Steam heating device for special gas cylinder

Abstract

The utility model relates to a kind of special gas steel bottle steam heating device, its structure includes the steam heater of special gas steel bottle outside casing, steam heater inlet is sequentially connected flow regulating valve, vortex flowmeter, filter then with factory steam system gas supply end connection by pipeline, steam heater outlet is connected with factory steam system back gas end connection by pipeline after adjusting valve, and PT100 temperature controller is mounted on steam heater.The utility model has the advantages of: reasonable structure design, compared with prior art electric heating mode, with more compact structure and smaller volume, no redundant complex electrical system, equipment installation and arrangement can be simplified, and equipment use cost and equipment energy consumption can be reduced, and the preferred aluminum alloy coil pipe heat efficiency is relatively high, compared with prior art electric heating mode, heat value is large, heating efficiency is high and reliability is high, explosion-proof safety.

Description

Technical Field

[0001] This utility model relates to a steam heating device for special gas cylinders, specifically a steam heating device for special gas supply cylinders used in semiconductor production. Background Technology

[0002] In the semiconductor manufacturing industry, processes such as thin film deposition, chemical vapor deposition, etching, and doping require large quantities of high-purity specialty gases. In specialty gas supply systems, these gases are typically stored in 47L cylinders or 470L horizontal storage tanks. Most gases, such as NH3, SF6, CO2, PH3, N2O, and Cl2, are usually stored in liquid form inside the cylinders. During use, the cylinders need to be heated to ensure proper vaporization. Since liquid gases remain liquefied at room temperature, this can easily lead to low pressure and insufficient evaporation flow during supply, impacting production.

[0003] In existing technologies, electric heating is generally used, which has high energy consumption and high operating costs. For special flammable and explosive gases, the use of electric heating will increase the safety risks of equipment operation.

[0004] Factories typically have their own steam systems. Due to the high enthalpy of steam and its more compact structure and smaller size compared to traditional heating equipment, coupled with the absence of redundant and complex electrical systems, steam not only facilitates equipment installation and layout but also reduces operating costs and energy consumption. Therefore, the use of high-pressure hot steam to heat special gas cylinders is being considered. Utility Model Content

[0005] This utility model proposes a special gas cylinder steam heating device, which aims to overcome the above-mentioned shortcomings of the existing technology, reduce practical costs and equipment energy consumption while ensuring heating effect, and improve safety.

[0006] The technical solution of this utility model is a steam heating device for special gas cylinders. Its structure includes a steam heater fitted around the outside of the special gas cylinder. The inlet of the steam heater is connected to a flow regulating valve, a vortex flow meter, and a filter via a pipeline, and then connected to the gas supply end of the factory's steam system. The outlet of the steam heater is connected to a regulating valve via a pipeline, and then connected to the return end of the factory's steam system. A PT100 temperature controller is installed on the steam heater. During operation, high-temperature steam from the factory's steam system is output from the gas supply end. It first passes through a filter to remove moisture and particulate matter, and then the flow rate is measured by the vortex flow meter. The PT100 temperature controller measures the real-time temperature of the steam heater, allowing for instantaneous monitoring of temperature changes during the heating of the special gas cylinder. The flow rate is adjusted by the flow regulating valve to allow steam to flow into the steam heater. The steam heater uses contact heat conduction to transfer heat from the steam to the surface of the special gas cylinder, causing the cylinder temperature to rise and produce a heating effect. Steam condensation and heating play a crucial role in this process, ensuring that the heated special gas cylinder is heated quickly and evenly. The outer casing provides insulation to reduce heat loss.

[0007] Preferably, the steam heater includes an outer sleeve fitted over the outside of the special gas cylinder, with a coil installed inside the outer sleeve. The inlet of the coil is connected to a flow regulating valve, a vortex flow meter, and a filter in sequence via a pipe, and then connected to the gas supply end of the factory steam system. The outlet of the coil is connected to a regulating valve via a pipe, and then connected to the return end of the factory steam system.

[0008] Preferably, the coil is an aluminum alloy coil, which has relatively high thermal efficiency.

[0009] The advantages of this utility model are: reasonable structural design, which has a more compact structure and smaller volume compared with the existing electric heating method, no redundant and complex electrical system, which can simplify equipment installation and layout, and reduce equipment operating costs and energy consumption. The preferred aluminum alloy coil has a relatively high thermal efficiency. Compared with the existing electric heating method, it has a large calorific value, high heating efficiency and high reliability, and is explosion-proof and safe. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the structure of the special gas cylinder steam heating device of this utility model.

[0011] Figure 2 yes Figure 1 A schematic diagram of the planar unfolded structure of a steam heater.

[0012] In the diagram, 1 is a steam heater, 11 is an outer casing, 12 is a coil, 2 is a PT100 temperature controller, 3 is a filter, 4 is a regulating valve, 5 is a vortex flow meter, 6 is a flow regulating valve, 7 is a special gas cylinder, and 8 is the factory steam system. Detailed Implementation

[0013] The present invention will be further described in detail below with reference to embodiments and specific implementation methods.

[0014] like Figure 1 , 2 As shown, a special gas cylinder steam heating device includes a steam heater 1 installed on the outside of the special gas cylinder 7. The inlet of the steam heater 1 is connected to a flow regulating valve 6, a vortex flow meter 5, and a filter 3 in sequence through a pipe, and then connected to the gas supply end of the factory steam system 8. The outlet of the steam heater 1 is connected to a regulating valve 4 through a pipe, and then connected to the gas return end of the factory steam system 8. A PT100 temperature controller 2 is installed on the steam heater 1.

[0015] The steam heater 1 includes an outer sleeve 11 that is fitted over the outside of the special gas cylinder 7. A coil 12 is installed inside the outer sleeve 11. The inlet of the coil 12 is connected to a flow regulating valve 6, a vortex flow meter 5, and a filter 3 in sequence through a pipe, and then connected to the gas supply end of the factory steam system 8. The outlet of the coil 12 is connected to a regulating valve 4 through a pipe, and then connected to the return end of the factory steam system 8.

[0016] Coil 12 is preferably made of aluminum alloy.

[0017] During operation, high-temperature steam at 50-60℃ from the factory's steam system 8 is output from the gas supply end. It first passes through filter 3 to filter out moisture and particulate matter, and then passes through vortex flow meter 5 to measure the flow rate. The PT100 temperature controller 2 can measure the real-time temperature of the steam heater 1 and monitor the instantaneous temperature change of the special gas cylinder 7 during heating. The steam flow rate is adjusted into the steam heater 1 through the flow regulating valve 6. The steam flow rate is adjusted according to the proportional and integral principle to control the heating temperature (generally 35-40℃). The steam heater 1 uses contact heat conduction to conduct the steam heat to the surface of the special gas cylinder 7, causing the temperature of the special gas cylinder 7 to rise and produce a heating effect. In this process, the steam condensation and heating play a key role, so that the heated special gas cylinder 7 can be heated quickly and evenly. The outer jacket 11 can provide heat insulation and reduce heat attenuation.

[0018] During operation, the PT100 temperature controller 2 can monitor the evaporation temperature and pressure of the special gas cylinder 7, collect data in real time and feed it back to the temperature control system connected to the signal. Then, it can adjust the steam flow rate according to the real-time temperature of the surface of the special gas cylinder 7 to achieve the required temperature of the special gas cylinder 7. This is beneficial for real-time monitoring and effective heating of the instantaneous temperature change of the cylinder caused by the evaporation and heat absorption process of liquefied gas.

[0019] All of the components described above are existing technologies, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0020] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present utility model, and these all fall within the protection scope of the present utility model.

Claims

1. A special gas cylinder steam heating device, characterized in that, The steam heater (1) is installed on the outside of the special gas cylinder (7). The inlet of the steam heater (1) is connected to the flow regulating valve (6), the vortex flow meter (5), and the filter (3) in sequence through the pipeline, and then connected to the gas supply end of the factory steam system (8). The outlet of the steam heater (1) is connected to the regulating valve (4) through the pipeline, and then connected to the return end of the factory steam system (8). The steam heater (1) is equipped with a PT100 temperature controller (2).

2. The special gas cylinder steam heating device as described in claim 1, characterized in that, The steam heater (1) includes an outer sleeve (11) fitted on the outside of the special gas cylinder (7), and a coil (12) is installed inside the outer sleeve (11). The inlet of the coil (12) is connected to the flow regulating valve (6), the vortex flow meter (5), and the filter (3) in sequence through a pipe, and then connected to the gas supply end of the factory steam system (8). The outlet of the coil (12) is connected to the regulating valve (4) through a pipe, and then connected to the gas return end of the factory steam system (8).

3. A special gas cylinder steam heating device as described in claim 2, characterized in that, The coil (12) is an aluminum alloy coil.

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