Semiconductor factory wastewater multi-stage filtration recovery treatment device

Abstract

The utility model is semiconductor factory wastewater multistage filtration recycling processing device, and its structure is that the preliminary filtration structure includes the preliminary filtration pool, is equipped with the biological membrane reactor, the secondary filtration structure includes the secondary filtration cylinder of the filter screen cylinder inside, the flocculation treatment structure includes the flocculation treatment pool of inside being equipped with the stirring mechanism, being equipped with the dosing hole of top, and the stirring mechanism is connected with the scraper of close flocculation treatment pool inner wall. The utility model's advantage: wastewater passes through the biological membrane reactor preliminary filtration, then flows into the secondary filtration cylinder and carries out secondary filtration to wastewater by the filter screen cylinder, can avoid the impurity in the wastewater in the secondary filtration cylinder as far as possible and flows into the flocculation treatment pool, avoids the influence of the impurity on the subsequent flocculation process as far as possible, thereby improves the filtration effect of the device to a certain extent, the stirring mechanism with scraper of flocculation treatment structure can scrape off the impurity adhered to the inner wall while stirring the wastewater and speeding up the flocculation reaction rate, avoids the impurity adhesion, and further improves the filtration effect.

Description

Technical Field

[0001] This utility model relates to a wastewater filtration and recycling treatment device, specifically a multi-stage filtration and recycling treatment device for semiconductor factory wastewater. Background Technology

[0002] Wastewater recycling in semiconductor factories is crucial for sustainable development, significantly reducing water consumption and production costs. Chip manufacturing requires large amounts of ultrapure water for wafer cleaning and etching; reducing the discharge of highly polluting wastewater prevents the contamination of the environment and water bodies by harmful substances such as heavy metals, fluorides, and organic solvents.

[0003] CN222204821U discloses a wastewater treatment device for the semiconductor industry, including a treatment tank. A connecting pipe extends from the upper opening of the treatment tank, and an inlet hopper is provided at the upper opening of the connecting pipe. A dosing component is provided inside the inlet hopper, and an inner support is provided inside the connecting pipe. The dosing component includes a dosing tube mounted on the inner support and coaxial with the connecting pipe. The dosing tube can rotate around its axis, and a pipe cap is installed at the upper opening of the dosing tube. Dosing holes are radially opened on the outer surface of the dosing tube, and several dosing holes are arranged in an array near the pipe cap along the circumference of the dosing tube. A piston and a driving component for moving the piston are installed inside the dosing tube. The device allows for the uniform mixing and addition of flocculant simultaneously with the wastewater entering the treatment tank, improving the overall purification efficiency of the wastewater. Furthermore, the uniform mixing of the dosing component uses a bladeless method, which is corrosion-resistant and more durable.

[0004] However, the above-mentioned device still has shortcomings: 1) When using it, only chemical flocculants are added to mix the wastewater. There is no structure to pre-treat large particulate waste in the wastewater before the mixing process, and impurities in the wastewater can easily affect the subsequent flocculation process. 2) It can uniformly mix flocculants, but it lacks a structure to clean the inner wall of the treatment tank. As a result, impurities in the wastewater and flocculants produced after the wastewater reacts with the flocculant may adhere to the inner wall of the treatment tank, which may have a certain impact on the filtration effect. Utility Model Content

[0005] This utility model proposes a multi-stage filtration and recycling treatment device for semiconductor factory wastewater. Its purpose is to overcome the above-mentioned shortcomings of the existing technology, solve the problem of filtration and recycling treatment of semiconductor factory wastewater, and improve the filtration effect of the filtration device.

[0006] This utility model provides a multi-stage filtration and recycling treatment device for semiconductor factory wastewater. Its structure includes a preliminary filtration structure, a secondary filtration structure, and a flocculation treatment structure connected in sequence. The preliminary filtration structure includes a preliminary filtration tank with a first inlet on its side and a biofilm reactor inside. The secondary filtration structure includes a secondary filter cylinder with an internal filter screen. The flocculation treatment structure includes a flocculation treatment tank with an internal stirring mechanism, a third outlet on its side, and a dosing port on its top. The stirring mechanism is connected to a scraper that is tightly attached to the inner wall of the flocculation treatment tank. During operation, wastewater is added to the preliminary filtration tank and undergoes preliminary filtration through the biofilm reactor. It then flows into the secondary filtration tank, where the filter screen performs a second filtration. The wastewater then flows into the flocculation treatment tank, where flocculant is added through the dosing port. Activating the stirring mechanism agitates the wastewater inside the flocculation treatment tank, accelerating the reaction rate. The rotating scraper removes impurities adhering to the inner surface of the flocculation treatment tank.

[0007] Preferably, the top of each of the opposite side walls of the primary filtration tank is provided with a fixing seat, and the top of each of the opposite side walls of the biofilm reactor is provided with a fixing plate that cooperates with the fixing seat. The fixing plate is inserted into the fixing seat accordingly. The top of each of the opposite side walls of the biofilm reactor is also provided with a handle. Pulling the two sets of handles can move the two sets of fixing plates out of the two sets of fixing seats, so that the biofilm reactor can be removed from the inside of the primary filtration tank for cleaning or replacement. During installation, it is only necessary to insert the two sets of fixing plates into the two sets of fixing seats to fix the position of the biofilm reactor, so that the operator can clean or replace the biofilm reactor with less effort.

[0008] Preferably, the secondary filtration structure further includes a sealing cap on top of the secondary filter cylinder, the sealing cap being connected to the top of the filter screen cylinder. The secondary filter cylinder has a second inlet and a second outlet on opposite sides. The second inlet is connected to the first outlet of the primary filtration structure, and the second outlet is connected to the flocculation treatment structure. The outer wall of the filter screen cylinder is tightly attached to the inner wall of the secondary filter cylinder, and the side walls of the filter screen cylinder are inclined. The side of the filter screen cylinder near the second inlet is lower than the bottom of the second inlet, and the side of the filter screen cylinder near the second outlet is higher than the top of the second outlet. During use, the wastewater initially filtered in the primary filtration tank flows into the interior of the secondary filter cylinder, where the filter screen cylinder performs a second filtration. The design of the filter screen cylinder minimizes the flow of impurities from the wastewater into the second outlet. Pulling the sealing cap allows it to detach from the upper part of the secondary filter cylinder, making it easier for the operator to remove the filter screen cylinder for cleaning.

[0009] Preferably, the secondary filter cylinder has a limiting groove at its bottom, and the bottom of the filter screen cylinder has a limiting block that matches the shape of the limiting groove, with the limiting block inserted into the limiting groove. The insertion of the limiting block into the limiting groove restricts the direction of the filter screen cylinder inside the secondary filter cylinder, preventing rotation of the filter screen cylinder within the secondary filter cylinder and thus preventing the filter screen cylinder from deviating from the second outlet. Preferably, the flocculation treatment structure further includes a third inlet located on the side of the flocculation treatment tank opposite to the third outlet. The third inlet is connected to the second outlet of the secondary filtration structure. A cover plate is provided on the top of the flocculation treatment tank, and a dosing port is located on the cover plate. The stirring mechanism includes a drive motor installed at the center of the top of the cover plate. The output end of the drive motor passes through the cover plate and is connected to a stirring shaft inside the flocculation treatment tank. The lower end of the stirring shaft is fixed to a connecting seat at the center of the bottom of the flocculation treatment tank. Several stirring blades are evenly spaced and staggered along the extension direction of the stirring shaft. Several through holes are arrayed on the stirring blades. The stirring shaft is also connected to a pair of spaced connecting cylinders. A connecting rod is connected inside the connecting cylinders through a pressure spring. The connecting rod is connected to a scraper. During use, the wastewater after secondary filtration flows into the flocculation treatment tank through the secondary filter cartridge. Flocculant can be added to the flocculation treatment tank through the dosing port to react with the wastewater inside. After the drive motor starts, it can drive the stirring shaft and multiple sets of stirring blades to rotate synchronously. When the stirring shaft rotates, it will also drive the two sets of connecting cylinders and scrapers to rotate synchronously. The multiple sets of stirring blades can stir the wastewater inside the flocculation treatment tank when rotating, which can accelerate the reaction speed of the wastewater inside the flocculation treatment tank to a certain extent. In addition, when the scraper rotates, it will scrape off the impurities attached to the inner surface of the flocculation treatment tank. This design can effectively prevent impurities from adhering to the inner surface of the flocculation treatment tank, thereby further improving the filtration effect.

[0010] The advantages of this utility model are: the reasonable structural design allows wastewater to undergo preliminary filtration through a biofilm reactor, followed by secondary filtration in a filter cylinder. This secondary filtration minimizes the risk of impurities from the wastewater flowing into the flocculation treatment tank and affecting subsequent flocculation processes, thereby improving the filtration efficiency to some extent. Furthermore, the flocculation treatment structure is equipped with a scraper-equipped stirring mechanism, which accelerates the flocculation reaction while simultaneously scraping away impurities adhering to the inner wall, further enhancing the filtration effect. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the structure of the multi-stage filtration and recycling treatment device for semiconductor factory wastewater according to this utility model.

[0012] Figure 2 This is a partial cross-sectional structural schematic diagram of the semiconductor factory wastewater multi-stage filtration and recycling treatment device of this utility model.

[0013] Figure 3 yes Figure 1 A partial exploded structural diagram of the initial filtration structure.

[0014] Figure 4 yes Figure 1 A partial exploded structural diagram of the secondary filtration structure.

[0015] Figure 5 yes Figure 1 A partial cross-sectional view of the flocculation treatment structure.

[0016] Figure 6 yes Figure 5 A schematic diagram of the stirring structure.

[0017] In the diagram, 1 is the primary filtration structure, 11 is the primary filtration tank, 12 is the first inlet, 13 is the first outlet, 14 is the fixed base, 15 is the biofilm reactor, 16 is the fixed plate, 17 is the handle, 2 is the secondary filtration structure, 21 is the secondary filter cylinder, 22 is the second inlet, 23 is the second outlet, 24 is the limiting groove, 25 is the filter screen cylinder, 26 is the limiting block, 27 is the sealing cover, 3 is the flocculation treatment structure, 31 is the flocculation treatment tank, 32 is the third inlet, 33 is the third outlet, 34 is the connecting base, 35 is the cover plate, 36 is the dosing port, 37 is the drive motor, 38 is the stirring shaft, 39 is the stirring blade, 310 is the connecting cylinder, 311 is the pressure spring, 312 is the connecting rod, and 313 is the scraper. Detailed Implementation

[0018] The present invention will be further described in detail below with reference to embodiments and specific implementation methods.

[0019] like Figure 1 , 2 As shown, the semiconductor factory wastewater multi-stage filtration and recycling treatment device includes a primary filtration structure 1, a secondary filtration structure 2, and a flocculation treatment structure 3 connected in sequence. The primary filtration structure 1 includes a primary filtration tank 11 with a first inlet 12 on the side and a biofilm reactor 15 inside the primary filtration tank 11. The secondary filtration structure 2 includes a secondary filtration cylinder 21 with a filter screen 25 inside. The flocculation treatment structure 3 includes a flocculation treatment tank 31 with a stirring mechanism inside, a third outlet 33 on the side, and a dosing port 36 on the top. The stirring mechanism is connected to a scraper 313 that is closely attached to the inner wall of the flocculation treatment tank 31.

[0020] During operation, wastewater is introduced into the primary filtration tank 11 through the first inlet 12. Then, the wastewater flowing into the primary filtration tank 11 is initially filtered through the biofilm reactor 15. The wastewater then flows into the secondary filtration cylinder 21, where the filter screen 25 performs a second filtration. The filter screen 25 is designed to minimize the leakage of impurities from the wastewater in the secondary filtration cylinder 21. The wastewater then flows into the flocculation treatment tank 31, where flocculant is added through the dosing port 36. The stirring mechanism is then activated to agitate the wastewater in the flocculation treatment tank 31, accelerating the reaction speed. The scraper 313, while rotating, scrapes off impurities adhering to the inner surface of the flocculation treatment tank 31.

[0021] like Figure 3 As shown, the preliminary filtration structure 1 also includes a first outlet 13 disposed on the other side of the preliminary filtration tank 11 opposite to the first inlet 12. The first outlet 13 is connected to the secondary filtration structure 2. The biofilm reactor 15 is detachably disposed in the preliminary filtration tank 11. The top of the opposite two side walls of the preliminary filtration tank 11 are respectively provided with a fixing seat 14. The top of the opposite two side walls of the biofilm reactor 15 are provided with a fixing plate 16 that cooperates with the fixing seat 14. The fixing plate 16 is inserted into the fixing seat 14. The top of the opposite two side walls of the biofilm reactor 15 are also respectively provided with a handle 17.

[0022] In use, the external water inlet pipe is connected to the first inlet 12 via a flange. Wastewater enters the interior of the preliminary filtration tank 11 through the first inlet 12. Microorganisms, such as toxic bacteria, attach to the surface of the packing material inside the biofilm reactor 15 to form a biofilm, secreting extracellular polymeric substances (EPS) to capture organic pollutants in the wastewater, such as isopropanol, acetone, and residual solvents from photoresist. At this point, the biofilm reactor 15 can perform preliminary filtration of the wastewater inside the preliminary filtration tank 11. Pulling the two sets of handles 17 can move the two sets of fixing plates 16 out of the two sets of fixing seats 14, allowing the biofilm reactor 15 to be removed from the interior of the preliminary filtration tank 11 for cleaning or replacement. During installation, simply insert the two sets of fixing plates 16 into the two sets of fixing seats 14 to fix the position of the biofilm reactor 15. This design allows the operator to clean or replace the biofilm reactor 15 with relatively little effort. Depending on the specific conditions of the wastewater, the operator usually needs to perform routine backwashing of the biofilm reactor 15 daily and acid / alkali washing weekly to maintain the filtration effect of the biofilm reactor 15.

[0023] like Figure 4As shown, the secondary filtration structure 2 also includes a sealing cover 27 covering the top of the secondary filter cylinder 21. The sealing cover 27 is connected to the top of the filter screen cylinder 25. The secondary filter cylinder 21 has a second inlet 22 and a second outlet 23 on opposite sides. The second inlet 22 is connected to the first outlet 13 of the primary filtration structure 1, and the second outlet 23 is connected to the flocculation treatment structure 3. The bottom of the secondary filter cylinder 21 is provided with a limiting groove 24. The bottom of the filter screen cylinder 25 is provided with a limiting block 26 that matches the shape of the limiting groove 24. The limiting block 26 is inserted into the limiting groove 24. The outer wall of the filter screen cylinder 25 is close to the inner wall of the secondary filter cylinder 21. The side wall of the filter screen cylinder 25 is inclined. The side of the filter screen cylinder 25 near the second inlet 22 is lower than the bottom of the second inlet 22, and the side of the filter screen cylinder 25 near the second outlet 23 is higher than the top of the second outlet 23.

[0024] During use, when the wastewater level after preliminary filtration in the primary filtration tank 11 reaches the height of the first outlet 13, it flows into the secondary filter cylinder 21 through the first outlet 13 and the second inlet 22. At this time, the filter screen cylinder 25 performs a second filtration of the wastewater. The design of the filter screen cylinder 25 can minimize the flow of impurities in the wastewater inside the secondary filter cylinder 21 into the second outlet 23. The insertion of the limiting block 26 and the limiting groove 24 can restrict the direction of the filter screen cylinder 25 inside the secondary filter cylinder 21, preventing the filter screen cylinder 25 from rotating inside the secondary filter cylinder 21 and thus preventing the filter screen cylinder 25 from deviating from the second outlet 23. Pulling the sealing cover 27 can detach it from the upper part of the secondary filter cylinder 21. This design allows the operator to remove the filter screen cylinder 25 for cleaning with relatively little effort. Under normal circumstances, the filter screen cylinder 25 needs to be cleaned twice a day, and the operation needs to be adjusted according to the actual situation of the wastewater to maintain the filtration effect of the filter screen cylinder 25.

[0025] like Figure 5 , 6 As shown, the flocculation treatment structure 3 also includes a third inlet 32 ​​located on the side of the flocculation treatment tank 31 opposite to the third outlet. The third inlet 32 ​​is connected to the second outlet 23 of the secondary filtration structure 2. The top of the flocculation treatment tank 31 is provided with a cover plate 35, and the dosing port 36 is provided on the cover plate 36. The stirring mechanism includes a drive motor 37 installed at the top center of the cover plate 35. The output end of the drive motor 37 passes through the cover plate 35 and is connected to the stirring shaft 38 inside the flocculation treatment tank 31. The lower end of the stirring shaft 38 is fixed to the connecting seat 34 at the bottom center inside the flocculation treatment tank 31. The stirring shaft 38 is provided with a number of stirring blades 39 evenly spaced and staggered in the extension direction. A number of through holes are arrayed on the stirring blades 39. The stirring shaft 38 is also connected to a pair of spaced connecting cylinders 310. The connecting cylinders 310 are connected to a connecting rod 312 through a pressure spring 311. The connecting rod 312 is connected to a scraper 313.

[0026] In use, when the wastewater level after secondary filtration inside the secondary filter cartridge 21 reaches the height of the second outlet 23, it flows into the flocculation treatment tank 31 through the second outlet 23 and the third inlet 32. When the wastewater level inside the flocculation treatment tank 31 reaches the height of the third outlet 33, it is discharged out through the third outlet 33. Flocculant can be added into the flocculation treatment tank 31 through the dosing port 36 to react with the wastewater inside the flocculation treatment tank 31. After the drive motor 37 is started, it can drive the stirring shaft 38 and multiple sets of stirring blades 39 to move together. The stirring shaft 38 rotates in sequence, and when it rotates, it will simultaneously drive the two sets of connecting cylinders 310 and scraper 313 to rotate synchronously. When the multiple sets of stirring blades 39 rotate, they can stir the wastewater inside the flocculation treatment tank 31, which can accelerate the reaction speed of the wastewater inside the flocculation treatment tank 31 to a certain extent. When the scraper 313 rotates, it will scrape off the impurities attached to the inner surface of the flocculation treatment tank 31. This design can effectively prevent impurities from adhering to the inner surface of the flocculation treatment tank 31, thereby further improving the filtration effect.

[0027] As one embodiment, the drive motor 37 is model WEG W22Xf-EP-B63-4T-7.5kW-EX, which has a double mechanical seal drive shaft inside, effectively preventing corrosion inside the drive motor 37. The connecting seat 34, stirring shaft 38, stirring blade 39, connecting cylinder 310, pressure spring 311, connecting rod 312, and scraper 313 are all made of nickel-based alloy, which has high corrosion resistance, effectively extending service life and reducing the frequency of maintenance and replacement.

[0028] All of the aforementioned transmission components and movable parts require regular cleaning and maintenance (including but not limited to dust removal and lubrication) to ensure their normal operation.

[0029] All of the components described above are existing technologies, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0030] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present utility model, and these all fall within the protection scope of the present utility model.

Claims

1. A multi-stage filtration and recycling treatment device for semiconductor factory wastewater, characterized in that, The structure includes a preliminary filtration structure (1), a secondary filtration structure (2), and a flocculation treatment structure (3) connected in sequence. The preliminary filtration structure (1) includes a preliminary filtration tank (11) with a first inlet (12) on the side and a biofilm reactor (15) inside the preliminary filtration tank (11). The secondary filtration structure (2) includes a secondary filtration cylinder (21) with a filter screen (25) inside. The flocculation treatment structure (3) includes a flocculation treatment tank (31) with a stirring mechanism inside, a third outlet (33) on the side, and a dosing port (36) on the top. The stirring mechanism is connected to a scraper (313) that is closely attached to the inner wall of the flocculation treatment tank (31).

2. The multi-stage filtration and recycling treatment device for semiconductor factory wastewater as described in claim 1, characterized in that, The top of the opposite two side walls of the primary filtration tank (11) is provided with a fixed seat (14), and the top of the opposite two side walls of the biofilm reactor (15) is provided with a fixed plate (16) that cooperates with the fixed seat (14). The fixed plate (16) is inserted into the fixed seat (14). The top of the opposite two side walls of the biofilm reactor (15) is also provided with a handle (17).

3. The multi-stage filtration and recycling treatment device for semiconductor factory wastewater as described in claim 2, characterized in that, The secondary filtration structure (2) further includes a sealing cover (27) covering the top of the secondary filter cylinder (21). The sealing cover (27) is connected to the top of the filter screen cylinder (25). The secondary filter cylinder (21) has a second inlet (22) and a second outlet (23) on opposite sides. The second inlet (22) is connected to the first outlet (13) of the primary filtration structure (1). The second outlet (23) is connected to the flocculation treatment structure (3). The outer wall of the filter screen cylinder (25) is close to the inner wall of the secondary filter cylinder (21). The side wall of the filter screen cylinder (25) is inclined. The side of the filter screen cylinder (25) near the second inlet (22) is lower than the bottom of the second inlet (22). The side of the filter screen cylinder (25) near the second outlet (23) is higher than the top of the second outlet (23).

4. The multi-stage filtration and recycling treatment device for semiconductor factory wastewater as described in claim 3, characterized in that, The secondary filter cylinder (21) is provided with a limiting groove (24) at the bottom, and the filter screen cylinder (25) is provided with a limiting block (26) at the bottom that matches the shape of the limiting groove (24). The limiting block (26) is inserted into the limiting groove (24).

5. The multi-stage filtration and recycling treatment device for semiconductor factory wastewater as described in claim 3, characterized in that, The flocculation treatment structure (3) further includes a third inlet (32) located on the side of the flocculation treatment tank (31) opposite to the third outlet. The third inlet (32) is connected to the second outlet (23) of the secondary filtration structure (2). A cover plate (35) is provided on the top of the flocculation treatment tank (31), and a dosing port (36) is provided on the cover plate (35). The stirring mechanism includes a drive motor (37) installed at the center of the top of the cover plate (35). The output end of the drive motor (37) passes through the cover plate (35) and connects to the flocculation treatment tank (31). The stirring shaft (38) inside 31) is connected, and the lower end of the stirring shaft (38) is fixed to the connecting seat (34) at the bottom center of the flocculation treatment tank (31). The stirring shaft (38) is evenly spaced and staggered with several stirring blades (39) in the extension direction. Several through holes are arrayed on the stirring blades (39). The stirring shaft (38) is also connected to a pair of spaced connecting cylinders (310). The connecting cylinder (310) is connected to the connecting rod (312) through the pressure spring (311). The connecting rod (312) is connected to the scraper (313).

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