Double-channel high-temperature push plate furnace hearth structure

Abstract

The utility model relates to high temperature push plate furnace technical field, specifically is a kind of double pass high temperature push plate furnace hearth structure. It includes furnace body, and the middle part of furnace body is provided with several vertical arrangement's partition beam brick, and partition beam brick divides the inside of furnace body into two chambers, and the bottom of chamber is provided with bottom brick, and bottom brick is fixedly provided with guiding assembly, and the lateral wall surface of chamber away from partition beam brick is provided with several parallel and side-by-side arrangement's vertical brick, and the upper end surface between vertical brick and partition beam brick is provided with arc brick, and the both ends of chamber are provided with annular brick, and annular brick is fixedly connected with bottom brick and arc brick;Arc brick is provided with fixed brick for fixing heating rod. Through the above technical scheme, the utility model solves the problem of low production efficiency of high temperature push plate furnace.

Description

Technical Field

[0001] This utility model relates to the field of high-temperature pusher furnace technology, specifically a dual-channel high-temperature pusher furnace furnace structure. Background Technology

[0002] High-temperature ceramic pusher tunnel furnaces with a temperature of 1650℃ are widely used in the market, mainly for sintering high-end ceramic substrates. These high-temperature pusher tunnel furnaces are expensive, have high requirements for temperature uniformity inside the kiln, and high stability of the furnace structure. With the expanding application of ceramic substrates in the semiconductor field, there are also higher requirements for the production capacity of such substrates.

[0003] High-temperature pusher tunnel furnaces are widely used in ceramic sintering applications. Existing technologies often employ a single-furnace structure for this type of furnace. However, the single-furnace structure suffers from low production efficiency, which hinders customers from increasing production capacity. Furthermore, high-temperature pusher tunnel furnaces are expensive and require a large footprint. If customers want to increase production capacity, they need to order multiple additional units, increasing their cost burden and making cost control difficult. Utility Model Content

[0004] In order to solve the problems in related technologies, this utility model provides a dual-channel high-temperature pusher furnace structure, which solves the problem of low production efficiency of high-temperature pusher furnaces.

[0005] To solve the above problems, the following technical solutions are provided: The present invention discloses a dual-channel high-temperature pusher furnace furnace structure, comprising a furnace body. A plurality of vertically arranged partition bricks are provided in the middle of the furnace body, dividing the furnace body into two chambers. Bottom bricks are provided at the bottom of each chamber, and guide components are fixedly mounted on the bottom bricks. A plurality of parallel vertical bricks are provided on the sidewalls of the chambers away from the partition bricks. An arc-shaped brick is provided between the upper surfaces of the vertical bricks and the partition bricks. Annular bricks are provided at both ends of the chambers, and the annular bricks are fixedly connected to the bottom bricks and the arc-shaped bricks. Fixing bricks for fixing heating rods are provided on the arc-shaped bricks.

[0006] The above solution divides the furnace body into two independent chambers by setting up partition bricks, forming a dual-channel sintering space. Compared with a single furnace structure, it can process twice the number of products simultaneously per unit time, doubling the production capacity and effectively meeting the growing demand for ceramic substrates in the semiconductor field, thereby solving the problem of low production efficiency of high-temperature pusher furnaces.

[0007] By setting the bottom bricks, a stable foundation is provided for the overall structure. Together with the side wall bricks and curved bricks, a symmetrical and stress-balanced furnace frame is constructed, which can effectively resist the thermal expansion and contraction effect under high temperature environment, avoid furnace deformation, ensure the uniformity of temperature inside the furnace, and reduce the risk of product scrap due to structural instability.

[0008] Furthermore, the guide assembly includes a support brick and a groove plate. The support brick is fixedly mounted on the bottom brick. A first through hole is provided in the middle of the support brick, and a second through hole is provided on the bottom brick. A protruding block is fixedly mounted on the lower end face of the groove plate. The protruding block passes through the first through hole and the second through hole, so that the support brick and the groove plate are fixedly connected.

[0009] In the above solution, the protruding block at the lower end of the groove plate passes through the first through hole and the second through hole to form a precise and firm connection structure. This effectively avoids the problem of the push plate shifting due to high temperature loosening, ensuring that the push plate drives the ceramic products to move smoothly in the furnace and reducing the risk of product collision damage.

[0010] Furthermore, the upright bricks and partition bricks are evenly distributed along the length of the furnace body, forming a first cavity between two adjacent upright bricks and a second cavity between two adjacent partition bricks. The fixing plates and arc-shaped bricks corresponding to the first cavity and the second cavity are provided with fixing holes for inserting heating rods. The heating rods are inserted into the first cavity and the second cavity respectively through the corresponding fixing holes.

[0011] In the above scheme, by setting up the first cavity and the second cavity, the heating rod is inserted into the first cavity and the second cavity through the corresponding fixing hole, so that the heat can be evenly diffused along the length of the furnace body, avoiding local temperature being too high or too low, improving the consistency of product sintering quality, and reducing product performance differences caused by uneven temperature.

[0012] Furthermore, the arc-shaped brick includes corner bricks and arched bricks. The corner bricks are respectively disposed on the columns and partition beams. The lower end surface of the corner bricks is provided with grooves, which are adapted to the upper end surfaces of the corresponding columns and partition beams. The arched bricks are disposed between the corner bricks.

[0013] In the above scheme, the grooves create a stable support between the corner bricks and the columns and partition bricks.

[0014] Furthermore, limiting plates are provided at both ends of the groove plate along the width direction of the furnace body.

[0015] The above scheme uses a limiting plate to create a lateral constraint on the pusher plate, effectively preventing the pusher plate from shifting laterally during its movement in the furnace.

[0016] Furthermore, maintenance ports are provided on the furnace sidewalls corresponding to the first cavity. The maintenance ports are connected to the first cavity, and a pull plate is provided inside the maintenance port. The pull plate is in a sliding fit with the furnace body.

[0017] With the maintenance port provided in the above solution, if the heating rod breaks or cannot be removed from the top, the staff can directly pull out the pull plate and quickly disassemble and replace the faulty heating rod through the maintenance port without disassembling the entire furnace structure, which helps to shorten maintenance time.

[0018] Furthermore, a through hole for installing a thermocouple is provided on the fixing brick corresponding to the middle of the chamber, and the lower end of the thermocouple extends into the chamber.

[0019] The above scheme uses through holes to install thermocouples, and the lower end of the thermocouple extends into the chamber, allowing it to directly contact the high-temperature environment inside the chamber and collect temperature data inside the chamber in real time and accurately.

[0020] The above solution has the following advantages: 1. The present invention relates to a dual-channel high-temperature pusher furnace structure, which divides the furnace body into two independent chambers by setting partition bricks, forming a dual-channel sintering space. Compared with a single furnace structure, it can process twice the number of products simultaneously per unit time, thereby doubling the production capacity and effectively meeting the growing production capacity demand for ceramic substrates in the semiconductor field.

[0021] 2. The base bricks provide a stable foundation for the overall structure. Together with the side wall bricks and curved bricks, they form a symmetrical and balanced furnace frame, which can effectively resist the thermal expansion and contraction effect under high temperature environment, avoid furnace deformation, ensure uniform temperature inside the furnace, and reduce the risk of product scrap due to structural instability. Attached Figure Description

[0022] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings, wherein: Figure 1 A schematic diagram of the furnace chamber structure of a dual-channel high-temperature pusher furnace; Figure 2 This is a top view of the furnace structure of a dual-channel high-temperature pusher furnace; Figure 3 for Figure 2 Sectional view of AA; Figure 4 for Figure 2 Sectional view of BB; Figure 5 for Figure 2 Sectional view of CC; Figure 6 This is a schematic diagram of the internal structure of a dual-channel high-temperature pusher furnace. Figure 7 for Figure 6 A sectional view; Figure 8 A schematic diagram illustrating the working process of a dual-channel high-temperature pusher furnace structure; Explanation of reference numerals in the attached drawings: 1. Furnace body; 2. Divider brick; 3. Chamber; 4. Bottom brick; 5. Vertical brick; 6. Annular brick; 7. Heating rod; 8. Fixing brick; 9. Support brick; 10. Groove plate; 11. Protruding block; 12. First cavity; 13. Second cavity; 14. Corner brick; 15. Arch top brick; 16. Limiting plate; 17. Maintenance port; 18. Pull plate; 19. Thermocouple; 20. Push plate. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] In specific embodiment 1, such as Figures 1-8 As shown, the furnace structure of this utility model, a dual-channel high-temperature pusher furnace, includes a furnace body 1. Several vertically arranged partition bricks 2 are arranged in the middle of the furnace body 1, dividing the furnace body 1 into two chambers 3. Bottom bricks 4 are provided at the bottom of each chamber 3, and guide components are fixedly installed on the bottom bricks 4. Several parallel vertical bricks 5 are arranged on the sidewalls of the chamber 3 away from the partition bricks 2. Arc-shaped bricks are provided between the upper surfaces of the vertical bricks 5 and the partition bricks 2. Annular bricks 6 are provided at both ends of the chamber 3, and the annular bricks 6 are fixedly connected to the bottom bricks 4 and the arc-shaped bricks. Fixing bricks 8 for fixing heating rods 7 are provided on the arc-shaped bricks. By setting the partition bricks 2, the furnace body 1 is divided into two independent chambers 3, forming a dual-channel sintering space. Compared with a single-furnace structure, twice the number of products can be processed simultaneously per unit time, doubling the production capacity and effectively meeting the increasing production capacity demand for ceramic substrates in the semiconductor field. This solves the problem of low production efficiency in high-temperature pusher furnaces. The base brick 4 provides a stable foundation for the overall structure. Together with the side wall bricks 5 and the arc-shaped bricks, a symmetrical and balanced furnace frame is constructed, which can effectively resist the thermal expansion and contraction effect under high temperature environment, avoid furnace deformation, ensure the uniformity of temperature inside the furnace, and reduce the risk of product scrap due to structural instability.

[0025] The guide assembly includes a support brick 9 and a groove plate 10. The support brick 9 is fixedly mounted on the bottom brick 4, and a first through hole is provided in the middle of the support brick 9. A second through hole is provided on the bottom brick 4. A protrusion 11 is fixedly mounted on the lower end face of the groove plate 10, and the protrusion 11 passes through the first through hole and the second through hole, so that the support brick 9 and the groove plate 10 are fixedly connected. The protrusion 11 at the lower end of the groove plate 10 passes through the first through hole and the second through hole, forming a precise and firm connection structure, which effectively avoids the problem of the push plate 20 shifting due to high temperature loosening, and ensures that the push plate 20 drives the ceramic product to move smoothly forward in the furnace, reducing the risk of product collision damage.

[0026] Limiting plates 16 are provided at both ends of the groove plate 10 along the width direction of the furnace body 1 to form a lateral constraint on the push plate 20, effectively preventing the push plate 20 from shifting laterally during its movement in the furnace.

[0027] The upright bricks 5 and the partition bricks 2 are evenly distributed along the length of the furnace body 1. A first cavity 12 is formed between two adjacent upright bricks 5, and a second cavity 13 is formed between two adjacent partition bricks 2. The fixing plates and arc-shaped bricks corresponding to the first cavity 12 and the second cavity 13 are provided with fixing holes for inserting heating rods 7. The heating rods 7 are inserted into the first cavity 12 and the second cavity 13 through the corresponding fixing holes. The insertion of the heating rods 7 into the first cavity 12 and the second cavity 13 through the corresponding fixing holes allows heat to be evenly diffused along the length of the furnace body 1, avoiding excessively high or low local temperatures, improving the consistency of product sintering quality, and reducing product performance differences caused by uneven temperature.

[0028] The arched bricks include corner bricks 14 and top bricks 15. The corner bricks 14 are respectively placed on the columns and beam bricks 2. The lower end surface of the corner bricks 14 is provided with grooves, which are adapted to the upper end surfaces of the corresponding columns and beam bricks 2. The top bricks 15 are placed between the corner bricks 14. The grooves provide stable support between the corner bricks 14 and the columns and beam bricks 2.

[0029] A through hole for installing a thermocouple 19 is provided on the fixing brick 8 in the middle of the chamber 3, and the lower end of the thermocouple 19 extends into the chamber 3. The thermocouple 19 can directly contact the high temperature environment inside the chamber 3 and collect temperature data inside the chamber 3 in real time and accurately.

[0030] In specific embodiment 2, the difference between this embodiment and embodiment 1 is that maintenance ports 17 are provided on the side wall of the furnace body 1 corresponding to the first cavity 12 in this embodiment. The maintenance ports 17 are connected to the first cavity 12. A pull plate 18 is provided in the maintenance port 17. The pull plate 18 is in sliding fit with the furnace body 1. When the heating rod 7 is broken or cannot be removed from the top, the staff can directly pull out the pull plate 18 and quickly disassemble and replace the faulty heating rod 7 through the maintenance port 17 without disassembling the entire furnace structure, which helps to shorten the maintenance time.

[0031] like Figure 8 As shown, during operation, the products to be sintered are placed on two sets of push plates 20. The two sets of push plates 20 enter the furnace synchronously along the groove plate 10 at the bottom of the corresponding chamber 3. After the push plates 20 carry the products completely into the two independent chambers 3, the heating rods 7 in the first cavity 12 and the second cavity 13 start working synchronously. Through heat conduction, the internal temperature of the two chambers 3 is rapidly raised to the preset sintering temperature. Then, the two sets of push plates 20 move smoothly in the corresponding chambers 3 at the same set speed. The products complete the sintering process synchronously in the two chambers 3, thus achieving efficient production with double the capacity.

[0032] In the description of this utility model, it should be understood that the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise specified and limited, it should be noted that the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to mechanical or electrical connections, or internal connections between two components, and can be direct connections or indirect connections through an intermediate medium. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0033] Obviously, the above embodiments are merely examples for clear illustration and are not intended to limit the implementation. For those skilled in the art, other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all implementation methods here, and any obvious variations or modifications derived therefrom are still within the protection scope of this utility model.

Claims

1. A dual-channel high-temperature pusher furnace structure, characterized in that, The furnace includes a furnace body, in which several vertically arranged partition bricks are arranged in the middle, dividing the furnace body into two chambers. The bottom of each chamber is provided with a bottom brick, and a guide component is fixedly installed on the bottom brick. Several parallel vertical bricks are arranged on the side wall of the chamber away from the partition bricks. An arc-shaped brick is provided between the upper end face of the vertical bricks and the partition bricks. Annular bricks are provided at both ends of the chamber, and the annular bricks are fixedly connected to the bottom bricks and the arc-shaped bricks. A fixing brick for fixing the heating rod is provided on the arc-shaped brick.

2. The furnace chamber structure of a dual-channel high-temperature pusher furnace as described in claim 1, characterized in that, The guide assembly includes a support brick and a groove plate. The support brick is fixedly mounted on the bottom brick. A first through hole is provided in the middle of the support brick, and a second through hole is provided on the bottom brick. A protruding block is fixedly mounted on the lower end face of the groove plate. The protruding block passes through the first through hole and the second through hole, so that the support brick and the groove plate are fixedly connected.

3. The dual-channel high-temperature pusher furnace structure as described in claim 1, characterized in that, The upright bricks and partition bricks are evenly distributed along the length of the furnace body. A first cavity is formed between two adjacent upright bricks, and a second cavity is formed between two adjacent partition bricks. Fixing holes for inserting heating rods are provided on the fixing plates and arc-shaped bricks corresponding to the first cavity and the second cavity, respectively. The heating rods are inserted into the first cavity and the second cavity through the corresponding fixing holes.

4. The furnace chamber structure of a dual-channel high-temperature pusher furnace as described in claim 1, characterized in that, The arc-shaped bricks include corner bricks and arched bricks. The corner bricks are respectively placed on the columns and partition beams. The lower end surface of the corner bricks is provided with grooves, which are adapted to the upper end surfaces of the corresponding columns and partition beams. The arched bricks are placed between the corner bricks.

5. The furnace chamber structure of a dual-channel high-temperature pusher furnace as described in claim 2, characterized in that, Limiting plates are provided at both ends of the groove plate along the width direction of the furnace body.

6. The dual-channel high-temperature pusher furnace structure as described in claim 3, characterized in that, Maintenance ports are provided on the side wall of the furnace body corresponding to the first cavity. The maintenance ports are connected to the first cavity. A pull plate is provided in the maintenance port, and the pull plate is in sliding cooperation with the furnace body.

7. The furnace chamber structure of a dual-channel high-temperature pusher furnace as described in claim 1, characterized in that, The fixed brick in the middle of the chamber has a through hole for installing a thermocouple, and the lower end of the thermocouple extends into the chamber.

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