casing, 111 Inlet Pipe 112 gear slots 1121 Sealing position, 1122 fine hole position, 1123 large hole position, 113 guide ring, 120 nozzles 121 First nozzle, 130 slide bar, 131 retaining ring, 132 end, 1321 Second nozzle, 1322 liquid inlet hole, 1323 sealing surface, 140 shift lever, 150 elastic element, 200 spray cleaning tank, 210 Storage Network 220 collection funnels, 230 discharge tube, 300 nitrogen supply unit, 400 conveying pipeline, 410 pump, 420 switching valve. Detailed Implementation

[0040] The following description, in conjunction with the accompanying drawings and a specific embodiment, will be provided.

[0041] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to represent selected embodiments of this utility model.

[0042] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

[0043] Example 1 See Figures 1 to 9 The ion source cleaning device described in this embodiment mainly consists of a spray gun 100, a spray chamber 200, and a conveying pipeline 400.

[0044] The spray gun 100 is a key component of the device. Its housing 110 is made of high-strength, corrosion-resistant aluminum alloy with an anodized surface to ensure good wear resistance and chemical corrosion resistance during long-term use. The nozzle 120 is installed at the front end of the housing 110, with a first nozzle 121 at its front end having a 5mm diameter aperture for spraying a larger diameter alumina slurry to clean the surface and inner walls of the ion source components. The slide rod 130 is axially slidable and rotatable within the housing 110 via a guide ring 113. The front end of the slide rod 130 has a cylindrical end 132 with a second nozzle 1321 having a 1.5mm diameter aperture on its axis. An inlet hole 1322 is located in the middle of the end 132, communicating with the second nozzle 1321 for spraying a smaller diameter alumina slurry to clean the small holes on the ion source components.

[0045] The housing 110 is provided with a stop groove 112, and the stop rod 140 is connected to the slide rod 130 and can slide within the stop groove 112. By operating the stop rod 140, the slide rod 130 can be driven to switch between different positioning positions in the stop groove 112, thereby achieving the sealing of all nozzles, the opening of the second nozzle 1321, or the opening of the first nozzle 121. When the stop rod 140 is in the fine hole position 1122, the second nozzle 1321 is opened for cleaning the small holes on the ion source component; when the stop rod 140 is in the large hole position 1123, the first nozzle 121 is opened for cleaning the surface and inner wall of the component; when it is necessary to stop spraying, the stop rod 140 can be switched to the sealing position 1121, at which time the sealing surface 1323 of the end 132 of the slide rod 130 is in contact with the first nozzle 121, and all nozzles are closed.

[0046] The spray cleaning chamber 200 is used to hold the ion source components to be cleaned. It contains a stainless steel mesh 210 to stably place the ion source components. A collection funnel 220 is located at the bottom of the spray cleaning chamber 200 to collect the alumina slurry washed onto the ion source components during the cleaning process. The bottom of the collection funnel 220 is connected to an outlet pipe 230, which is connected to the inlet pipe 111 of the spray gun 100 via a delivery pipe 400, enabling the recycling of the alumina slurry. The delivery pipe 400 is made of chemically resistant polytetrafluoroethylene (PTFE) to ensure that no leakage or corrosion occurs during the delivery of the alumina slurry.

[0047] In actual operation, the ion source component is placed on the storage net 210 of the spray cleaning chamber 200. The operator controls the position of the baffle 140 in the baffle slot 112, so that the spray gun 100 cleans the small holes, surface and inner wall of the ion source component respectively. During the cleaning process, the alumina slurry is sprayed out by the spray gun 100 and washes the ion source component. Then it falls into the liquid collection funnel 220 and collects at the bottom of the funnel. Finally, it flows back to the liquid inlet pipe 111 of the spray gun 100 through the liquid outlet pipe 230 and the conveying pipe 400, realizing the recycling of alumina slurry, saving resources and reducing waste.

[0048] In a further embodiment, the ion source cleaning apparatus also includes a nitrogen supply unit 300 for blowing nitrogen gas onto the ion source components. During the cleaning process, when it is necessary to remove residual alumina slurry from the surface of the ion source components, high-pressure nitrogen gas is blown onto the surface of the ion source components, and the high-pressure airflow of nitrogen gas quickly and effectively removes the residual alumina slurry from the surface of the components. Nitrogen blowing not only improves the thoroughness of cleaning but also reduces cleaning agent residue, reduces potential interference with subsequent analysis results, and further improves cleaning efficiency and the consistency of cleaning effect. At the same time, the introduction of the nitrogen supply unit 300 enables automation and convenient switching of the cleaning process, avoiding the cumbersome operation and time waste caused by frequent pipe replacements or equipment switching, ensuring that the cleaning process is carried out efficiently and stably.

[0049] In a further embodiment, the outlet pipe 230, the inlet pipe 111, and the nitrogen supply unit 300 are connected to the same delivery pipeline 400 via a switching valve 420. The switching valve 420 is a three-way solenoid valve capable of rapidly switching the delivery medium between alumina slurry and nitrogen, ensuring that the needs of different stages of the cleaning process are met.

[0050] The 400 conveying pipeline is made of corrosion-resistant polytetrafluoroethylene (PTFE), which has excellent chemical stability and mechanical strength, ensuring no leakage or corrosion occurs when conveying alumina slurry and nitrogen. The inner diameter of the pipeline is precisely designed to ensure smooth flow of the alumina slurry and reduce pressure loss within the pipeline.

[0051] The operation of the switching valve 420 is managed by an automatic control system. When alumina slurry cleaning of the ion source components is required, the control system sets the switching valve 420 to the alumina slurry delivery position, allowing the alumina slurry to be sprayed from the spray gun 100 to clean the ion source components. In the final stage of cleaning, when it is necessary to remove residual alumina slurry from the component surface, the control system switches the switching valve 420 to the nitrogen delivery position, allowing nitrogen to be sprayed onto the ion source components through the spray gun 100. The high-pressure airflow of nitrogen quickly and effectively removes any residual alumina slurry from the component surface.

[0052] This integrated design not only makes the entire cleaning process more efficient and continuous, but also reduces the operational hassle and time waste caused by frequent pipe replacements or equipment switching. Precise control of the switching valve 420 ensures timely switching of the cleaning medium, thereby improving cleaning effectiveness and the practicality and reliability of the entire system.

[0053] In a further embodiment, a pump 410 is provided between the outlet pipe 230 and the switching valve 420 to drive the alumina slurry to flow stably in the system. This pump 410 is a corrosion-resistant diaphragm pump 410, possessing good chemical stability and mechanical properties, capable of adapting to the high viscosity and abrasive characteristics of the alumina slurry. The flow rate and pressure of the pump 410 can be adjusted according to actual cleaning needs to ensure that the spray gun 100 provides sufficient cleaning force under different operating conditions. In this embodiment, the impact force of the alumina slurry on the ion source component is 6~10N, for example, 6N, 7N, 8N, 9N, or 10N.

[0054] Pump 410 is installed between the outlet pipe 230 and the switching valve 420. Its function is to pressurize the alumina slurry collected by the collection funnel 220 and then re-transport it back to the inlet pipe 111 of the spray gun 100, thus realizing the recycling of the alumina slurry. Driven by pump 410, the alumina slurry can maintain a stable flow rate and pressure in the delivery pipeline 400, ensuring that the spray gun 100 will not experience insufficient flow or pressure fluctuations during spraying.

[0055] In a recommended embodiment, the operation of pump 410 is intelligently managed by a control system. During the cleaning process, when switching valve 420 is in the alumina slurry delivery position, the control system starts pump 410, delivering alumina slurry from collection funnel 220 through outlet pipe 230 to spray gun 100; in the final stage of cleaning, when switching valve 420 is switched to the nitrogen delivery position, the control system stops pump 410 to prevent alumina slurry from entering nitrogen supply unit 300. This design not only improves cleaning efficiency but also ensures the stability and reliability of the entire system.

[0056] By installing a pump 410 between the outlet pipe 230 and the switching valve 420, this embodiment effectively solves the problem of unstable alumina slurry supply during manual cleaning, improving the automation level of the cleaning process and the consistency of cleaning results. At the same time, the use of pump 410 reduces alumina slurry waste, lowers cleaning costs, and further enhances the practicality and economy of the device.

[0057] In a further embodiment, the housing 110 of the spray gun 100 is provided with a stop groove 112, which includes three positioning positions, each corresponding to a different nozzle working state: Fine orifice position 1122: When the stop lever 140 slides to the fine orifice position 1122, the slide bar 130 moves under the drive of the stop lever 140, causing the second nozzle 1321 to open. At this time, the alumina slurry is ejected through the second nozzle 1321, forming a jet stream with a smaller diameter, which is suitable for cleaning small holes and fine parts on the ion source components.

[0058] Large orifice position 1123: When the stop bar 140 slides to the large orifice position 1123, the slide bar 130 moves to open the first nozzle 121. At this time, alumina slurry is ejected through the first nozzle 121, forming a jet stream with a larger diameter, which is suitable for cleaning the surface and inner wall of the ion source component.

[0059] Sealing position 1121: When the stop bar 140 slides to the sealing position 1121, the sealing surface 1323 of the end 132 of the slide bar 130 is tightly fitted with the first nozzle 121, all nozzles are closed to prevent alumina slurry leakage and ensure the system's sealing when spraying is not required.

[0060] The multi-position design allows the spray gun 100 to flexibly switch nozzle states according to different cleaning needs, achieving precise cleaning of different parts of the ion source component. By operating the position of the stop lever 140 in the position slot 112, the working mode of the spray gun 100 can be easily controlled, improving cleaning efficiency and effectiveness.

[0061] In a further embodiment, an elastic element 150 is added inside the spray gun 100, specifically a compression spring installed between the tail end of the housing 110 and the retaining ring 131 of the slide bar 130. This compression spring consistently applies a moderate axial force to the slide bar 130, ensuring that the stop lever 140 remains stable in its selected position within the stop groove 112. When the operator switches the working state of the spray gun 100 using the stop lever 140, the axial force of the spring effectively prevents position deviation due to vibration or accidental contact, ensuring the accuracy of the spray gun 100 when cleaning small holes, surfaces, and inner walls. This design not only improves the operational stability of the spray gun 100 but also enhances the consistency and reliability of the cleaning process, ensuring that each cleaning achieves the expected results.

[0062] Since the workload of ion source cleaning is not particularly large, manual operation is sufficient to meet the actual needs. In an optional embodiment, the ion source cleaning device further integrates a robotic arm as a drive mechanism (not shown in the figure) to realize the relative movement between the spray gun 100 and the ion source component. Through a high-precision multi-axis control system, the robotic arm can accurately move the spray gun 100 or the ion source component according to a preset program and trajectory, ensuring the automation and consistency of the cleaning process.

[0063] The specific configuration of the robotic arm is as follows: Multi-axis motion control: The robotic arm has at least three degrees of freedom (such as X, Y, and Z axes), which can cover all cleaning surfaces of the ion source components within the 200mm spray chamber, ensuring a comprehensive and thorough cleaning effect.

[0064] Repeatability: The repeatability of the robotic arm reaches ±0.1mm, ensuring accurate repetition of each cleaning action and improving the consistency of cleaning results.

[0065] Load capacity: The robotic arm can stably support the weight of the spray gun 100 or the ion source component, ensuring the relative position of the spray gun 100 and the component remains stable during movement, and avoiding a decrease in cleaning effect due to mechanical vibration.

[0066] Movement speed adjustment: The movement speed of the robotic arm can be adjusted according to the degree of contamination of the ion source components and the cleaning requirements, ensuring cleaning efficiency while avoiding over-cleaning that could damage the components.

[0067] The operation of the robotic arm is integrated and managed by the control system. During the cleaning process, the operator only needs to set the cleaning parameters on the control panel, and the robotic arm can automatically execute the corresponding movement trajectory. By combining with the gear switching of the spray gun 100 and the media switching of the delivery pipe 400, the robotic arm can realize complex cleaning processes, such as first performing preliminary cleaning on the surface of the parts, then performing fine cleaning on the small holes, and finally using nitrogen to purge and remove residues.

[0068] The integrated robotic arm design not only significantly improves cleaning efficiency but also reduces human intervention, minimizing errors and safety hazards caused by human operation, and further enhancing the intelligence and practicality of the entire cleaning device.

[0069] Example 2 The applicant performs weekly maintenance on the ion source under normal usage. This embodiment describes an ion source cleaning method using the ion source cleaning device described in Embodiment 1. The specific cleaning steps are as follows: Preparation: Place the ion source components to be cleaned (including the ion focusing lens, inlet lens, extraction cylinder, extraction plate, interface socket, and ion source body) on the storage net 210 of the spray cleaning chamber 200, ensuring that each component is stable and easily accessible to the spray gun 100. Check that all components of the device, such as the spray gun 100, nitrogen supply unit 300, and delivery pipeline 400, are properly connected and operating, ensuring that the supply of alumina slurry is sufficient and the concentration meets the requirements (alumina to water ratio of 1:3).

[0070] Initial spray gun settings (100): Operate the spray gun 100 and ensure that the stop bar 140 is in the sealed position 1121 in the initial state, and all nozzles are closed to prevent alumina slurry leakage.

[0071] Cleaning Stage 1: Small Hole Treatment Operate lever 140 to switch it from the sealing position 1121 to the fine hole position 1122. At this time, the second nozzle 1321 (orifice diameter of about 1.5mm) opens.

[0072] The spray gun 100 sprays alumina slurry through the second nozzle 1321 onto the orifices of the ion source components (such as the orifices of the ion focusing lens, inlet lens, and interface socket), using high-pressure slurry to flush away contaminants inside the orifices. The spraying time is approximately 5 to 10 minutes, depending on the degree of contamination in the orifices.

[0073] Cleaning Phase Two: Surface and Interior Wall Treatment Operate lever 140 to switch it from the small orifice position 1122 to the large orifice position 1123. At this time, the first nozzle 121 (orifice diameter of about 5mm) will open.

[0074] The spray gun 100 sprays alumina slurry through the first nozzle 121 onto the surface and inner wall of the ion source component (such as the extraction cylinder, extraction plate, and inner wall of the ion source body), completely covering and washing away contaminants on the surface and inner wall of the component. The spraying time is approximately 10-15 minutes to ensure the cleanliness of the component surface and inner wall.

[0075] Medium switching and nitrogen injection: The conveying medium is switched from alumina slurry to nitrogen gas by switching valve 420.

[0076] Switch the spray gun to nitrogen blowing mode, using high-pressure nitrogen to purge the surface and orifices of the ion source components, quickly removing residual alumina paste. The nitrogen blowing time is approximately 5-10 minutes, ensuring no obvious residue remains on the component surface.

[0077] Alumina slurry circulation: Waste alumina slurry generated during the cleaning process is collected in the collection funnel 220 at the bottom of the spray tank 200. The waste slurry is then transported back to the inlet pipe 111 of the spray gun 100 through the outlet pipe 230 and the conveying pipe 400, thereby realizing the recycling of alumina slurry and reducing resource waste.

[0078] The entire cleaning process should be completed within 30 to 40 minutes.

[0079] Cleaning effect test: The effectiveness of instrument cleaning is mainly assessed by comparing the abundance and peak number in the instrument's tuning report before and after cleaning, which are two key parameters that reflect the cleanliness of the ion source.

[0080] The dried ion source components were reinstalled into the gas chromatograph-mass spectrometer (GC-MS) for instrument tuning and performance testing. Key parameters in the tuning report (such as the number of peaks and relative abundance) were analyzed to verify whether the cleaning effect met the instrument's requirements. The experimental protocol and results are shown in Table 1.

[0081] Table 1 Comparison of different cleaning solutions and their effects The data in Table 1 shows that: Before cleaning, the ion source components were severely contaminated. The abundance value on the tuning report was 178,897, which was lower than the maintenance requirement of 300,000, and the number of peaks was 352, which was much higher than the usage requirement of 200. This indicated that the cleanliness of the ion source surface could not meet the instrument's usage requirements.

[0082] After 60 minutes of manual cleaning, the abundance value on the tuning report was 579274 and the number of peaks was 129, which met the instrument's requirements. However, the process was time-consuming and inefficient, and the cleaning process required the analyst to operate manually throughout, which was labor-intensive.

[0083] Spray gun cleaning: At 10 minutes, the abundance was 217,986, still lower than the maintenance requirement of 300,000, and the number of peaks was 286, which also did not meet the usage requirements.

[0084] At 20 minutes, the abundance reached 252,268, but was still below 300,000, and the number of peaks dropped to 214, which was close to but still did not meet the usage requirements.

[0085] At 30 minutes, the abundance reached 586,199, exceeding 300,000, and the number of peaks was 111, which is less than 200, meeting the requirements for instrument use.

[0086] At 40 minutes, the abundance was 573,549 and the number of peaks was 120, which also met the usage requirements, but the cleaning effect was similar to that of 30 minutes.

[0087] At 50 minutes, the abundance was 581257 and the number of peaks was 105, indicating a further improvement in the cleaning effect, but the improvement was not significant.

[0088] Therefore, it can be seen that 30 minutes of spray gun cleaning achieves the same cleaning effect as 60 minutes of manual cleaning, significantly improving cleaning efficiency. While the cleaning effect improves to some extent with extended spray gun cleaning time, the improvement gradually decreases after 30 minutes. Based on experimental data, 30 minutes of spray gun cleaning is determined to be the optimal cleaning duration, ensuring cleaning effectiveness while effectively saving time and improving cleaning efficiency.

[0089] By using the above method and the ion source cleaning device, the cleaning of ion source components can be completed efficiently, significantly shortening the cleaning time, reducing the intensity of manual operation, reducing the use of organic solvents, protecting the health of analysts, ensuring the consistency and reliability of the cleaning effect, extending the service life of the instrument, and ensuring the accuracy of the analytical results.

[0090] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0091] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0092] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0093] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0094] The above are merely preferred embodiments of this utility model. It should be noted that the above preferred embodiments should not be considered as limitations on this utility model, and the scope of protection of this utility model should be determined by the scope defined in the claims. For those skilled in the art, several improvements and modifications can be made without departing from the spirit and scope of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model.

Claims

1. An ion source cleaning apparatus, characterized by, include: A spray gun for spraying alumina slurry onto an ion source component, the spray gun comprising a housing and a nozzle, a slide bar axially slidable and rotatable within the housing, and a stop groove on the housing; The nozzle has a first nozzle at its front end, the slide rod has a cylindrical end that slides with the first nozzle at its front end, a second nozzle is provided on the axis of the end, and a liquid inlet is provided in the middle of the end, which is connected to the second nozzle. The stop lever is connected to the slide rod, and the stop lever slides in the gear slot. The stop lever is operated to drive the slide rod to switch between different positioning positions in the gear slot, thereby correspondingly achieving the blocking of all nozzles, the opening of the second nozzle, or the opening of the first nozzle. A spray cleaning chamber is used to hold the ion source components to be cleaned. The spray cleaning chamber is equipped with a storage net and a liquid collection funnel. The bottom of the liquid collection funnel is connected to a liquid outlet pipe. A delivery pipe connects the liquid outlet pipe to the liquid inlet pipe of the spray gun.

2. The ion source cleaning apparatus of claim 1, wherein, It also includes a nitrogen supply unit for blowing nitrogen into the ion source components.

3. The ion source cleaning apparatus of claim 2, wherein, The liquid outlet pipe, liquid inlet pipe, and nitrogen supply unit are connected in the same delivery pipeline via a switching valve, which is used to switch between supplying alumina slurry or nitrogen to the spray gun.

4. The ion source cleaning apparatus of claim 3, wherein, A pump is installed between the outlet pipe and the switching valve to drive the flow of alumina slurry.

5. The ion source cleaning apparatus of claim 1, wherein, The gear slot includes three positioning positions: When the stop lever is in the fine orifice position, the second nozzle opens; When the stop lever is in the large orifice position, the first nozzle opens. When the stop bar is in the sealed position, the sealing surface of the slide bar end is in contact with the first nozzle, and all nozzles are closed.

6. The ion source cleaning apparatus of claim 1 or 5, wherein The spray gun also includes an elastic element, which is used to apply an axial force to the slide bar to stabilize the stop bar at the selected positioning position in the gear slot.

7. The ion source cleaning apparatus of claim 1, wherein, The diameter of the first nozzle is 4.5~6mm, and the diameter of the second nozzle is 1.2~1.8mm.

8. The ion source cleaning apparatus of claim 1, wherein, It also includes a drive mechanism for driving the relative movement of the spray gun or the ion source component, the drive mechanism being a robotic arm.

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