Magnetron sputter shield

Abstract

The utility model relates to magnetron sputtering equipment technical field, and disclose magnetron sputtering shield, including quick -detachable cover main part, the top end threaded joint of quick -detachable cover main part has the cover, quick -detachable cover main part includes base frame, and the four around edge of base frame is fixed with pre -install frame, and the four around inner wall of base frame is seted up to have installed groove, and the four around inner wall of installed groove is seted up to have the engagement groove. The utility model through base frame and cover body composition, its base frame can cooperate four around pre -install frame with equipment internal cavity fixed, when installing and removing operation, only need to operate to hold the handle to make cover body direct rotation just can cooperate bottom clamping plate frame and engagement groove quick sliding joint, and through spring connection's clamping block reset buckling, keep locking, and the operation is convenient structure stable, and also need to pull out the bolt reverse rotation just can in removing, and the installation and removal mode is quick, provides the convenience for the maintenance work of magnetron sputtering.

Description

Technical Field

[0001] This utility model relates to the technical field of magnetron sputtering equipment, specifically to a magnetron sputtering shield. Background Technology

[0002] Magnetron sputtering increases the sputtering rate by introducing a magnetic field onto the target cathode surface and confining charged particles within the magnetic field to increase plasma density. Electrons, under the influence of an electric field E, collide with argon atoms as they fly towards the substrate, ionizing them to produce Ar+ ions and new electrons. The new electrons fly towards the substrate, while the Ar+ ions, accelerated by the electric field, fly towards the cathode target and bombard its surface with high energy, sputtering the target material. During sputtering, some electrons and negative ions enter the anode, some positive ions enter the cathode, and some charged particles collide with the container walls and recombine. These recombinating particles severely contaminate the magnetron chamber cavity, causing secondary contamination of the sputtering substrate and target material during subsequent sputtering experiments. Because the magnetron chamber has a complex structure and is difficult and often impossible to clean completely, a shielding cover is needed to protect the sputtering target, shielding it from charged particles and preventing or reducing the impact of charged ions on the magnetron chamber during sputtering.

[0003] When using a magnetron sputtering shield in a magnetron sputtering device, the base of the shield must first be fixed to the inner wall of the cavity and the outside of the cathode target. At the same time, a certain distance must be maintained between the inner wall of the shield and the cathode target to ensure that they are in an open circuit state. At the same time, attention should be paid to the gap between the workpiece and the shield. Finally, after tightening the three screws to ensure good sealing, the magnetron sputtering process can be carried out.

[0004] While the aforementioned existing technologies have significant beneficial effects, they still have shortcomings: The aforementioned shields are mostly molded as a single piece and fixed to the inside of the magnetron sputtering cavity by screws at the bottom. Current magnetron sputtering shields are easily contaminated by sputtered materials during use, and cleaning usually requires disassembly of the shield. However, current shields are generally in a single structure and are fixed by a large number of bolts, making it difficult to quickly disassemble and replace them when damaged or needing cleaning. Therefore, the magnetron sputtering shield was proposed. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a magnetron sputtering shield, which consists of a base frame and a shield body. The operator only needs to hold the handle to rotate the shield body directly to quickly slide and engage with the bottom card plate frame and the engagement slot. The spring-connected card block resets and locks the shield in place, making the operation convenient and the structure stable.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a magnetron sputtering shield, comprising a main frame, including a quick-release shield body, the top of which is threadedly connected to a cap, the quick-release shield body including a base frame, pre-installation frames fixed to the four periphery of the base frame, mounting grooves formed on the inner walls of the base frame, and engaging grooves formed on the inner walls of the mounting grooves, a pin passing through one set of engaging grooves, locking blocks symmetrically distributed above and below the engaging grooves, sliding rollers axially connected to the top two sides of the locking blocks, sliding grooves formed at the two end edges of the locking blocks, springs connected to the bottom two sides of the locking blocks, a shield body engaging with the inner wall of the mounting groove, handles fixed to the outer walls of the shield body, and locking plate frames fixed around the bottom of the shield body, positioning grooves formed on one side of the locking plate frames, and a pin hole formed at the center of one set of locking plate frames.

[0007] Preferably, the cover is engaged with the mounting groove on the top surface of the base frame via a retaining plate frame around the bottom, and the retaining groove is equidistantly distributed around the inner wall of the mounting groove.

[0008] Preferably, the card holder engages with the inner wall of the engaging groove, and the engaging groove is engaged with the card holder by vertically aligned card blocks.

[0009] Preferably, the locking block forms an elastic telescopic structure with the locking groove through the spring, and the locking block slides up and down with the locking groove through the sliding grooves at both ends.

[0010] Preferably, the end of the card block is sloping on both sides, and the sliding rollers are arranged obliquely along both sides of the end of the card block.

[0011] Preferably, the cover includes a cover frame, the bottom of the inner wall of the cover frame is provided with a threaded groove, the bottom of the threaded groove is fitted with a thickened retaining ring, and the inner wall of the thickened retaining ring is fitted with the top of the cover.

[0012] Preferably, the cover frame is detachable from the cover body via a threaded groove, and a thickened retaining ring is fixedly connected to the bottom end of the cover frame.

[0013] Compared with the prior art, the present invention has the following beneficial effects: This utility model consists of a base frame and a cover. The base frame can be fixed to the internal cavity of the equipment with the surrounding pre-installed brackets. During installation and dismantling, the operator only needs to hold the handle and rotate the cover directly to quickly slide and engage with the bottom card plate frame and the locking groove. The locking block connected by the spring returns to the original position and remains locked. The operation is convenient and the structure is stable. Dismantling only requires pulling out the pin and rotating in the opposite direction. The installation and dismantling method is quick and provides convenience for the maintenance of magnetron sputtering.

[0014] This shielding cover features a threaded, detachable structure, allowing the cover frame to be removed and installed. This facilitates the cleaning process of the entire shielding cover after disassembly. Furthermore, the thickened retaining ring provides a ring-shaped support when the cover frame is threaded to the top of the cover, further enhancing the stability of the cover structure.

[0015] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of this invention can be realized and obtained by means of the structures pointed out in the description, claims, and drawings. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of the quick-release cover of this utility model; Figure 2 This is a schematic cross-sectional view of the locking groove of this utility model. Figure 3 This is a schematic diagram of the three-dimensional structure of the card block of this utility model; Figure 4 This is a schematic diagram of the three-dimensional structure of the cover of this utility model.

[0017] In the diagram: 1. Quick-release cover body; 101. Base frame; 102. Pre-installation frame; 103. Mounting slot; 104. Engaging slot; 105. Pin; 106. Locking block; 107. Sliding roller; 108. Sliding groove; 109. Spring; 110. Cover body; 111. Handle; 112. Clamping plate frame; 113. Positioning slot; 114. Pin hole; 2. Cover; 201. Cover frame; 202. Threaded groove; 203. Thickened retaining ring. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0019] Please see Figure 1-4The magnetron sputtering shield of this embodiment includes a quick-release shield body 1, with a cap 2 threadedly connected to the top of the quick-release shield body 1. The quick-release shield body 1 includes a base frame 101, with pre-installation frames 102 fixed to the four periphery of the base frame 101. The inner walls of the base frame 101 are provided with mounting grooves 103, and the inner walls of the mounting grooves 103 are provided with engaging grooves 104. A pin 105 passes through one set of engaging grooves 104, and locking blocks 10 are symmetrically distributed above and below the engaging grooves 104. 6. The top surface of the locking block 106 is axially connected to the two sides of the sliding roller 107. The two ends of the locking block 106 are provided with sliding grooves 108. The bottom surface of the locking block 106 is connected to the two sides of the spring 109. The inner wall of the mounting groove 103 is fitted with the cover 110. The outer walls of the cover 110 are fixed with handles 111. The bottom of the cover 110 is fixed with the locking plate frame 112. The locking plate frame 112 is provided with positioning grooves 113 on one side. The center of one set of locking plate frames 112 is provided with a pin hole 114.

[0020] like Figure 1-4As shown, the shielding cover in this utility model is similar in structure to existing shielding covers. The main improvement of this utility model is that it is composed of a base frame 101 and a cover body 110. The operator only needs to hold the handle 111 to rotate the cover body 110 directly to quickly slide and engage with the bottom card plate frame 112 and the engaging groove 104. The locking block 106 connected by the spring 109 resets and locks in place, making the operation convenient and the structure stable. In this utility model, the spring 109 and the pin 105 are both existing technologies. When using this shielding cover... First, fix the base frame 101, along with the pre-installed brackets 102 around it and the screws, to the bottom of the inner cavity of the magnetron sputtering equipment. Then, align the retaining plate brackets 112 around the bottom of the cover 110 with the groove opening of the mounting slot 103 of the base frame 101. Next, insert the cover 110 downwards into the mounting slot 103. After insertion, the user holds the handle 111 and rotates the entire cover 110 to the right, causing the retaining plate brackets 112 to slide into the engaging groove 104. At this time, the engaging groove 104 is symmetrically arranged vertically. As the card holder 112 slides in, the locking block 106 compresses inward. When the card holder 112 slides into place, the locking block 106 returns to its original position with the spring 109, aligning with the positioning grooves 113 on the upper and lower parts of the card holder 112 and engaging. The user inserts the pin 105 into the engaging groove 104 and locks it in place with the pin hole 114 of one set of card holders 112, thus completing the installation. To disassemble, simply pull out the pin hole 114 and rotate the cover 110 in the opposite direction to remove it. The shielding cover consists of a base frame 101 and a cover 110. Its base frame 101 can be fixed to the internal cavity of the equipment with the surrounding pre-installed frame 102. When performing installation and disassembly operations, the operator only needs to hold the handle 111 to rotate the cover 110 directly to quickly slide and engage with the bottom card plate frame 112 and the card slot 104. The card block 106 connected by the spring 109 is reset and locked. The operation is convenient and the structure is stable. When disassembling, it is only necessary to pull out the pin 105 and rotate in the opposite direction. The installation and disassembly methods are quick and provide convenience for the maintenance of magnetron sputtering.

[0021] like Figure 4 As shown, the cover 2 includes a cover frame 201. The bottom of the inner wall of the cover frame 201 is circumferentially provided with a threaded groove 202. The bottom of the threaded groove 202 is fitted with a thickened retaining ring 203, and the inner wall of the thickened retaining ring 203 is fitted with the top of the cover 110. During the installation process, before the cover 110 is installed, the cover frame 201 needs to be placed on the top of the cover 110. The threaded groove 202 on the inner wall is used to rotate and tighten the cover frame 201 with the top of the cover 110 to complete the installation and keep the top closed. Through this threaded detachable structure, the cover frame 201 can be removed and installed, which provides convenience for the cleaning process of the overall shielding cover after disassembly. In addition, the thickened retaining ring 203 can provide a ring structure support when the cover frame 201 is threadedly connected to the top of the cover 110, further improving the stability of the cover structure.

[0022] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A magnetron sputtering shield, comprising a quick-release shield body (1), characterized in that, The top of the quick-release cover body (1) is threaded with a cap (2). The quick-release cover body (1) includes a base frame (101). Pre-installation frames (102) are fixed to the four periphery of the base frame (101). The inner walls of the base frame (101) are provided with mounting grooves (103), and the inner walls of the mounting grooves (103) are provided with engaging grooves (104). A pin (105) is inserted in one set of engaging grooves (104). Engaging blocks (106) are symmetrically distributed on the upper and lower sides of the engaging grooves (104). The top surfaces of the engaging blocks (106) are on both sides. A sliding roller (107) is connected to the shaft. Sliding grooves (108) are provided at both ends of the clamping block (106). Springs (109) are connected to both sides of the bottom surface of the clamping block (106). A cover (110) is clamped to the inner wall of the mounting groove (103). A handle (111) is fixed to the outer wall of the cover (110). A clamping plate frame (112) is fixed to the bottom of the cover (110). A positioning groove (113) is provided on one side of the clamping plate frame (112). A pin hole (114) is provided in the center of one set of clamping plate frames (112).

2. The magnetron sputtering shield according to claim 1, characterized in that, The cover (110) engages with the mounting groove (103) on the top surface of the base frame (101) via the clamping plate frame (112) around the bottom end, and the engaging groove (104) is equidistantly arranged around the inner wall of the mounting groove (103).

3. The magnetron sputtering shield according to claim 1, characterized in that, The card holder (112) engages with the inner wall of the engagement groove (104), and the engagement groove (104) is engaged with the card holder (112) by the upper and lower aligned card blocks (106).

4. The magnetron sputtering shield according to claim 1, characterized in that, The locking block (106) forms an elastic telescopic structure with the locking groove (104) through the spring (109), and the locking block (106) slides and engages with the locking groove (104) through the sliding grooves (108) at both ends.

5. The magnetron sputtering shield according to claim 1, characterized in that, The end of the card block (106) is sloping on both sides, and the sliding rollers (107) are arranged obliquely along both sides of the end of the card block (106).

6. The magnetron sputtering shield according to claim 1, characterized in that, The cover (2) includes a cover frame (201), the bottom of the inner wall of the cover frame (201) is provided with a threaded groove (202), the bottom of the threaded groove (202) is fitted with a thickened retaining ring (203), and the inner wall of the thickened retaining ring (203) is fitted with the top of the cover (110).

7. The magnetron sputtering shield according to claim 6, characterized in that, The cover frame (201) forms a detachable structure with the cover body (110) through the threaded groove (202), and the thickened retaining ring (203) is fixedly connected to the bottom end of the cover frame (201).

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