auxiliary flattening mechanism

Abstract

The application provides an auxiliary flattening mechanism applied to a magnetron sputtering machine, the magnetron sputtering machine comprising a winding roller, the auxiliary flattening mechanism comprising a main shaft and a swing arm assembly, the swing arm assembly comprising a swing arm and a swing arm driving piece, and the swing arm swings when the winding roller is wound and unwound to adjust the distance between the first guide roller and the surface of the film roll on the winding roller. Through the swing arm assembly, the swing arm swings when the winding roller is wound and unwound to adjust the distance between the first guide roller and the surface of the film roll on the winding roller, so that the free span between the first guide roller and the surface of the film roll on the winding roller is reduced, and the wrinkles generated during film coating are reduced.

Description

Technical Field

[0001] This application relates to the field of magnetron sputtering machine technology, and more particularly to an auxiliary flattening mechanism. Background Technology

[0002] Magnetron sputtering machines are machines that use physical vapor deposition to manufacture composite films, which are widely used in the semiconductor industry.

[0003] As equipment becomes more sophisticated, manufacturers are prioritizing production efficiency, leading to increased demands for coating length, coating speed, and film yield. The increased coating length necessitates larger unwinding diameters. Furthermore, a certain distance is required before the film enters the coating rollers for wrinkle removal, flattening, and tension adjustment. Simultaneously, the winding and coating rollers cannot be too close. Consequently, there is a problem of excessively long free span between the first guide roller and the unwinding roller in the later stages of coating, and similarly, excessively long free span between the last guide roller and the take-up roller in the early stages of coating. Excessive free span can easily cause wrinkles in the film. Utility Model Content

[0004] In view of this, the purpose of this application is to provide an auxiliary flattening mechanism that can reduce the free span of the film and reduce wrinkles generated during coating.

[0005] To achieve the above objectives, this application provides an auxiliary flattening mechanism for use in a magnetron sputtering machine, wherein the magnetron sputtering machine includes a winding roller, and the auxiliary flattening mechanism includes:

[0006] A swing arm assembly includes a main shaft, a swing arm, and a swing arm drive unit. The swing arm drive unit is connected to the main shaft and drives the main shaft to rotate around the axis of the main shaft. The main shaft is connected to the swing arm and drives the swing arm to swing.

[0007] The first guide roller has two ends rotatably connected to the swing arm, and the axis of the first guide roller is parallel to the axis of the main shaft.

[0008] The first guide roller is disposed on the film transport path, and the swing arm swings during the winding and unwinding of the winding roller to adjust the distance between the first guide roller and the film roll surface on the winding roller.

[0009] In a preferred embodiment, the auxiliary flattening mechanism further includes a distance sensor disposed on the first guide roller, the distance sensor being used to detect the distance between the first guide roller and the film roll surface on the winding roller.

[0010] In a preferred embodiment, the magnetron sputtering machine includes a vacuum chamber, the swing arm drive is disposed outside the vacuum chamber, and the spindle penetrates the cavity wall of the vacuum chamber and is connected to the swing arm drive.

[0011] In a preferred embodiment, the main shaft includes a first sub-shaft, a second sub-shaft, a first support tube, and a second support tube connected in sequence. A portion of the first sub-shaft is located outside the vacuum cavity and connected to the swing arm drive, while another portion is located inside the vacuum cavity and connected to the second sub-shaft.

[0012] In a preferred embodiment, the swing arm includes a first swing arm and a second swing arm, the second pivot shaft and the first support tube clamp the first swing arm and fasten it with a first fastener, the first support tube and the second support tube clamp the second swing arm and fasten it with a second fastener, and the two ends of the first guide roller are rotatably connected to the first swing arm and the second swing arm respectively.

[0013] In a preferred embodiment, the auxiliary flattening mechanism further includes a first support plate and a second support plate, the first support plate supporting the second sub-shaft, the second support plate supporting the second support tube, the second sub-shaft being rotatably connected to the first support plate, and the second support plate being rotatably connected to the second support tube.

[0014] In a preferred embodiment, the auxiliary flattening mechanism further includes a seal, through which the first split shaft is connected to the vacuum chamber;

[0015] And / or, the auxiliary flattening mechanism further includes a coupling, through which the first branch shaft and the second branch shaft are connected.

[0016] In a preferred embodiment, the swing arm assembly further includes a bracket and a connector. The bracket is connected to the outer wall of the vacuum chamber. The swing arm drive includes a cylinder. The cylinder body is rotatably connected to the bracket. The piston rod of the cylinder is rotatably connected to the connector. The connector is connected to the main shaft and rotates synchronously with the main shaft.

[0017] In a preferred embodiment, the auxiliary flattening mechanism further includes a second guide roller, the two ends of which are rotatably connected to the swing arm. The axis of the first guide roller is parallel to the axis of the second guide roller. The distance between the first guide roller and the main shaft is greater than the distance between the second guide roller and the main shaft. The second guide roller is disposed on the film transport path.

[0018] Alternatively, the auxiliary flattening mechanism may further include a second guide roller, the two ends of which are rotatably connected to the swing arm. The axis of the first guide roller is parallel to the axis of the second guide roller. The distance between the first guide roller and the main shaft is greater than the distance between the second guide roller and the main shaft. The second guide roller is disposed on the film transport path. The position of the second guide roller on the swing arm is adjustable.

[0019] In a preferred embodiment, the auxiliary flattening mechanism further includes a mechanical limiting structure for abutting against the swing arm to limit the swing range of the swing arm.

[0020] In a preferred embodiment, the winding roller includes an unwinding roller and a take-up roller, and the auxiliary flattening mechanism is disposed on one side of the unwinding roller and / or the take-up roller, and adjusts the distance between the first guide roller and the film roll surface on the unwinding roller and / or the take-up roller.

[0021] As can be seen from the above, the auxiliary flattening mechanism provided in this application, by setting up a swing arm assembly, uses the swing arm to swing during the winding and unwinding of the winding roller to adjust the distance between the first guide roller and the film roll surface on the winding roller, thereby reducing the free span between the first guide roller and the film roll surface on the winding roller and reducing wrinkles generated during coating. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in this application or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is an assembly diagram of the auxiliary flattening mechanism in one embodiment of this application;

[0024] Figure 2 This is a schematic diagram of the overall structure of the auxiliary flattening mechanism in one embodiment of this application;

[0025] Figure 3 This is a schematic diagram of the swing arm assembly in one embodiment of this application;

[0026] Figure 4 This is an assembly diagram of the auxiliary flattening mechanism in another embodiment of this application.

[0027] Figure Labels

[0028] 200. Auxiliary flattening mechanism; 201. Seal; 202. Coupling; 10. Winding roller; 11. Unwinding roller; 12. Rewinding roller; 20. Cavity wall; 30. Film;

[0029] 210. Main spindle; 211. First sub-spindle; 212. Second sub-spindle; 213. First support tube; 214. Second support tube;

[0030] 220. Swing arm assembly; 221. Swing arm; 2211. First swing arm; 2212. Second swing arm; 222. Swing arm drive component; 2221. Cylinder block; 2222. Piston rod; 223. First fastener; 224. Second fastener; 225. Bracket; 226. Connector;

[0031] 230. First guide roller;

[0032] 240. Second guide roller;

[0033] 250. Distance sensor;

[0034] 260. First support plate;

[0035] 270. Second support plate;

[0036] 280. Mechanical limiting structure. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with specific embodiments and the accompanying drawings.

[0038] It should be noted that, unless otherwise defined, the technical or scientific terms used in the embodiments of this application should have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in the embodiments of this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are only used to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0039] Reference Figure 1-3 As shown, one embodiment of this application discloses an auxiliary flattening mechanism 200 applied to a magnetron sputtering machine. The magnetron sputtering machine includes a winding roller 10, and the auxiliary flattening mechanism 200 includes a swing arm assembly 220 and a first guide roller 230.

[0040] The swing arm assembly 220 includes a main shaft 210, a swing arm 221, and a swing arm drive 222. The swing arm drive 222 is connected to the main shaft 210 and drives the main shaft 210 to rotate around the axis Q of the main shaft 210. The main shaft 210 is connected to the swing arm 221 and drives the swing arm 221 to swing. The two ends of the first guide roller 230 are rotatably connected to the swing arm 221, and the axis of the first guide roller 230 is parallel to the axis of the main shaft 210.

[0041] The first guide roller 230 is disposed on the transport path of the film 30, and the swing arm 221 swings during the winding and unwinding of the winding roller 10 to adjust the distance between the first guide roller 230 and the film roll surface on the winding roller 10.

[0042] The auxiliary flattening mechanism 200 provided in this embodiment uses a swing arm assembly 220 to swing the swing arm 221 during the winding and unwinding of the winding roller 10, thereby adjusting the distance between the first guide roller 230 and the film roll surface on the winding roller 10, thereby reducing the free span between the first guide roller 230 and the film roll surface on the winding roller 10 and reducing wrinkles generated during coating.

[0043] Specifically, the swing arm 221 swings during the winding and unwinding of the winding roller 10 to adjust the distance between the first guide roller 230 and the film roll surface on the winding roller 10, so that the distance between the first guide roller 230 and the film roll surface on the winding roller 10 is maintained at a target distance. The target distance can be a fixed value or a numerical range.

[0044] In one embodiment, the auxiliary flattening mechanism 200 further includes a second guide roller 240, the two ends of which are rotatably connected to the swing arm 221. The axis of the first guide roller 230 is parallel to the axis of the second guide roller 240, and the distance between the first guide roller 230 and the main shaft 210 is greater than the distance between the second guide roller 240 and the main shaft 210.

[0045] The second guide roller 240 serves as a transition between the first guide roller 230 and other guide rollers, reducing the free span between them and minimizing wrinkles during coating. Furthermore, since the distance between the second guide roller 240 and the main shaft 210 is less than the distance between the first guide roller 230 and the main shaft 210 (where the distance between the first guide roller 230 and the main shaft 210 is d1 and the distance between the second guide roller 240 and the main shaft 210 is d2, d2>d1), during oscillation, at the same oscillation / rotation angle, the positional change of the second guide roller 240 relative to the first guide roller 230 is smaller, which is more beneficial for the flattening of the film 30.

[0046] Optionally, the position of the second guide roller 240 on the swing arm 221 is adjustable. For example, the swing arm 221 is provided with a U-shaped groove, and the end of the second guide roller 240 can be adjusted within the U-shaped groove and locked in place by bolts or the like. Alternatively, the swing arm 221 is provided with multiple mounting holes along its length that mate with the second guide roller 240, allowing the second guide roller 240 to be fitted with different mounting holes to adjust its position.

[0047] In one embodiment, the auxiliary flattening mechanism 200 further includes a distance sensor 250, which is disposed on the first guide roller 230 and detects the distance between the first guide roller 230 and the film roll surface on the winding roller 10. The swing arm drive 222 drives the main shaft 210 to rotate around its axis Q according to the distance detected by the distance sensor 250. Specifically, refer to... Figure 1 As shown, when the distance detected by the distance sensor 250 is greater than the target distance, the swing arm drive 222 drives the swing arm 221 to rotate counterclockwise to reduce the distance between the first guide roller 230 and the film roll surface on the winding roller 10; when the distance detected by the distance sensor 250 is less than the target distance, the swing arm drive 222 drives the swing arm 221 to rotate clockwise to increase the distance between the first guide roller 230 and the film roll surface on the winding roller 10. The swing arm drive 222 is controlled by the control system.

[0048] Optionally, the distance sensor 250 may be an ultrasonic distance sensor, a laser distance sensor, or an infrared distance sensor, etc.

[0049] Reference Figure 2 As shown, in one embodiment, the magnetron sputtering machine includes a vacuum chamber, a swing arm drive 222 is disposed outside the vacuum chamber, and a main shaft 210 penetrates the cavity wall 20 of the vacuum chamber and is connected to the swing arm drive 222. Disposing the swing arm drive 222 outside the vacuum chamber reduces the risk of vacuum chamber leakage.

[0050] Reference Figure 2 As shown, in one embodiment, the main shaft 210 includes a first sub-shaft 211, a second sub-shaft 212, a first support tube 213, and a second support tube 214 connected in sequence. A portion of the first sub-shaft 211 is located outside the vacuum chamber and connected to the swing arm drive 222, while another portion is located inside the vacuum chamber and connected to the second sub-shaft 212. The main shaft 210 is configured in multiple segments for ease of installation and adjustment.

[0051] Reference Figure 2As shown, in one embodiment, the swing arm 221 includes a first swing arm 2211 and a second swing arm 2212. A second split shaft 212 and a first support tube 213 clamp the first swing arm 2211 and fasten it with a first fastener 223. The first support tube 213 and a second support tube 214 clamp the second swing arm 2212 and fasten it with a second fastener 224. The two ends of the first guide roller 230 are rotatably connected to the first swing arm 2211 and the second swing arm 2212, respectively. The two ends of the second guide roller 240 are also rotatably connected to the first swing arm 2211 and the second swing arm 2212, respectively. Optionally, the first fastener 223 and the second fastener 224 are bolts or screws, etc., for easy assembly and disassembly. The first swing arm 2211 and the second swing arm 2212 are spaced apart and parallel to each other, and can swing synchronously under the action of the swing arm drive member 222.

[0052] The first guide roller 230 serves to support the first swing arm 2211 and the second swing arm 2212.

[0053] Optionally, the two ends of the first guide roller 230 are rotatably connected to the first swing arm 2211 and the second swing arm 2212 via bearings, respectively, and the two ends of the second guide roller 240 are rotatably connected to the first swing arm 2211 and the second swing arm 2212 via bearings, respectively. The second guide roller 240 also serves to support the first swing arm 2211 and the second swing arm 2212 to increase structural stability.

[0054] Reference Figure 2 As shown, in one embodiment, the auxiliary flattening mechanism 200 further includes a first support plate 260 and a second support plate 270. The first support plate 260 supports the second sub-shaft 212, and the second support plate 270 supports the second support tube 214. The second sub-shaft 212 is rotatably connected to the first support plate 260, and the second support plate 270 is rotatably connected to the second support tube 214. Optionally, the first support plate 260 and the second support plate 270 are connected to the bottom of the vacuum chamber to achieve stable support for the second sub-shaft 212 and the second support tube 214, ensuring the stability of the main shaft 210 during rotation.

[0055] Reference Figure 2 As shown, in one embodiment, the auxiliary flattening mechanism 200 further includes a seal 201, through which the first split shaft 211 is connected to the vacuum chamber. The seal 201 prevents leakage from the vacuum chamber. Optionally, the seal 201 can be a mechanical seal, sealing packing, etc. Further, when the seal 201 is a mechanical seal, as an example, the seal 201 may include a sealing ring.

[0056] Optionally, the seal 201 employs a magnetohydrodynamic seal. Furthermore, the seal 201 can be configured with water cooling based on the design temperature to reduce its temperature and prevent structural damage from excessive heat, thus extending its service life.

[0057] Reference Figure 2 As shown, in one embodiment, the auxiliary flattening mechanism 200 further includes a coupling 202, through which the first branch shaft 211 and the second branch shaft 212 are connected for easy disassembly. The coupling 202 can be a diaphragm coupling, which facilitates adjustment of the axial, radial, and angular deviations between the first branch shaft 211 and the second branch shaft 212.

[0058] Reference Figure 2 and Figure 3 As shown, in one embodiment, the swing arm assembly 220 further includes a bracket 225 and a connector 226. The bracket 225 is connected to the outer wall of the vacuum chamber. The swing arm drive component 222 includes a cylinder. The cylinder body 2221 is rotatably connected to the bracket 225, and the piston rod 2222 of the cylinder is rotatably connected to the connector 226. The connector 226 is connected to the main shaft 210 and rotates synchronously with the main shaft 210. When the piston rod 2222 of the cylinder extends or retracts, it drives the connector 226 and the main shaft 210 to rotate, converting linear motion into rotational motion.

[0059] Optionally, the cylinder body 2221 is rotatably connected to the bracket 225 via a rotating shaft, and the piston rod 2222 is rotatably connected to the connecting member 226 via a rotating shaft. The connecting member 226 is welded to the main shaft 210 or connected by bolts, etc. In other embodiments, the swing arm drive 222 can be a motor, which drives the main shaft 210 to rotate via a belt or chain, etc. Optionally, the connecting member 226 can be a connecting rod or a connecting plate, etc.

[0060] Optionally, the cylinder is equipped with a magnetic switch to prevent the first guide roller 230 from colliding with the winding roller 10. The non-contact nature of the magnetic switch allows it to output a signal by sensing changes in the magnetic field position before any collision occurs.

[0061] Reference Figure 1 As shown, in one embodiment, the auxiliary flattening mechanism 200 further includes a mechanical limiting structure 280, which abuts against the swing arm 221 to limit the swing range of the swing arm 221. The mechanical limiting structure 280 can prevent the first guide roller 230 from colliding with the winding roller 10. Optionally, the mechanical limiting structure 280 can be a limiting block or a limiting plate, etc. The mechanical limiting structure 280 may also include a spring, etc., to provide cushioning when abutting against the swing arm 221.

[0062] Reference Figure 4As shown, in one embodiment, the winding roller 10 includes an unwinding roller 11 and a take-up roller 12. An auxiliary flattening mechanism 200 is disposed on one side of the unwinding roller 11 and / or the take-up roller 12 and adjusts the distance between the first guide roller 230 and the film roll surface on the unwinding roller 11 and / or the take-up roller 12.

[0063] Specifically, when the auxiliary flattening mechanism 200 is set on one side of the unwinding roller 11, the first guide roller 230 and the second guide roller 240 are arranged sequentially along the film 30 transport path. During the unwinding process, the swing arm drive 222 drives the swing arm 221 to rotate counterclockwise, reducing the distance between the first guide roller 230 and the winding roller 10, so that the distance between the first guide roller 230 and the film roll surface on the unwinding roller 11 is at the target distance.

[0064] When the auxiliary flattening mechanism 200 is set on one side of the take-up roller 12, the second guide roller 240 and the first guide roller 230 are arranged sequentially along the film 30 transport path. During the take-up process, the swing arm drive 222 drives the swing arm 221 to rotate clockwise, increasing the distance between the first guide roller 230 and the winding roller 10, so that the distance between the first guide roller 230 and the film roll surface on the take-up roller 12 is at the target distance.

[0065] Preferably, such as Figure 4 As shown, in this embodiment, an auxiliary flattening mechanism 200 is provided on one side of the unwinding roller 11 and one side of the winding roller 12, and the two auxiliary flattening mechanisms 200 work simultaneously.

[0066] It should be noted that some embodiments of this application have been described above. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps described in the claims can be performed in a different order than that shown in the above embodiments and still achieve the desired result. In addition, the processes depicted in the drawings do not necessarily require the specific order or sequential order shown to achieve the desired result.

[0067] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of this application (including the claims) is limited to these examples; within the framework of this application, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of different aspects of the above embodiments of this application, which are not provided in detail for the sake of brevity.

[0068] The embodiments of this application are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the embodiments of this application should be included within the protection scope of this application.

Claims

1. An auxiliary flattening mechanism applied to a magnetron sputtering machine, the magnetron sputtering machine comprising a winding roller, characterized in that, The auxiliary flattening mechanism includes: A swing arm assembly includes a main shaft, a swing arm, and a swing arm drive unit. The swing arm drive unit is connected to the main shaft and drives the main shaft to rotate around the axis of the main shaft. The main shaft is connected to the swing arm and drives the swing arm to swing. The first guide roller has two ends rotatably connected to the swing arm, and the axis of the first guide roller is parallel to the axis of the main shaft. The first guide roller is disposed on the film transport path, and the swing arm swings during the winding and unwinding of the winding roller to adjust the distance between the first guide roller and the film roll surface on the winding roller.

2. The auxiliary flattening mechanism according to claim 1, characterized in that, The auxiliary flattening mechanism also includes a distance sensor, which is disposed on the first guide roller and is used to detect the distance between the first guide roller and the film roll surface on the winding roller.

3. The auxiliary flattening mechanism according to claim 1, characterized in that, The magnetron sputtering machine includes a vacuum chamber, the swing arm drive is disposed outside the vacuum chamber, and the main shaft passes through the cavity wall of the vacuum chamber and is connected to the swing arm drive.

4. The auxiliary flattening mechanism according to claim 3, characterized in that, The main shaft includes a first sub-shaft, a second sub-shaft, a first support tube, and a second support tube connected in sequence. A portion of the first sub-shaft is located outside the vacuum cavity and connected to the swing arm drive, while another portion is located inside the vacuum cavity and connected to the second sub-shaft.

5. The auxiliary flattening mechanism according to claim 4, characterized in that, The swing arm includes a first swing arm and a second swing arm. The second pivot shaft and the first support tube clamp the first swing arm and are fastened by the first fastener. The first support tube and the second support tube clamp the second swing arm and are fastened by the second fastener. The two ends of the first guide roller are rotatably connected to the first swing arm and the second swing arm, respectively.

6. The auxiliary flattening mechanism according to claim 4, characterized in that, The auxiliary flattening mechanism further includes a first support plate and a second support plate. The first support plate supports the second sub-shaft, and the second support plate supports the second support tube. The second sub-shaft is rotatably connected to the first support plate, and the second support plate is rotatably connected to the second support tube.

7. The auxiliary flattening mechanism according to claim 4, characterized in that, The auxiliary flattening mechanism also includes a sealing element, and the first split shaft is connected to the vacuum chamber through the sealing element; And / or, the auxiliary flattening mechanism further includes a coupling, through which the first branch shaft and the second branch shaft are connected.

8. The auxiliary flattening mechanism according to claim 3, characterized in that, The swing arm assembly also includes a bracket and a connector. The bracket is connected to the outer wall of the vacuum chamber. The swing arm drive includes a cylinder. The cylinder body is rotatably connected to the bracket. The piston rod of the cylinder is rotatably connected to the connector. The connector is connected to the main shaft and rotates synchronously with the main shaft.

9. The auxiliary flattening mechanism according to claim 1, characterized in that, The auxiliary flattening mechanism also includes a second guide roller, the two ends of which are rotatably connected to the swing arm. The axis of the first guide roller is parallel to the axis of the second guide roller. The distance between the first guide roller and the main shaft is greater than the distance between the second guide roller and the main shaft. The second guide roller is disposed on the film transport path. Alternatively, the auxiliary flattening mechanism may further include a second guide roller, the two ends of which are rotatably connected to the swing arm. The axis of the first guide roller is parallel to the axis of the second guide roller. The distance between the first guide roller and the main shaft is greater than the distance between the second guide roller and the main shaft. The second guide roller is disposed on the film transport path. The position of the second guide roller on the swing arm is adjustable.

10. The auxiliary flattening mechanism according to any one of claims 1-9, characterized in that, The winding roller includes an unwinding roller and a take-up roller. The auxiliary flattening mechanism is disposed on one side of the unwinding roller and / or the take-up roller, and adjusts the distance between the first guide roller and the film roll surface on the unwinding roller and / or the take-up roller. And / or, the auxiliary flattening mechanism further includes a mechanical limiting structure for abutting against the swing arm to limit the swing range of the swing arm.

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