Silane combustion tower

Abstract

The utility model discloses a kind of silane combustion towers, including tower body, including bottom box, vertical tower, narrowing section arranged sequentially from bottom to top;Bevel pipe, fixed in the top of bottom box, bevel pipe is staggered with vertical tower, bevel pipe is stretched into bottom box inside downwards;Fill layer, located in vertical tower;Nozzle, located in vertical tower and located above fill layer, nozzle can be sprayed to the top of fill layer;Wherein, the top of bevel pipe is waste gas inlet, narrowing section has waste gas outlet;Bottom box can store liquid, between the bottom of bevel pipe and the liquid level of liquid can form silane combustion section. Adopt this utility model bevel pipe and liquid level form combustion section, guarantee silane fully burns. Fill layer and nozzle enhance gas-liquid contact, improve purification effect. Overall structure design is reasonable, reliable in operation.

Description

Technical Field

[0001] This utility model relates to the field of industrial combustion towers, specifically to a silane combustion tower. Background Technology

[0002] In industries such as semiconductors and photovoltaics, silanes are commonly used raw materials, and their production and processing generate industrial exhaust gases containing silanes. Silanes are flammable and explosive, and direct emissions can cause environmental pollution and safety risks; therefore, dedicated combustion treatment equipment is required to purify the exhaust gases.

[0003] Some existing silane tail gas treatment devices suffer from problems such as incomplete combustion, uneven gas-liquid contact, and poor purification effects. Some devices also have drawbacks such as cumbersome maintenance, inconvenient liquid level control, and incomplete demisting. Sometimes it is difficult to balance treatment efficiency, emission compliance rate, and ease of operation, and cannot meet the needs of efficient, safe, and stable tail gas treatment in industrial production. Therefore, structural optimization of the silane combustion tower is crucial. Utility Model Content

[0004] The problem to be solved by this utility model is to provide a silane combustion tower.

[0005] To solve the above problems, this utility model provides a silane combustion tower. To achieve the above objectives, the technical solution adopted by this utility model to solve its technical problems is as follows: A silane combustion tower includes: a tower body comprising a bottom box, a vertical tower, and a narrowing section arranged sequentially from bottom to top; an inclined tube fixed to the top of the bottom box, the inclined tube being offset from the vertical tower and extending downward into the bottom box; a packing layer located inside the vertical tower; and a nozzle located inside the vertical tower and above the packing layer, the nozzle capable of spraying the top of the packing layer; wherein the top of the inclined tube is an exhaust gas inlet, and the narrowing section has an exhaust gas outlet; the bottom box can store liquid, and a silane combustion section can be formed between the bottom of the inclined tube and the liquid surface.

[0006] As a further improvement of this utility model, the plane where the bottom opening of the inclined tube is located forms a non-right angle with the axis of the inclined tube, and the bottom opening of the inclined tube faces the side closer to the vertical tower.

[0007] As a further improvement of this utility model, there are several oblique tubes, and the several oblique tubes are arranged in a rectangular array.

[0008] As a further improvement of this utility model, there are several nozzles, and the several nozzles are connected to a liquid supply pipe. The side wall of the tower body is provided with a pull-out spray port, and one end of the liquid supply pipe is located at the pull-out spray port.

[0009] As a further improvement of this utility model, the vertical height of the filling layer is greater than the horizontal width of the filling layer.

[0010] As a further improvement of this utility model, from bottom to top, the area enclosed by the horizontal cross-section of the narrowing section gradually decreases, the exhaust gas outlet is horizontally oriented, and the outer wall of the narrowing section is provided with a top viewing window, the top viewing window being oriented obliquely.

[0011] As a further improvement of this utility model, a demisting layer is provided above the nozzle.

[0012] As a further improvement of this utility model, the side wall of the tower body is provided with side viewing windows at the locations of the filling layer and the nozzle.

[0013] As a further improvement of this utility model, the side wall of the bottom box is provided with two level gauges of different heights; the top of the bottom box is provided with a water inlet.

[0014] As a further improvement of this utility model, the side wall of the bottom box is provided with a cleaning window, an overflow port, and a discharge port, which are arranged sequentially from top to bottom.

[0015] The beneficial technical effects of using the silane combustion tower of this application are: By extending the inclined pipe downwards into the bottom chamber and forming a silane combustion section with the liquid surface, the silane exhaust gas can directly contact the combustion environment after entering from the exhaust gas inlet, ensuring that the silane fully contacts the air and undergoes a combustion reaction, which can effectively solve the problem of incomplete combustion in traditional devices.

[0016] The combination of the filling layer inside the vertical tower and the nozzle above allows the exhaust gas after combustion to pass through the filling layer before contacting the spray liquid. The filling layer increases the gas-liquid contact area, and the spray liquid can fully neutralize and purify the exhaust gas, significantly improving the exhaust gas purification effect.

[0017] The tower body adopts a bottom box, vertical tower and narrowing section arranged from bottom to top, and the inclined pipe is staggered with the vertical tower, so that the exhaust gas flow path is designed reasonably, which not only ensures the smooth connection of the combustion and purification process, but also reduces airflow interference and improves the reliability of equipment operation. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a top view of one embodiment of the present invention; Figure 2 This is a front view of one embodiment of the present invention; Figure 3 This is a side view of one embodiment of the present invention.

[0020] 1-Tower body; 101-Narrowing section; 102-Vertical tower; 103-Bottom box; 2-Exhaust gas inlet; 3-Air volume regulating port; 4-Exhaust gas outlet; 5-Top viewing window; 6-Pull-out spray nozzle; 7-Side viewing window; 8-Water inlet; 9-Level gauge; 10-Cleaning viewing window; 11-Overflow port; 12-Discharge port; 13-Liquid surface; 14-Angled pipe; 15-Nozzle; 16-Liquid supply pipe; 17-Spray field; 18-Demisting layer; 19-Filling layer; 20-Silane combustion section. Detailed Implementation

[0021] The present invention will be further described in detail below with reference to specific embodiments: To achieve the purpose of this utility model, please refer to Figures 1 to 3 A silane combustion tower includes: a tower body 1, comprising a bottom box 103, a vertical tower 102, and a narrowing section 101 arranged sequentially from bottom to top; an inclined pipe 14 fixed to the top of the bottom box 103, offset from the vertical tower 102, and extending downward into the bottom box 103; a packing layer 19 located within the vertical tower 102; and a nozzle 15 located within the vertical tower 102 and above the packing layer 19, capable of spraying the top of the packing layer 19. The top of the inclined pipe 14 serves as an exhaust gas inlet 2, and the narrowing section 101 has an exhaust gas outlet 4. The bottom box 103 can store liquid, and a silane combustion section 20 can be formed between the bottom of the inclined pipe 14 and the liquid surface 13.

[0022] Figure 2 , Figure 3 Arrows indicate the directions of gas entry and exit.

[0023] The beneficial effects of adopting the above technical solution are as follows: Because silane tail gas spontaneously combusts upon contact with air, the silane tail gas generated during the production process is piped into a silane combustion tower for purification. Inside the combustion tower, silane fully contacts and combusts with air, producing silicon dioxide and water, and releasing a large amount of heat. The combusted gas passes through the packing layer and then enters the spray layer of the combustion tower. After being sprayed, the waste gas reacts with the neutralizing circulating liquid, and then enters the demister layer for demisting before being discharged into the atmosphere by an exhaust fan.

[0024] The inclined pipe 14 extends downwards into the bottom housing 103, forming a silane combustion section 20 between its bottom and the liquid surface 13. This allows the silane exhaust gas, entering from the exhaust gas inlet 2, to directly contact and fully combust with the air above the liquid surface, solving the problem of incomplete combustion in traditional devices. Simultaneously, the packing layer 19 within the vertical tower 102 works in conjunction with the upper nozzle 15. The combusted exhaust gas passes through the packing layer, increasing the gas-liquid contact area, and is then neutralized and purified by the spray liquid, significantly improving the exhaust gas purification effect. The tower body 1 adopts a bottom housing 103, vertical tower 102, and narrowing section 101 layout from bottom to top, with the inclined pipe 14 staggered from the vertical tower 102. This ensures a reasonable and orderly exhaust gas flow path, guaranteeing smooth connection between the combustion and purification processes, reducing airflow interference, and improving the reliability of equipment operation.

[0025] In some other embodiments of this utility model, the plane where the bottom opening of the oblique tube 14 is located forms a non-right angle with the axis of the oblique tube 14, and the bottom opening of the oblique tube 14 faces the side closer to the vertical tower 102.

[0026] The beneficial effects of adopting the above technical solution are: by directing the opening toward the side closer to the vertical tower 102, the exhaust gas can be effectively guided to spray toward the liquid surface 13 at a specific angle, thereby optimizing the mixing process of exhaust gas and air, enhancing the turbulence effect, and promoting faster combustion of silane in the combustion section 20.

[0027] like Figure 1 As shown, in some other embodiments of this utility model, there are several oblique tubes 14, and the several oblique tubes 14 are arranged in a rectangular array.

[0028] The beneficial effects of adopting the above technical solution are: setting multiple inclined pipes 14 and arranging them in a rectangular array allows the exhaust gas to enter the bottom box 103 evenly through multiple inlets, which expands the area of ​​the initial combustion reaction, improves the capacity and efficiency of single exhaust gas treatment, is conducive to meeting the demand for larger flow of exhaust gas treatment, and enhances the processing capacity of the equipment.

[0029] In some other embodiments of this utility model, there are several nozzles 15, and several nozzles 15 are connected to a liquid supply pipe 16. A pull-out spray port 6 is provided on the side wall of the tower body 1, and one end of the liquid supply pipe 16 is located at the pull-out spray port 6.

[0030] Each nozzle 15 forms a cone-shaped spray field 17.

[0031] The pull-out spray nozzle 6 can be pulled out horizontally for maintenance without disassembling the machine, balancing the observation through the spray window with the accuracy of spray coverage and ensuring the gas-liquid mixing effect.

[0032] The beneficial effects of adopting the above technical solution are: it achieves large-area uniform spraying of the top of the filling layer 19. The design of the pull-out spray port 6 makes it easy to pull out the end of the liquid supply pipe 16 from the side for maintenance without disassembling the main body of the equipment, which takes into account the visual observation and maintenance convenience of the spray system and ensures the gas-liquid mixing effect of the spray field 17.

[0033] In some other embodiments of this invention, the vertical height of the filling layer 19 is greater than the horizontal width of the filling layer 19.

[0034] The filling layer 19 uses φ50mm PP stepped ring packing, and the filling height of the filling layer 19 is 800mm. The top and bottom of the filling layer 19 are equipped with PP grid plates.

[0035] The beneficial effects of adopting the above technical solution are: this slender and tall design extends the path and time for the exhaust gas to pass through the packing layer, forcing the exhaust gas and the spray liquid to have more full contact and reaction on the surface of the packing, thereby significantly improving the removal efficiency of pollutants.

[0036] like Figure 3 As shown, in some other embodiments of this utility model, from bottom to top, the area enclosed by the horizontal cross-section of the narrowing section 101 gradually decreases, the exhaust outlet 4 is horizontal, and the outer wall of the narrowing section 101 is provided with a top viewing window 5, which is oriented obliquely.

[0037] The beneficial effects of adopting the above technical solution are: the gradually decreasing structure facilitates the smooth convergence and acceleration of exhaust gas before the outlet, reducing eddies and pressure losses. The horizontal orientation of the exhaust gas outlet 4 facilitates pipeline connection. The top viewing window 5, located on the outer wall of the narrowing section 101 and facing at an angle, provides a good viewing angle for observing the top of the tower and the area near the exhaust gas outlet 4, facilitating monitoring of the emission status.

[0038] In some other embodiments of this utility model, a demisting layer 18 is provided above the nozzle 15.

[0039] The demister layer 18 uses a PP baffle demister with a baffle angle of 30° and a spacing of 20m. It solves the problem of spray residue by physically intercepting and separating tiny droplets, thereby improving the cleanliness of the discharge.

[0040] The beneficial effects of adopting the above technical solution are: the demisting layer 18 can effectively capture and remove the fine droplets entrained in the exhaust gas after spray purification, prevent the droplets from being discharged with the exhaust gas, solve the problem of incomplete demisting in traditional equipment, thereby improving the cleanliness of the final exhaust gas and meeting stricter environmental emission requirements.

[0041] In some other embodiments of this utility model, the side wall of the tower body 1 is provided with side viewing windows 7 at the locations of the filling layer 19 and the nozzle 15, respectively.

[0042] The beneficial effects of adopting the above technical solution are: the side window 7 provides operators with a window to directly observe the internal packing status, spraying operation and gas-liquid contact effect, which facilitates daily inspection, fault diagnosis and maintenance operations, and improves the maintenance convenience of the equipment.

[0043] like Figure 2 As shown, in some other embodiments of this utility model, two level gauges 9 with different heights are provided on the side wall of the bottom tank 103. A water inlet 8 is provided on the top of the bottom tank 103.

[0044] The beneficial effects of adopting the above technical solution are: the level gauge 9 can more accurately monitor the fluctuation range and high and low limits of the liquid level 13. The water inlet 8 set at the top facilitates the direct replenishment of liquid into the tank. The combination of the two achieves accurate monitoring and convenient adjustment of the liquid level, ensuring the high stability of the combustion section 20 and the continuous and stable operation of the equipment.

[0045] like Figure 3 As shown, in some other embodiments of this utility model, the side wall of the bottom housing 103 is provided with a cleaning window 10, an overflow port 11, and a discharge port 12. The overflow port 11, the cleaning window 10, and the discharge port 12 are arranged sequentially from top to bottom.

[0046] The beneficial effects of adopting the above technical solution are: the overflow port 11 prevents the liquid level from becoming too high, and the cleaning window 10 facilitates observation of the sedimentation inside the tank. The bottom discharge port 12 is used to completely empty the waste liquid for cleaning. This layout makes liquid level control, status observation, and cleaning and maintenance operations more centralized and convenient, improving the operability and maintenance efficiency of the equipment.

[0047] In one embodiment, such as Figure 1 As shown, an airflow adjustment port 3 is provided on one side of the bottom housing 103.

[0048] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it. They should not be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be covered within the protection scope of this utility model.

Claims

1. A silane combustion tower, characterized in that, include: The tower body includes, from bottom to top, a bottom box, a vertical tower, and a narrowing section; An oblique-mouthed tube is fixed to the top of the bottom box body. The oblique-mouthed tube is offset from the vertical tower and extends downward into the interior of the bottom box body. The infill layer is located inside the vertical tower; The nozzle, located inside the vertical tower and above the filling layer, is capable of spraying the top of the filling layer; The top of the inclined tube is the exhaust gas inlet, and the narrowing section has an exhaust gas outlet. The bottom chamber can store liquid, and a silane combustion section can be formed between the bottom of the oblique tube and the liquid surface.

2. The silane combustion tower according to claim 1, characterized in that: The plane containing the bottom opening of the inclined tube forms a non-right angle with the axis of the inclined tube, and the bottom opening of the inclined tube faces the side closer to the vertical tower.

3. The silane combustion tower according to claim 1, characterized in that: The oblique-mouthed tubes are a number of tubes arranged in a rectangular array.

4. The silane combustion tower according to claim 1, characterized in that: The nozzles are multiple, and the multiple nozzles are connected to a liquid supply pipe. The side wall of the tower body is provided with a pull-out spray port, and one end of the liquid supply pipe is located at the pull-out spray port.

5. The silane combustion tower according to claim 1, characterized in that: The vertical height of the filling layer is greater than the horizontal width of the filling layer.

6. The silane combustion tower according to claim 1, characterized in that: From bottom to top, the area enclosed by the horizontal cross-section of the narrowing section gradually decreases, the exhaust outlet is horizontal, and the outer wall of the narrowing section is provided with a top viewing window, which is oriented at an angle.

7. The silane combustion tower according to claim 1, characterized in that: A demisting layer is provided above the nozzle.

8. The silane combustion tower according to claim 1, characterized in that: The side walls of the tower body are provided with side viewing windows at the locations of the filling layer and the nozzles, respectively.

9. The silane combustion tower according to claim 1, characterized in that: The side wall of the bottom box is equipped with two level gauges of different heights; A water inlet is provided at the top of the bottom box.

10. The silane combustion tower according to claim 1, characterized in that: The side wall of the bottom housing is provided with a cleaning window, an overflow port, and a discharge port, which are arranged in order from top to bottom.

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