A growth station assembly for synthesizing diamond

Abstract

The utility model provides a kind of for synthetic diamond's growth platform assembly, belong to chemical vapor deposition method preparation diamond technical field.Growth platform assembly includes growth base and water cooling platform, and water cooling platform is connected with outer tube, middle tube and inner tube, and the lower part of outer tube, middle tube and inner tube is connected with water collection block, and growth base is connected with the connecting rod that passes through inner tube downwards, and inner tube extends to below water collection block by passing through water collection block, and the outer portion of inner tube lower end and connecting rod is equipped with telescopic cover, and the upper end of telescopic cover is equipped with with inner tube outer circumferential surface sealing fixed upper connector, and the lower end of telescopic cover is equipped with with connecting rod outer circumferential surface sealing fixed lower connector.When lifting drive device controls connecting rod to move up and down, external air cannot enter between growth base and water cooling platform again by the gap between connecting rod and inner tube, and growth base can be moved to above water cooling platform, height adjustment range is larger, solve the problem that the movement stroke of growth base in prior art is limited, and growth base height adjustment is not conducive.

Description

Technical Field

[0001] This utility model relates to a growth stage assembly for synthesizing diamond, belonging to the field of diamond preparation technology by chemical vapor deposition. Background Technology

[0002] Microwave plasma chemical vapor deposition (MPCVD) is the preferred method for preparing high-quality single-crystal diamond. The temperature required for single-crystal diamond growth has a significant impact on the synthesis quality and efficiency. Controlling the temperature and uniformity during the synthesis of single-crystal diamond wafers is particularly important for the efficient preparation of high-quality single-crystal diamond.

[0003] The growth of single-crystal diamond is carried out on a growth stage assembly, which includes a water-cooled stage and a growth substrate. Traditionally, the growth substrate is a solid molybdenum stage. This type of growth substrate alters its overall temperature and heat dissipation distribution by adjusting its combination (integral, double-layer, triple-layer, or multi-layer configurations using high thermal conductivity copper as the bottom layer) and structural form (purely solid, or with a centrally located annular groove), thereby ensuring the temperature and uniformity of the single-crystal diamond wafer. This method introduces limitations to temperature control. Each temperature test requires a shutdown to adjust the growth substrate combination until a suitable combination is achieved. Furthermore, under high power and high pressure conditions (where the growth temperature of single-crystal diamond is far higher than the required process temperature), relying solely on the growth substrate to transfer heat to the water-cooled stage is insufficient for temperature control.

[0004] In response, Chinese invention patent application CN116695099A discloses a liftable MPCVD growth stage. This growth stage includes an upper sealing cover, a lower sealing plate, a lifting drive device, a first water-cooling assembly, and a second water-cooling assembly. A diamond growth stage is located on the top of the lower sealing plate, and a positioning ring for placing a molybdenum support is provided on the diamond growth stage. The lifting drive device is connected to the positioning ring to control its movement within a lifting channel. The first water-cooling assembly includes a first lifting water pipe and a second lifting water pipe nested from the outside in. The bottoms of the two lifting water pipes are connected to a first water nozzle sleeve (i.e., a first water collector), and the tops are respectively connected to a first cooling water inlet plate and a first cooling water outlet plate. A sealing water plate is located below the positioning ring. The first cooling water inlet plate divides the inner cavity of the sealing water plate into an upper first cooling water inlet chamber and a lower first cooling water outlet chamber.

[0005] The second water-cooling assembly includes a fourth cooling water pipe (outer pipe), a third cooling water pipe (middle pipe), and a connecting water pipe (inner pipe) nested from the outside in. The lower ends of the three water pipes are connected to the second water nozzle sleeve (second water collector), and the upper ends are respectively connected to the second cooling water outlet plate, the second cooling water inlet plate, and the diamond growth stage. The second cooling water inlet plate divides the inner cavity of the diamond growth stage into an upper second cooling water inlet cavity and a lower second cooling water outlet cavity. The annulus between the fourth and third cooling water pipes communicates with the second cooling water outlet cavity, and the annulus between the third cooling water pipe and the connecting water pipe communicates with the second cooling water inlet cavity. The first lifting water pipe passes through the connecting water pipe and its lower end is connected to the first water nozzle sleeve. A lifting drive device is connected below the first water nozzle sleeve.

[0006] The aforementioned positioning ring, sealing water plate, first cooling water inlet plate, and first cooling water outlet plate constitute the growth stage for placing the molybdenum support (i.e., molybdenum stage). The diamond growth stage, second cooling water inlet plate, and second cooling water outlet plate constitute the water-cooled stage. In use, the lower sealing plate and upper sealing cover form a reaction chamber for diamond growth. A vacuum is required inside the reaction chamber. Both the first and second water nozzle sleeves are located outside the reaction chamber. The aforementioned first lifting water pipe (i.e., the hollow connecting rod) needs to move the growth stage up and down. It must have a clearance fit with the second water nozzle sleeve. Therefore, outside air will enter the space between the growth stage and the water-cooled stage through this gap and the annular space between the first lifting water pipe and the connecting water pipe. To maintain the vacuum environment inside the reaction chamber, the upper limit of the sealing water plate's movement must be limited, ensuring that the sealing water plate always maintains a sealed fit with the lifting channel. This limits the movement stroke of the growth stage, hindering the adjustment of the growth stage's height. Utility Model Content

[0007] The purpose of this invention is to provide a growth stage assembly for synthetic diamond, which solves the problem in the prior art that outside air can enter between the growth stage and the water cooling stage through the gap between the connecting rod and the water block, thus restricting the movement of the growth stage and hindering the height adjustment of the growth stage.

[0008] To achieve the above objectives, the growth stage assembly for synthesizing diamond in this utility model adopts the following technical solution: A growth stage assembly for synthesizing diamond includes a growth stage and a water-cooled stage. The water-cooled stage has an upper cooling chamber and a lower cooling chamber. An outer tube, a middle tube, and an inner tube, extending downwards and nested from the outside to the inside, are connected to the water-cooled stage. The annular space between the outer tube and the middle tube communicates with the lower cooling chamber, and the annular space between the middle tube and the inner tube communicates with the upper cooling chamber. A water collector is connected to the lower part of the outer tube, the middle tube, and the inner tube. A connecting rod is connected to the growth stage, passing downwards through the inner tube and used to connect to a lifting drive device. The inner tube extends through the water collector to below the water collector. A telescopic cover is provided on the lower end of the inner tube and the outer surface of the connecting rod. The upper end of the telescopic cover has an upper connector that is sealed and fixed to the outer circumferential surface of the inner tube, and the lower end of the telescopic cover has a lower connector that is sealed and fixed to the outer circumferential surface of the connecting rod.

[0009] The beneficial effects of the above technical solution are as follows: This utility model is an improved invention, which further limits the inner tube, extending it through the water collector to below it. A retractable telescopic cover is added, covering the lower end of the inner tube and the outside of the connecting rod. The upper end of the telescopic cover has an upper joint that seals and fixes to the outer circumference of the inner tube, and the lower end of the telescopic cover has a lower joint that seals and fixes to the outer circumference of the connecting rod. This seals the gap between the connecting rod and the inner tube. Thus, when the lifting drive device controls the connecting rod and the growth platform to move up and down, outside air can no longer enter between the growth platform and the water-cooling platform through the gap between the connecting rod and the inner tube. Consequently, the growth platform can move completely above the water-cooling platform, resulting in a wider height adjustment range. This solves the problem in the prior art where the movement stroke of the growth platform is limited, hindering height adjustment.

[0010] Furthermore, the upper connector includes an upper collar fixed to the upper end of the telescopic cover and sleeved on the outside of the inner tube, an upper nut cap sleeved on the outside of the inner tube and threaded to the upper part of the upper collar, and an upper sealing ring disposed at the upper end orifice of the upper collar and pressed by the upper nut cap to be in close contact with the outer circumferential surface of the inner tube.

[0011] Furthermore, the upper end opening of the upper collar is funnel-shaped.

[0012] Furthermore, the lower connector includes a lower collar fixed to the lower end of the telescopic cover and sleeved on the outside of the connecting rod, a lower nut cap sleeved on the outside of the connecting rod and threaded to the lower part of the lower collar, and a lower sealing ring located at the lower end opening of the lower collar and pressed by the lower nut cap to be in close contact with the outer circumferential surface of the connecting rod.

[0013] Furthermore, the lower end opening of the lower collar is trumpet-shaped.

[0014] Furthermore, the telescopic cover is a corrugated pipe.

[0015] Furthermore, the water-cooled platform is provided with an upward-facing upper groove, the inner diameter of which is adapted to the outer diameter of the growth substrate, so that when the growth substrate moves downward to its limit position, the bottom surface can contact the bottom wall of the upper groove.

[0016] Furthermore, the growth platform is provided with an upper cavity and a lower cavity for the flow of coolant. The connecting rod includes a hollow inner connecting rod and an outer connecting rod nested inside and outside. The inner connecting rod is connected to the upper cavity, and the annular space between the inner connecting rod and the outer connecting rod is connected to the lower cavity. The lower connector is sealed and fixed to the outer circumferential surface of the outer connecting rod. The water collector connected to the lower part of the outer tube, the middle tube and the inner tube is the upper water collector. The lower part of the inner connecting rod and the outer connecting rod is connected to the lower water collector, and the lower water collector is connected to a lifting drive device.

[0017] Furthermore, the bottom surface of the drain block is provided with a bottom threaded hole, and the top output end of the lifting drive device is provided with a screw, which is connected to the bottom threaded hole.

[0018] Furthermore, the side of the drain block is provided with a side threaded hole that communicates with the bottom threaded hole, and a tightening screw for tightening the screw is installed in the side threaded hole. Attached Figure Description

[0019] Figure 1 This is a usage diagram of the growth stage assembly for synthesizing diamond according to this utility model; Figure 2 This is a perspective view of an embodiment of the growth stage assembly for synthesizing diamond according to this utility model; Figure 3 This is a front sectional view of the water-cooled stage assembly and the upper water collector in the embodiment of the growth stage assembly for synthetic diamond of this utility model. Figure 4 This is a front sectional view of the growth platform assembly, water collection block, and lifting motor in the embodiment of the growth platform assembly for synthetic diamond of this utility model. Figure 5 This is a structural diagram of the sealing device in the embodiment of the growth stage assembly for synthetic diamond of this utility model.

[0020] In the diagram: 1. Cavity; 2. Cavity base plate; 3. Water-cooled stage assembly; 3-1. Copper disk; 3-2. Water distribution plate; 3-3. Antenna disk; 3-4. Sealing groove; 3-5. Fastening screw; 3-6. First sealing ring; 3-7. Inner tube; 3-8. Middle tube; 3-9. Outer tube; 4. Growth stage assembly; 4-1. Upper stage; 4-2. Middle stage; 4-3. Lower stage; 4-4. Second sealing ring; 4-5. Beryllium copper spiral tube; 4-6 1. Inner connecting rod; 4-7. Outer connecting rod; 5. Quartz ring; 6. Molybdenum platform; 7. Mode converter; 8. Spring; 9. Threaded retainer assembly; 10. Mounting frame; 10-1. Retaining ring; 11. Water inlet block; 11-1. First upper block; 11-2. First lower block; 11-3. First plug; 11-4. First nut cap; 11-5. First sealing ring; 11-6. Third sealing ring; 11-7. Fourth seal 11-8, Fifth sealing ring; 11-9, First lower connector; 11-10, First upper connector; 12, Drain collector; 12-1, Second upper block; 12-2, Second lower block; 12-2-1, Side threaded hole; 12-3, Second plug; 12-4, Second nut cap; 12-5, Second sealing ring; 12-6, Sixth sealing ring; 12-7, Outer sealing ring; 12-8, Inner sealing ring; 12-9. 12-10 Second lower connector; 12-11 Second upper connector; 12-11 Connecting bolt; 13 Sealing device; 13-1 Telescopic cover; 13-2 Upper collar; 13-3 Upper nut cap; 13-4 Upper sealing ring; 13-5 Lower collar; 13-6 Lower nut cap; 13-7 Lower sealing ring; 14 Lifting motor; 15 Displacement sensor; 16 Clamp; 17 Round flange; 18 Fixing bolt; 19 Base plate. Detailed Implementation

[0021] To address the technical problems existing in the prior art, the basic concept of this utility model is to set a sealing device at the lower end of the inner tube and outside the connecting rod. By sealing the gap between the connecting rod and the inner tube, outside air can no longer enter between the growth stage and the water-cooling stage through the gap between the connecting rod and the inner tube, thereby making the height adjustment range of the growth stage larger.

[0022] The features and performance of this utility model will be further described in detail below with reference to the embodiments.

[0023] The embodiment of the growth stage assembly (hereinafter referred to as the growth stage assembly) for synthesizing diamond in this utility model is as follows: like Figure 1 and Figure 2 As shown, the growth stage assembly includes a water-cooled stage assembly 3 and a growth substrate assembly 4. The water-cooled stage assembly 3 includes a water-cooled stage and a connecting pipe extending downward from the water-cooled stage. The water-cooled stage has an upper cooling chamber and a lower cooling chamber. Figure 3As shown, the aforementioned connecting pipe includes an outer pipe 3-9, a middle pipe 3-8, and an inner pipe 3-7 nested from the outside to the inside. The annulus between the outer pipe 3-9 and the middle pipe 3-8 is connected to the lower cooling chamber, and the annulus between the middle pipe 3-8 and the inner pipe 3-7 is connected to the upper cooling chamber. The lower parts of the outer pipe 3-9, the middle pipe 3-8, and the inner pipe 3-7 are connected to an upper water collector 11, and the inner pipe 3-7 extends through the upper water collector 11 to the bottom of the upper water collector 11.

[0024] The growth stage assembly 4 includes a growth stage and a connecting rod that is connected to the growth stage and extends downward. The connecting rod passes downward through the inner tube 3-7 and is used to connect to the lifting drive device. Specifically, in this embodiment, as shown... Figure 4 As shown, the connecting rod includes a hollow inner connecting rod 4-6 and an outer connecting rod 4-7 nested together. The growth base has an upper chamber and a lower chamber for coolant flow. The inner connecting rod 4-6 communicates with the upper chamber, and the annular space between the inner connecting rod 4-6 and the outer connecting rod 4-7 communicates with the lower chamber. The lower part of the inner connecting rod 4-6 and the outer connecting rod 4-7 is connected to a drain block 12, which is connected to the aforementioned lifting drive device. That is, in this embodiment, the connecting rod is indirectly connected to the lifting drive device through the drain block 12. In other embodiments, the growth base can be a solid platform without a chamber for coolant flow. That is, the growth base itself does not have a cooling function and is cooled by a water-cooled platform. In this case, the connecting rod is a single solid rod, and its lower end can be directly connected to the lifting drive device after passing through the inner tube 3-7.

[0025] Combination Figure 1 , Figure 2 and Figure 5 As shown, the growth stage assembly also includes a sealing device 13. Specifically, the sealing device 13 includes a telescopic cover 13-1 that covers the lower end of the inner tube 3-7 and the outer connecting rod 4-7 and is telescopic. The upper end of the telescopic cover 13-1 is provided with an upper connector that is sealed and fixed to the outer circumferential surface of the inner tube 3-7, and the lower end of the telescopic cover 13-1 is provided with a lower connector that is sealed and fixed to the outer circumferential surface of the outer connecting rod 4-7 (in other embodiments, if the connecting rod is a single solid rod, the telescopic cover 13-1 covers the lower end of the inner tube 3-7 and the solid rod, and the lower connector is sealed and fixed to the outer circumferential surface of the solid rod), thereby sealing the gap between the outer connecting rod 4-7 and the inner tube 3-7. When the lifting drive device controls the linkage and growth substrate to move up and down, the telescopic cover 13-1 extends and retracts accordingly. Outside air can no longer enter between the growth substrate and the water-cooling stage through the gap between the outer linkage 4-7 and the inner tube 3-7, ensuring the vacuum tightness of the interlayer formed by the inner circumference of the inner tube 3-7 and the outer circumference of the outer linkage 4-7. This, in turn, ensures the vacuum tightness inside the MPCVD chamber during the lifting and lowering of the growth substrate. With this configuration, the growth substrate can be moved completely above the water-cooling stage, providing a wider height adjustment range and solving the problem of limited movement of the growth substrate in existing technologies, which hinders height adjustment.

[0026] Furthermore, in this embodiment, the upper connector includes an upper collar 13-2 fixed to the upper end of the telescopic cover 13-1 and sleeved on the outside of the inner tube 3-7; an upper nut cap 13-3 sleeved on the outside of the inner tube 3-7 and threadedly connected to the upper part of the upper collar 13-2; and an upper sealing ring 13-4 located at the upper end opening of the upper collar 13-2 and pressed against the outer circumferential surface of the inner tube 3-7 by the upper nut cap 13-3. That is, the upper collar 13-2 has external threads, and the upper nut cap 13-3 includes an upper sleeve body with internal threads and an upper end plate located at the upper end of the upper sleeve body, with the upper sleeve body threadedly connected to the upper collar 13-2. When the upper nut cap 13-3 is tightened, the upper end plate presses down on the upper sealing ring 13-4. Through the tight contact between the upper sealing ring 13-4 and the outer circumference of the inner tube 3-7, both a seal between the upper connector and the inner tube 3-7 is achieved, and a fixed connection between the upper connector and the inner tube 3-7 is achieved through static friction. This structure facilitates the installation of the upper connector and the sealing and fixing between the upper connector and the inner tube 3-7. Of course, there are fitting clearances between the inner holes of the upper collar 13-2 and the upper nut cap 13-3 and the inner tube 3-7 to facilitate the installation of the upper collar 13-2 and the upper nut cap 13-3, as well as the rotation of the upper nut cap 13-3.

[0027] Meanwhile, the lower connector in this embodiment includes a lower collar 13-5 fixed to the lower end of the telescopic cover 13-1 and sleeved on the outside of the outer connecting rod 4-7; a lower nut cap 13-6 sleeved on the outside of the outer connecting rod 4-7 and threadedly connected to the lower part of the lower collar 13-5; and a lower sealing ring 13-7 located at the lower end opening of the lower collar 13-5 and pressed against the outer circumferential surface of the outer connecting rod 4-7 by the lower nut cap 13-6. That is, the lower collar 13-5 has external threads on its outside, and the lower nut cap 13-6 includes a lower sleeve body with internal threads and a lower end plate located at the lower end of the lower sleeve body, with the lower sleeve body threadedly connected to the lower collar 13-5. When the lower nut cap 13-6 is tightened, the lower end plate presses upward against the lower sealing ring 13-7. The tight contact between the lower sealing ring 13-7 and the outer connecting rod 4-7 achieves both sealing between the lower connector and the outer connecting rod 4-7 and a fixed connection between them through static friction. This structure facilitates the installation of the lower connector and the sealing and fixing between the lower connector and the outer connecting rod 4-7. Of course, the inner holes of the lower collar 13-5 and the lower nut cap 13-6 have fitting clearances with the outer connecting rod 4-7 to facilitate the installation of the lower collar 13-5 and the lower nut cap 13-6, as well as the rotation of the lower nut cap 13-6.

[0028] In other embodiments, the upper connector can be a clamp structure, including a two-part clamping ring. The two halves of the clamping ring clamp and fix the upper end of the telescopic cover 13-1 to the outer circumferential surface of the inner tube 3-7, achieving both sealing and fixation. Alternatively, an upper sealing ring can be provided between the telescopic cover 13-1 and the inner tube 3-7 to improve the sealing effect. Similarly, in other embodiments, the lower connector can be a clamp structure, including a two-part clamping ring. The two halves of the clamping ring clamp and fix the lower end of the telescopic cover 13-1 to the outer circumferential surface of the outer connecting rod 4-7, achieving both sealing and fixation. Alternatively, a lower sealing ring can be provided between the telescopic cover 13-1 and the outer connecting rod 4-7 to improve the sealing effect.

[0029] Furthermore, in this embodiment, the upper opening of the upper collar 13-2 is trumpet-shaped, i.e., conical, which facilitates the deformation of the upper sealing ring 13-4, resulting in a better effect of the upper sealing ring 13-4 squeezing the inner tube 3-7, thus improving the sealing and fixing connection effect. In other embodiments, the upper opening of the upper collar 13-2 can also be cylindrical.

[0030] Furthermore, in this embodiment, the lower end opening of the lower collar 13-5 is funnel-shaped, i.e., conical, which facilitates the deformation of the lower sealing ring 13-7, resulting in a better effect of the lower sealing ring 13-7 pressing against the outer connecting rod 4-7, thereby improving the sealing and fixing connection effect. In other embodiments, the lower end opening of the lower collar 13-5 may also be cylindrical.

[0031] Furthermore, in this embodiment, the telescopic cover 13-1 is a corrugated pipe with good deformability. In other embodiments, it can also be a rubber sleeve with a bulge in the middle, which is similar to a folded part. This part determines the amount of expansion and contraction of the rubber sleeve. In this case, the overall structure of the sealing device is similar to the clamp-type flexible pipe joint in the prior art.

[0032] like Figure 1 and Figure 2 As shown, the top surface of the growth stage is used to place the molybdenum stage 6, on which single-crystal diamond is grown. The main bodies of the water-cooled stage assembly 3 and the growth stage assembly 4 are located inside the cavity 1 of the MPCVD equipment and mounted on the quartz ring 5. From top to bottom, the outside of the connecting pipe of the water-cooled stage assembly 3 is equipped with a mode converter 7, a spring 8, and a threaded retainer 9. The mode converter 7 is located below the cavity bottom plate 2, and the spring 8 is located between the mode converter 7 and the threaded retainer 9. The threaded retainer 9 is tightly mounted on the outer tube 3-9 by a retainer. By rotating the threaded sleeve, the spring 8 can be squeezed, thereby enabling the water-cooled stage assembly 3 to squeeze the quartz ring 5 and the cavity bottom plate 2, thus connecting them into one unit.

[0033] The lifting drive device is used to control the vertical movement of the lower water collection block 12 and the growth substrate assembly 4, changing the vertical height of the molybdenum stage 6 and the cooling effect of the water-cooled stage on the growth substrate. In this embodiment, the lifting drive device is a lifting motor 14; in other embodiments, a hydraulic cylinder or a pneumatic cylinder may also be used.

[0034] The growth platform assembly also includes a mounting frame 10, which is fixed in position relative to the cavity 1. The upper water collection block 11 is fixed on the top of the mounting frame 10, and the lifting motor 14 is fixed on the bottom of the mounting frame 10. The top output end of the lifting motor 14 is fixedly connected to the lower water collection block 12.

[0035] Specifically, such as Figure 4 As shown, the growth platform includes an upper platform 4-1, a middle platform 4-2, and a lower platform 4-3. The lower platform 4-3 is fixed to the upper platform 4-1 by fastening screws, and the middle platform 4-2 is clamped between the two. A second sealing ring 4-4 ​​is provided between the lower platform 4-3 and the upper platform 4-1 to ensure a seal between them. The upper platform 4-1 and the middle platform 4-2 form the upper cavity mentioned above. The upper end of the inner connecting rod 4-6 is connected to the center of the middle platform 4-2 to achieve communication with the upper cavity. The middle platform 4-2 and the lower platform 4-3 form the lower cavity mentioned above. The middle platform 4-2 is provided with a connecting hole connecting the upper cavity and the lower cavity. The outer connecting rod 4-7 is connected to the center of the lower platform 4-3 to achieve communication with the lower cavity.

[0036] Combination Figures 1-4 As shown, the water-cooled stage has an upward-facing upper groove. The inner diameter of the upper groove matches the outer diameter of the growth stage, allowing the bottom surface of the growth stage to contact the bottom wall of the groove when it moves downward to its extreme position. When assembling the water-cooled stage assembly 3 and the growth stage assembly 4, the outer connecting rod 4-7 and the inner connecting rod 4-6 pass through the inner tube 3-7, and the growth stage is placed into the upper groove of the water-cooled stage. A beryllium copper spiral tube 4-5 is installed on the outer periphery of the lower stage 4-3. The beryllium copper spiral tube 4-5 cooperates with the groove wall of the upper groove, serving to position and shield microwaves. Under the action of the upper groove, the growth stage sinks further relative to the surface of the water-cooled stage. This not only increases the possibility of matching the water-cooled stage surface with higher or more combinations of molybdenum stages, but also increases the contact area between the sunken growth stage and the water-cooled stage, resulting in better cooling. Of course, the growth stage can completely detach from the upper groove and move above the water-cooled stage, especially during the initial diamond growth stage. Later, as the temperature gradually increases, it can slowly descend back into the upper groove, allowing for a wider range of height adjustment for the growth stage. Of course, since the growth platform in this invention does not need to be sealed with the water cooling platform, in other embodiments, the upper groove may not be provided on the water cooling platform, and the top surface of the water cooling platform is flat. In this case, the growth platform can be moved down to contact the top surface of the water cooling platform.

[0037] like Figure 4As shown, the drain block 12 includes a drain block body and a second plug 12-3 that is sealed and fixedly connected to the upper end of the drain block body. The drain block body includes a second upper block 12-1 and a second lower block 12-2. The second plug 12-3 is threaded to the upper end opening of the second upper block 12-1. A sixth sealing ring 12-6 is provided at the mating surface between the second plug 12-3 and the second upper block 12-1 to achieve a seal between the two.

[0038] The lower end of the outer connecting rod 4-7 passes through the second plug 12-3 and extends into the second upper block 12-1. The second upper block 12-1 has a step, and the lower end of the outer connecting rod 4-7 extends into it until it abuts against the step. The top of the second plug 12-3 is threaded with a second nut cap 12-4, and the outer connecting rod 4-7 passes through the second nut cap 12-4. A second sealing ring 12-5 is provided between the upper end opening of the second plug 12-3 and the outer peripheral surface of the outer connecting rod 4-7. When the second nut cap 12-4 is tightened, the second nut cap 12-4 compresses the second sealing ring 12-5, achieving a seal between the second plug 12-3 and the outer connecting rod 4-7, preventing liquid in the drain manifold 12 from leaking out. At the same time, under the friction of the second sealing ring 12-5, a certain binding force is formed between the drain manifold 12 and the outer connecting rod 4-7.

[0039] The upper opening of the second plug 12-3 is a flared opening, so that as the second nut cap 12-4 is pressed down, the second sealing ring 12-5 is subjected to better pressure, and the sealing effect between it and the outer connecting rod 4-7 is better.

[0040] A clamp 16 is fixedly connected to the second nut cover 12-4 for clamping and fixing it to the outer connecting rod 4-7 after the second nut cover 12-4 is installed. After the second nut cover 12-4 is tightened to achieve a seal between the second sealing ring 12-5 and the outer connecting rod 4-7, the rigid connection between the clamp 16 and the outer connecting rod 4-7 indirectly fixes the drain block 12 to the outer connecting rod 4-7. Thus, when the lifting motor 14 drives the drain block 12 to move up and down, the drain block 12 can stably drive the outer connecting rod 4-7 to move up and down, preventing slippage of the connection position during the lifting process or water pressure fluctuations.

[0041] Below the second nut cap 12-4, a round flange 17 is fitted over the second plug 12-3. A clamp 16 is located above the second nut cap 12-4. The clamp 16 and the round flange 17 are fixedly connected by at least two fixing bolts 18 to clamp the second nut cap 12-4 between the clamp 16 and the round flange 17.

[0042] The clamp 16 comprises two separate clamping rings, which are fixedly connected by two locking bolts. During assembly, after the second nut cover 12-4 is installed, first tighten the fixing bolt 18 to give the two clamping rings and the round flange 17 an initial clamping force on the middle second nut cover 12-4, but not a complete clamping; otherwise, the position of the two clamping rings will be fixed, and the outer connecting rod 4-7 cannot be clamped. Then install the locking bolts, using the gap between the fixing bolt 18 and the bolt holes on the clamping rings to allow the two clamping rings to move relative to each other to clamp the outer circumference of the outer connecting rod 4-7. Of course, while installing, the fixing bolt 18 also needs to be tightened to ensure that the clamp 16 clamps the outer connecting rod 4-7, and the clamp 16 and the round flange 17 also clamp the second nut cover 12-4. Alternatively, the locking bolts can be tightened first to give the two clamping rings an initial clamping force on the outer connecting rod 4-7, but again, not a complete clamping; then the fixing bolt 18 can be installed, and the locking bolts tightened simultaneously.

[0043] Furthermore, combined Figure 1 , Figure 2 and Figure 4 As shown, a substrate 19 extending outwards is pressed between the bolt head of one of the fixing bolts 18 and the clamp 16. The growth stage assembly also includes a displacement sensor 15. A fixing ring 10-1 is provided on the mounting frame 10. The displacement sensor 15 is mounted on the fixing ring 10-1, and the measuring contact of the displacement sensor 15 presses against the substrate 19. Figure 2 (In the unassembled and unpressed state), when the growth platform moves up and down under the control of the lifting motor 14, the substrate 19 moves up and down accordingly, and the displacement sensor 15 can accurately record the values ​​of rising and falling.

[0044] like Figure 4 As shown, the lower end of the inner connecting rod 4-6 extends through the outer connecting rod 4-7, passes through the second upper block 12-1, and enters the second lower block 12-2. An inner sealing ring 12-8 is provided between the junction of the second upper block 12-1 and the second lower block 12-2 and the outer peripheral surface of the inner connecting rod 4-6. Both the second upper block 12-1 and the second lower block 12-2 have flanges, which are fixedly connected by connecting bolts 12-11. When fixed, the end faces of the two blocks press against the inner sealing ring 12-8 to achieve a seal between the two blocks and between the inner connecting rod 4-6 and the two blocks, preventing coolant in the second lower block 12-2 from entering the annulus between the inner connecting rod 4-6 and the outer connecting rod 4-7 through the gap between the inner connecting rod 4-6 and the two blocks.

[0045] An outer sealing ring 12-7 is also provided between the end faces of the second upper block 12-1 and the second lower block 12-2. The outer sealing ring 12-7 is coaxially arranged outside the inner sealing ring 12-8, further enhancing the sealing effect between the two blocks. In other embodiments, only the inner sealing ring 12-8 may be provided, and the outer sealing ring 12-7 may not be provided.

[0046] The second upper block 12-1 is equipped with a second upper connector 12-10 communicating with the annular space between the inner connecting rod 4-6 and the outer connecting rod 4-7. The second lower block 12-2 is equipped with a second lower connector 12-9 communicating with the inner connecting rod 4-6. The second lower connector 12-9 serves as a water inlet connector, and the second upper connector 12-10 serves as a water outlet connector. This allows coolant to enter the inner connecting rod 4-6 through the second lower connector 12-9, then flow upwards into the upper cavity of the growth stage. The coolant flows from the center to the outer periphery and along the connecting hole on the middle platform 4-2 into the lower cavity. After converging at the center, it flows downwards along the annular space between the inner connecting rod 4-6 and the outer connecting rod 4-7 to the lower water collector 12, and finally flows through the second upper connector 12-10 to the external cooling system, thus cooling the growth stage. In other embodiments, the second lower connector 12-9 can also serve as a water outlet connector, in which case the second upper connector 12-10 serves as a water inlet connector.

[0047] The bottom surface of the second lower block 12-2 is provided with a bottom threaded hole. The lifting drive device includes a screw rod connected to the bottom threaded hole, that is, the top output end of the lifting motor 14 is the screw rod, and the screw rod is connected to the bottom threaded hole. At the same time, a side threaded hole 12-2-1 is provided on the side of the second lower block 12-2, which is perpendicularly connected to the bottom threaded hole. A tightening screw is installed in the side threaded hole 12-2-1 to tighten the screw rod, so as to prevent the connection between the lifting motor 14 and the drain block 12 from loosening, and also to adjust the position of the screw rod screwed into the bottom threaded hole. In other embodiments, the screw rod can be connected only by the bottom threaded hole, and the side threaded hole 12-2-1 is not provided. In other embodiments, depending on the specific form of the output end of the lifting drive device, there may be other connection methods between the lifting drive device and the drain block 12. For example, when the output end of the lifting drive device is a connecting plate, the connecting plate can be attached to the bottom surface of the drain block 12 and the two can be fixed by screws. Alternatively, a fixing stud can be welded to the bottom surface of the drain block 12. In this case, a through hole is provided on the connecting plate for the stud to pass through, and then a nut is used to fix the output end of the lifting drive device and the drain block 12.

[0048] like Figure 3As shown, the water-cooled platform includes a copper disk 3-1, a water distribution plate 3-2, and an antenna disk 3-3. A sealing groove 3-4 is provided on the bottom surface of the copper disk 3-1 to achieve a seal with the quartz ring 5. The aforementioned upper groove is formed on the copper disk 3-1, which also has a downward-facing lower groove. The lower groove is a stepped groove, and the water distribution plate 3-2 is located within the stepped groove. The antenna disk 3-3 is fixed to the copper disk 3-1 by fastening screws 3-5, pressing the water distribution plate 3-2 between them. A first sealing ring 3-6 is provided between the antenna disk 3-3 and the copper disk 3-1 to achieve a seal.

[0049] The water distribution plate 3-2 and the antenna disk 3-3 form a lower cooling chamber, and the water distribution plate 3-2 and the copper disk 3-1 form an upper cooling chamber. The water distribution plate 3-2 has a connecting hole near its outer circle that connects the upper cooling chamber and the lower cooling chamber. The inner tube 3-7 (i.e., the copper disk connector) is connected to the center of the copper disk 3-1 and communicates with the upper groove. The middle tube 3-8 (i.e., the water distribution plate connector) is connected to the center of the water distribution plate 3-2 and communicates with the upper cooling chamber. The outer tube 3-9 (i.e., the antenna disk connector) is connected to the center of the antenna disk 3-3 and communicates with the lower cooling chamber.

[0050] The water supply manifold 11 includes a water supply manifold body and a first plug 11-3 that is sealed and fixedly connected to the lower end of the water supply manifold body. The water supply manifold body includes a first upper block 11-1 and a first lower block 11-2. The lower end of the outer pipe 3-9 extends into the first upper block 11-1 and is threadedly connected to the first upper block 11-1. A fifth sealing ring 11-8 is provided between the lower end face of the outer pipe 3-9 and the first upper block 11-1 to achieve a seal between the two.

[0051] The first upper block 11-1 and the first lower block 11-2 are connected by a threaded fit. The lower end of the middle tube 3-8 passes through the outer tube 3-9 and through the first upper block 11-1 into the first lower block 11-2. A fourth sealing ring 11-7 is provided between the junction of the first upper block 11-1 and the first lower block 11-2 and the outer circumferential surface of the middle tube 3-8. In this way, when the first upper block 11-1 and the first lower block 11-2 are tightened, both the two can be fixedly connected and sealed between them. At the same time, the middle tube 3-8 is sealed with the two blocks, preventing the annulus between the inner tube 3-7 and the middle tube 3-8 from communicating with the annulus between the middle tube 3-8 and the outer tube 3-9.

[0052] The first plug 11-3 is threaded to the lower end hole of the first lower block 11-2. A third sealing ring 11-6 is provided between the first plug 11-3 and the lower end face of the first lower block 11-2 to achieve a seal between the two.

[0053] The inner tube 3-7 extends out of the middle tube 3-8 and through the first plug 11-3. The lower part of the first plug 11-3 is threadedly connected to the first nut cap 11-4. The inner tube 3-7 passes through the first nut cap 11-4 and extends below the first nut cap 11-4. A first sealing ring 11-5 is provided between the lower end opening of the first plug 11-3 (which is also a flared opening) and the outer circumference of the inner tube 3-7. When the first nut cap 11-4 is tightened, the first nut cap 11-4 compresses the first sealing ring 11-5, thereby achieving a seal between the first plug 11-3 and the inner tube 3-7, preventing the liquid in the annular space between the inner tube 3-7 and the middle tube 3-8 from leaking outward.

[0054] The first lower block 11-2 is equipped with a first lower connector 11-9 that communicates with the annulus between the inner tube 3-7 and the middle tube 3-8. The first upper block 11-1 is equipped with a first upper connector 11-10 that communicates with the annulus between the middle tube 3-8 and the outer tube 3-9. In this embodiment, the first lower connector 11-9 is a water inlet connector and the first upper connector 11-10 is a water outlet connector, so that the coolant enters the annulus between the inner tube 3-7 and the middle tube 3-8 through the first lower connector 11-9, and then flows upward to the upper cooling chamber inside the water-cooled platform. The coolant disperses from the center to the surrounding area and flows into the lower cooling chamber along the connecting holes on the water distribution plate 3-2. After the coolant gathers from the surrounding area to the center, it flows downward along the annulus between the middle tube 3-8 and the outer tube 3-9 to the upper water collector 11, and finally flows to the external cooling system through the first upper connector 11-10 to achieve cooling of the water-cooled platform. In other embodiments, the first lower connector 11-9 can also be a water outlet connector, in which case the first upper connector 11-10 is a water inlet connector.

[0055] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. The patent protection scope of the present utility model shall be determined by the claims. Similarly, any equivalent structural changes made based on the description and drawings of the present utility model shall also be included within the protection scope of the present utility model.

Claims

1. A growth stage assembly for synthesizing diamond, comprising a growth stage and a water-cooled stage, wherein the water-cooled stage has an upper cooling chamber and a lower cooling chamber, and an outer tube, a middle tube, and an inner tube extending downwards and nested from the outside to the inside are connected to the water-cooled stage; the annular space between the outer tube and the middle tube communicates with the lower cooling chamber, and the annular space between the middle tube and the inner tube communicates with the upper cooling chamber; a water collector is connected to the lower part of the outer tube, the middle tube, and the inner tube; and a connecting rod passing downwards through the inner tube and used to connect a lifting drive device is connected to the growth stage, characterized in that... The inner tube extends through the water collector to below it. The lower end of the inner tube and the outer cover of the connecting rod are equipped with a telescopic cover. The upper end of the telescopic cover is equipped with an upper joint that is sealed and fixed to the outer circumference of the inner tube, and the lower end of the telescopic cover is equipped with a lower joint that is sealed and fixed to the outer circumference of the connecting rod.

2. The growth stage assembly for synthesizing diamond according to claim 1, characterized in that, The upper connector includes an upper collar fixed to the upper end of the telescopic cover and sleeved on the outside of the inner tube, an upper nut cap sleeved on the outside of the inner tube and threaded to the upper part of the upper collar, and an upper sealing ring located at the upper end orifice of the upper collar and pressed by the upper nut cap to make tight contact with the outer circumferential surface of the inner tube.

3. The growth stage assembly for synthesizing diamond according to claim 2, characterized in that, The upper end of the upper collar has a funnel-shaped opening.

4. The growth stage assembly for synthesizing diamond according to any one of claims 1 to 3, characterized in that, The lower connector includes a lower collar fixed to the lower end of the telescopic cover and sleeved on the outside of the connecting rod, a lower nut cap sleeved on the outside of the connecting rod and threaded to the lower part of the lower collar, and a lower sealing ring located at the lower end opening of the lower collar and pressed by the lower nut cap to make tight contact with the outer circumferential surface of the connecting rod.

5. The growth stage assembly for synthesizing diamond according to claim 4, characterized in that, The lower end of the lower collar has a funnel-shaped opening.

6. The growth stage assembly for synthesizing diamond according to claim 1, 2, 3, or 5, characterized in that, The telescopic cover is a corrugated pipe.

7. The growth stage assembly for synthesizing diamond according to claim 1, 2, 3, or 5, characterized in that, The water-cooled platform has an upward-facing groove. The inner diameter of the groove is matched with the outer diameter of the growth substrate so that the bottom surface of the growth substrate can contact the bottom wall of the groove when it moves downward to its limit position.

8. The growth stage assembly for synthesizing diamond according to claim 1, 2, 3, or 5, characterized in that, The growth platform has an upper chamber and a lower chamber for coolant flow. The connecting rod includes a hollow inner connecting rod and an outer connecting rod nested inside and outside. The inner connecting rod communicates with the upper chamber, and the annular space between the inner and outer connecting rods communicates with the lower chamber. The lower connector is sealed and fixed to the outer circumferential surface of the outer connecting rod. The water collector connected to the lower part of the outer pipe, middle pipe and inner pipe is the upper water collector. The lower part of the inner connecting rod and the outer connecting rod is connected to the lower water collector, and the lower water collector is connected to a lifting drive device.

9. The growth stage assembly for synthesizing diamond according to claim 8, characterized in that, The bottom surface of the drain block is provided with a bottom threaded hole, and the top output end of the lifting drive device is provided with a screw, which is connected to the bottom threaded hole.

10. The growth stage assembly for synthesizing diamond according to claim 9, characterized in that, The drain block has a side threaded hole that communicates with the bottom threaded hole, and a tightening screw for tightening the screw is installed in the side threaded hole.

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