High-efficiency heating and radiating integrated heater

Abstract

The utility model relates to a kind of high-efficiency heating and heat dissipation integrated novel heater, belong to the field of heater.The heater includes heating cover, is combined from upper part dome structure and lower part cylinder structure;Base table, it is attached to the lower end of the heating cover, and the top outer wall of base table is symmetrically and throughly opened with two groups of cylindrical mounting slots;Gas supply pipe, fixedly installed in the upper end of the heating cover, and the internal space of gas supply pipe and heating cover is through;Wherein, the inside of the heating cover is provided with heating control component, and the top of the base table is provided with plating resistance component.By setting heating control component in heating cover, jacketed heating structure and annular heat spreader, cooperate honeycomb structure heat storage tank, effectively improve the heat conduction and energy storage capacity, so that the temperature inside heating cavity can realize balanced distribution in the process of temperature rise, avoid local overheating or temperature gradient too large caused by plating uneven.

Description

Technical Field

[0001] This utility model relates to heaters, and in particular to a novel heater that integrates high-efficiency heating and heat dissipation. Background Technology

[0002] CVD (Chemical Vapor Deposition) is a technology that uses chemical reactions of gases to deposit thin films on the surface of objects. It is widely used in semiconductors, tool coatings, and optical devices. This process usually needs to be carried out in a high-temperature environment. By heating the reaction gases, they are decomposed or combined, thereby forming a uniform and dense film on the surface of the substrate. The heater is an important guarantee for the efficient coating of CVD technology.

[0003] However, existing heaters generally use heating wires to raise the temperature directly when heating devices, which makes it difficult to balance the temperature of the entire chamber inside the heating cavity. In addition, existing heaters require the device to be left to cool down after use before the coated devices inside the device can be removed, resulting in a long cooling cycle. Therefore, there is an urgent need for a new type of heater that integrates high-efficiency heating and heat dissipation. Summary of the Invention

[0004] Therefore, it is necessary to provide a new type of heater that integrates efficient heating and heat dissipation, addressing the problems of existing heaters in terms of difficulty in evenly heating the internal temperature of the heating chamber and the long cooling cycle after the device is used.

[0005] The novel high-efficiency heating and heat dissipation integrated heater provided by this utility model includes: The heating cover is composed of an upper dome structure and a lower cylindrical structure. The base support is fitted to the lower end of the heating cover, and two sets of cylindrical mounting grooves are symmetrically opened through the outer wall of the top of the base support. An air supply pipe is fixedly installed at the upper end of the heating cover, and the air supply pipe is in communication with the internal space of the heating cover. The heating cover is equipped with a heating control component inside, a coating contact component is provided above the base platform, and an auxiliary heat dissipation component is provided on the outside of the heating cover.

[0006] In one embodiment, the heating control assembly includes a heating wire and a power supply control module. The heating cover has a jacket inside its housing, the heating wire is installed inside the jacket, and a power supply control module for controlling the heating wire is fixedly installed on the outer side wall of the heating cover.

[0007] In one embodiment, an annular heat spreader is fixedly installed on the inner side wall of the heating cover, and a heat storage groove is circumferentially formed on the inner side wall of the annular heat spreader away from the heating cover, and the heat storage groove is configured as a honeycomb structure.

[0008] In one embodiment, the coating abutment assembly includes a positioning support, a limiting cylinder, an abutment spring, and a flexible convex ball. The positioning support is located directly above the base platform and has a flared structure. Four sets of U-shaped through grooves are circumferentially opened on the inner side wall of the positioning support, and four sets of limiting cylinders are fixedly installed on the inner side wall of the positioning support. A limiting piston rod is slidably installed inside the limiting cylinder, and an abutment spring is connected between the outer side wall of the limiting piston rod and the inner bottom wall of the limiting cylinder. The protruding end of the limiting piston rod is located outside the limiting cylinder, and a flexible convex ball is fixedly installed on the protruding end of the limiting piston rod.

[0009] In one embodiment, the top of the limiting cylinder has a limiting groove for sliding installation of the limiting piston rod, and a sealing ring is fixedly installed inside the limiting groove. The sealing ring has an "I" shaped cross-section, and the inner side wall of the sealing ring is in contact with the outer wall of the limiting piston rod.

[0010] In one embodiment, a boss seat is fixedly installed on the top outer wall of the base platform, a positioning threaded groove is formed through the bottom inner wall of the positioning support, and an alignment threaded groove is formed on the top outer wall of the boss seat. Fastening bolts are installed in the internal threads of the positioning threaded groove and the alignment threaded groove.

[0011] In one embodiment, the auxiliary heat dissipation assembly includes an annular outer ring, an annular chamber, an inlet pipe, and an outlet pipe. The annular outer ring is fixedly installed on the outer side wall of the heating cover at the annular surface position. The annular outer ring has an annular chamber inside. The inlet pipe and the outlet pipe are installed at staggered heights on the outer side wall of the annular outer ring at the annular surface position, and both the inlet pipe and the outlet pipe communicate with the internal space of the annular chamber.

[0012] In one embodiment, control valves are installed inside both the inlet pipe and the outlet pipe, and the rotating ends of the valve stems of both control valves are located outside the inlet pipe and the outlet pipe.

[0013] The aforementioned high-efficiency integrated heating and cooling heater effectively improves heat conduction and energy storage capacity by incorporating heating control components, a jacketed heating structure, and an annular heat spreader within the heating hood, along with a honeycomb structure heat storage tank. This allows for a uniform temperature distribution within the heating chamber during the heating process, preventing uneven coating caused by localized overheating or excessive temperature gradients. Simultaneously, an annular chamber-type auxiliary heat dissipation component is integrated on the outside of the heating hood, enabling rapid introduction of condensate for liquid cooling after the process, shortening the cooling cycle, and significantly improving the operating efficiency of the device and the overall stability of the coating process.

[0014] The coating contact assembly, through the coordinated design of positioning support, limiting cylinder, limiting piston rod, contact spring and flexible convex ball, can achieve multi-point elastic support during substrate placement, avoiding surface scratches or positional displacement of the substrate due to uneven force. At the same time, the damping fluid and overflow groove structure inside the limiting cylinder can provide a buffering and deceleration effect when the limiting piston rod moves under pressure, reducing component wear and extending the service life of the device. Simultaneously, the point support method enhances the overall coating contact area of ​​the device, so that the original bottom placement surface can also be well coated. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the overall three-dimensional structure of this utility model; Figure 2 This is a three-dimensional structural diagram of the heating cover and base platform of this utility model. Figure 3 This is a three-dimensional schematic diagram of the heating wire mounting structure in one embodiment; Figure 4 This is a schematic diagram of the three-dimensional structure of the annular heat spreader in one embodiment; Figure 5 This is a schematic diagram of the three-dimensional structure for installing the positioning support in one embodiment. Figure 6 As in one embodiment Figure 5 Enlarged 3D structural diagram at point A in the middle; Figure 7 A three-dimensional structural diagram of the mounting base and positioning support in one embodiment; Figure 8 This is a three-dimensional structural diagram of the heating cover and the annular outer ring in one embodiment.

[0017] Figure label: 1. Heating cover; 2. Base support; 3. Gas supply pipe; 4. Heating control assembly; 401. Jacket; 402. Heating wire; 403. Power supply control module; 404. Annular heat spreader; 405. Heat storage tank; 5. Coating contact assembly; 501. Positioning support; 502. U-shaped through groove; 503. Limiting cylinder; 504. Limiting piston rod; 505. Contact spring; 506. Sealing ring; 507. Flexible convex ball; 5001. Boss seat; 5002. Positioning threaded groove; 5003. Alignment threaded groove; 5004. Fastening bolt; 6. Auxiliary heat dissipation assembly; 601. Annular outer ring; 602. Annular chamber; 603. Liquid inlet pipe; 604. Liquid outlet pipe. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0019] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this specification are for illustrative purposes only and do not represent the only possible implementation.

[0020] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0021] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0022] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this specification belongs. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items.

[0023] The following is combined with Figures 1-8 This invention describes a novel heater that integrates high-efficiency heating and heat dissipation.

[0024] like Figures 1-4 As shown, in one embodiment, a novel high-efficiency heating and heat dissipation integrated heater includes: The heating cover 1 is composed of an upper dome structure and a lower cylindrical structure; The base support 2 is fitted to the lower end of the heating cover 1, and two sets of cylindrical mounting grooves are symmetrically opened through the outer wall of the top of the base support 2. The air supply pipe 3 is fixedly installed at the upper end of the heating cover 1, and the air supply pipe 3 is in communication with the internal space of the heating cover 1. The heating cover 1 is equipped with a heating control component 4.

[0025] The heating control assembly 4 includes a heating wire 402 and a power supply control module 403. The heating cover 1 has a jacket 401 inside its shell. The heating wire 402 is installed inside the jacket 401, and the power supply control module 403 for controlling the heating wire 402 is fixedly installed on the outer side wall of the heating cover 1.

[0026] An annular heat equalization plate 404 is fixedly installed on the inner side wall of the heating cover 1, and a heat storage groove 405 is provided on the circumferential inner side wall of the annular heat equalization plate 404 away from the heating cover 1. The heat storage groove 405 is configured as a honeycomb structure.

[0027] It should be noted that the gas supply pipe 3 needs to be connected to an external gas supply pipe in actual use in order to perform coating treatment on the substrate inside the device; the power supply control module 403 is set up to control the power supply status of the heating wire 402 and the heating temperature of the heating wire 402. The specific control method and the power supply control module 403 supply power are all existing conventional operating techniques and have not been improved, so they will not be described in detail here; at the same time, the heat storage tank 405 is set up to store the heat guided by the annular heat spreader 404, and setting it as a honeycomb structure enhances its energy storage effect in actual use.

[0028] In this embodiment, when it is necessary to control the heating wire 402 to heat the inside of the heating cover 1, the power supply control module 403 is directly driven to supply power to the heating wire 402. At the same time, the heating wire 402 is energized and heats up the inside of the heating cover 1 through heat transfer. The temperature area inside the device is balanced and uniform through the setting of the annular heat spreader 404 and the heat storage tank 405. The substrate is heated to the set temperature. After surface activation, the external precursor gas and carrier gas are sent to the inside of the heating cover 1 through the gas supply pipe 3. Then the gas undergoes a chemical reaction on the surface of the substrate to complete the coating process.

[0029] like Figures 1-2 , Figures 5-7 As shown, in one embodiment, a coated contact component 5 is disposed above the base 2.

[0030] The coating contact assembly 5 includes a positioning support 501, a limiting cylinder 503, a contact spring 505, and a flexible convex ball 507. The positioning support 501 is located directly above the base platform 2 and has a flared structure. Four sets of U-shaped through grooves 502 are circumferentially opened on the inner side wall of the positioning support 501, and four sets of limiting cylinders 503 are fixedly installed on the inner side wall of the positioning support 501. A limiting piston rod 504 is slidably installed inside the limiting cylinder 503, and a contact spring 505 is connected between the outer side wall of the limiting piston rod 504 and the inner bottom wall of the limiting cylinder 503. The protruding end of the limiting piston rod 504 is located outside the limiting cylinder 503, and a flexible convex ball 507 is fixedly installed on the protruding end of the limiting piston rod 504.

[0031] The top of the limiting cylinder 503 has a limiting groove for sliding installation of the limiting piston rod 504, and a sealing ring 506 is fixedly installed inside the limiting groove. The sealing ring 506 has an "I" shaped cross section, and the inner side wall of the sealing ring 506 is in contact with the outer wall of the rod of the limiting piston rod 504.

[0032] The top outer wall of the base support 2 is fixedly installed with a boss seat 5001. The bottom inner wall of the positioning support 501 is provided with a positioning threaded groove 5002. The top outer wall of the boss seat 5001 is provided with a matching threaded groove 5003. The internal threads of the positioning threaded groove 5002 and the matching threaded groove 5003 are fitted with fastening bolts 5004.

[0033] It should be noted that the limiting cylinder 503 is filled with damping fluid, and the limiting piston rod 504 has an overflow groove circumferentially opened on the outer side wall of the piston plate. This design utilizes the incompressibility of the liquid to slow down and buffer the movement of the limiting piston rod 504, thereby extending the overall durability of the device.

[0034] In this embodiment, before coating, the substrate needs to be placed inside the device. During placement, the substrate is simply adjusted to a suitable position and pushed vertically downwards to the center of the four sets of flexible convex balls 507. This ensures accurate placement and that the four points formed by the flexible convex balls 507 provide stable support to the substrate. The flexible convex balls 507 automatically contract outwards under the pressure of the substrate, providing a certain space for placement. When the flexible convex balls 507 move, they automatically drive the limiting piston rod 504 to slide inside the limiting cylinder 503. When the spring 505 is compressed by the piston rod 504, the damping fluid in the limiting cylinder 503 moves from one side of the piston plate to the other side through the overflow groove under the compression of the piston rod 504. This process slows down and buffers the piston rod 504. When the spring 505 is compressed, it also generates a reaction force to push the piston rod 504 to move in the opposite direction. The reverse movement of the piston rod 504 will automatically push the flexible convex ball 507 to make tight contact with the side outer wall of the substrate, so as to complete the point and surface support limiting process of the substrate.

[0035] like Figure 1 and Figure 8 As shown, in one embodiment, an auxiliary heat dissipation component 6 is provided on the outer side of the heating cover 1.

[0036] The auxiliary heat dissipation assembly 6 includes an annular outer ring 601, an annular chamber 602, an inlet pipe 603, and an outlet pipe 604. The annular outer ring 601 is fixedly installed on the outer side wall of the heating cover 1 at the annular surface position. The annular outer ring 601 has an annular chamber 602 inside. The inlet pipe 603 and the outlet pipe 604 are installed at staggered heights on the outer side wall of the annular outer ring 601 at the annular surface position, and both the inlet pipe 603 and the outlet pipe 604 communicate with the internal space of the annular chamber 602.

[0037] Both the inlet pipe 603 and the outlet pipe 604 are equipped with control valves, and the rotating ends of the valve stems of both control valves are located on the outside of the inlet pipe 603 and the outlet pipe 604.

[0038] It should be noted that the inlet pipe 603 and the outlet pipe 604 need to be connected to external pipes in actual use so that condensate can be connected to cool the inside of the device.

[0039] In this embodiment, when the substrate needs to be cooled after coating, it is necessary to ensure that the heating control component 4 stops operating. Then, external condensate is sent into the annular chamber 602 through the inlet pipe 603. Note that the control valve inside the drain pipe 604 needs to be kept closed when the condensate is first introduced so that the condensate level in the annular chamber 602 is controlled at a specified level. Then, the control valve inside the drain pipe 604 is opened. In this way, the heat inside the device can be carried out through the circulation of condensate to achieve the effect of heat dissipation and cooling.

[0040] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0041] The above-described embodiments are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the appended claims.

Claims

1. A high-efficiency heating and cooling integrated novel heater, characterized in that, include: The heating cover is composed of an upper dome structure and a lower cylindrical structure. The base support is fitted to the lower end of the heating cover, and two sets of cylindrical mounting grooves are symmetrically opened through the top outer wall of the base support. An air supply pipe is fixedly installed at the upper end of the heating cover, and the air supply pipe is in communication with the internal space of the heating cover. The heating cover is equipped with a heating control component inside, a coating contact component is provided above the base platform, and an auxiliary heat dissipation component is provided on the outside of the heating cover.

2. The high efficiency heating and cooling integrated heater of claim 1, wherein The heating control assembly includes a heating wire and a power supply control module. The heating cover has a jacket inside its shell, the heating wire is installed inside the jacket, and a power supply control module for controlling the heating wire is fixedly installed on the outer side wall of the heating cover.

3. The high efficiency heating and cooling integrated heater of claim 1, wherein An annular heat-dissipating plate is fixedly installed on the inner side wall of the heating cover, and a heat storage groove is provided on the circumferential inner side wall of the annular heat-dissipating plate away from the heating cover. The heat storage groove is configured as a honeycomb structure.

4. The high efficiency heating and cooling integrated heater of claim 1, wherein, The coating contact assembly includes a positioning support, a limiting cylinder, a contact spring, and a flexible convex ball. The positioning support is located directly above the base platform and has a flared structure. Four U-shaped through grooves are circumferentially opened on the inner side wall of the positioning support, and four limiting cylinders are fixedly installed circumferentially on the inner side wall of the positioning support. A limiting piston rod is slidably installed inside the limiting cylinder, and a contact spring is installed between the outer side wall of the limiting piston rod and the inner bottom wall of the limiting cylinder. The protruding end of the limiting piston rod is located outside the limiting cylinder, and a flexible convex ball is fixedly installed on the protruding end of the limiting piston rod.

5. The high efficiency heating and cooling integrated heater of claim 4, wherein, The top of the limiting cylinder has a limiting groove for sliding installation of the limiting piston rod, and a sealing ring is fixedly installed inside the limiting groove. The sealing ring has an "I" shaped cross-section, and the inner side wall of the sealing ring is in contact with the outer wall of the limiting piston rod.

6. The high efficiency heating and cooling integrated heater of claim 4, wherein, A boss seat is fixedly installed on the top outer wall of the base support. A positioning threaded groove is opened through the bottom inner wall of the positioning support. A matching threaded groove is opened on the top outer wall of the boss seat. Fastening bolts are installed in the internal threads of the positioning threaded groove and the matching threaded groove.

7. The high efficiency heating and cooling integrated heater of claim 1, wherein, The auxiliary heat dissipation assembly includes an outer ring, an annular chamber, an inlet pipe, and an outlet pipe. The outer ring is fixedly installed on the outer side wall of the heating cover at the annular surface position. The annular chamber is located inside the outer ring. The inlet pipe and outlet pipe are installed at staggered heights on the outer side wall of the outer ring at the annular surface position, and both the inlet pipe and outlet pipe communicate with the internal space of the annular chamber.

8. The high efficiency heating and heat sink integrated novel heater of claim 7, wherein, Both the inlet pipe and the outlet pipe are equipped with control valves, and the rotating ends of the valve stems of both control valves are located on the outside of the inlet pipe and the outlet pipe.

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