Heat exchange structure for production of electronic-grade hydrofluoric acid

Abstract

The utility model discloses a heat exchange structure for electronic grade hydrofluoric acid production. The utility model discloses a support is provided with the base at the top, the middle position of base bottom is provided with the liquid flange, the outside of base top is provided with the middle section pipe fitting. The utility model discloses, is provided with heat exchange structure, makes the hydrogen fluoride steam can liquefy in heat exchange structure, through the cooperation of branch pipe and outer tube, hydrogen fluoride steam can enter the cooling liquefaction of branch pipe, and the branch pipe and outer tube between 45 degrees, make the liquefied hydrogen fluoride can flow from branch pipe to the inside of outer tube, can not exist the residual, can avoid the corrosion damage of heat exchange structure thus, prevent the leakage situation of hydrogen fluoride solution or coolant, and through the cooperation of inner tube, branch pipe and connecting pipe, make coolant can fully wrap heat exchange structure, increase the cooling surface of hydrogen fluoride steam, thereby hydrogen fluoride steam liquefaction efficiency.

Description

Technical Field

[0001] This utility model relates to the field of heat exchange device technology, specifically a heat exchange structure for the production of electronic-grade hydrofluoric acid. Background Technology

[0002] A heat exchanger is an energy-saving device that enables heat transfer between two or more fluids at different temperatures. It transfers heat from a higher-temperature fluid to a lower-temperature fluid, bringing the fluid temperature to the specified parameters of the process to meet the requirements of the process conditions. It is also one of the main devices for improving energy utilization efficiency.

[0003] Distillation is required in the production of electronic-grade hydrofluoric acid. Existing distillation equipment includes a heat exchange structure to liquefy hydrofluoric acid vapor into liquid hydrofluoric acid. However, the heat exchange structure in existing distillation equipment is mostly a serpentine structure, which is then placed in a coolant to allow the hydrofluoric acid vapor to liquefy within the serpentine structure. Due to the right-angle bends in this heat exchange structure, liquefied hydrofluoric acid residue remains at the right-angle bends, leading to corrosion and damage. This can easily cause hydrofluoric acid vapor to leak, and at the same time, coolant can enter the interior of the heat exchange structure, contaminating the hydrofluoric acid. Utility Model Content

[0004] The purpose of this invention is to provide a heat exchange structure for the production of electronic-grade hydrofluoric acid, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a heat exchange structure for electronic-grade hydrofluoric acid production, comprising:

[0006] The bracket has a base on top, a liquid outlet flange at the middle of the bottom of the base, a middle section pipe fitting on the outer side of the top of the base, a water outlet flange and a water inlet flange at the bottom and top of the outer surface of the middle section pipe fitting, a top cover on the top of the middle section pipe fitting, a steam inlet flange on the outer surface of the top cover, a heat exchange structure at the middle of the top of the base, and a sealing component on one side of the bottom of the base.

[0007] A heat exchange structure includes an outer tube, connecting pipes are arranged at equal intervals on the inner surface of the outer tube, an inner tube is arranged in the middle of the inner part of the outer tube through the connecting pipe, and multiple branch pipes are arranged at equal intervals on the outer surface of the outer tube.

[0008] Preferably, a fixing ring is provided on the top of the outer surface of the base, the bottom of the outer surface of the middle section pipe, and the bottom of the top and the outer surface of the top cover, and the base, the middle section pipe and the top cover are connected by the fixing ring.

[0009] Preferably, a connection port is provided at the middle position of the bottom of the base, and the base is connected to the liquid outlet flange through the connection port. Threads are provided on the bottom of the outer surface of the outer tube and the top of the inner surface of the liquid outlet flange, and the outer tube is threadedly connected to the liquid outlet flange through the threads.

[0010] Preferably, the top and bottom of the outer surface of the middle section pipe fitting are provided with round holes, and the bottom and top of the middle section pipe fitting are respectively connected to the outlet flange and the inlet flange through the round holes.

[0011] Preferably, the outer surface of the top cover has an opening, the top cover is connected to the steam inlet flange through the opening, and the steam inlet flange is connected to the outer pipe.

[0012] Preferably, the top of the outer tube is provided with a flow guide, the outer tube is connected to the inner tube through the flow guide, the outer tube and the inner tube are connected by a connecting pipe, and the two ends of the connecting pipe pass through the outer tube and the inner tube respectively and are connected to the outside.

[0013] Preferably, the branch pipe and the outer pipe are connected, there is a gap between the outer pipe and the inner pipe, the branch pipe is connected to the gap between the outer pipe and the inner pipe, and the branch pipe and the outer pipe are at a 45° angle.

[0014] Preferably, multiple guide plates are arranged at equal intervals on the inner surface of the inner tube, the guide plates on the inner tube are connected to the connecting pipe, and a water outlet is provided on one side of the bottom of the base, and the base is connected to the sealing component through the water outlet.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows: This heat exchange structure for electronic-grade hydrofluoric acid production is equipped with a heat exchange structure that allows hydrofluoric acid vapor to liquefy within the heat exchange structure. Through the cooperation of the branch pipe and the outer pipe, the hydrofluoric acid vapor can enter the branch pipe for cooling and liquefaction. At the same time, the branch pipe and the outer pipe are at a 45-degree angle, allowing the liquefied hydrofluoric acid to flow from the branch pipe to the interior of the outer pipe without any residue. This avoids corrosion damage to the heat exchange structure and prevents leakage of hydrofluoric acid solution or coolant. Furthermore, through the cooperation of the inner pipe, branch pipe, and connecting pipe, the coolant can fully enclose the heat exchange structure, increasing the cooling surface of the hydrofluoric acid vapor and thus improving the liquefaction efficiency of the hydrofluoric acid vapor. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0017] Figure 2 This is a front sectional view of the structure of this utility model;

[0018] Figure 3 This is a top sectional view of the heat exchange structure of this utility model;

[0019] Figure 4 This utility model Figure 2 Enlarged view of the structure at point A in the middle.

[0020] In the diagram: 1. Bracket; 2. Base; 3. Liquid outlet flange; 4. Intermediate pipe fitting; 5. Water outlet flange; 6. Water inlet flange; 7. Top cover; 8. Steam inlet flange; 9. Heat exchange structure; 90. Outer pipe; 91. Connecting pipe; 92. Inner pipe; 93. Branch pipe; 10. Sealing component. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present utility model, and not all of them. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1-4 This utility model provides an embodiment of a heat exchange structure for electronic-grade hydrofluoric acid production, comprising: a support 1, a base 2 on the top of the support 1, a liquid outlet flange 3 at the middle position of the bottom of the base 2, a middle section pipe 4 on the outer side of the top of the base 2, a water outlet flange 5 and a water inlet flange 6 respectively on the bottom and top of the outer surface of the middle section pipe 4, a top cover 7 on the top of the middle section pipe 4, a steam inlet flange 8 on the outer surface of the top cover 7, a heat exchange structure 9 at the middle position of the top of the base 2, and a sealing component 10 on one side of the bottom of the base 2; the heat exchange structure 9 includes an outer pipe 90, connecting pipes 91 are arranged equidistantly on the inner surface of the outer pipe 90, and a connecting pipe 91 is arranged at the middle position inside the outer pipe 90 through the middle position of the outer pipe 90. Multiple branch pipes 93 are equidistantly arranged on the outer surface of the inner pipe 92 and the outer pipe 90. The user introduces coolant into the middle section pipe fitting 4 through the water inlet flange 6, and then introduces hydrofluoric acid vapor into the heat exchange structure 9. The hydrofluoric acid vapor flows inside the heat exchange structure 9. Since the heat exchange structure 9 is equipped with the inner pipe 92, branch pipes 93 and connecting pipes 91, the coolant flows between the connecting pipes 91, the inner pipe 92 and the branch pipes 93, thereby increasing the cooling surface of the hydrofluoric acid vapor and improving the liquefaction efficiency of the hydrofluoric acid vapor. In addition, the branch pipes 93 can be at a 45-degree angle to the outer pipe 90, so that the hydrofluoric acid vapor in the branch pipes 93 can be introduced into the space between the outer pipe 90 and the inner pipe 92 after liquefaction, avoiding the presence of liquefied hydrofluoric acid residue inside the heat exchange structure 9 and preventing corrosion and damage to the heat exchange structure 9.

[0023] In this embodiment, fixing rings are provided on the top of the outer surface of the base 2, the bottom of the outer surface of the middle section pipe 4, and the bottom of the outer surface of the top cover 7. The base 2, the middle section pipe 4, and the top cover 7 are connected by fixing rings. The base 2, the middle section pipe 4, and the top cover 7 can be stably connected by fixing rings. If the heat exchange structure 9 is damaged, the user can disconnect the connection between the base 2, the middle section pipe 4, and the top cover 7 so that the user can replace the heat exchange structure 9.

[0024] In this embodiment, a connection port is provided at the middle position of the bottom of the base 2. The base 2 is connected to the liquid outlet flange 3 through the connection port. The bottom of the outer surface of the outer tube 90 and the top of the inner surface of the liquid outlet flange 3 are both provided with threads. The outer tube 90 is threadedly connected to the liquid outlet flange 3 through the threads. The liquid outlet flange 3 can be stably and firmly installed on the base 2 through the connection port, and the heat exchange structure 9 can be stably and firmly installed on the base 2 through the threads.

[0025] In this embodiment, the top and bottom of the outer surface of the middle section pipe fitting 4 are provided with round holes. The bottom and top of the middle section pipe fitting 4 are connected to the outlet flange 5 and the inlet flange 6 through the round holes, respectively. The outlet flange 5 and the inlet flange 6 can be stably and firmly installed on the middle section pipe fitting 4 through the round holes, and the connection between the outlet flange 5 and the inlet flange 6 and the middle section pipe fitting 4 is reinforced by welding.

[0026] In this embodiment, the outer surface of the top cover 7 has an opening, and the top cover 7 is connected to the steam inlet flange 8 through the opening. The steam inlet flange 8 is connected to the outer pipe 90. The steam inlet flange 8 is stably and firmly installed on the top cover 7 through the opening, and the connection between the steam inlet flange 8 and the top cover 7 is reinforced by welding.

[0027] In this embodiment, a flow guide is provided at the top of the outer pipe 90. The outer pipe 90 is connected to the inner pipe 92 through the flow guide. The outer pipe 90 and the inner pipe 92 are connected by a connecting pipe 91. The two ends of the connecting pipe 91 pass through the outer pipe 90 and the inner pipe 92 respectively and are connected to the outside. The flow guide can guide the coolant into the interior of the inner pipe 92, and the flow guide can also squeeze the hydrofluoric acid vapor, so that the hydrofluoric acid vapor can better enter the interior of the branch pipe 93.

[0028] In this embodiment, branch pipe 93 is connected to outer pipe 90, and there is a gap between outer pipe 90 and inner pipe 92. Branch pipe 93 is connected to the gap between outer pipe 90 and inner pipe 92, and branch pipe 93 is at a 45° angle to outer pipe 90. Outer pipe 90 and inner pipe 92 are connected by a guide and connecting pipe 91, so that there is a gap between outer pipe 90 and inner pipe 92. Hydrofluoric acid vapor flows in the gap between outer pipe 90 and inner pipe 92. At the same time, after hydrofluoric acid vapor is liquefied in branch pipe 93, it can flow into the gap between outer pipe 90 and inner pipe 92, and finally be discharged from liquid outlet flange 3.

[0029] In this embodiment, multiple guide plates are arranged at equal intervals on the inner surface of the inner tube 92. The guide plates on the inner tube 92 are connected to the connecting pipe 91. A water outlet is provided on one side of the bottom of the base 2. The base 2 is connected to the sealing member 10 through the water outlet. The coolant can flow in the connecting pipe 91 with the assistance of the guide plates, thereby improving the cooling surface of hydrofluoric acid vapor. When the user wants the coolant to flow completely out of the middle section pipe fitting 4 and the base 2, the user removes the sealing member 10 from the base 2 so that the coolant can be discharged from the water outlet.

[0030] Working principle: The user introduces coolant into the middle section pipe fitting 4 through the inlet flange 6, and then introduces hydrofluoric acid vapor into the heat exchange structure 9. The hydrofluoric acid vapor flows inside the heat exchange structure 9. Since the heat exchange structure 9 is equipped with an inner pipe 92, a branch pipe 93, and a connecting pipe 91, the coolant flows between the connecting pipe 91, the inner pipe 92, and the branch pipe 93, thereby increasing the cooling surface of the hydrofluoric acid vapor and improving the liquefaction efficiency of the hydrofluoric acid vapor. Furthermore, the branch pipe 93 can be at a 45-degree angle to the outer pipe 90, so that the liquefied hydrofluoric acid vapor in the branch pipe 93 can be introduced between the outer pipe 90 and the inner pipe 92, avoiding the presence of liquefied hydrofluoric acid residue inside the heat exchange structure 9 and preventing corrosion and damage to the heat exchange structure 9.

[0031] For those skilled in the art, this invention is not limited to the details of the exemplary embodiments described above, and can be implemented in other specific forms without departing from the spirit or scope of this invention. Therefore, the embodiments of this invention are exemplary and not restrictive. The scope of this invention is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A heat exchange structure for the production of electronic-grade hydrofluoric acid, characterized in that, include: A bracket (1) is provided with a base (2) on the top of the bracket (1). A liquid outlet flange (3) is provided at the middle position of the bottom of the base (2). A middle section pipe fitting (4) is provided on the outer side of the top of the base (2). A water outlet flange (5) and a water inlet flange (6) are provided at the bottom and top of the outer surface of the middle section pipe fitting (4) respectively. A top cover (7) is provided on the top of the middle section pipe fitting (4). A steam inlet flange (8) is provided on the outer surface of the top cover (7). A heat exchange structure (9) is provided at the middle position of the top of the base (2). A sealing component (10) is provided on one side of the bottom of the base (2). The heat exchange structure (9) includes an outer tube (90), connecting pipes (91) are arranged at equal intervals on the inner surface of the outer tube (90), an inner tube (92) is arranged in the middle position inside the outer tube (90) through the connecting pipe (91), and multiple branch pipes (93) are arranged at equal intervals on the outer surface of the outer tube (90).

2. The heat exchange structure for electronic-grade hydrofluoric acid production according to claim 1, characterized in that: The top of the outer surface of the base (2), the bottom of the outer surface of the middle section pipe (4), and the bottom of the outer surface of the top cover (7) are all provided with fixing rings. The base (2), the middle section pipe (4) and the top cover (7) are connected by fixing rings.

3. The heat exchange structure for electronic-grade hydrofluoric acid production according to claim 1, characterized in that: The base (2) has a connection port at the middle of its bottom. The base (2) is connected to the liquid outlet flange (3) through the connection port. The bottom of the outer surface of the outer tube (90) and the top of the inner surface of the liquid outlet flange (3) are both provided with threads. The outer tube (90) is threadedly connected to the liquid outlet flange (3) through the threads.

4. The heat exchange structure for electronic-grade hydrofluoric acid production according to claim 1, characterized in that: The top and bottom of the outer surface of the middle section pipe fitting (4) are provided with round holes, and the bottom and top of the middle section pipe fitting (4) are respectively connected to the outlet flange (5) and the inlet flange (6) through the round holes.

5. The heat exchange structure for electronic-grade hydrofluoric acid production according to claim 1, characterized in that: The top cover (7) has an opening on its outer surface. The top cover (7) is connected to the steam inlet flange (8) through the opening. The steam inlet flange (8) is connected to the outer pipe (90).

6. The heat exchange structure for electronic-grade hydrofluoric acid production according to claim 1, characterized in that: The top of the outer tube (90) is provided with a flow guide. The outer tube (90) is connected to the inner tube (92) through the flow guide. The outer tube (90) and the inner tube (92) are connected by a connecting pipe (91). The two ends of the connecting pipe (91) pass through the outer tube (90) and the inner tube (92) respectively and are connected to the outside.

7. The heat exchange structure for electronic-grade hydrofluoric acid production according to claim 1, characterized in that: The branch pipe (93) is connected to the outer pipe (90), and there is a gap between the outer pipe (90) and the inner pipe (92). The branch pipe (93) is connected to the gap between the outer pipe (90) and the inner pipe (92), and the branch pipe (93) is at a 45° angle to the outer pipe (90).

8. The heat exchange structure for electronic-grade hydrofluoric acid production according to claim 1, characterized in that: Multiple guide plates are arranged at equal intervals on the inner surface of the inner tube (92). The guide plates on the inner tube (92) are connected to the connecting pipe (91). A water outlet is provided on one side of the bottom of the base (2). The base (2) is connected to the sealing member (10) through the water outlet.

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