Paper sheet pasting device and machine

Abstract

The application provides a paper laying device and a machine table, which comprises a paper storage assembly including an inner cavity for accommodating paper and a paper outlet communicating with the inner cavity; a plurality of layers of paper are stacked in the inner cavity, and the top of the inner cavity is provided with a paper separating piece for separating a single layer of paper from the remaining paper and sending the single layer of paper to the paper outlet of the paper storage assembly; a paper conveying assembly is located on one side of the paper outlet and is used to drive the paper to displace to a preset paper taking area; a paper picking assembly is used to pick up the paper located in the preset paper taking area and move the paper above a surface to be laid; and one end of the paper picking assembly used to contact the paper is provided with a plurality of air holes used to adsorb the paper. The paper laying device of the application can complete the storage, taking, transfer and laying of paper, realizes the automation of paper laying, and solves the problems of low efficiency, poor stability and easy pollution under the present manual operation.

Description

Technical Field

[0001] This application relates to a semiconductor testing device, and more particularly to a paper laying apparatus and machine. Background Technology

[0002] In semiconductor manufacturing, stealth dicing is a technique that uses a laser to irradiate the wafer, focusing the laser energy inside the wafer to form a modified layer. This layer then utilizes the stress difference between different areas of the wafer to cause internal cracks, which are then cut by wafer expansion. Due to its advantages such as high precision, low damage, and no particulate contamination, stealth dicing is widely used in the wafer dicing stage. However, unlike traditional dicing, stealth dicing requires the wafer to be inverted during the dicing process. Therefore, to minimize damage to the front side of the wafer and maintain wafer stability and contamination during dicing, a protective paper must be placed on the tray before supporting the wafer.

[0003] Wafers are inherently hard and brittle materials, making them susceptible to fatal defects such as chipping, breakage, and microcracks from even minor external forces during the dicing process. If wafers are directly attached to a rigid substrate, vacuum suction or laser thermal stress can easily cause micro-damage. Protective paper provides micro-elastic support, acting as a stress buffer and a "safety buffer zone" between the wafer and the rigid structure. This significantly reduces the breakage rate and ensures high product yield.

[0004] Although protective paper is an essential auxiliary material in the operation of the machine, most invisible cutting machines still use manual application, which suffers from problems such as low efficiency, inaccurate alignment, and lack of support for automated production lines. Therefore, how to automate paper application has become one of the urgent technical problems to be solved.

[0005] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this application and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this application. Utility Model Content

[0006] In view of the shortcomings of the prior art described above, the purpose of this application is to provide a paper laying device and machine to solve the problems of low efficiency, inaccurate alignment and lack of support for automatic production lines in the manual laying method of the prior art.

[0007] Firstly, to achieve the above-mentioned and other related objectives, this application provides a paper laying apparatus, the paper laying apparatus comprising:

[0008] A paper storage assembly includes an inner cavity for accommodating paper and a paper outlet communicating with the inner cavity; wherein multiple layers of paper are stacked in the inner cavity, and the top of the inner cavity has a paper separating component for separating a single layer of paper from the remaining paper and feeding the single layer of paper to the paper outlet of the paper storage assembly.

[0009] A paper transport assembly, located on one side of the paper outlet, is used to move the paper to a preset paper pick-up area;

[0010] A paper pickup assembly is used to pick up paper located in the preset paper pickup area and move the paper above the surface to be laid; wherein, the end of the paper pickup assembly that is in contact with the paper has a plurality of air holes, which are used to adsorb the paper.

[0011] In one embodiment, the paper pickup component includes:

[0012] Support;

[0013] The Z-axis lifting element is located on the support and connected to the support;

[0014] A horizontal robotic arm, one end of which is connected to the Z-axis lifting element, and the other end of which has multiple air holes. The horizontal robotic arm has an internal cavity for gas circulation, and the air holes communicate with the cavity. The horizontal robotic arm is used to move on a horizontal plane perpendicular to the Z-axis.

[0015] In one embodiment, the horizontal robotic arm includes:

[0016] The first robotic arm is connected to the Z-axis lifting element and has the cavity inside.

[0017] The second robotic arm is rotatably connected to the first robotic arm, with its rotating axis parallel to the Z-axis and its interior containing the cavity.

[0018] A picking-up robotic arm is connected to the second robotic arm. The picking-up robotic arm has the cavity inside and also has multiple air holes penetrating the outer wall. The air holes are connected to the cavity.

[0019] The cavities in the first robotic arm, the second robotic arm, and the picking robotic arm are interconnected.

[0020] In one embodiment, the picking robotic arm includes:

[0021] A tubular structure is rotatably connected to the second robotic arm, with the pivot parallel to the extension direction of the tubular structure to allow the tubular structure to rotate. The cavity at the end of the tubular structure not in contact with the second robotic arm is closed, and the cavity at the end of the tubular structure used for connection with the second robotic arm is connected to a cavity in the second robotic arm. Multiple air vents penetrate the wall of the tubular structure.

[0022] In one embodiment, the picking robotic arm includes:

[0023] A disc-shaped structure is fixedly connected to the second robotic arm. The disc-shaped structure has a cavity inside, and the side of the disc-shaped structure that is in contact with the paper has multiple air holes that penetrate the outer wall of the disc-shaped structure.

[0024] In one embodiment, the paper storage component further includes:

[0025] A drying chamber is located below the inner cavity, and the inner cavity and the drying chamber are separated by a perforated partition. The paper is placed on the perforated partition, and the drying chamber is used to store desiccant.

[0026] In one embodiment, the paper separating component includes:

[0027] The paper feed roller has its shaft fixed to the top of the inner cavity.

[0028] In one embodiment, the paper transport assembly includes:

[0029] A conveyor belt, wherein the conveying direction of the conveyor belt is from the paper outlet to the preset paper picking area.

[0030] In one embodiment, the paper laying device further includes:

[0031] A control component is connected to the paper storage component, the paper transport component, and the paper pickup component, respectively, and is used to control the paper separating component to separate the paper, control the paper transport component to move the paper, and control the paper pickup component to pick up or release the paper.

[0032] Secondly, this application also provides a machine tool, including: a paper laying device as described in any one of the embodiments of this application; and a tray for carrying a wafer, the tray having a surface to be laid.

[0033] As described above, the paper laying apparatus and machine of this application have the following beneficial effects:

[0034] The paper laying device and machine of this application include: a paper storage component, a paper transport component, and a paper pickup component. The paper storage component includes an inner cavity for accommodating paper and a paper outlet communicating with the inner cavity. Multiple layers of paper are stacked in the inner cavity. The top of the inner cavity has a paper separating component, which is used to separate a single layer of paper from the rest of the paper and send the single layer of paper to the paper outlet of the paper storage component. The paper transport component is located on one side of the paper outlet and is used to move the paper to a preset paper picking area. The paper pickup component is used to pick up the paper located in the preset paper picking area and move the paper above the surface to be laid. The paper pickup component has multiple air holes at the end that contacts the paper. The air holes are used to adsorb the paper, so that when the paper pickup component contacts the paper located in the preset paper picking area, it can adsorb the paper and move the paper above the surface to be laid, and then release the paper, thereby attaching the paper to the surface to be laid. The paper laying device of this application can complete the storage, picking, transfer, and laying of paper, realize the automation of paper laying, and solve the problems of low efficiency, poor stability, and easy contamination under existing manual operation. Attached Figure Description

[0035] The accompanying drawings, which form part of this specification, are used to provide a further understanding of the embodiments of this application and to illustrate the implementation of this application, together with the textual description, to explain the principles of this application. Obviously, the drawings described below are merely some embodiments of this application.

[0036] Figure 1 This is a structural block diagram of a paper laying device provided in one embodiment;

[0037] Figure 2 This is a schematic diagram of the paper laying device provided in one embodiment;

[0038] Figure 3 A schematic diagram of the structure of a paper storage component provided in one embodiment;

[0039] Figure 4 This is a schematic diagram of the structure of a paper pickup component provided in one embodiment;

[0040] Figure 5 This is a schematic diagram illustrating the operation of a tubular structure provided in one embodiment;

[0041] Figure 6 This is a schematic diagram of the paper pickup component provided in another embodiment.

[0042] Component designation explanation

[0043] 100 Paper Laying Device

[0044] 10. Paper storage components

[0045] 102 Paper output slot

[0046] 104 pieces of paper

[0047] 106 Inner cavity

[0048] 108 Drying Chamber

[0049] 110 Paper

[0050] 112 Desiccant

[0051] 20 Paper transport assembly

[0052] 30 Paper Pickup Components

[0053] 302 support

[0054] 304 Z-axis lifting element

[0055] 306 Horizontal Robotic Arm

[0056] 312 First Robotic Arm

[0057] 314 Second robotic arm

[0058] 316 Pick-up Robotic Arm

[0059] 322 pores

[0060] 40 Preset paper dispensing area

[0061] 50 Surfaces to be tiled Detailed Implementation

[0062] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0063] It should be emphasized that the term "including / comprises" as used herein refers to the presence of a feature, whole, step, or component, but does not exclude the presence or addition of one or more other features, wholes, steps, or components.

[0064] Features described and / or illustrated for one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0065] In the detailed description of embodiments of the present invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged and not to scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of the present invention. In actual fabrication, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0066] It is understood that the terms “first,” “second,” etc., used in this application may be used herein to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish one element from another.

[0067] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, the element or feature described as “below,” “under,” or “below” will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both above and below orientations. Furthermore, the device may also include other orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptive terms used herein will be interpreted accordingly.

[0068] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0069] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that terms such as “comprising / including” or “having” specify the presence of the stated features, wholes, components, parts, or combinations thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, components, parts, or combinations thereof. Meanwhile, the term “and / or” as used in this specification includes any and all combinations of the associated listed items.

[0070] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intermediate element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intermediate element present. Where applicable, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the invention. Therefore, the illustrations only show components relevant to the invention and are not drawn according to the actual number, shape, and size of components in implementation. In actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may be more complex.

[0071] As described in the background section, most invisible paper cutting machines currently still use a manual paper-laying method, where sheets of paper are manually attached to the machine's tray one by one. This method suffers from several drawbacks: low efficiency, poor operational stability, susceptibility to warping and misalignment during attachment, unsuitability for continuous, high-volume automated production, and high risk of contamination. Therefore, automating paper-laying has become one of the most pressing technical challenges.

[0072] For the reasons mentioned above, please refer to Figure 1 and Figure 2 This application provides a paper laying device 100, which includes a paper storage component 10, a paper transport component 20, and a paper pickup component 30. The paper storage component 10 includes an inner cavity for accommodating paper and a paper outlet 102 communicating with the inner cavity. Multiple layers of paper are stacked in the inner cavity, and a paper separating component 104 is provided at the top of the inner cavity. The paper separating component 104 is used to separate a single layer of paper from the other papers and send the single layer of paper to the paper outlet 102 of the paper storage component 10. The paper transport component 20 is located on one side of the paper outlet 102 and is used to move the paper to a preset paper picking area 40. The paper pickup component 30 is used to pick up the paper located in the preset paper picking area 40 and move the paper above the surface to be laid. The end of the paper pickup component 30 that contacts the paper has multiple air holes for adsorbing the paper.

[0073] As an example, please continue to refer to Figure 2 The paper storage component 10 may include a housing, which may be rectangular, cylindrical, or other regular or irregular shapes. The housing includes an internal cavity for accommodating paper, and the paper outlet 102 may be located on one side of the housing. The shape of the housing can be set according to actual needs, and this application does not impose specific limitations on the shape of the housing.

[0074] As an example, the paper separating component 104 may include an adsorption component, a friction component, etc., which use suction or friction to separate the single layer of paper located on top of the stacked paper from the rest of the paper and send it to the paper outlet.

[0075] As an example, the paper transport assembly 20 may include rollers. When the rollers contact the paper at the paper outlet 102, they use the friction and inertia between the rollers and the paper to feed the paper to a preset paper pick-up area 40. The preset paper pick-up area 40 may include a flat surface for placing paper. The position of the preset paper pick-up area 40 may be matched with the structure of the paper transport assembly 20, as long as it can move the paper to the preset paper pick-up area 40.

[0076] As an example, the paper picking component 30 may include a robotic arm, a conveyor belt, etc.

[0077] In the above embodiments, the paper laying device includes a paper storage component, a paper transport component, and a paper pickup component. The paper storage component includes an inner cavity for accommodating paper and a paper outlet communicating with the inner cavity. Multiple layers of paper are stacked in the inner cavity, and a paper separating component is provided at the top of the inner cavity. The paper separating component is used to separate a single layer of paper from the rest of the paper and send the single layer of paper to the paper outlet of the paper storage component. The paper transport component is located on one side of the paper outlet and is used to move the paper to a preset paper picking area. The paper pickup component is used to pick up the paper located in the preset paper picking area and move the paper above the surface to be laid. The paper pickup component has multiple air holes at the end that contacts the paper. The air holes are used to adsorb the paper, so that when the paper pickup component contacts the paper located in the preset paper picking area, it can adsorb the paper and move the paper above the surface to be laid, and then release the paper, thereby attaching the paper to the surface to be laid. The paper laying device of this application can complete the storage, picking, transfer, and laying of paper, realize the automation of paper laying, and solve the problems of low efficiency, poor stability, and easy contamination under existing manual operation.

[0078] In some embodiments, please refer to Figure 3 The paper storage assembly also includes a drying chamber 108. The drying chamber 108 is located below the inner cavity 106, and the inner cavity 106 and the drying chamber 108 are separated by a perforated partition. The paper 110 is placed on the perforated partition, and the drying chamber 108 is used to store the desiccant 112.

[0079] As an example, the perforated partition can be slidably connected to the housing of the paper storage assembly 10, allowing the partition to be pulled out for easy paper replenishment, or the top of the housing can have an openable opening for easy paper replenishment. Furthermore, the bottom of the drying chamber 108 can be slidably connected to the housing for easy desiccant replenishment.

[0080] In some embodiments, the paper separating component includes a paper feeding roller, the shaft of which is fixed to the top of the inner cavity.

[0081] As an example, the paper feed roller may include an elastic material layer and a rotating shaft. The elastic material layer has a cylindrical structure, and the rotating shaft is located at the center of the cylindrical structure. The cylindrical structure may be multiple segmented cylindrical structures to accommodate different sizes of paper. The elastic material layer may be made of materials such as rubber or polyurethane, thereby using friction to separate the paper. The surface of the elastic material layer may also include shallow grooves to further increase the friction against the paper. Furthermore, the paper laying device also includes a drive motor connected to the rotating shaft of the paper feed roller for driving the shaft to rotate.

[0082] In some embodiments, the paper transport assembly includes a conveyor belt, the conveying direction of which is from the paper outlet to a preset paper pick-up area.

[0083] As an example, the preset paper picking area may also include a limiting member located on the edge of the preset paper picking area away from the conveyor belt, thereby preventing the paper from deviating from the preset paper picking area due to inertia.

[0084] In some embodiments, please refer to Figure 4 The paper pickup assembly includes: a support 302, a Z-axis lifting element 304, and a horizontal robotic arm 306; wherein, the Z-axis lifting element 304 is located on the support and connected to the support 302, one end of the horizontal robotic arm 306 is connected to the Z-axis lifting element 304, and the other end of the horizontal robotic arm 306 has multiple air holes 322, and the horizontal robotic arm 306 has a cavity inside for gas circulation, and the air holes 322 communicate with the cavity; the horizontal robotic arm 306 is used to move on a horizontal plane perpendicular to the Z-axis.

[0085] As an example, the paper pickup assembly also includes an air source, which is connected to a cavity inside the horizontal mechanical wall.

[0086] As an example, the paper pickup assembly also includes a vision positioning system connected to the Z-axis lifting element and the horizontal robotic arm, thereby improving the accuracy of the paper placement.

[0087] In some embodiments, please refer to Figure 4 The horizontal robotic arm 306 includes a first robotic arm 312, a second robotic arm 314, and a pickup robotic arm 316. The first robotic arm 312 is connected to a Z-axis lifting element 304 and has an internal cavity. The second robotic arm 314 is rotatably connected to the first robotic arm 312, with its rotating shaft parallel to the Z-axis and also has an internal cavity. The pickup robotic arm 316 is connected to the second robotic arm 314, has an internal cavity, and also has multiple air holes 322 penetrating the outer wall, which communicate with the cavity. The cavities in the first robotic arm 312, the second robotic arm 314, and the pickup robotic arm 316 are interconnected.

[0088] In some embodiments, please refer to Figure 4 The picking robotic arm 316 includes: a tubular structure; the tubular structure is rotatably connected to the second robotic arm 314, and the pivot is parallel to the extension direction of the tubular structure so that the tubular structure rotates; wherein, the cavity at the end of the tubular structure that is not in contact with the second robotic arm 314 is closed, the cavity at the end of the tubular structure that is connected to the second robotic arm 314 is connected to the cavity in the second robotic arm, and a plurality of air holes 322 penetrate the tube wall of the tubular structure.

[0089] For example, please refer to Figure 5 During the paper picking process, the second robotic arm 314 can drive the picking robotic arm 316 to move to the edge of the paper and adsorb it. The tubular structure rotates during the movement, thereby rolling the paper onto the surface of the tubular structure. During the paper release process, the second robotic arm 314 can drive the picking robotic arm 316 to move to the edge of the surface to be laid 50 and release the paper. The tubular structure rotates during the movement, thereby laying the paper onto the surface to be laid 50.

[0090] In the above embodiments, by making the picking robotic arm a tubular structure, it can be adapted to paper of different shapes, thus expanding the applicability of the paper laying device.

[0091] In some embodiments, please refer to Figure 6 The picking robotic arm 316 includes: a disc-shaped structure; the disc-shaped structure is fixedly connected to the second robotic arm 316, the disc-shaped structure has a cavity inside, and the side of the disc-shaped structure used to contact the paper has a plurality of air holes 322 penetrating the outer wall of the disc-shaped structure.

[0092] Multiple air holes 322 are arrayed on the surface of the disc-shaped structure. As an example, the shape of the disc-shaped structure may include a circular disc, a rectangular disc, etc., and can be set according to the shape of the paper; this application does not impose specific limitations.

[0093] In some embodiments, the paper laying apparatus further includes a control component connected to the paper storage component, the paper transport component, and the paper pickup component, respectively, for controlling the paper separating component to separate the paper, controlling the paper transport component to move the paper, and controlling the paper pickup component to pick up or release the paper.

[0094] This application also provides a machine tool, including: a paper placement device and a tray; wherein, the paper placement device includes: a paper storage component, a paper transport component, and a paper pickup component; the paper storage component includes an inner cavity for accommodating paper and a paper outlet communicating with the inner cavity; wherein, multiple layers of paper are stacked in the inner cavity, and the top of the inner cavity has a paper separating component, which is used to separate a single layer of paper from the rest of the paper and send the single layer of paper to the paper outlet of the paper storage component; the paper transport component is located on one side of the paper outlet and is used to move the paper to a preset paper pickup area; the paper pickup component is used to pick up the paper located in the preset paper pickup area and move the paper above the surface to be placed; wherein, the end of the paper pickup component that contacts the paper has multiple air holes, which are used to adsorb the paper. The tray is used to carry wafers and has a surface to be placed.

[0095] In some embodiments, the paper pickup assembly includes: a support, a Z-axis lifting element, and a horizontal robotic arm; the Z-axis lifting element is located on the support and connected to the support; one end of the horizontal robotic arm is connected to the Z-axis lifting element, the other end of the horizontal robotic arm has multiple air holes, the horizontal robotic arm has a cavity inside for gas to flow through, and the air holes communicate with the cavity; the horizontal robotic arm is used to move on a horizontal plane perpendicular to the Z-axis.

[0096] In some embodiments, the horizontal robotic arm includes: a first robotic arm, a second robotic arm, and a picking robotic arm; wherein, the first robotic arm is connected to a Z-axis lifting element and has an internal cavity; the second robotic arm is rotatably connected to the first robotic arm, with its rotating shaft parallel to the Z-axis and also having an internal cavity; the picking robotic arm is connected to the second robotic arm, has an internal cavity, and also has multiple air holes penetrating its outer wall, which communicate with the cavity; the cavities in the first robotic arm, the second robotic arm, and the picking robotic arm are interconnected.

[0097] In some embodiments, the picking robotic arm includes: a tubular structure; the tubular structure is rotatably connected to a second robotic arm, and the pivot is parallel to the extension direction of the tubular structure to make the tubular structure rotate; wherein, the cavity at the end of the tubular structure that is not in contact with the second robotic arm is closed, the cavity at the end of the tubular structure that is connected to the second robotic arm is connected to the cavity in the second robotic arm, and a plurality of air holes penetrate the wall of the tubular structure.

[0098] In some embodiments, the picking robotic arm includes: a disc-shaped structure; the disc-shaped structure is fixedly connected to a second robotic arm, the disc-shaped structure has a cavity inside, and the side of the disc-shaped structure used to contact the paper has a plurality of air holes penetrating the outer wall of the disc-shaped structure.

[0099] In some embodiments, the paper storage assembly further includes a drying chamber located below the inner cavity, with the inner cavity and the drying chamber separated by a perforated partition, the paper being placed on the perforated partition, and the drying chamber being used to store a desiccant.

[0100] In some embodiments, the paper separating component includes a paper feeding roller, the shaft of which is fixed to the top of the inner cavity.

[0101] In some embodiments, the paper transport assembly includes a conveyor belt, the conveying direction of which is from the paper outlet to a preset paper pick-up area.

[0102] In some embodiments, the paper laying apparatus further includes a control component connected to the paper storage component, the paper transport component, and the paper pickup component, respectively, for controlling the paper separating component to separate the paper, controlling the paper transport component to move the paper, and controlling the paper pickup component to pick up or release the paper.

[0103] In summary, the paper laying apparatus and machine of this application include: a paper storage component, a paper transport component, and a paper pickup component. The paper storage component includes an inner cavity for accommodating paper and a paper outlet communicating with the inner cavity. Multiple layers of paper are stacked in the inner cavity, and a paper separating component is provided at the top of the inner cavity. The paper separating component is used to separate a single layer of paper from the other papers and to send the single layer of paper to the paper outlet of the paper storage component. The paper transport component is located on one side of the paper outlet and is used to move the paper to a preset paper pickup area. The paper pickup component is used to pick up the paper located in the preset paper pickup area and place the paper... The paper is moved above the surface to be laid; wherein, the end of the paper picking component that is in contact with the paper has multiple air holes, which are used to adsorb the paper, so that when the paper picking component is in contact with the paper located in the preset paper picking area, it can adsorb the paper and move the paper above the surface to be laid, and then release the paper, thereby attaching the paper to the surface to be laid. The paper laying device of this application can complete the storage, picking, transfer and laying of paper, realize the automation of paper laying, and solve the problems of low efficiency, poor stability and easy contamination under the existing manual operation.

[0104] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A paper laying device, characterized in that, The paper laying device includes: A paper storage assembly includes an inner cavity for accommodating paper and a paper outlet communicating with the inner cavity; wherein multiple layers of paper are stacked in the inner cavity, and the top of the inner cavity has a paper separating component for separating a single layer of paper from the remaining paper and feeding the single layer of paper to the paper outlet of the paper storage assembly. A paper transport assembly, located on one side of the paper outlet, is used to move the paper to a preset paper pick-up area; A paper pickup assembly is used to pick up paper located in the preset paper pickup area and move the paper above the surface to be laid; wherein, the end of the paper pickup assembly that is in contact with the paper has a plurality of air holes, which are used to adsorb the paper.

2. The paper laying device according to claim 1, characterized in that, The paper pickup component includes: Support; The Z-axis lifting element is located on the support and connected to the support; A horizontal robotic arm, one end of which is connected to the Z-axis lifting element, and the other end of which has multiple air holes. The horizontal robotic arm has an internal cavity for gas circulation, and the air holes communicate with the cavity. The horizontal robotic arm is used to move on a horizontal plane perpendicular to the Z-axis.

3. The paper laying device according to claim 2, characterized in that, The horizontal robotic arm includes: The first robotic arm is connected to the Z-axis lifting element and has the cavity inside. The second robotic arm is rotatably connected to the first robotic arm, with its rotating axis parallel to the Z-axis and its interior containing the cavity. A picking-up robotic arm is connected to the second robotic arm. The picking-up robotic arm has the cavity inside and also has multiple air holes penetrating the outer wall. The air holes are connected to the cavity. The cavities in the first robotic arm, the second robotic arm, and the picking robotic arm are interconnected.

4. The paper laying device according to claim 3, characterized in that, The picking robotic arm includes: A tubular structure is rotatably connected to the second robotic arm, with the pivot parallel to the extension direction of the tubular structure to allow the tubular structure to rotate. The cavity at the end of the tubular structure not in contact with the second robotic arm is closed, and the cavity at the end of the tubular structure used for connection with the second robotic arm is connected to a cavity in the second robotic arm. Multiple air vents penetrate the wall of the tubular structure.

5. The paper laying device according to claim 3, characterized in that, The picking robotic arm includes: A disc-shaped structure is fixedly connected to the second robotic arm. The disc-shaped structure has a cavity inside, and the side of the disc-shaped structure that is in contact with the paper has multiple air holes that penetrate the outer wall of the disc-shaped structure.

6. The paper laying device according to claim 1, characterized in that, The paper storage component also includes: A drying chamber is located below the inner cavity, and the inner cavity and the drying chamber are separated by a perforated partition. The paper is placed on the perforated partition, and the drying chamber is used to store desiccant.

7. The paper laying device according to claim 1, characterized in that, The paper separating component includes: The paper feed roller has its shaft fixed to the top of the inner cavity.

8. The paper laying apparatus according to claim 1, characterized in that, The paper transport assembly includes: A conveyor belt, wherein the conveying direction of the conveyor belt is from the paper outlet to the preset paper picking area.

9. The paper laying device according to claim 1, characterized in that, The paper laying device also includes: A control component is connected to the paper storage component, the paper transport component, and the paper pickup component, respectively, and is used to control the paper separating component to separate the paper, control the paper transport component to move the paper, and control the paper pickup component to pick up or release the paper.

10. A machine tool, characterized in that, include: The paper laying apparatus according to any one of claims 1-9; A tray for holding wafers, the tray having a surface to be tiled.

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