Dust collection convenient dismounting device of semiconductor vacuum pump
Patent Information
- Application Number
- CN202522200529.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-17
- Publication Date
- 2026-09-08
- Estimated Expiration
- 2035-10-17
AI Technical Summary
但是，上述的螺丝锁紧固定的方式在需要对粉尘收集盒进行拆卸清理或更换时，由于需要使用工具逐个拧松螺丝，操作过程较为繁琐，耗费时间较长，且螺丝在经过多次拆卸和安装操作后，容易出现滑牙现象，影响粉尘收集盒与真空泵主体之间的连接密封性，使得粉尘就可能从连接处泄漏出来，进而影响设备的正常运行
[0018] Compared with the prior art, this utility model has obvious advantages and beneficial effects. Specifically, as can be seen from the above technical solution:
Smart Images
Figure CN224729714U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor vacuum pump technology, and in particular to a convenient disassembly device for collecting dust from a semiconductor vacuum pump. Background Technology
[0002] In the semiconductor manufacturing and related precision machining fields, semiconductor vacuum pumps are key equipment for ensuring a stable process environment and maintaining high vacuum levels. During the operation of semiconductor vacuum pumps, a certain amount of dust is inevitably generated. If this dust is not collected and treated in a timely and effective manner, it will not only contaminate the precision components inside the vacuum pump, leading to decreased equipment performance and shortened lifespan, but may also contaminate semiconductor products, seriously affecting product quality. Therefore, dust collection devices have become an indispensable and crucial component of semiconductor vacuum pumps.
[0003] Currently, most existing semiconductor vacuum pump dust collection devices on the market use screws to secure the dust collection box to the vacuum pump body. This ensures a stable connection between the dust collection box and the pump body, preventing the box from easily loosening or falling off during operation and guaranteeing normal dust collection. However, this screw-locking method is cumbersome and time-consuming when disassembling, cleaning, or replacing the dust collection box. The screws need to be loosened individually with tools, and after repeated disassembly and installation, they are prone to stripping, affecting the seal between the dust collection box and the pump body. This can cause dust to leak from the connection, impacting the normal operation of the equipment.
[0004] Therefore, a new technical solution needs to be researched to address the above problems. Utility Model Content
[0005] In view of this, the present invention addresses the deficiencies of the existing technology, and its main objective is to provide a convenient disassembly device for dust collection of semiconductor vacuum pumps.
[0006] To achieve the above objectives, the present invention adopts the following technical solution:
[0007] A convenient disassembly device for collecting dust from a semiconductor vacuum pump includes a dust collection box; the dust collection box is provided with a first connecting pipe and a second connecting pipe; one end of the first connecting pipe is connected to a third connecting pipe provided on a reaction device; and the second connecting pipe is connected to a fourth connecting pipe provided on the vacuum pump.
[0008] A fixing component is provided between the third connecting pipe and the first connecting pipe, and between the fourth connecting pipe and the second connecting pipe; the fixing component includes a quick-release component for quick assembly and a guide component for installation guidance, and the quick-release component and the guide component are each set in two groups, and the two are staggered.
[0009] As further explained, the quick-release component includes a first retaining seat and a clamp; the first retaining seat is disposed on the first connecting pipe and the second connecting pipe; the clamp is disposed on the third connecting pipe and the fourth connecting pipe; a retaining ring is rotatably connected to the clamp, and the retaining ring can engage or disengage from the first retaining seat.
[0010] As further explained, the clamp includes a base, a pressure rod, and a locking rod; the base is disposed on the third connecting pipe and the fourth connecting pipe; one end of the pressure rod is rotatably connected to the base, and the middle part of the pressure rod is connected to the retaining ring; the locking rod is rotatably disposed on the base, and one end of the locking rod is engaged with the other end of the pressure rod.
[0011] As further explained, the pressure rod has outwardly extending connecting posts on both sides of its middle section, and the connecting posts are rotatably connected to the pressure rod; the retaining ring has a U-shaped structure, and the two ends of the retaining ring are respectively connected to the connecting posts.
[0012] As further explained, both ends of the retaining ring are provided with threaded portions, and both ends of the retaining ring pass through the connecting post respectively. Furthermore, two sets of locking nuts are provided between both ends of the retaining ring and the threaded portions, and the two sets of locking nuts are located on both sides of the connecting post.
[0013] As further explained, the first card holder has a conical groove on the side away from the clamp; the middle part of the retaining ring can engage or disengage from the conical groove.
[0014] As further explained, the guide component includes a guide shaft and a second retainer; the guide shaft is rotatably mounted on the first connecting pipe and the second connecting pipe; the second retainer is mounted on the third connecting pipe and the fourth connecting pipe; the second retainer has an opening for the guide shaft to enter, and the guide shaft can enter or leave the second retainer; the opening is provided with a rubber layer that fits tightly against the guide shaft.
[0015] As further explained, the top of the second card holder is provided with a movable block that is movably connected, and the movable block spans across the top of the opening. The movable block is used to lock the guide shaft into the opening.
[0016] As further explained, the dust collection box includes a box body and a box cover; a latch for locking the box cover is provided between the box body and the box cover; and a filter unit for dust filtration is provided inside the box body.
[0017] As further explained, a sealing ring is provided between the third connecting pipe and the first connecting pipe, and between the fourth connecting pipe and the second connecting pipe.
[0018] Compared with the prior art, this utility model has obvious advantages and beneficial effects. Specifically, as can be seen from the above technical solution:
[0019] By incorporating quick-release components, when the dust collection box needs to be disassembled for cleaning or replacement, operators do not need to loosen the screws one by one using tools. They simply need to first release the locking lever of the quick-release component, then lift the pressure rod of the quick-release component away from the locking lever, and disengage the retaining ring of the quick-release component from the first retaining seat. This allows for quick removal of the dust collection box from the reaction equipment and vacuum pump. Conversely, it allows for quick installation of the dust collection box, shortening the disassembly and installation time and improving equipment maintenance efficiency. Simultaneously, a guide component is incorporated. The guide shaft of the guide component engages with the second retaining seat of the guide component, guiding the disassembly and installation of the first and second connecting pipes on the dust collection box. This ensures that the pipes move smoothly away from or towards the third and fourth connecting pipes during disassembly and installation, effectively avoiding potential problems such as misalignment or jamming between connecting pipes, further enhancing the stability and accuracy of the disassembly and installation operations. Attached Figure Description
[0020] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0021] Figure 1 A schematic diagram of the overall structure of a convenient disassembly device for collecting dust from a semiconductor vacuum pump provided by this utility model;
[0022] Figure 2 A schematic diagram of the overall structure of the quick-release component and guide component provided by this utility model;
[0023] Figure 3 A schematic diagram of the overall structure of the dust collection box provided by this utility model.
[0024] The following are the labeling elements in the figure:
[0025] 10. Dust collection box; 11. Box body; 12. Box cover; 13. Filter unit; 14. First connecting pipe; 15. Second connecting pipe; 16. Third connecting pipe; 17. Fourth connecting pipe; 18. Lock;
[0026] 20. Quick-release component; 21. First retainer; 211. Conical groove; 22. Clamp; 221. Base; 222. Pressure bar; 222a. Connecting post; 223. Locking rod; 23. Snap ring; 231. Threaded part; 232. Locking nut;
[0027] 30. Guide component; 31. Guide shaft; 32. Second bracket; 33. Movable block. Detailed Implementation
[0028] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.
[0029] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.
[0030] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.
[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.
[0032] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments.
[0033] In one embodiment of this utility model, such as Figure 1-3As shown, a convenient disassembly device for collecting dust from a semiconductor vacuum pump is provided, including a dust collection box 10. The dust collection box 10 is provided with a first connecting pipe 14 and a second connecting pipe 15. One end of the first connecting pipe 14 is connected to a third connecting pipe 16 disposed on a reaction device. A fourth connecting pipe 17 disposed on the vacuum pump is connected to the second connecting pipe 15.
[0034] Fixing components are provided between the third connecting pipe 16 and the first connecting pipe 14, and between the fourth connecting pipe 17 and the second connecting pipe 15. The fixing components include quick-release parts 20 for quick assembly and quick disassembly, and guide parts 30 for installation guidance. Both quick-release parts 20 and guide parts 30 are provided in two sets, and the two are staggered.
[0035] By setting up the quick-release component 20, when the dust collection box 10 needs to be disassembled, cleaned, or replaced, the operator does not need to use tools to loosen the screws one by one. They only need to first release the locking state of the locking rod 223 of the quick-release component 20, then lift the pressure rod 222 of the quick-release component 20 away from the locking rod 223, and disengage the retaining ring 23 of the quick-release component 20 from the first retaining seat 21. This allows the dust collection box 10 to be quickly removed from the reaction equipment and the vacuum pump. Conversely, the dust collection box 10 can be quickly installed in place, shortening the time for disassembling and installing the dust collection box 10 and improving the maintenance efficiency of the equipment. Meanwhile, by setting up a guide component, the guide shaft 31 of the guide component is engaged with the second bracket 32 of the guide component, which plays a guiding role in the disassembly and installation of the first connecting pipe 14 and the second connecting pipe 15 on the dust collection box 10. This allows them to move smoothly away from or closer to the third connecting pipe 16 and the fourth connecting pipe 17 during the disassembly and installation process, effectively avoiding possible problems during disassembly and installation, such as misalignment or jamming between the connecting pipes, and further improving the stability and accuracy of the disassembly and installation operation.
[0036] Preferably, the quick-release component 20 includes a first retaining seat 21 and a clamp 22. The first retaining seat 21 is disposed on the first connecting pipe 14 and the second connecting pipe 15. The clamp 22 is disposed on the third connecting pipe 16 and the fourth connecting pipe 17. A retaining ring 23 is rotatably connected to the clamp 22, and the retaining ring 23 can engage or disengage from the first retaining seat 21. The clamp 22 includes a base 221, a pressure rod 222, and a locking rod 223. The base 221 is disposed on the third connecting pipe 16 and the fourth connecting pipe 17. One end of the pressure rod 222 is rotatably connected to the base 221, and the retaining ring 23 is connected to the middle of the pressure rod 222. The locking rod 223 is rotatably disposed on the base 221, and one end of the locking rod 223 is engaged with the other end of the pressure rod 222.
[0037] When the dust collection box 10 needs to be disassembled for cleaning or replacement, the operator does not need to loosen the screws one by one with tools. Simply release the locking lever 223, then lift the pressure lever 222 away from the locking lever 223, and disengage the quick-release component 20's retaining ring 23 from the first retaining seat 21. This allows the dust collection box 10 to be quickly removed from the reaction equipment and vacuum pump. When installation is required, the above steps are reversed to quickly and accurately install the dust collection box 10, shortening the disassembly and installation time and improving equipment maintenance efficiency.
[0038] Furthermore, the pressure rod 222 has outwardly extending connecting posts 222a on both sides of its middle section, which are rotatably connected to the pressure rod 222. The retaining ring 23 has a U-shaped structure, with its two ends connected to the connecting posts 222a. Both ends of the retaining ring 23 have threaded portions 231, which pass through the connecting posts 222a. Two sets of locking nuts 232 are provided between the retaining ring 23 and the threaded portions 231, located on both sides of the connecting posts 222a. By setting the locking nuts 232, the connection gap between the retaining ring 23 and the first retaining seat 21 can be adjusted to ensure reliable connection. Users can also flexibly adjust the connection gap according to actual needs to adapt to the connection relationships between different connecting pipes, thereby improving the applicability of the dust collector to different equipment.
[0039] Preferably, the first retaining seat 21 has a tapered groove 211 on the side away from the clamp 22. The retaining ring 23 can engage or disengage from the tapered groove 211 in the middle. By setting the tapered groove 211, the connection between the retaining ring 23 and the first retaining seat 21 is more precise and stable, avoiding dust leakage caused by connection deviation, and ensuring the sealing and normal operation of the equipment.
[0040] Preferably, the guide component 30 includes a guide shaft 31 and a second retainer 32. The guide shaft 31 is rotatably mounted on the first connecting pipe 14 and the second connecting pipe 15. The second retainer 32 is mounted on the third connecting pipe 16 and the fourth connecting pipe 17. The second retainer 32 has an opening for the guide shaft 31 to enter or disengage. The opening is provided with a rubber layer (not shown) that fits tightly against the guide shaft 31. By providing the rubber layer, the friction between the guide shaft 31 and the second retainer 32 is increased, allowing the guide shaft 31 to be stably engaged within the second retainer 32, thereby improving the stability of the guide and also acting as a buffer to reduce the impact force during disassembly and assembly, protecting the connecting pipes from damage.
[0041] Meanwhile, by setting up the guide shaft 31 and the second bracket 32, when the dust collection box 10 needs to be installed, the operator will snap the guide shaft 31 into the second bracket 32. That is, through the snap-fit connection between the guide shaft 31 and the second bracket 32, the initial position of the dust collection box 10 and the reaction equipment or vacuum pump is fixed, so that the connection ports of each connecting pipe are aligned with each other. This makes it easier for the operator to quickly install each connecting pipe through the quick-release parts, thereby simplifying the installation steps of the dust collection box 10 and improving the installation efficiency of the dust collection box 10.
[0042] Furthermore, the top of the second mounting bracket 32 is provided with a movable block 33, which spans across the top of the opening and is used to lock the guide shaft 31 within the opening. By setting the movable block 33, the position of the guide shaft 31 within the second mounting bracket 32 is further fixed, preventing the guide shaft 31 from dislodging from the second mounting bracket 32 due to vibration during equipment operation, thereby improving the reliability and stability of the guide.
[0043] Preferably, the dust collection box 10 includes a box body 11 and a lid 12. A latch 18 for locking the lid 12 is provided between the box body 11 and the lid 12. The box body 11 contains a filter unit 13 for dust filtration, which is a dust removal filter element. By providing the latch 18, the opening and closing of the lid 12 is more convenient and quick, facilitating the operator to clean and replace the filter unit 13 inside the dust collection box 10. Furthermore, by providing the filter unit 13, dust can be effectively filtered and collected, improving the efficiency and quality of dust collection.
[0044] Preferably, sealing rings are provided between the third connecting pipe 16 and the first connecting pipe 14, and between the fourth connecting pipe 17 and the second connecting pipe 15. By providing sealing rings, the tightness of the connection between the third connecting pipe 16 and the first connecting pipe 14, and between the fourth connecting pipe 17 and the second connecting pipe 15, is improved, effectively preventing leakage between the third connecting pipe 16 and the first connecting pipe 14, and between the fourth connecting pipe 17 and the second connecting pipe 15.
[0045] The above are merely preferred embodiments of the present utility model, and only specifically describe the technical principles of the present utility model. These descriptions are only for explaining the principles of the present utility model and should not be construed as limiting the scope of protection of the present utility model in any way. Based on this explanation, any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model, as well as other specific embodiments of the present utility model that can be conceived by those skilled in the art without creative effort, should be included within the scope of protection of the present utility model.
Claims
1. A convenient disassembly device for collecting dust from a semiconductor vacuum pump, characterized in that, Includes a dust collection box; the dust collection box is provided with a first connecting pipe and a second connecting pipe; one end of the first connecting pipe is connected to a third connecting pipe provided on the reaction equipment; the second connecting pipe is connected to a fourth connecting pipe provided on the vacuum pump; A fixing component is provided between the third connecting pipe and the first connecting pipe, and between the fourth connecting pipe and the second connecting pipe; the fixing component includes a quick-release component for quick assembly and a guide component for installation guidance, and the quick-release component and the guide component are each set in two groups, and the two are staggered. The quick-release component includes a first retaining seat and a clamp; the first retaining seat is disposed on the first connecting pipe and the second connecting pipe; the clamp is disposed on the third connecting pipe and the fourth connecting pipe; a retaining ring is rotatably connected to the clamp, and the retaining ring can engage or disengage from the first retaining seat; the clamp includes a base, a pressure rod, and a locking rod; the base is disposed on the third connecting pipe and the fourth connecting pipe; one end of the pressure rod is rotatably connected to the base, and the retaining ring is connected to the middle of the pressure rod; the locking rod is rotatably disposed on the base, and one end of the locking rod is engaged with the other end of the pressure rod.
2. The convenient disassembly device for dust collection of the semiconductor vacuum pump according to claim 1, characterized in that, The pressure rod has outwardly extending connecting posts on both sides of its middle section, and the connecting posts are rotatably connected to the pressure rod; the retaining ring has a U-shaped structure, and the two ends of the retaining ring are respectively connected to the connecting posts.
3. The convenient disassembly device for dust collection of the semiconductor vacuum pump according to claim 2, characterized in that, Both ends of the retaining ring are provided with threaded portions, and both ends of the retaining ring pass through the connecting post. Two sets of locking nuts are provided between both ends of the retaining ring and the threaded portions, and the two sets of locking nuts are located on both sides of the connecting post.
4. The dust collection and easy-to-disassemble device for a semiconductor vacuum pump according to any one of claims 2-3, characterized in that, The first clamping seat has a tapered groove on the side away from the clamp; the middle part of the retaining ring can engage or disengage from the tapered groove.
5. The convenient disassembly device for dust collection of the semiconductor vacuum pump according to claim 1, characterized in that, The guiding component includes a guide shaft and a second retainer; the guide shaft is rotatably mounted on the first connecting pipe and the second connecting pipe; the second retainer is mounted on the third connecting pipe and the fourth connecting pipe; the second retainer has an opening for the guide shaft to enter, and the guide shaft can enter or leave the second retainer; the opening is provided with a rubber layer that fits tightly against the guide shaft.
6. The convenient disassembly device for dust collection of the semiconductor vacuum pump according to claim 5, characterized in that, The second card holder has a movable block at its top, which is movably connected and spans the top of the opening. The movable block is used to lock the guide shaft into the opening.
7. The convenient disassembly device for dust collection of the semiconductor vacuum pump according to claim 1, characterized in that, The dust collection box includes a box body and a box cover; a latch for locking the box cover is provided between the box body and the box cover; a filter unit for dust filtration is provided inside the box body.
8. The convenient disassembly device for collecting dust from a semiconductor vacuum pump according to claim 1, characterized in that, A sealing ring is provided between the third connecting pipe and the first connecting pipe, and between the fourth connecting pipe and the second connecting pipe.