A high purity chemical filling system

Abstract

This invention provides a high-purity chemical filling system, comprising: a raw material tank, a filling tank, a raw material panel, and a filling panel; the raw material panel and the filling panel are connected by a liquid pipeline, and the chemicals in the raw material tank are filled into the filling tank via the raw material panel and the filling panel; the raw material panel is provided with a pressure control pipeline and its valve assembly, a purge gas pipeline and its valve assembly, and a liquid pipeline and its valve assembly; the filling panel is provided with a filling pressure control pipeline, a gas pipeline, and a liquid inlet pipeline, and the filling pressure control pipeline, gas pipeline, and filling liquid pipeline are connected in parallel to the filling tank. The filling system provided by this invention adopts a dual-panel architecture with separate raw material and filling panels, optimizes the structure of the filling pipeline, and provides a clear and efficient operation process, thereby improving the control accuracy and filling efficiency of the filling process.

Description

Technical Field

[0001] This utility model belongs to the field of chemical equipment technology, specifically relating to a high-purity chemical filling system. Background Technology

[0002] With the development of industries such as semiconductors, photovoltaics, and optical fibers, the demand for high-purity precursor materials such as metal-organic sources (MO sources) and silicon tetrachloride (SiCl4) is increasing. These precursor materials are core raw materials for thin film deposition processes, and generally possess characteristics such as high toxicity, strong corrosiveness, and flammability and explosiveness, and are extremely sensitive to purity. Therefore, ensuring that they are not contaminated or introduced with impurities during the filling process is a key step in guaranteeing the quality of downstream products and the stability of the process.

[0003] However, existing filling technology systems have certain technical shortcomings in addressing the ever-increasing demands for purity and efficiency. Filling systems are becoming increasingly complex due to the need to accommodate various materials, and these complex pipeline layouts can create flow dead zones and cleaning dead angles, leading to the risk of impurity residue and cross-contamination. Traditional valves and their purging structures have limited effectiveness, making it difficult to achieve thorough purification within complex flow channels. Residual materials may cause corrosion or side reactions, damaging product quality. Furthermore, the system's control logic is often cumbersome and complex, heavily reliant on human experience and the coordination of multiple discrete units. This not only increases operational difficulty and failure rates but also makes the process susceptible to fluctuations due to human error. Limited by pipeline design, valve response, and other factors, overall filling efficiency is low, making it difficult to meet the demands of large-scale mass production and hindering production efficiency and market responsiveness.

[0004] Based on the existing problems, there is a need to provide a high-purity chemical filling system. Utility Model Content

[0005] The purpose of this invention is to provide a high-purity chemical filling system that optimizes pipeline structure and improves filling efficiency.

[0006] To achieve the objective of this utility model, the following technical solution is adopted:

[0007] This utility model provides a high-purity chemical filling system, the high-purity chemical filling system comprising:

[0008] The raw material tank, the filling tank, the raw material panel, and the filling panel are connected by a liquid pipeline, and the chemicals in the raw material tank are filled into the filling tank through the raw material panel and the filling panel.

[0009] The raw material panel is equipped with a pressure control pipeline and its valve assembly, an extrusion gas pipeline and its valve assembly, a purge gas pipeline and its valve assembly, and a liquid pipeline and its valve assembly. The extrusion gas pipeline is connected to the raw material tank via a gas phase pipeline, and the liquid pipeline is connected to the raw material tank via a liquid phase pipeline. The pressure control pipeline and the purge gas pipeline are respectively connected to the gas phase pipeline and the liquid phase pipeline, and the gas circuit of the entire filling system is connected through a connecting branch between the gas phase pipeline and the liquid phase pipeline. A purge gas branch is introduced into the purge gas pipeline and connected to the liquid pipeline, so that a loop is formed between the purge gas pipeline and the liquid pipeline.

[0010] The filling panel is equipped with a filling pressure control line, a gas line, and a liquid inlet line, which are connected in parallel to the filling tank.

[0011] The filling system provided by this utility model adopts a dual-panel architecture with separate raw material panel and filling panel. The raw material panel is used for raw material input and output control, while the filling panel is responsible for filling operation. This optimizes the structure of the filling pipeline, reduces pipeline crossing and mutual interference, and reduces the complex layout of multiple branches in the system. The operation process is clear and efficient, which can improve the control accuracy and filling efficiency of the filling process.

[0012] Preferably, in the raw material panel, the pressure control pipeline includes a venting branch and a vacuum branch connected in parallel; the extrusion gas pipeline includes an extrusion helium branch and an extrusion nitrogen branch connected in parallel; and the purging gas pipeline includes a purging helium branch and a purging nitrogen branch connected in parallel.

[0013] By further merging and optimizing the gas pipelines, the gas supply is integrated, effectively avoiding redundant structures and operational complexity. This not only reduces the frequency and difficulty of system maintenance but also significantly improves the rate and efficiency of gas purging and replacement.

[0014] Preferably, in the raw material panel, the connection points of the purge gas pipeline, the liquid pipeline, and the liquid phase pipeline are connected by a three-way valve.

[0015] Preferably, a three-way valve is provided to connect the gas phase pipeline and the liquid phase pipeline.

[0016] The three-way valve structure reduces the number of valves and the space occupied, eliminates dead zones in the flow path, reduces the possibility of contamination, and further improves the purity of the product and the reliability of the system.

[0017] Preferably, the number of raw material tanks is two or more, and the raw material tanks are connected in parallel.

[0018] Preferably, in the filling panel, the filling pressure control pipeline includes a second venting pipeline and a second vacuum pipeline connected in parallel; the gas pipeline includes a helium pipeline and a nitrogen pipeline.

[0019] Preferably, in the filling panel, the filling pressure control line, the gas line, and the liquid inlet line are connected to the filling tank via three-way valves.

[0020] Preferably, a weighing device is also provided at the bottom of the raw material tank and the filling tank.

[0021] Preferably, a sampling port is provided on the body of the raw material tank, and the sampling port is connected to a sampling and testing device.

[0022] Sampling and testing are performed at the front end of the filling process, achieving completely closed sampling that prevents the introduction of external impurities and avoids contamination. It also enables automatic sampling and real-time analysis of each batch of raw materials, effectively ensuring the high purity of the filling chemicals and reducing the generation of substandard products from the source.

[0023] Preferably, the high-purity chemical filling system further includes an automatic control unit, which is controlled by a PLC and operated via a human-machine interface.

[0024] The automatic control unit is used to drive the valve group in the system to control the filling according to preset logic. It can also collect and provide feedback on the monitoring points (pressure, weight) in the system in real time to realize the dynamic linkage adjustment of the system. PLC control and human-machine interface operation are existing technologies in this field, and no specific limitations are made on their operation methods.

[0025] Compared with the prior art, the present invention has the following beneficial effects:

[0026] The filling system provided by this utility model adopts a dual-panel architecture with separate raw material panel and filling panel. The raw material panel is used for raw material input and output control, while the filling panel is responsible for filling operation. This optimizes the structure of the filling pipeline, reduces pipeline crossing and mutual interference, and reduces the complex layout of multiple branches in the system. The operation process is clear and efficient, which can improve the control accuracy and filling efficiency of the filling process. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the high-purity chemical filling system provided in Example 1;

[0028] Among them, 1 is the vent port; 11 is the vent port; 2 is the vacuum port; 21 is the vacuum port; 3 is the compressed helium port; 4 is the compressed nitrogen port; 5 is the purging helium port; 51 is the helium port; 6 is the purging nitrogen port; 61 is the nitrogen port; 7 is the raw material tank; 71 is the second raw material tank; 8 is the filling tank; 9 is the raw material panel; 10 is the filling panel; V01-V21 are pneumatic valves; V22-V23 are pneumatic micro-leakage valves; C1-C10 are one-way valves; K1-K8 are three-way valves; L1-L3 are liquid valves; and P is the pressure gauge. Detailed Implementation

[0029] It should be understood that in the description of this utility model, the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0030] It should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0031] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0032] Example 1

[0033] This embodiment provides a method such as Figure 1 The high-purity chemical filling system shown includes:

[0034] Raw material tank 7, filling tank 8, raw material panel 9 and filling panel 10.

[0035] The raw material tank 7 is equipped with an air inlet and a liquid outlet.

[0036] The raw material panel 9 is equipped with a pressure control pipeline and its valve group, an extrusion gas pipeline and its valve group, a purging gas pipeline and its valve group, and a liquid pipeline and its valve group.

[0037] The pressure control pipeline includes a main pressure control pipeline and a vent branch and a vacuum branch connected in parallel at one end of the main pressure control pipeline. The vent branch and vacuum branch are further connected to vent port 1 and vacuum port 2, respectively. A main control valve, a check valve C6, and a pneumatic valve V07 are installed on the main pressure control pipeline. A check valve C1 and a pneumatic valve V01 are installed on the vent branch, and a pneumatic valve V02 is installed on the vacuum branch for separate control of each branch. A pressure gauge P is also installed on the main pressure control pipeline.

[0038] The extrusion gas pipeline includes a main extrusion gas pipeline and two branch lines for extruded helium and nitrogen gas, connected in parallel at one end of the main extrusion gas pipeline. The extruded helium and nitrogen branch lines are further connected to extruded helium port 3 and extruded nitrogen port 4, respectively. A main control valve, pneumatic valve V08, is installed on the main extrusion gas pipeline. Pneumatic valve V03 and check valve C2 are installed on the extruded helium branch lines, and pneumatic valve V04 and check valve C3 are installed on the extruded nitrogen branch lines for separate control of each branch.

[0039] The other end of the pressure control main pipeline is connected in parallel with the other end of the extrusion gas main pipeline, and is connected to the air inlet of the raw material tank 7 through a gas phase pipeline. A main control valve, pneumatic valve V10, is installed on the gas phase pipeline.

[0040] One end of the liquid pipeline serves as an outlet, connected to the filling panel 10, for conveying chemicals from the raw material tank 7 to the filling tank 8 via the filling panel 10. A liquid valve L1 is installed on the liquid pipeline. The other end of the liquid pipeline is connected to the outlet of the raw material tank 7 via a liquid phase pipeline.

[0041] The purge gas pipeline includes a main purge gas pipeline and two purge helium and nitrogen branches connected in parallel at one end of the main purge gas pipeline. These branches are further connected to purge helium port 5 and purge nitrogen port 6. A main control valve, a pneumatic micro-leakage valve V22, and a pneumatic valve V09 are installed on the main purge gas pipeline. A pneumatic valve V05 and a one-way valve C4 are installed on the purge helium branch, and a pneumatic valve V06 and a one-way valve C5 are installed on the purge nitrogen branch for separate control of each branch. The other end of the main purge gas pipeline is connected in parallel to the other end of the liquid pipeline to a liquid phase pipeline. The connection points of the main purge gas pipeline, the liquid pipeline, and the liquid phase pipeline are connected by a three-way valve K1, which eliminates flow dead zones and improves pipeline switching flexibility. A purge branch is also led out from the main purge gas pipeline. A pneumatic valve V11 is installed on the purge branch. The purge branch is connected to the liquid pipeline to form a loop, which can be used to return the residual liquid after filling to the raw material tank.

[0042] A connecting branch is provided between the gas phase pipeline and the liquid phase pipeline, and the connection is made by a three-way valve K2, so that the whole system can complete the venting, vacuuming or purging process.

[0043] Preferably, multiple raw material tanks can be installed and connected in parallel, which can be used for switching and filling of various chemicals, thereby improving filling efficiency.

[0044] For example, the number of raw material tanks can be set to two, namely raw material tank 7 and the second raw material tank 71.

[0045] The second raw material tank 71 is also equipped with an air inlet and a liquid outlet. A second pressure control main pipeline is led out from the main pressure control pipeline. The second pressure control main pipeline is equipped with a main control valve, a one-way valve C7, and a pneumatic valve V14. A second extrusion gas main pipeline is led out from the main extrusion gas pipeline. The second extrusion gas main pipeline is equipped with a main control valve and a pneumatic valve V15. The second pressure control main pipeline and the second extrusion gas main pipeline are connected to the air inlet of the second raw material tank 71 through a second gas phase pipeline. The second gas phase pipeline is equipped with a main control valve and a pneumatic valve V17. A second purging gas main pipeline is led out from the main purging gas pipeline. The second purging gas main pipeline is equipped with a main control valve and a pneumatic valve V16. A branch is led out from the liquid pipeline and connected to the second purging gas main pipeline via a three-way valve K3 and a second liquid phase pipeline to the liquid outlet of the second raw material tank 71. A connecting branch is provided between the second gas phase pipeline and the second liquid phase pipeline, and the two are connected by a three-way valve K4, thereby realizing the gas path connection of the entire system.

[0046] Preferably, multiple liquid pipelines can be installed, and the liquid pipelines are connected in parallel. One end of each liquid pipeline serves as an outlet, which can be connected to the filling panel to realize the switching and filling of various chemicals.

[0047] For example, the number of liquid pipelines can be set to three: a primary liquid pipeline, a second liquid pipeline, and a third liquid pipeline. Liquid valves L2 and L3 are respectively installed on the second and third liquid pipelines. A second and third purging branch are also led out from the main purging gas pipeline. Pneumatic valves V12 and V13 are respectively installed on the second and third purging branch, and then connected to the second and third liquid pipelines respectively, forming a second circuit and a third circuit, which can be used to return residual pressure after filling to the raw material tank.

[0048] The filling tank 8 is equipped with a feed inlet.

[0049] The filling panel 10 is provided with a second venting pipeline, a second vacuum pipeline, a helium pipeline, a liquid inlet pipeline, and a nitrogen pipeline.

[0050] A one-way valve C8 and a pneumatic valve V18 are installed on the second vent line. A pneumatic valve V19 is installed on the second vacuum line. One end of the second vent line is connected to the vent port 11 and further connected to the vent port 1. One end of the second vacuum line is connected to the vacuum port 21 and further connected to the vacuum port 2.

[0051] The helium pipeline is equipped with a pneumatic valve V20 and a one-way valve C9, and one end of the helium pipeline is connected to a helium port 51.

[0052] The other end of the second venting pipeline and the other end of the second vacuum pipeline are connected in parallel and connected to the other end of the helium pipeline through a three-way valve K5 to the main filling pipeline, and further connected to the inlet of the filling tank 8.

[0053] The nitrogen pipeline is equipped with a pneumatic valve V21, a pneumatic micro-leakage valve V23, and a one-way valve C10. One end of the nitrogen pipeline is connected to the nitrogen port 61. The other end of the nitrogen pipeline is connected to the main filling pipeline through a three-way valve K8.

[0054] One end of the liquid inlet pipe is connected to the outlet of the liquid pipe in the raw material panel for conveying chemicals. The other end of the liquid inlet pipe is connected to the main filling pipe via a three-way valve K6.

[0055] Preferably, multiple inlet lines can be installed and connected to the main filling line via a three-way valve. For example, a second inlet line can be connected to the main filling line via a three-way valve K7 to enable switching between filling different chemicals.

[0056] Preferably, the high-purity chemical filling system further includes an automatic control unit, which employs PLC control and a human-machine interface for operation, thereby achieving automatic control of the filling system. The use of PLC control and a human-machine interface is existing technology in this field and will not be specifically described herein.

[0057] Preferably, the bottom of the raw material tank and the filling tank are also equipped with a weighing device for weighing the tank body, which facilitates monitoring of the filling status.

[0058] Preferably, the raw material tank 7 is also equipped with a sampling port, which is connected to a sampling and testing device for sampling and testing of the contained chemicals. The sampling and testing device can be selected according to the needs of the testing items, and its structure is not specifically limited.

[0059] This embodiment also provides a method for filling high-purity chemicals, the method using the high-purity chemical filling system, the method comprising the following steps:

[0060] (1) Open valve V06 of the nitrogen pipeline on the raw material panel and valves V21 and V23 of the nitrogen pipeline on the filling panel to purge the filling system with nitrogen;

[0061] (2) Vacuum the filling tank and verify its weight before installing it into the filling system;

[0062] (3) Open valve V05 of the raw material panel helium pipeline and valve V20 of the filling panel helium pipeline to purge helium to a certain pressure, then close the helium purging, perform helium pressure holding test, and perform helium leakage detection.

[0063] (4) After the leak test is passed, open valve V01 of the vent pipe on the raw material panel and valve V18 of the second vent pipe on the filling panel to release helium into the tail gas treatment.

[0064] (5) Open valve V02 of the vacuum pipeline on the raw material panel and valve V19 of the second vacuum pipeline on the filling panel, evacuate to a certain pressure, and maintain negative pressure.

[0065] (6) After the negative pressure holding is qualified, nitrogen purging is performed again;

[0066] (7) Open valves K2 and K1 on the discharge pipeline of the raw material tank, and open valves V04, V08 and V10 on the nitrogen pipeline of the raw material panel to start filling;

[0067] (8) When the filling weight reaches the specified value, open valve V06 of the nitrogen pipeline on the raw material panel to return the residual liquid in the liquid pipeline to the raw material tank, and then close all discharge valves and filling valves.

[0068] (9) Perform nitrogen purging again. When the pressure in the system reaches a certain level, turn off the purging and equalize the pressure. Then, vent the system and release the replacement gas in the pipeline to the tail gas treatment.

[0069] (10) Use helium for pulsed purging and replacement, and then release the gas to the tail gas treatment;

[0070] (11) Evacuate the system to negative pressure, and then purge and replace it again;

[0071] (12) Use the pneumatic micro-leak valve to maintain positive pressure, disassemble the filling tank, and then close the pneumatic micro-leak valve.

[0072] In summary, the filling system provided by this utility model adopts a dual-panel architecture with separate raw material panel and filling panel. The raw material panel is used for raw material input and output control, while the filling panel is responsible for filling operation. This optimizes the structure of the filling pipeline, reduces pipeline crossing and mutual interference, and reduces the complex layout of multiple branches in the system. The operation process is clear and efficient, which can improve the control accuracy and filling efficiency of the filling process.

[0073] The above description is only a specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model fall within the protection and disclosure scope of the present utility model.

Claims

1. A high purity chemical filling system, characterized by, The high-purity chemical filling system includes: The raw material tank, the filling tank, the raw material panel, and the filling panel are connected by a liquid pipeline, and the chemicals in the raw material tank are filled into the filling tank through the raw material panel and the filling panel. The raw material panel is equipped with a pressure control pipeline and its valve assembly, an extrusion gas pipeline and its valve assembly, a purge gas pipeline and its valve assembly, and a liquid pipeline and its valve assembly. The extrusion gas pipeline is connected to the raw material tank via a gas phase pipeline, and the liquid pipeline is connected to the raw material tank via a liquid phase pipeline. The pressure control pipeline and the purge gas pipeline are respectively connected to the gas phase pipeline and the liquid phase pipeline, and the gas circuit of the entire filling system is connected through a connecting branch between the gas phase pipeline and the liquid phase pipeline. A purge gas branch is led out from the purge gas pipeline and connected to the liquid pipeline, so that a loop is formed between the purge gas pipeline and the liquid pipeline. The filling panel is equipped with a filling pressure control line, a gas line, and a liquid inlet line, which are connected in parallel to the filling tank.

2. The high-purity chemical filling system according to claim 1, characterized in that, In the raw material panel, the pressure control pipeline includes a venting branch and a vacuum branch connected in parallel; the extrusion gas pipeline includes an extrusion helium branch and an extrusion nitrogen branch connected in parallel; and the purging gas pipeline includes a purging helium branch and a purging nitrogen branch connected in parallel.

3. The high purity chemical filling system of claim 1, wherein, In the raw material panel, the connection points of the purge gas pipeline, liquid pipeline and liquid phase pipeline are connected by a three-way valve.

4. The high purity chemical filling system of claim 1, wherein, A three-way valve is installed to connect the gas phase pipeline and the liquid phase pipeline.

5. The high purity chemical filling system of claim 1, wherein, The number of raw material tanks is two or more, and the raw material tanks are connected in parallel.

6. The high purity chemical filling system of claim 1, wherein, In the filling panel, the filling pressure control pipeline includes a second venting pipeline and a second vacuum pipeline connected in parallel; the gas pipeline includes a helium pipeline and a nitrogen pipeline.

7. The high purity chemical filling system of claim 1, wherein, In the filling panel, the filling pressure control pipeline, gas pipeline and liquid inlet pipeline are respectively connected to the filling tank through a three-way valve.

8. The high purity chemical filling system of claim 1, wherein, The bottom of the raw material tank and the filling tank are also equipped with weighing devices.

9. The high purity chemical filling system of claim 1, wherein, A sampling port is provided on the body of the raw material tank, and the sampling port is connected to a sampling and testing device.

10. The high purity chemical filling system of claim 1, wherein, The high-purity chemical filling system also includes an automatic control unit, which is controlled by a PLC and operated via a human-machine interface.

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