Parallelism detection device and parallelism detection apparatus

Abstract

The utility model discloses a parallelism detection device and parallelism detection equipment, wherein, parallelism detection device carries out parallelism detection through the method of detecting trace displacement, including a fixed part, a steering unit, a detection part and a displacement sensor. Steering unit is connected fixed part through a first pivot, wherein one end of steering unit is connected detection part, and the other end contacts displacement sensor. The fixed part of parallelism detection device is used to place on a loading platform of bonding mechanism, wherein when the detection part is pressed by the pressing unit of bonding mechanism, the steering unit will swing relative to the fixed part with the first pivot as the axis, so that the movable part of displacement sensor generates displacement, the distance between the pressing surface of pressing unit and the bearing surface of loading platform is measured, and bonding mechanism can be corrected according to the measurement result.

Description

Technical Field

[0001] This utility model relates to a parallelism detection device and parallelism detection equipment, which can be used to perform horizontal correction on a pressing unit and a platform of a bonding mechanism. Background Technology

[0002] With advancements in semiconductor technology, electronic products are increasingly trending towards thinner, smaller, higher-performance, more reliable, and smarter designs. Chips within these products significantly impact their performance; for example, thinner chips can improve heat dissipation efficiency, enhance mechanical properties, improve electrical performance, and reduce package size and weight.

[0003] Therefore, during the chip manufacturing process, wafers are ground and thinned to reduce chip thickness, lower resistance, increase processing speed, and extend lifespan. However, the structure of thinned wafers is very fragile, making them prone to warping or breakage in subsequent processes, thus reducing product yield.

[0004] To avoid the aforementioned problems, wafers are typically bonded to a carrier substrate, which supports the thinned wafers to prevent warping or breakage during the manufacturing process.

[0005] Specifically, an adhesive can be applied to the surfaces of the substrate and the wafer. The substrate and wafer are then moved to a bonding mechanism for alignment, and the laminated wafer and substrate are bonded together using the bonding unit and stage of the bonding mechanism. After bonding, processes such as thinning, etching, and metallization can be performed on the wafer.

[0006] However, if the bonding unit and the stage are not kept parallel during the bonding process, the bonding force applied by the bonding unit and the stage to different areas of the wafer and the carrier substrate may be uneven, resulting in bonding bubbles in the adhesive between the wafer and the carrier substrate, and poor total thickness variation (TTV) of the bonded wafer and the carrier substrate. Utility Model Content

[0007] To address the problems encountered in existing technologies, this invention proposes a parallelism detection device. This device accurately measures the distance between the pressing surface of the bonding unit and the bearing surface of the stage in a bonding mechanism. Based on the measurement results, the bonding unit and stage can be adjusted to ensure that the pressing surface of the bonding unit is parallel to the bearing surface of the stage. The parallel bonding unit and stage apply uniform pressure to the stacked wafers and substrate, reducing the likelihood of bonding bubbles forming in the adhesive layer between the wafer and the substrate, thereby improving the overall thickness variation of the bonded wafer and substrate.

[0008] One objective of this invention is to provide a parallelism detection device, comprising a fixing member, a steering unit, a detection unit, and a displacement sensor. The steering unit is connected to the fixing member via a first rotating shaft, wherein one end of the steering unit is connected to the detection unit, and the other end contacts the displacement sensor.

[0009] During measurement, the parallelism detection device can be placed on the platform of the bonding mechanism. When the detection unit is subjected to pressure from the pressing unit of the bonding mechanism, it will cause the steering unit to swing relative to the fixed part around the first axis. By adjusting the distance between the first axis and the detection unit, the swing angle or displacement of the steering unit can be amplified, so that the small displacement on the detection unit can be magnified to improve the detection accuracy. The swinging steering unit applies pressure to the displacement sensor, causing a movable part of the displacement sensor to move, thereby measuring the distance between the pressing surface of the pressing unit and the bearing surface of the platform. Then, the pressing unit and the platform can be calibrated based on the measurement results to make the pressing surface of the pressing unit parallel to the bearing surface of the platform.

[0010] One objective of this invention is to provide a parallelism detection device for detecting minute displacements of a pressing unit and measuring the parallelism between the pressing unit and the platform. The device includes a fixing member, a steering unit, a detection unit, a connecting rod, and a displacement sensor. The steering unit is connected to the fixing member via a first rotating shaft. One end of the connecting rod is connected to the detection unit, and the other end is connected to the steering unit.

[0011] During measurement, the parallelism detection device can be placed on the platform of the bonding mechanism. When the detection unit is subjected to pressure from the pressing unit of the bonding mechanism, it will drive the steering unit to swing relative to the fixed part around the first rotating axis via a connecting rod. The swinging steering unit will apply pressure to the displacement sensor, causing a movable part of the displacement sensor to be displaced, and the distance between the pressing surface of the pressing unit and the bearing surface of the platform will be measured.

[0012] One objective of this invention is to provide a parallelism testing device, which mainly includes a base on which multiple parallelism testing devices are mounted. The parallelism testing device can simultaneously measure the distance between the pressing surfaces of pressing units in multiple regions and the bearing surfaces of the platform, and can adjust the pressing units and platform based on the measurement results, significantly reducing the time spent measuring and calibrating the bonding mechanism.

[0013] To achieve the above objectives, this utility model proposes a parallelism detection device, comprising: a fixing member for placing on a platform of a bonding mechanism; a steering unit connected to the fixing member via a first rotating shaft, wherein the steering unit includes a first connecting portion and a second connecting portion, the first connecting portion and the second connecting portion having an angle of less than 180 degrees; a detection unit for contacting a pressing unit of the bonding mechanism, wherein when the detection unit is subjected to pressure applied by the pressing unit, it will drive the steering unit to swing relative to the fixing member around the first rotating shaft; and a displacement sensor disposed on the fixing member for sensing the displacement of the steering unit.

[0014] In at least one embodiment of the parallelism detection device, a linkage part is further included. The linkage part is connected to the steering unit. When the steering unit swings, it will drive the linkage part to move, so that the linkage part pushes a movable part of the displacement sensor to move.

[0015] In at least one embodiment of the parallelism detection device, a connecting rod is further included. The connecting rod is connected to a fixing member via a second rotating shaft. One end of the connecting rod is connected to a steering unit, and the other end of the connecting rod is connected to a detection unit. When the detection unit is subjected to pressure applied by the pressing unit, it will cause the connecting rod to swing relative to the fixing member with the second rotating shaft as the axis. The connecting rod will cause the steering unit to swing, causing a movable part of the displacement sensor to be displaced.

[0016] In at least one embodiment of the parallelism detection device, the distance between the second rotating shaft and the steering unit is greater than the distance between the second rotating shaft and the detection unit.

[0017] In at least one embodiment of the parallelism detection device, the steering unit includes a pusher portion, the steering unit is connected to a connecting rod via a first connecting shaft, and the pusher portion of the steering unit is used to apply pressure to the displacement sensor.

[0018] In at least one embodiment of the parallelism detection device, the fixing member includes a setting groove and at least one guide groove. The setting groove is used to accommodate the fixing member, the steering unit and the detection part. The guide groove communicates with the setting groove and is used to accommodate the first connecting shaft, so that the first connecting shaft is displaced along the guide groove.

[0019] This utility model proposes a parallelism detection device, comprising: a base for placing on a platform of a bonding mechanism, the base including multiple receiving slots and multiple through holes, wherein the multiple through holes are respectively connected to the multiple receiving slots; and multiple parallelism detection devices, respectively disposed in the multiple receiving slots of the base, and including: a fixing member; a steering unit connected to the fixing member via a first rotating shaft, wherein the steering unit includes a first connecting part and a second connecting part, the first connecting part and the second connecting part having an angle of less than 180 degrees; a detection part for contacting a pressing unit of the bonding mechanism, wherein when the detection part is subjected to pressure applied by the pressing unit, it will drive the steering unit to swing relative to the fixing member around the first rotating shaft; and a displacement sensor disposed on the fixing member and used to sense the displacement of the steering unit.

[0020] In at least one embodiment of the parallelism detection device, a connecting rod is further included. The connecting rod is connected to the fixing member via a second rotating shaft. One end of the connecting rod is connected to the steering unit, and the other end of the connecting rod is connected to the detection unit. When the detection unit is subjected to pressure applied by the pressing unit, it will cause the connecting rod to swing relative to the fixing member with the second rotating shaft as the axis. The connecting rod will cause the steering unit to swing, causing a movable part of the displacement sensor to be displaced.

[0021] In at least one embodiment of the parallelism detection device, the steering unit includes a pushing part, the steering unit is connected to the connecting rod via a first connecting shaft, and the pushing part of the steering unit is used to apply pressure to the displacement sensor.

[0022] In at least one embodiment of the parallelism detection device, the fixing member includes a setting groove and at least one guide groove. The setting groove is used to accommodate the fixing member, the steering unit and the detection part. The guide groove communicates with the setting groove and is used to accommodate the first connecting shaft, so that the first connecting shaft is displaced along the guide groove. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the bonding mechanism. Figure 2 This is a three-dimensional schematic diagram of an embodiment of the parallelism detection device for the bonding mechanism of this utility model; Figure 3 This is a perspective view of another embodiment of the parallelism detection device for the bonding mechanism of this utility model; Figure 4 This is a three-dimensional schematic diagram of an embodiment of the parallelism detection device for the bonding mechanism of this utility model.

[0024] Explanation of reference numerals in the attached figures 10: Bonding mechanism 11: Platform 111: Bearing surface 13: Pressing Unit 131: Pressing surface 15: Cavity 151: Enclosed Space 17: Air extraction motor 20: Parallelism testing device 21: Fasteners 221: First pivot 223: First connecting shaft 225: Second connecting shaft 23: Detection Department 25: Steering Unit 251: First connecting part 253: Second connecting part 27: Linkage Section 29: Displacement sensor 291: Movable Part 30: Parallelism testing device 31: Fasteners 311: First connecting hole 313: Set a groove 315: Guide groove 321: First pivot 323: Second pivot 325: First connecting shaft 327: Second connecting shaft 33: Detection Department 331: Perforation 333: Connecting hole 35: Steering Unit 351: First connecting hole 353: Second connecting hole 355: Pushing part 37: Linkage 371: First connecting hole 373: Second connecting hole 375: Third connecting hole 39: Displacement sensor 391: Movable Part 40: Parallelism testing equipment 41: base body 411: Receiving slot 413: Perforation. Detailed Implementation

[0025] Figure 1 This is a schematic diagram of the bonding mechanism. Figure 2This is a perspective view of an embodiment of the parallelism detection device for the bonding mechanism of this utility model. As shown in the figure, the bonding mechanism 10 mainly includes a platform 11, a pressing unit 13, and a cavity 15, wherein the platform 11 and the pressing unit 13 are located inside the cavity 15. The platform 11 can be disposed on the bottom surface inside the cavity 15, while the pressing unit 13 is located on the top surface inside the cavity 15, wherein the pressing unit 13 faces the platform 11 and can be displaced relative to the platform 11.

[0026] In practical applications, the stacked carrier substrate and wafer can be placed on the stage 11, wherein an adhesive can be provided between the carrier substrate and the wafer. The pressing unit 13 can be displaced toward the stage 11 and press the carrier substrate and wafer located between the stage 11 and the pressing unit 13 to complete the bonding between the carrier substrate and the wafer.

[0027] During the bonding process of the substrate and the wafer, a sealed space 151 is formed inside the cavity 15. The gas in the sealed space 151 can be extracted by a vacuum motor 17. The stage 11 and the pressing unit 13 will bond the substrate and the wafer in the vacuum sealed space 151 to improve the accuracy of the bonding of the substrate and the wafer.

[0028] While the bonding mechanism 10 described above can complete the bonding of the carrier substrate and the wafer, if the carrier surface 111 of the stage 11 and the pressing surface 131 of the pressing unit 13 are not kept parallel, it may result in an undesirable total thickness variation of the carrier substrate and the wafer after bonding. For example, if the adhesive is not evenly distributed between the carrier substrate and the wafer, the adhesive between some parts of the carrier substrate and the wafer will be thicker, making the total thickness of the carrier substrate, adhesive, and wafer in that area greater than in other areas.

[0029] When grinding and thinning a wafer bonded to a substrate, if the wafer is not kept flat, the grinding thickness of different areas of the wafer will be inconsistent. For example, in areas where the total thickness of the substrate, adhesive, and wafer is large, the wafer will be thinned by grinding, resulting in the wafer in that area being thinner after debonding than in other areas.

[0030] When wafers with uneven thickness are subsequently cut into chips, the different thicknesses of each chip will result in significant differences in the electrical properties of the produced chips, which may affect the reliability and yield of the chips.

[0031] Therefore, this utility model proposes a parallelism detection device 20 for bonding mechanism, which can be used to measure the distance or parallelism between the platform 11 and the pressing unit 13 of the bonding mechanism 10, and can adjust the bearing surface 111 of the platform 11 and the pressing surface 131 of the pressing unit 13 to be parallel to each other based on the measurement results.

[0032] In one embodiment of this utility model, such as Figure 2 As shown, the parallelism detection device 20 mainly includes a fixing member 21, a detection unit 23, a steering unit 25 and a displacement sensor 29. The fixing member 21 can be a block-shaped base, such as a square body, and the parallelism detection device 20 can be placed on the bearing surface 111 of the stage 11 through the fixing member 21.

[0033] The steering unit 25 is connected to the fixing member 21 via a first pivot 221, wherein the steering unit 25 can swing relative to the fixing member 21 with the first pivot 221 as the axis. One end of the steering unit 25 is connected to the detection unit 23, for example, one end of the steering unit 25 can be connected to the detection unit 23 via a first connecting shaft 223, wherein the steering unit 25 can swing relative to the detection unit 23 with the first connecting shaft 223 as the axis, and the other end of the steering unit 25 can be used to apply pressure to the displacement sensor 29.

[0034] Specifically, the displacement sensor 29 can be a linear variable differential transformer (LVDT), which can be mounted on the fixed member 21. The displacement sensor 29 includes a movable part 291. When the movable part 291 is displaced, the displacement sensor 29 will output signals of different magnitudes, such as different voltages. In use, the displacement of the movable part 291 can be determined from the signal output by the displacement sensor 29, and the displacement of the detection unit 23 can be calculated to determine the distance between the pressing surface 131 of the pressing unit 13 and the bearing surface 111 of the stage 11.

[0035] In one embodiment of the present invention, the steering unit 25 may be a curved rod. For example, the steering unit 25 may include a first connecting part 251 and a second connecting part 253, wherein the first connecting part 251 and the second connecting part 253 have an angle of less than 180 degrees.

[0036] The first connecting part 251 of the steering unit 25 can be connected to the detection part 23 via the first connecting shaft 223, while the second connecting part 253 of the steering unit 25 can be used to apply pressure to the displacement sensor 29 and cause the movable part 291 of the displacement sensor 29 to be displaced.

[0037] In one embodiment of the present invention, the second connecting part 253 of the steering unit 25 can be connected to a linkage part 27 through a second connecting shaft 225. When the steering unit 25 swings, it will drive the linkage part 27 to move, so that the linkage part 27 pushes the movable part 291 of the displacement sensor 29 to move.

[0038] Specifically, the steering unit 25 can redirect the force acting on the detection unit 23 to different directions. For example, the force exerted by the pressing unit 13 on the detection unit 23 will be perpendicular to the bearing surface 111 of the stage 11, while the force exerted by the steering unit 25 on the displacement sensor 29 will be parallel to the bearing surface 111 of the stage 11. By using the steering unit 25, the length of the parallelism detection device 20 can be reduced, making the parallelism detection device 20 more suitable for use inside the sealed cavity 15.

[0039] In one embodiment of this utility model, the detection unit 23 and / or the linkage unit 27 may be a columnar body, wherein a through hole is provided on the side surface of the columnar body, and the first connecting shaft 223 and the second connecting shaft 225 can pass through the through hole on the detection unit 23 and the linkage unit 27 respectively. The detection unit 23 and the linkage unit 27 may be connected to the steering unit 25 through the first connecting shaft 223 and the second connecting shaft 225 respectively, wherein the steering unit 25 may swing relative to the detection unit 23 and / or the linkage unit 27.

[0040] When measuring the parallelism of the bonding mechanism 10, the parallelism detection device 20 can be placed on the bearing surface 111 of the stage 11 of the bonding mechanism 10 via the fixing member 21, with a portion of the detection part 23 protruding from the fixing member 21. The pressing unit 13 is displaced towards the stage 11, and the pressing surface 131 of the pressing unit 13 contacts and pushes the detection part 23 of the parallelism detection device 20, causing the detection part 23 to displace towards the stage 11. The displacement of the detection part 23 causes the connected steering unit 25 to swing, and the swinging steering unit 25 applies pressure to the displacement sensor 29, causing the movable part 291 of the displacement sensor 29 to displace. The displacement sensor 29 measures the displacement of the pressing surface 131 of the pressing unit 13 to determine the distance between the pressing surface 131 of the pressing unit 13 and the bearing surface 111 of the stage 11. In another embodiment of this invention, the steering unit 25 can apply pressure to the displacement sensor 29 via the linkage part 27.

[0041] The parallelism testing device 20 can then be moved to other areas of the bearing surface 111 of the stage 11. For example, the parallelism testing device 20 can be moved to three different areas on the bearing surface 111 of the stage 11, and the above steps can be repeated. In this way, it can be determined whether the pressing surface 131 of the pressing unit 13 is parallel to the bearing surface 111 of the stage 11. Based on the measurement results of the parallelism testing device 20, the pressing unit 13 and / or the stage 11 are adjusted so that the pressing surface 131 of the pressing unit 13 is parallel to the bearing surface 111 of the stage 11.

[0042] Figure 3 This is a perspective view of another embodiment of the parallelism detection device for the bonding mechanism of this utility model. Please refer to the accompanying diagram. Figure 1 The parallelism detection device 30 mainly includes a fixing member 31, a detection unit 33, a steering unit 35, a connecting rod 37 and a displacement sensor 39. The fixing member 31 can be a block-shaped base, and the parallelism detection device 30 can be placed on the bearing surface 111 of the platform 11 through the fixing member 31.

[0043] One end of the connecting rod 37 is connected to the steering unit 35. For example, a first connecting hole 371 can be provided at one end of the connecting rod 37, and a first connecting hole 351 is provided on the steering unit 35. The first connecting shaft 325 passes through the first connecting hole 371 of the connecting rod 37 and the first connecting hole 351 of the steering unit 35 to connect the connecting rod 37 and the steering unit 35. The steering unit 35 and the connecting rod 37 can swing relative to each other with the first connecting shaft 325 as the axis.

[0044] In one embodiment of this utility model, a guide groove 315 may be provided on the fixing member 31, wherein the first connecting shaft 325, which is disposed in the first connecting hole 351 of the steering unit 35 and the first connecting hole 371 of the connecting rod 37, may be located in the guide groove 315. When the connecting rod 37 swings relative to the fixing member 31 with the second rotating shaft 323 as the axis, the first connecting shaft 325 may be displaced along the guide groove 315.

[0045] The other end of the connecting rod 37 is connected to the detection unit 33. For example, the detection unit 33 can be a columnar body. A through hole 331 or a groove can be provided on the side surface of the detection unit 33, and the other end of the connecting rod 37 can be inserted into the through hole 331 or groove of the detection unit 33. In practical applications, a second connecting hole 373 can be provided on the connecting rod 37, and a connecting hole 333 can be provided on the side surface of the detection unit 33, wherein the connecting hole 333 communicates with the through hole 331. After the connecting rod 37 is inserted into the through hole 331 of the detection unit 33, the second connecting shaft 327 can be passed through the connecting hole 333 of the detection unit 33 and the second connecting hole 373 of the connecting rod 37 to mount the detection unit 33 on the connecting rod 37.

[0046] The steering unit 35 includes a second connecting hole 353, while the fixing member 31 is provided with a first connecting hole 311. After aligning the second connecting hole 353 of the steering unit 35 with the first connecting hole 311 of the fixing member 31, a first rotating shaft 321 can pass through the second connecting hole 353 of the steering unit 35 and the first connecting hole 311 of the fixing member 31, wherein the steering unit 35 can swing relative to the fixing member 31 with the first rotating shaft 321 as the axis.

[0047] A third connecting hole 375 may be provided on the connecting rod 37, wherein the third connecting hole 375 is located between the first connecting hole 371 and the second connecting hole 373. A second rotating shaft 323 may pass through the third connecting hole 375 of the connecting rod 37 and mount the connecting rod 37 on the fixing member 31, wherein the connecting rod 37 can swing relative to the fixing member 31 with the second rotating shaft 323 as the axis.

[0048] In practical applications, the parallelism detection device 30 can be placed on the bearing surface 111 of the stage 11 of the bonding mechanism 10, with a portion of the detection part 33 protruding from the fixing member 31. The pressing unit 13 is moved towards the stage 11, and the pressing surface 131 of the pressing unit 13 contacts and pushes the detection part 33 of the parallelism detection device 30, causing the detection part 33 to move towards the stage 11. When the detection part 33 moves, it will cause the connected connecting rod 37 to swing around the second rotating shaft 323, and through the connecting rod 37, it will drive the steering unit 35 to swing. The closer the second rotating shaft 323 is to the detection part 33, the larger the swing angle or displacement of the steering unit 35 will be, in order to detect smaller displacements of the pressing unit 13. The swinging steering unit 35 applies pressure to the displacement sensor 39, causing the movable part 391 of the displacement sensor 39 to be displaced, so as to measure the distance between the pressing surface 131 of the pressing unit 13 and the bearing surface 111 of the stage 11 by means of the displacement sensor 39.

[0049] In one embodiment of the present invention, the displacement sensor 39 can be mounted on the fixing member 31, and the pushing part 355 on the steering unit 35 will contact the movable part 391 of the displacement sensor 39 and apply pressure to the displacement sensor 39.

[0050] The fixing member 31 of this utility model embodiment may include at least one setting groove 313, wherein the guide groove 315 on the fixing member 31 communicates with the setting groove 313, and the detection unit 33, the connecting rod 37 and the steering unit 35 can be arranged in the setting groove 313 of the fixing member 31.

[0051] In this embodiment of the invention, a connecting rod 37 is mainly provided on the parallelism detection device 30, and a detection unit 33 and a steering unit 35 are respectively provided at both ends of the connecting rod 37. The distance between the third connecting hole 375 and the second connecting hole 373 of the connecting rod 37 is smaller than the distance between the third connecting hole 375 and the first connecting hole 371, so that the distance between the second rotating shaft 323 and the steering unit 35 is greater than the distance between the second rotating shaft 323 and the detection unit 33. As a result, the displacement generated by the detection unit 33 when it is pressed by the pressing unit 13 will be amplified, and the steering unit 35 will produce a larger swing and / or displacement, thereby improving the accuracy and sensitivity of the displacement sensor 39 in measuring the distance between the pressing surface 131 of the pressing unit 13 and the bearing surface 111 of the stage 11.

[0052] Figure 4 This is a perspective view of an embodiment of the parallelism testing device for the bonding mechanism of this utility model. Please refer to the accompanying diagram. Figure 1 , Figure 2 and Figure 3 The parallelism testing device 40 mainly includes a base 41 and multiple parallelism testing devices 20 / 30. The parallelism testing device 40 can be placed on the stage 11 of the bonding mechanism 10 through the base 41. For example, the base 41 can be disc-shaped.

[0053] In one embodiment of this utility model, the base 41 of the parallelism testing device 40 may include a plurality of receiving slots 411, and can accommodate... Figure 2 or Figure 3 The parallelism detection device 20 / 30 is installed in the receiving groove 411 of the base 41.

[0054] In addition, the base 41 of the parallelism testing device 40 also includes a plurality of through holes 413, wherein each through hole 413 is located on the upper surface of the base 41 and is connected to each receiving groove 411 respectively. Figure 2 or Figure 3 When the parallelism detection device 20 / 30 is installed in the receiving groove 411 of the base 41, the detection part 23 / 33 of the parallelism detection device 20 / 30 will be located in the through hole 413, and part of the detection part 23 / 33 will protrude from the through hole 413 and can be used to contact and measure the pressing surface 131 of the pressing unit 13.

[0055] The parallelism detection device 40 described in this embodiment of the present invention includes multiple parallelism detection devices 20 / 30, and the detection units 23 / 33 of each parallelism detection device 20 / 30 can simultaneously measure the pressing surfaces 131 of multiple regions of the pressing unit 13, thereby improving the measurement efficiency. For example, the parallelism detection device 40 may include three parallelism detection devices 20 / 30, and the parallelism between the pressing surfaces 131 of the pressing unit 13 and the bearing surfaces 111 of the platform 11 can be determined by the three parallelism detection devices 20 / 30.

[0056] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model. All equivalent variations and modifications made in accordance with the shape, structure, features and spirit described in the claims of the present utility model should be included within the scope of the claims of the present utility model.

Claims

1. A parallelism detection device, characterized in that, include: A fastener for placing on a platform of a bonding mechanism; A steering unit is connected to the fixing member via a first rotating shaft, wherein the steering unit includes a first connecting part and a second connecting part, the first connecting part and the second connecting part having an angle of less than 180 degrees; A detection unit for contacting a pressing unit of the bonding mechanism; and A displacement sensor is mounted on the fixing member and used to sense the displacement of the steering unit.

2. The parallelism detection device as described in claim 1, characterized in that, It also includes a linkage that connects to the steering unit.

3. The parallelism detection device as described in claim 1, characterized in that, It also includes a link that connects to the fixing member via a second pivot. One end of the link is connected to the steering unit, and the other end is connected to the detection unit.

4. The parallelism detection device as described in claim 3, characterized in that, The distance between the second rotating shaft and the steering unit is greater than the distance between the second rotating shaft and the detection unit.

5. The parallelism detection device as described in claim 3, characterized in that, The steering unit includes a pusher portion, which is connected to the linkage via a first connecting shaft, and the pusher portion of the steering unit is used to apply pressure to the displacement sensor.

6. The parallelism detection device as described in claim 5, characterized in that, The fastener includes a recess and at least one guide groove. The recess is used to accommodate the fastener, the steering unit and the detection unit. The guide groove communicates with the recess and is used to accommodate the first connecting shaft, so that the first connecting shaft is displaced along the guide groove.

7. A parallelism testing device, characterized in that, include: A body for placing on a platform of a bonding mechanism, the body including a plurality of receiving slots and a plurality of through holes, wherein the plurality of through holes are respectively connected to the plurality of receiving slots; and Multiple parallelism detection devices are respectively disposed in the multiple receiving slots of the base, and include: One fastener; A steering unit is connected to the fixing member via a first rotating shaft, wherein the steering unit includes a first connecting part and a second connecting part, the first connecting part and the second connecting part having an angle of less than 180 degrees; A detection unit for contacting a pressing unit of the bonding mechanism; and A displacement sensor is mounted on the fixing member and used to sense the displacement of the steering unit.

8. The parallelism testing device as described in claim 7, characterized in that, It also includes a link that connects to the fixing member via a second pivot. One end of the link is connected to the steering unit, and the other end is connected to the detection unit.

9. The parallelism testing device as described in claim 8, characterized in that, The steering unit includes a pusher portion, which is connected to the linkage via a first connecting shaft, and the pusher portion of the steering unit is used to apply pressure to the displacement sensor.

10. The parallelism testing device as described in claim 9, characterized in that, The fastener includes a recess and at least one guide groove. The recess is used to accommodate the fastener, the steering unit and the detection unit. The guide groove communicates with the recess and is used to accommodate the first connecting shaft, so that the first connecting shaft is displaced along the guide groove.

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