Annular light source mechanism and probe stage

Abstract

The utility model relates to the technical field of semiconductor, disclose annular light source mechanism and probe station, including installation structure and lighting structure, installation structure includes the interval setting bearing and mounting piece, lighting structure includes control part and a plurality of lighting components, control part sets up on the bearing, all lighting components interval setting are on the mounting piece, and any lighting component is individually connected with control part electricity, to emit light under the power control of control part, wherein, any lighting component is configured to have the light of one color, and all lighting components emit the light gathering in focus point to adapt the focal length of camera lens, the utility model discloses can provide the light of different colors simultaneously, and make different chip sensitive through the light of different colors to can avoid through replacing annular light source mechanism to obtain the light of different colors, and then be favorable to improve the test efficiency of chip.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to a ring light source mechanism and a probe station. Background Technology

[0002] Probe stations are mainly used in the semiconductor, optoelectronic, integrated circuit, and packaging testing industries. They are widely used in the research and development of precision electrical measurements for complex, high-speed devices, aiming to ensure quality and reliability, and reduce research and development time and device manufacturing process costs.

[0003] Currently, when using a probe station for chip testing, operators need to use a microscope system to observe the circuitry, pads, and alignment of the probes with the pads on the chip surface. Therefore, illumination is required during testing to improve the accuracy of observation. Furthermore, different colors of light have different illumination effects on different chips, and existing ring light sources typically only provide one color of light. Testing different chips may require replacing the ring light source to obtain illumination of different colors of light, thereby improving testing accuracy and reducing chip testing efficiency. Utility Model Content

[0004] This invention provides a ring light source mechanism and probe station to solve the problem that existing ring light source mechanisms can only provide one color of light, requiring replacement of the ring light source mechanism to provide different colors of light for different chips, which reduces the chip testing efficiency.

[0005] In a first aspect, this utility model provides a ring-shaped light source mechanism, comprising: The installation structure includes spaced-apart load-bearing components and mounting components; A lighting structure includes a control element and several lighting components. The control element is disposed on the support element, and all the lighting components are spaced apart on the mounting element. Each lighting component is individually electrically connected to the control element to emit light under the electrical control of the control element. In this embodiment, any one of the lighting components is configured to have a light of a single color, and the light emitted by all the lighting components is focused at a focal point to match the focal length of the lens.

[0006] Beneficial effects: By setting the lighting structure on the mounting structure, different lighting components can emit different colors of light under the power control of the controller. Thus, when testing different chips, the lighting structure can improve the light that the chip is sensitive to, thereby avoiding the need to change the ring light source mechanism to obtain different colors of light. This helps to improve the testing efficiency of the chip.

[0007] In one alternative embodiment, any of the lighting components includes a plurality of lighting elements, all of which are spaced apart and arranged in a ring on the mounting member, so that the light emitted by all of the lighting elements is focused at the focal point.

[0008] Beneficial effects: By setting each lighting component to include several lighting elements, which are LED beads in this embodiment, and all the lighting elements are spaced apart and arranged in a ring on the mounting component, the light emitted by all the lighting elements in a single lighting component can be focused on the focal point, thereby maximizing the brightness of the light at the focal point and improving the detection accuracy of the lens.

[0009] In one alternative implementation, any of the lighting components is configured to have one of red light, white light, yellow light, green light, and blue light.

[0010] Beneficial effects: By configuring each lighting component to have one of red, white, yellow, green, and blue light, the lighting structure can have red, white, yellow, green, and blue light, thus enabling the lighting structure to be compatible with a variety of chips.

[0011] In one optional embodiment, a mounting groove is provided on the front side of the mounting member, and all the lighting components are spaced apart on the inner wall of the mounting groove; the mounting groove is flared in the direction away from the support member.

[0012] Beneficial effects: By creating mounting slots on the front of the mounting component, all lighting components are spaced apart on the inner wall of the mounting slots, and the mounting slots are flared out in the direction away from the support component. This ensures that all lighting components in each lighting component are mounted at the same angle on the mounting component, while the lighting components in different lighting components are mounted at different angles. As a result, the light emitted by all lighting components in each lighting component can be focused on the focal point, and the light emitted by all lighting components can also be focused on the focal point.

[0013] In one optional embodiment, an alignment hole is provided on the bottom surface of the mounting groove, and all the lighting elements of any lighting assembly are arranged around the axis of the alignment hole so that the axis of the alignment hole covers the focal point.

[0014] Beneficial effects: By using the alignment holes opened on the mounting parts, specifically on the bottom surface of the mounting groove, all the lighting elements of each lighting assembly are arranged around the axis of the alignment holes, so that the focal point will be located on the axis of the alignment holes. Therefore, by simply setting the lens on the axis of the alignment holes, the focal point can be aligned with the lens, which is beneficial for convenient installation of the ring light source mechanism.

[0015] In one optional embodiment, the mounting component has a mounting protrusion on its back side, the mounting protrusion is adapted to the mounting groove, and the mounting protrusion has a plurality of mounting holes communicating with the mounting groove, and any one of the lighting components is disposed in the mounting hole.

[0016] Beneficial effects: The mounting protrusions on the mounting components are adapted to the mounting grooves, and the mounting protrusions have several mounting holes that connect to the mounting grooves. The lighting elements in each lighting assembly are set in the mounting holes. Since the mounting holes and the mounting grooves are connected, the light emitted by the lighting elements can be directed from the mounting grooves to the focal point.

[0017] In one alternative implementation, the lighting elements of any of the lighting components are installed at the same angle, while the lighting elements of any two adjacent lighting components are installed at different angles, so that all light rays are focused on the focal point.

[0018] Beneficial effects: By setting the installation angle of all the lighting elements in each lighting assembly to be the same, the light emitted by all the lighting elements in each lighting assembly can be focused on the focal point. By setting the installation angle of all the lighting elements in two adjacent lighting assemblies to be different, the light emitted by all the lighting elements in two adjacent lighting assemblies can still be focused on the focal point, thus enabling the light emitted by the lighting elements in all lighting assemblies to be focused on the focal point.

[0019] In one alternative embodiment, the mounting structure further includes a connector disposed between the carrier and the mounting member to connect the carrier and the mounting member, the connector being adapted to connect with a probe station.

[0020] Beneficial effects: The installation structure also includes a connector, which in this embodiment is a connecting plate. The connector is specifically disposed between the carrier and the mounting component, so that the connector can connect the carrier and the mounting component together. At the same time, the connector can also be connected to the probe station, so that the connector can simultaneously mount the carrier and the mounting component on the probe station.

[0021] In one alternative embodiment, the connector has a plurality of connecting portions, and the connector is adapted to be connected to the probe station through the connecting portions.

[0022] Beneficial effects: Through the several connecting parts provided on the connector, which are connecting holes in this embodiment, the connector can be connected to the probe station through the connecting parts.

[0023] Secondly, this utility model also provides a probe station, including a lens and the aforementioned annular light source mechanism, wherein the lens is disposed on the axis of the alignment hole.

[0024] Beneficial effects: By setting the probe station including the lens and the aforementioned ring light source mechanism, the probe station can emit different colors of light under the power control of the control unit through the lighting structure set on the mounting structure. Thus, when testing different chips, the lighting structure can improve the light that the chip is sensitive to, thereby avoiding the need to change the ring light source mechanism to obtain different colors of light, which is beneficial to improving the chip testing efficiency. Attached Figure Description

[0025] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of a ring light source mechanism according to an embodiment of the present invention.

[0027] Explanation of reference numerals in the attached figures: 1-Mounting structure; 11-Bearing component; 12-Mounting component; 121-Mounting groove; 122-Alignment hole; 123-Mounting protrusion; 124-Mounting hole; 13-Connector; 131-Connecting part; 21-Control component; 22-Lighting component. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0029] The following is combined Figure 1 The following describes embodiments of the present invention.

[0030] According to an embodiment of the present invention, in one aspect, a ring-shaped light source mechanism is provided, such as... Figure 1As shown, the system includes an installation structure 1 and a lighting structure. The installation structure 1 includes a carrier 11 and a mounting member 12 spaced apart. The lighting structure includes a control member 21 and several lighting components. The control member 21 is mounted on the carrier 11, and all the lighting components are spaced apart on the mounting member 12. Each lighting component is individually electrically connected to the control member 21 to emit light under the electrical control of the control member 21. Each lighting component is configured to emit light of a single color, and the light emitted by all the lighting components is focused at a focal point to match the focal length of the lens.

[0031] The ring light source mechanism described above utilizes an illumination structure mounted on a mounting structure 1. The mounting structure 1 can be mounted on a probe stage and includes a carrier 11 and a mounting block 12 spaced apart. In this embodiment, the carrier 11 and the mounting block 12 are respectively a carrier block and a mounting block. The illumination structure includes a control component 21 and several illumination components. In this embodiment, the control component 21 is a PCB (printed circuit board). The control component 21 is designed on the carrier 11, and all the illumination components are spaced apart on the mounting block 12. Each illumination component is electrically connected to the control component 21 to emit light under the electrical control of the control component 21.

[0032] Specifically, each lighting component is configured to emit light of a single color, and the light emitted by all the lighting components is focused at a focal point, so that the light emitted by the lighting components can be adapted to the focal length of the lens, thereby enabling the lens to accurately test the chip.

[0033] In addition, since each illumination component has a different color of light, when the lens tests different chips, different illumination components can provide different colors of light to match the colors of light that different chips are sensitive to, thereby improving the accuracy of lens detection.

[0034] Since all the lighting components are mounted on the mounting piece 12, the ring light source mechanism can provide light of different colors simultaneously, thus avoiding the need to change the ring light source mechanism to obtain different colors of light when testing different chips, thereby improving the chip testing efficiency.

[0035] It should be noted that only one illumination component emits light each time the chip is tested, while the other illumination components do not emit light. This is to avoid the mixing of different colors of light to form other colors of light, which would make the light unsensitive to the chip and cause inaccurate testing. In addition, the emission of light from all illumination components is controlled by the controller 21.

[0036] In summary, by setting the lighting structure on the mounting structure 1, different lighting components can emit light of different colors under the power control of the control unit 21. Thus, when testing different chips, the lighting structure can improve the light that the chip is sensitive to, thereby avoiding the need to change the ring light source mechanism to obtain different colors of light. This is beneficial to improving the testing efficiency of the chip.

[0037] In one embodiment, such as Figure 1 As shown, any lighting component includes a plurality of lighting elements 22, all of which are spaced apart and arranged in a ring on the mounting member 12, so that the light emitted by all the lighting elements 22 is focused at the focal point.

[0038] The ring light source mechanism described above includes several lighting elements 22 in each lighting component. In this embodiment, the lighting elements 22 are LED beads. All the lighting elements 22 are spaced apart and arranged in a ring on the mounting component 12. This allows the light emitted by all the lighting elements 22 in a single lighting component to be focused at the focal point, thereby maximizing the brightness of the light at the focal point and improving the detection accuracy of the lens.

[0039] In one embodiment, such as Figure 1 As shown, any lighting component is configured to have one of the following: red light, white light, yellow light, green light, and blue light.

[0040] The ring light source mechanism described above, by configuring each lighting component to have one of red light, white light, yellow light, green light, and blue light, enables the lighting structure to have red light, white light, yellow light, green light, and blue light, thereby enabling the lighting structure to be compatible with a variety of chips.

[0041] It should be noted that the above-mentioned light colors are only those provided in this embodiment. The actual lighting structure can have all colors of light, which will not be listed here.

[0042] In one embodiment, such as Figure 1 As shown, a mounting groove 121 is provided on the front side of the mounting member 12, and all the lighting components are spaced apart on the inner wall of the mounting groove 121; the mounting groove 121 is flared in the direction away from the support member 11.

[0043] The ring light source mechanism described above, through the mounting groove 121 opened on the mounting member 12, specifically the front side of the mounting member 12, all the lighting components are spaced apart on the inner wall of the mounting groove 121, and the mounting groove 121 is flared in the direction away from the support member 11. In this way, all the lighting elements 22 in each lighting component are mounted on the mounting member 12 at the same angle, while the mounting angles of all the lighting elements 22 in different lighting components will be different, so that the light emitted by all the lighting elements 22 in each lighting component can be focused on the focal point, and the light emitted by all the lighting components can also be focused on the focal point.

[0044] In one embodiment, such as Figure 1 As shown, an alignment hole 122 is provided on the bottom surface of the mounting groove 121. All the lighting elements 22 of any lighting assembly are arranged around the axis of the alignment hole 122 so that the axis of the alignment hole 122 covers the focal point.

[0045] The ring light source mechanism described above, through the alignment hole 122 opened on the mounting member 12, specifically opened on the bottom surface of the mounting groove 121, all the lighting elements 22 of each lighting component are arranged around the axis of the alignment hole 122, so that the focal point will be located on the axis of the alignment hole 122. Therefore, by simply setting the lens on the axis of the alignment hole 122, the focal point can be aligned with the lens, which is beneficial for convenient adjustment of the installation of the ring light source mechanism.

[0046] In one embodiment, such as Figure 1 As shown, a mounting protrusion 123 is provided on the back of the mounting component 12. The mounting protrusion 123 is adapted to the mounting groove 121. A plurality of mounting holes 124 communicating with the mounting groove 121 are provided on the mounting protrusion 123. Any lighting component 22 is disposed in the mounting hole 124.

[0047] The ring light source mechanism described above uses a mounting protrusion 123 on the mounting member 12 to fit the mounting groove 121. The mounting protrusion 123 is provided with a plurality of mounting holes 124 that communicate with the mounting groove 121. The lighting element 22 in each lighting component is set in the mounting hole 124. Since the mounting hole 124 and the mounting groove 121 are connected, the light emitted by the lighting element 22 can be directed from the mounting groove 121 to the focal point.

[0048] In one embodiment, such as Figure 1 As shown, the lighting elements 22 of any lighting component are installed at the same angle, while the lighting elements 22 of any two adjacent lighting components are installed at different angles, so that all the light rays are focused and concentrated.

[0049] The ring light source mechanism described above, by setting the installation angle of all the lighting elements 22 in each lighting assembly to be the same, allows the light emitted by all the lighting elements 22 in each lighting assembly to be focused at the focal point. By setting the installation angle of all the lighting elements 22 in two adjacent lighting assemblies to be different, the light emitted by all the lighting elements 22 in two adjacent lighting assemblies can still be focused at the focal point, thereby allowing the light emitted by the lighting elements 22 in all lighting assemblies to be focused at the focal point.

[0050] In one embodiment, such as Figure 1 As shown, the mounting structure 1 also includes a connector 13, which is disposed between the carrier 11 and the mounting member 12 to connect the carrier 11 and the mounting member 12. The connector 13 is adapted to be connected to the probe station.

[0051] The ring light source mechanism described above also includes a connector 13 by setting the mounting structure 1. In this embodiment, the connector 13 is a connecting plate. The connector 13 is specifically set between the carrier 11 and the mounting member 12, so that the connector 13 can connect the carrier 11 and the mounting member 12 together. At the same time, the connector 13 can also be connected to the probe station, so that the connector 13 can simultaneously mount the carrier 11 and the mounting member 12 on the probe station.

[0052] In one embodiment, such as Figure 1 As shown, the connector 13 has a plurality of connecting parts 131, and the connector 13 is adapted to be connected to the probe station through the connecting parts 131.

[0053] The ring light source mechanism described above can be connected to the probe station through a number of connecting parts 131 provided on the connector 13. In this embodiment, the connecting parts 131 are connecting holes.

[0054] According to an embodiment of the present invention, another aspect, a probe station is also provided, such as... Figure 1 As shown, it includes a lens and the aforementioned ring light source mechanism, with the lens positioned on the axis of the alignment hole 122.

[0055] The probe station with the above-described structure includes a lens and the aforementioned ring light source mechanism. This allows the probe station to emit different colors of light under the power control of the control unit 21 through the illumination structure set on the mounting structure 1. Thus, when testing different chips, the illumination structure can improve the light that the chip is sensitive to, thereby avoiding the need to change the ring light source mechanism to obtain different colors of light. This is beneficial to improving the chip testing efficiency.

[0056] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A ring light source mechanism characterized by comprising: include: The mounting structure (1) includes a spaced-apart support member (11) and a mounting member (12). The lighting structure includes a control element (21) and a plurality of lighting components. The control element (21) is disposed on the support element (11), and all the lighting components are spaced apart on the mounting element (12). Each lighting component is individually electrically connected to the control element (21) to emit light under the power control of the control element (21). In this embodiment, any one of the lighting components is configured to have a light of a single color, and the light emitted by all the lighting components is focused at a focal point to match the focal length of the lens.

2. The ring-shaped light source mechanism according to claim 1, characterized by, Each of the lighting components includes a plurality of lighting elements (22), all of which are spaced apart and arranged in a ring on the mounting member (12) so that the light emitted by all of the lighting elements (22) is focused at the focal point.

3. Ring light source mechanism according to claim 2, characterized in that Any of the lighting components is configured to have one of red light, white light, yellow light, green light, and blue light.

4. Ring light source mechanism according to claim 2 or 3, characterized in that The mounting component (12) has a mounting groove (121) on its front side, and all the lighting components are spaced apart on the inner wall of the mounting groove (121); the mounting groove (121) is flared in the direction away from the support component (11).

5. Ring light source mechanism according to claim 4, characterized in that The mounting groove (121) has an alignment hole (122) on its bottom surface. All the lighting elements (22) of any lighting assembly are arranged around the axis of the alignment hole (122) so that the axis of the alignment hole (122) covers the focal point.

6. Ring light source mechanism according to claim 5, characterized in that The mounting component (12) has a mounting protrusion (123) on its back side. The mounting protrusion (123) is adapted to the mounting groove (121). The mounting protrusion (123) has a plurality of mounting holes (124) that communicate with the mounting groove (121). Any of the lighting components (22) is disposed in the mounting hole (124).

7. Ring light source mechanism according to claim 6, characterized in that The lighting elements (22) of any of the lighting components are installed at the same angle, and the lighting elements (22) of any two adjacent lighting components are installed at different angles, so that all the light is focused on the focal point.

8. The ring-shaped light source mechanism according to claim 1, wherein The mounting structure (1) further includes a connector (13) disposed between the carrier (11) and the mounting (12) to connect the carrier (11) and the mounting (12), and the connector (13) is adapted to be connected to the probe station.

9. The ring light source mechanism according to claim 8, characterized in that, The connector (13) has a plurality of connecting parts (131) and the connector (13) is adapted to be connected to the probe station through the connecting parts (131).

10. A probe station characterized by The device includes a lens and an annular light source mechanism according to any one of claims 1-9, wherein the lens is disposed on the axis of the alignment hole (122).

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