Laser focal spot analysis device

Abstract

This invention relates to a laser focal spot analysis device, comprising a focusing device main unit, a magnification fine-tuning component, and a five-dimensional adjustment platform. The focusing device main unit includes a housing and an imaging camera and a first wedge mirror respectively disposed at the light inlet and first light outlet of the housing. The magnification fine-tuning component is disposed within the optical path channel and includes an objective lens, a field-of-view fine-tuning tube, a second wedge mirror, and optical lenses sequentially arranged between the first wedge mirror and the imaging camera. The focusing device main unit is disposed on the five-dimensional adjustment platform, and its attitude is adjusted by the five-dimensional adjustment platform to achieve focusing of the imaging camera. The optical path system formed by this invention eliminates the need for cumbersome and time-consuming construction, resulting in a compact and small structure that is more convenient to store, move, and install. Furthermore, it offers flexible operation and adjustment, meeting the requirements for laser beam quality monitoring and reliably completing the debugging and calibration of laser equipment.

Description

Technical Field

[0001] This utility model relates to the field of laser focal spot analysis, and in particular to a laser focal spot analysis device. Background Technology

[0002] Currently, laser applications, represented by ultrafast and ultraviolet laser processing and surface treatment, have entered the micro-nano scale stage. The size, shape, and beam quality of the laser focal spot directly determine the processing accuracy and quality.

[0003] Laser focal spot analyzers are focal spot parameter analysis systems specifically developed for demanding laser applications. They can be used to monitor laser beam quality, ensuring processing accuracy and efficiency. Furthermore, they can be used for debugging and calibration of laser equipment on production lines. However, existing laser focal spot analyzers require the construction of an external optical path system using various optical components, which is not only cumbersome and time-consuming, but also requires debugging after completion. This makes them inefficient and cost-effective in practice. Additionally, because existing laser focal spot analyzers are constructed on a temporary basis, they are susceptible to external environmental influences during optical path analysis and testing, resulting in poor accuracy and a lack of flexible adjustment capabilities.

[0004] Therefore, this utility model proposes a laser focal spot analysis device to overcome the shortcomings of the prior art. Utility Model Content

[0005] The purpose of this invention is to provide a laser focal spot analysis device. It features an integrated structure and modular assembly, forming an anti-interference optical path system. This eliminates the need for cumbersome and time-consuming construction of the optical path system. The device is not only compact and small, making it more convenient to store, move, and install, but also flexible in operation and adjustment. It can meet the needs of laser beam quality monitoring and reliably complete the debugging and calibration of laser equipment.

[0006] The objective of this utility model can be achieved by the following solutions:

[0007] This utility model provides a laser focal spot analysis device, the laser focal spot analysis device comprising:

[0008] The focusing device main unit includes:

[0009] The housing has an optical path channel formed inside it, and the two ends of the housing have an inlet and a first outlet that are connected to the optical path channel, respectively.

[0010] An imaging camera is disposed at the first light outlet and is used to image a focal spot image of the laser passing through the optical path channel.

[0011] A first wedge-shaped mirror is disposed within the optical path channel and located below the light inlet;

[0012] Magnification fine-tuning component, the magnification fine-tuning component comprising:

[0013] An objective lens is fixedly disposed within the optical path channel and located between the light inlet and the first light outlet; the objective lens is used to magnify the focal spot image.

[0014] A field-of-view fine-tuning lens barrel is movably disposed within the optical path channel, and the field-of-view fine-tuning lens barrel is located between the objective lens and the first light outlet. The magnification fine-tuning component has a convex lens, and by adjusting the distance between the convex lens and the objective lens, the laser can be focused onto the imaging camera.

[0015] The second wedge mirror is fixedly disposed in the optical path channel and located between the field-of-view fine-tuning lens barrel and the imaging camera. The second wedge mirror is used to make the laser in the imaging band enter the imaging camera in a straight line.

[0016] A five-dimensional adjustment platform is provided, on which the focusing device host is mounted. The orientation of the focusing device host is adjusted by the five-dimensional adjustment platform to enable the imaging camera to focus.

[0017] In a preferred embodiment of the present invention, the objective lens and the field-of-view fine-tuning lens tube are both located between the first wedge lens and the second wedge lens, and at least one optical lens is disposed between the second wedge lens and the imaging camera. The optical lens is used to reduce the intensity of the laser in the imaging band.

[0018] The first wedge lens, the objective lens, the field-of-view fine-tuning lens tube, the second wedge lens, and at least one of the optical lenses cooperate to form a focal spot sampling lens combination.

[0019] In a preferred embodiment of the present invention, the line connecting the center of the first wedge mirror to the center of the second wedge mirror is orthogonal to the line connecting the center of the second wedge mirror to the light input port of the imaging camera.

[0020] In a preferred embodiment of this utility model, the optical path channel from the light inlet to the first light outlet includes a first straight section, a bend section, and a second straight section connected in sequence. The light inlet is located at the top of the first straight section and away from the bend section. The light-injection surface of the first wedge mirror is obliquely disposed towards the light inlet and the objective lens, respectively. The first wedge mirror is used to reflect the laser of the imaging band that is vertically injected into the light inlet into the first straight section, so that the laser of the imaging band is injected straight into the objective lens.

[0021] In a preferred embodiment of the present invention, the bottom of the first straight section and the end away from the angled section has a second light outlet. The second light outlet is connected to the optical path channel and is vertically opposite to the first wedge mirror. The laser in the non-imaging band that is vertically injected into the light inlet passes through the first wedge mirror and is emitted from the second light outlet.

[0022] In a preferred embodiment of the present invention, the second wedge mirror is fixedly disposed within the angled segment, and the light-incidence surface of the second wedge mirror is respectively obliquely disposed towards the first straight segment and the second straight segment. The second wedge mirror is used to reflect the laser passing through the first straight segment into the second straight segment, so that the laser of the imaging band enters the imaging camera in a straight line.

[0023] In a preferred embodiment of this utility model, the field-of-view fine-tuning lens tube includes a cylindrical adjusting tube body, the convex lens is disposed inside the adjusting tube body, the outer wall of the adjusting tube body has an external thread, the inner wall of the optical path channel has an internal thread, the adjusting tube body and the optical path channel are connected by the external thread and the internal thread, and the distance between the convex lens and the objective lens is adjusted by adjusting the screw position of the adjusting tube body and the optical path channel.

[0024] In a preferred embodiment of this utility model, the number of optical lenses is multiple, and the multiple optical lenses are multiple lenses with different optical densities. The multiple lenses with optical densities from small to large are arranged at intervals along the direction from away from the imaging camera to close to the imaging camera.

[0025] In a preferred embodiment of the present invention, the laser focal spot analysis device further includes a fixed-distance micrometer, which is disposed above the light inlet of the main unit of the focusing device. The magnification of the focal spot image is determined by the image displayed in the imaging camera through the fixed-distance micrometer.

[0026] In a preferred embodiment of the present invention, the top of the five-dimensional adjustment platform has a mounting surface, a first mounting bracket is provided on the mounting surface, and the main unit of the focusing device is mounted on the first mounting bracket.

[0027] In a preferred embodiment of the present invention, the laser focal spot analysis device further includes a second mounting bracket, which is located on one side of the five-dimensional adjustment platform, and the fixed-distance micrometer is disposed on the second mounting bracket;

[0028] The second mounting bracket is also provided with a plane mirror, which is located above the micrometer. The plane mirror is used to reflect the laser emitted by the light source vertically to the micrometer.

[0029] In a preferred embodiment of this utility model, the effective aperture of the laser focal spot analysis device is greater than 20mm.

[0030] As described above, the features and advantages of the laser focal spot analysis device of this utility model are:

[0031] The optical path system formed by the focusing device host, magnification fine-tuning component and five-dimensional adjustment platform in this application does not require cumbersome and time-consuming construction. It is not only compact and small in structure, but also more convenient to store, move and install. Moreover, it is flexible in operation and adjustment, and can meet the needs of laser beam quality monitoring and reliably complete the debugging and calibration of laser equipment. Attached Figure Description

[0032] The following figures are intended only to illustrate and explain the present invention and do not limit the scope of the present invention. Wherein:

[0033] Figure 1 This is a schematic diagram of the structure of the laser focal spot analysis device of this utility model;

[0034] Figure 2 This is a schematic diagram of the main unit of the focusing device in the laser focal spot analysis device of this utility model;

[0035] Figure 3 This is a schematic diagram of the five-dimensional adjustment platform in the laser focal spot analysis device of this utility model;

[0036] Figure 4 This is a schematic diagram of the optical path in the laser focal spot analysis device of this utility model.

[0037] The reference numerals in the accompanying drawings of this utility model are:

[0038] 1. Outer casing; 101. Optical path channel;

[0039] 1011. First straight section; 1012. Angle section;

[0040] 1013, Second straight section; 102, Light inlet;

[0041] 103. Adjustment port; 104. Second light outlet;

[0042] 2. First wedge lens; 3. Objective lens;

[0043] 4. Magnification fine-tuning component; 401. Convex lens;

[0044] 402. Adjusting cylinder body; 4021. External thread;

[0045] 5. Second wedge mirror; 6. Optical lens;

[0046] 7. Imaging camera; 8. Five-dimensional adjustment platform;

[0047] 801. Mounting surface; 9. First mounting bracket;

[0048] 10. Second mounting bracket; 11. Plane reflector;

[0049] 12. Micrometer with fixed distance; 13. Light source;

[0050] 14. Lifting support; 15. Coking device main unit. Detailed Implementation

[0051] The technical solution of this utility model will be described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that these embodiments are only used to illustrate this utility model and are not intended to limit the scope of this utility model. After reading this utility model, any modifications of this utility model in various equivalent forms by those skilled in the art will fall within the scope defined by the appended claims.

[0052] It should be noted that when an element is referred to as being "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0053] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0054] Implementation Method 1

[0055] like Figures 1 to 4 As shown, this utility model provides a laser focal spot analysis device, which includes a focusing device main unit 15, a magnification fine-tuning component 4, and a five-dimensional adjustment platform 8. Wherein:

[0056] The focusing device main unit 15 includes a housing 1, an imaging camera 7, and a first wedge mirror 2. An optical path channel 101 is formed inside the housing 1. One end of the housing 1 has an inlet 102 communicating with the optical path channel 101, and the other end of the housing 1 has a first outlet 1 communicating with the optical path channel 101. The imaging camera 7 is fixedly installed at the first outlet 1, and the light inlet of the imaging camera 7 is aligned with the first outlet 1. After the laser enters the optical path channel 101 through the inlet 102, it can pass through the optical path channel 101 and enter the imaging camera 7 through the first outlet 1, thereby imaging the laser passing through the optical path channel 101 to form a focal spot image. The first wedge mirror 2 is installed inside the optical path channel 101 and located below the inlet 102. The first wedge mirror 2 can reflect the laser of the imaging band that enters from the inlet 102, so that the laser of the imaging band enters the optical path channel 101 in a straight line.

[0057] The magnification fine-tuning component 4 includes an objective lens 3, a field-of-view fine-tuning tube, and a second wedge mirror 5. The objective lens 3 is fixedly disposed within the optical path channel 101 and located between the light inlet 102 and the first light outlet. The laser passes through the objective lens 3 during its journey through the optical path channel 101, thereby magnifying the focal spot image on the imaging camera 7. The field-of-view fine-tuning tube is movably disposed within the optical path channel 101 and is located between the objective lens 3 and the first light outlet. The magnification fine-tuning component 4 has a convex lens 401. By adjusting the distance between the convex lens 401 and the objective lens 3, the laser can be focused onto the imaging camera 7. The second wedge mirror 5 is fixedly disposed within the optical path channel 101 and located between the field-of-view fine-tuning tube and the imaging camera 7. The placement of the second wedge mirror 5 allows the laser in the imaging band to enter the imaging camera 7 in a straight line.

[0058] The focusing device host 15 is mounted on the five-dimensional adjustment platform 8. The attitude of the focusing device host 15 can be adjusted through the five-dimensional adjustment platform 8 so that the imaging camera 7 can be focused.

[0059] The optical path system formed by the combination of the focusing device host 15, the magnification fine-tuning component 4, and the five-dimensional adjustment platform 8 in this invention does not require cumbersome and time-consuming construction. It is not only compact and small in structure, but also more convenient to store, move, and install. Moreover, it is flexible in operation and adjustment, which can meet the needs of laser beam quality monitoring, perfectly realize field-of-view fine-tuning and fine focusing, and reliably complete the debugging and calibration of laser equipment.

[0060] In this invention, the objective lens 3 and the field-of-view fine-tuning lens tube are both located between the first wedge lens 2 and the second wedge lens 5. At least one optical lens 6 is also provided between the second wedge lens 5 and the imaging camera 7. The optical lens 6 can reduce the intensity of the laser in the imaging band, preventing excessive laser intensity from damaging the imaging camera 7. This invention, through the combination of the first wedge lens 2, objective lens 3, field-of-view fine-tuning lens tube, second wedge lens 5, and at least one optical lens 6 to form a focal spot sampling lens, has the advantages of high resolution, high imaging quality, and a high damage threshold. Furthermore, its structure is simpler and its practicality is enhanced.

[0061] In this invention, the focusing device host 15 works in conjunction with the magnification fine-tuning component 4, that is, by using a combination of a high magnification attenuation optical path and a magnification fine-tuning lens, the focal spot size parameters can be adjusted more precisely.

[0062] In an optional embodiment of this invention, the line connecting the center of the first wedge mirror 2 to the center of the second wedge mirror 5 is orthogonal to the line connecting the center of the second wedge mirror 5 to the light inlet port of the imaging camera 7. During use, by rationally configuring the parameters of the first wedge mirror 2 and the second wedge mirror 5, a uniformly shaped light spot with attenuated energy can be formed to enter the imaging camera 7, effectively ensuring the imaging quality of the focal spot.

[0063] In one optional embodiment of this utility model, such as Figure 2 and Figure 4As shown, the outer casing 1 has an "L"-shaped cylindrical structure, and an "L"-shaped optical path channel 101 is formed inside the outer casing 1. Specifically, from the light inlet 102 to the first light outlet, the optical path channel 101 includes a first straight section 1011, a bend section 1012, and a second straight section 1013 connected in sequence. The bend section 1012 is a 90° bend channel, while the first straight section 1011 and the second straight section 1013 are both straight channels extending in a straight line direction, and the extension direction of the first straight section 1011 is perpendicular to the extension direction of the second straight section 1013. The light inlet 102 is located in the first straight section 1011. At the top of the end of the optical path channel 101, away from the angled section 1012, and below the light inlet 102, there is a first wedge mirror 2. The light-injection surface of the first wedge mirror 2 is obliquely facing the light inlet 102 and the objective lens 3, respectively. The external laser is vertically downward injected into the light inlet 102, and the first wedge mirror 2 at the light inlet 102 is used to reflect the laser of the imaging band vertically injected into the light inlet 102 into the first straight section 1011, so that the laser of the imaging band is straight injected into the objective lens 3.

[0064] Furthermore, such as Figure 2 As shown, a second light-emitting port 104 is located at the bottom of the first straight section 1011, away from the angled section 1012. The second light-emitting port 104 is connected to the optical path channel 101 and is vertically opposite to the first wedge mirror 2. Laser light of the non-imaging band that is vertically incident into the light-emitting port 102 passes through the first wedge mirror 2 and exits through the second light-emitting port 104. The first wedge mirror 2 can reflect the laser light of the desired imaging band, while the laser light of the non-imaging band can pass through the first wedge mirror 2 and exit through the second light-emitting port 104, which plays a role in appropriately attenuating the laser light, achieving fine focusing, and improving the image quality of the focal spot. The objective lens 3 and the magnification fine-tuning component 4 are both located in the first straight section 1011 between the first wedge mirror 2 and the second wedge mirror 5, and the objective lens 3 and the magnification fine-tuning component 4 are arranged at intervals along the direction from the first wedge mirror 2 to the second wedge mirror 5.

[0065] Furthermore, such as Figure 2As shown, since the optical path channel 101 has a bend segment 1012, in order to ensure that the laser can enter from the first straight segment 1011 into the second straight segment 1013, in this embodiment, the second wedge mirror 5 is fixedly disposed within the bend segment 1012. The light-incident surface of the second wedge mirror 5 is obliquely oriented towards the first straight segment 1011 and the second straight segment 1013, respectively. Through the reflection of the second wedge mirror 5, the laser in the imaging band that has passed through the first straight segment 1011 is reflected into the second straight segment 1013, so that the laser in the imaging band enters the imaging camera 7 in a straight line. Among them, the line connecting the center of the first wedge mirror 2 to the center of the second wedge mirror 5 is orthogonal to the line connecting the center of the second wedge mirror 5 to the light-incident port of the imaging camera 7. The cooperation of the first wedge mirror 2 and the second wedge mirror 5 can effectively attenuate the laser, achieve fine focusing, and improve the quality of the focal spot imaging.

[0066] In one optional embodiment of this utility model, such as Figure 2 As shown, the magnification fine-tuning component 4 also includes a cylindrical adjustment cylinder body 402. The convex lens 401 is fixedly disposed inside the adjustment cylinder body 402. The outer wall of the adjustment cylinder body 402 has an external thread 4021, and the inner wall of the optical path channel 101 has an internal thread at a position opposite to the adjustment cylinder body 402. The outer wall of the adjustment cylinder body 402 and the inner wall of the optical path channel 101 are connected by the external thread 4021 and the internal thread. By adjusting the screw connection position between the adjustment cylinder body 402 and the optical path channel 101, the distance between the convex lens 401 and the objective lens 3 can be adjusted.

[0067] Furthermore, such as Figure 2 As shown, an adjustment port 103 is provided on the outer shell 1 at a position opposite to the adjustment cylinder body 402. When the adjustment cylinder body 402 is installed in the optical path channel 101, at least part of the outer wall of the adjustment cylinder body 402 is exposed in the adjustment port 103. The operator can rotate the adjustment cylinder body 402 through the adjustment port 103 to adjust the screw connection position between the adjustment cylinder body 402 and the optical path channel 101, thereby achieving the effect of autonomous control of the distance between the convex lens 401 and the objective lens 3. During use, it can be adjusted according to the actual situation to ensure the flexibility of adjustment.

[0068] In one optional embodiment of this utility model, such as Figure 2 and Figure 4As shown, there are multiple optical lenses 6, each with a different optical density (OD value). Multiple slots are spaced apart on the second straight section 1013 of the housing 1, allowing the optical lenses 6 to be inserted into their respective slots for easy assembly and disassembly. The lenses, with increasing optical density, are arranged sequentially along the direction from furthest from the imaging camera 7 to closest to it within the second straight section 1013 and inserted into their corresponding slots. In practical use, the number of optical lenses 6 can be adjusted to reduce the intensity of the laser beam entering the imaging camera 7, achieving a suitable laser intensity without damaging the camera 7 while maintaining image quality. One method for adjusting the number of optical lenses 6 is to remove one or more lenses 6 from their respective slots in ascending order of optical density, gradually adjusting the laser intensity to obtain a suitable intensity.

[0069] In some alternative embodiments of this utility model, the optical lens 6 is a filter that can filter out lasers of a set wavelength. By filtering out lasers of a specific wavelength, the intensity of the laser rays incident on the imaging camera 7 can also be reduced, thus achieving the effect of ensuring image quality without damaging the imaging camera 7.

[0070] In this invention, the imaging camera 7 may be, but is not limited to, a CMOS / CCD camera.

[0071] In one optional embodiment of this utility model, such as Figure 1 As shown, the laser focal spot analysis device also includes a distance micrometer 12, which is set above the light inlet 102 of the focusing device host 15. The magnification of the focal spot image can be determined by the image displayed in the imaging camera 7 through the distance micrometer 12.

[0072] In this invention, the five-dimensional adjustment platform 8 can adopt an existing platform structure. That is, if the vertical incident direction of the laser is defined as the Z-axis, then the directions perpendicular to the laser incident direction are defined as the X-axis and Y-axis (the X-axis and Y-axis are also perpendicular). The five-dimensional adjustment platform 8 is layered with a first platform that can translate along the X-axis, a second platform that can translate along the Y-axis, a third platform that can translate along the Z-axis, a fourth platform that can swing along the X-axis (i.e., an X-axis swing slide), and a fifth platform that can rotate along the Z-axis (i.e., a Z-axis rotary table). These platforms are distributed vertically and are driven by corresponding drive cylinders to adjust the attitude of the focusing device host 15. This ensures that the laser focus is displayed on the screen of the imaging camera 7. Furthermore, by adjusting the attitude of the focusing device host 15, the laser focus can be positioned at the center of the screen of the imaging camera 7, thereby improving image quality. Since the five-dimensional adjustment platform 8 adopts an existing platform structure, its specific structure will not be described in detail here.

[0073] Furthermore, such as Figure 1 and Figure 3 As shown, the top of the five-dimensional adjustment platform 8 has a mounting surface 801, on which a first mounting bracket 9 is provided. The focusing device host 15 is fixedly mounted on the first mounting bracket 9. The five-dimensional adjustment platform 8 can drive the mounting surface 801 to move, thereby driving the first mounting bracket 9 and the focusing device host 15 mounted on the first mounting bracket 9 to move, thereby achieving the purpose of adjusting the posture of the focusing device host 15.

[0074] The first mounting bracket 9 may be, but is not limited to, a vertically arranged "L"-shaped steel.

[0075] In one optional embodiment of this utility model, such as Figure 1 As shown, the laser focal spot analysis device also includes a second mounting bracket 10. The second mounting bracket 10 can be, but is not limited to, a vertically arranged mounting column. The second mounting bracket 10 is located on one side of the five-dimensional adjustment platform 8, and the bottom of the second mounting bracket 10 and the bottom of the five-dimensional adjustment platform 8 are both fixed on the same operating plane. The micrometer 12 is mounted on the second mounting bracket 10. In addition, a plane mirror 11 is also mounted on the second mounting bracket 10. The plane mirror 11 is located above the micrometer 12, and the light incident surface of the plane mirror 11 is obliquely facing the light source 13 and the micrometer 12. The plane mirror 11 is used to reflect the laser emitted from the light source 13 vertically to the micrometer 12, so that the laser enters the optical path channel 101 from the light inlet 102.

[0076] The second mounting bracket 10 can be a telescopic mounting column, allowing the height of the micrometer 12 to be adjusted by regulating the telescopic length of the second mounting bracket 10. Alternatively, multiple second mounting brackets 10 can be provided, each with a different height for the micrometer 12, allowing for selection of different heights for the micrometer 12 during actual use.

[0077] In one optional embodiment of this utility model, such as Figure 1 As shown, the laser focal spot analysis device also includes a lifting support 14, on which the light source 13 is mounted. The height of the light source 13 can be adjusted by the lifting support 14 to ensure that the laser emitted from the light source 13 can be directed straight towards the plane mirror 11. The light source 13 can be, but is not limited to, a laser.

[0078] This invention comprehensively considers factors such as the utilization rate of the overall space in the device, polarization insensitivity, and lens protection. Specifically, the laser focal spot analysis device has an effective aperture greater than 20mm, is insensitive to polarization direction, and is suitable for Gaussian fitting, focal position stability testing, and other applications.

[0079] The features and advantages of this laser focal spot analysis device are:

[0080] I. The laser focal spot analysis device, through the optical path system formed by the combination of the focusing device host 15, the magnification fine-tuning component 4 and the five-dimensional adjustment platform 8, does not require cumbersome and time-consuming construction. It is not only compact and small in structure, but also more convenient to store, move and install. Moreover, it is flexible in operation and adjustment, which can meet the needs of laser beam quality monitoring, perfectly realize field of view fine-tuning and fine focusing, and reliably complete the debugging and calibration of laser equipment.

[0081] Second, this laser focal spot analysis device, through the cooperation of the focusing device host 15 and the magnification fine adjustment component 4, that is, by using a combination of a high magnification attenuation optical path and a magnification fine adjustment lens, can more accurately adjust the focal spot size parameters.

[0082] Third, in this laser focal spot analysis device, the first wedge mirror 2 and the second wedge mirror 5 are orthogonally matched, and by reasonably configuring the parameters of the first wedge mirror 2 and the second wedge mirror 5, a light spot with uniform shape and energy attenuation can be formed and enter the imaging camera 7, effectively ensuring the imaging quality of the focal spot.

[0083] IV. The laser focal spot analysis device, which is a combination of a first wedge mirror 2, an objective lens 3, a field-of-view fine-tuning tube, a second wedge mirror 5 and at least one optical lens 6 to form a focal spot sampling mirror, has the advantages of high resolution, high imaging quality and high damage threshold, and has a simpler structure and stronger practicality.

[0084] Fifth, this laser focal spot analysis device can replace the objective lens 3 with different wavelengths according to actual needs, fully adapting to the actual application environment of various users, avoiding a large amount of low-efficiency expenditure, and has excellent cost performance.

[0085] Implementation Method 2

[0086] This invention provides a method for debugging a laser focal spot analysis device, which calibrates and adjusts the aforementioned laser focal spot analysis device. The debugging method includes the following steps:

[0087] Step S1: Adjust the orientation of the focusing device host 15 through the five-dimensional adjustment platform 8 to display the laser focus on the screen of the imaging camera 7;

[0088] Step S2: Calibrate the actual magnification of the focusing device main unit 15;

[0089] Step S3: Adjust the magnification of the focusing device main unit 15 so that the image and laser of the distance measuring micrometer 12 are focused on the screen of the imaging camera 7;

[0090] Step S4: By measuring the magnification of the laser focal spot on the screen of the imaging camera 7 using the micrometer 12, the magnification of the laser focal spot on the screen of the imaging camera 7 can be determined.

[0091] In an optional embodiment of this utility model, in step S1, the vertical incident direction of the laser is first determined as the Z-axis direction, and the directions perpendicular to the incident direction of the laser are defined as the X-axis direction and the Y-axis direction (the X-axis direction is also perpendicular to the Y-axis direction). The initial positions of the fourth platform (i.e., the X-axis swing slide) that can swing along the X-axis direction and the fifth platform (i.e., the Z-axis rotary table) that can rotate along the Z-axis are both 0°. By adjusting the five-dimensional adjustment platform 8, the laser is made to enter through the mirror surface of the objective lens 3 in the main unit 15 of the vertical focusing device.

[0092] Furthermore, in step S1, the five-dimensional adjustment platform 8 is translated in the X-axis and / or Y-axis directions to make the laser focus appear on the screen of the imaging camera 7; then, the five-dimensional adjustment platform 8 is translated in the Z-axis direction to increase the light intensity of the imaging camera 7 to the maximum, so as to ensure that the laser focus can be clearly displayed on the screen of the imaging camera 7.

[0093] Furthermore, in step S1, after adjusting the light intensity of the imaging camera 7, the number of optical lenses 6 in the focusing device host 15 can be adjusted to reduce the intensity of the laser light entering the imaging camera 7, thereby achieving the purpose of allowing a suitable intensity of laser light to enter the imaging camera 7, ensuring image quality without damaging the imaging camera 7. The method of adjusting the number of optical lenses 6 includes: removing one or more optical lenses 6 in ascending order of light density, gradually adjusting the laser intensity to obtain a suitable intensity of laser light.

[0094] In an optional embodiment of this utility model, step S2 includes:

[0095] Step S201: In the initial position, the micrometer 12 can be close to the light inlet 102 of the focusing device host 15. At this time, if the laser focus does not appear on the objective lens 3 of the focusing device host 15, the distance between the micrometer 12 and the light inlet 102 of the focusing device host 15 is gradually adjusted from near to far (i.e., the position of the micrometer 12 is gradually moved upward) until the laser focus is located on the objective lens 3 of the focusing device host 15.

[0096] Step S202: Fix the position of the micrometer 12;

[0097] Step S203: The five-dimensional adjustment platform 8 is translated in the X-axis and / or Y-axis directions so that the laser focus is located at or near the center of the objective lens 3 in the main unit 15 of the focusing device;

[0098] Step S204: The five-dimensional adjustment platform 8 is translated in the Z-axis direction so that the micrometer 12 is gradually moved further away from the light inlet 102 until the image of the micrometer 12 appears on the screen of the imaging camera 7.

[0099] Step S205: Perform translational adjustment on the five-dimensional adjustment platform 8 in the X-axis, Y-axis and / or Z-axis directions, so that the image of the micrometer scale 12 fills the screen of the imaging camera 7 while ensuring that the imaging camera 7 is in focus;

[0100] Step S206: Select a segment of the grid in the image of the micrometer 12 on the screen of the imaging camera 7 to measure the distance and obtain the measured distance;

[0101] Step S207: By dividing the measured distance by the corresponding actual distance on the micrometer 12, the actual magnification of the focusing device host 15 can be obtained. This actual magnification is the calibrated magnification.

[0102] In an optional embodiment of this utility model, step S3 includes:

[0103] Step S301: Adjust the magnification of the focusing device host 15 so that the image and laser of the micrometer 12 are focused on the screen of the imaging camera 7.

[0104] Specifically, the operator can rotate the main body 402 of the adjustment cylinder through the adjustment port 103, thereby adjusting the screw connection position between the main body 402 of the adjustment cylinder and the optical path channel 101, achieving the effect of autonomous control of the distance between the convex lens 401 and the objective lens 3, thereby achieving the purpose of adjusting the magnification of the main unit 15 of the focusing device.

[0105] Step S302: Perform translation adjustment in the Z-axis direction and swing adjustment in the X-axis direction on the five-dimensional adjustment platform 8 to reduce the offset of the laser focus on the screen of the imaging camera 7.

[0106] Furthermore, step S302 above includes:

[0107] Step S3021: Perform translational adjustment of the five-dimensional adjustment platform 8 in the Z-axis direction so that the main unit 15 of the focusing device has a first actual moving distance h1 in the Z-axis direction, and record the first offset △S1 of the laser focus on the screen of the imaging camera 7.

[0108] Step S3022: Perform swing adjustment on the five-dimensional adjustment platform 8 in the X-axis direction. After determining the direction in which the first offset △S1 decreases, fix the first sway angle of the five-dimensional adjustment platform 8 in the X-axis direction and record the first sway angle △O1.

[0109] Step S3023: Then, the five-dimensional adjustment platform 8 is translated in the Z-axis direction so that the focusing device host 15 has a second actual moving distance h2 in the Z-axis direction, and the second offset △S2 of the laser focus on the screen of the imaging camera 7 is recorded; wherein, the second actual moving distance h2 is less than the first actual moving distance h1.

[0110] Step S3024: Perform swing adjustment on the five-dimensional adjustment platform 8 in the X-axis direction. After determining the direction in which the second offset △S2 decreases, fix the second swing angle of the five-dimensional adjustment platform 8 in the X-axis direction and record the second swing angle △O2.

[0111] Step S3025: Repeat steps S3023 to S3024 until the laser focus is located at the center of the screen of the imaging camera 7, and the offset of the laser focus on the screen of the imaging camera 7 and the sway angle of the five-dimensional adjustment platform 8 in the X-axis direction are both less than preset thresholds. The thresholds for the offset of the laser focus on the screen of the imaging camera 7 and the sway angle of the five-dimensional adjustment platform 8 in the X-axis direction can be set as follows: if the five-dimensional adjustment platform 8 is translated 1mm in the Z-axis direction, the offset of the laser focus on the screen of the imaging camera 7 is less than 0.0035mm, and the sway angle of the five-dimensional adjustment platform 8 in the X-axis direction is less than 0.2°, then the laser focus can be considered to be located at the center of the screen of the imaging camera 7.

[0112] Through the above-mentioned step S302, this invention can gradually adjust the position of the laser focus on the screen of the imaging camera 7 until the laser focus is at the center position of the screen of the imaging camera 7, so as to ensure the imaging quality of the laser focal spot.

[0113] The debugging method of the laser focal spot analysis device of this invention can realize the calibration and precise adjustment of the laser focal spot analysis device, so that the laser focal spot analysis device can meet the requirements for quality monitoring of laser beam and reliably complete the debugging and calibration of laser equipment.

[0114] It should be noted that in the description of this application, the terms "first," "second," etc., are used only for descriptive purposes and to distinguish similar objects; there is no order between them, nor should they be construed as indicating or implying relative importance. Furthermore, in the description of this application, unless otherwise stated, "multiple" means two or more.

[0115] The various embodiments described in this specification are presented in a progressive manner. The same or similar parts between the embodiments can be referred to each other. Each embodiment focuses on the differences from other embodiments.

[0116] The above are merely several embodiments of this utility model. Although the embodiments disclosed in this utility model are as described above, the content is only for the purpose of facilitating understanding of this utility model and is not intended to limit this utility model. Any equivalent changes and modifications made by those skilled in the art without departing from the concept and principles of this utility model should fall within the protection scope of this utility model.

Claims

1. A laser focal spot analysis device, characterized in that, The laser focal spot analysis device includes: The main unit of the focusing device includes: The housing has an optical path channel formed inside it, and the two ends of the housing have an inlet and a first outlet that are connected to the optical path channel, respectively. An imaging camera is disposed at the first light outlet and is used to image a focal spot image of the laser passing through the optical path channel. A first wedge-shaped mirror is disposed within the optical path channel and located below the light inlet; Magnification fine-tuning component, the magnification fine-tuning component comprising: An objective lens is fixedly disposed within the optical path channel and located between the light inlet and the first light outlet; the objective lens is used to magnify the focal spot image. A field-of-view fine-tuning lens barrel is movably disposed within the optical path channel, and the field-of-view fine-tuning lens barrel is located between the objective lens and the first light outlet. The magnification fine-tuning component has a convex lens, and by adjusting the distance between the convex lens and the objective lens, the laser can be focused onto the imaging camera. The second wedge mirror is fixedly disposed in the optical path channel and located between the field-of-view fine-tuning lens barrel and the imaging camera. The second wedge mirror is used to make the laser in the imaging band enter the imaging camera in a straight line. A five-dimensional adjustment platform is provided, on which the focusing device host is mounted. The orientation of the focusing device host is adjusted by the five-dimensional adjustment platform to enable the imaging camera to focus.

2. The laser focal spot analysis device as described in claim 1, characterized in that, The objective lens and the field-of-view fine-tuning lens tube are both located between the first wedge lens and the second wedge lens. At least one optical lens is provided between the second wedge lens and the imaging camera. The optical lens is used to reduce the intensity of the laser in the imaging band. The first wedge lens, the objective lens, the field-of-view fine-tuning lens tube, the second wedge lens, and at least one of the optical lenses cooperate to form a focal spot sampling lens combination.

3. The laser focal spot analysis device as described in claim 2, characterized in that, The line connecting the center of the first wedge mirror to the center of the second wedge mirror is orthogonal to the line connecting the center of the second wedge mirror to the light input port of the imaging camera.

4. The laser focal spot analysis device as described in claim 1 or 2, characterized in that, From the light inlet to the first light outlet, the optical path channel includes a first straight section, a bend section, and a second straight section connected in sequence. The light inlet is located at the top of the first straight section and away from the bend section. The light-inlet surface of the first wedge mirror is obliquely arranged towards the light inlet and the objective lens, respectively. The first wedge mirror is used to reflect the laser of the imaging band that is vertically incident into the light inlet into the first straight section, so that the laser of the imaging band is incident straight into the objective lens.

5. The laser focal spot analysis device as described in claim 4, characterized in that, The bottom of the first straight section and the end away from the angled section has a second light outlet. The second light outlet is connected to the optical path channel and is vertically opposite to the first wedge mirror. The laser in the non-imaging band that is vertically injected into the light inlet passes through the first wedge mirror and is emitted from the second light outlet.

6. The laser focal spot analysis device as described in claim 5, characterized in that, The second wedge mirror is fixedly disposed within the angled section. The light-incident surface of the second wedge mirror is obliquely disposed towards the first straight section and the second straight section, respectively. The second wedge mirror is used to reflect the laser passing through the first straight section into the second straight section, so that the laser in the imaging band enters the imaging camera in a straight line.

7. The laser focal spot analysis device as described in claim 1, characterized in that, The field-of-view fine-tuning lens tube includes a cylindrical adjustment tube body, a convex lens disposed inside the adjustment tube body, an external thread on the outer wall of the adjustment tube body, and an internal thread on the inner wall of the optical path channel. The adjustment tube body and the optical path channel are connected by the external thread and the internal thread. The distance between the convex lens and the objective lens can be adjusted by adjusting the screw position of the adjustment tube body and the optical path channel.

8. The laser focal spot analysis device as described in claim 2, characterized in that, The optical lenses are multiple, and the multiple optical lenses are multiple lenses with different optical densities. The multiple lenses with optical densities from small to large are arranged at intervals along the direction from away from the imaging camera to close to the imaging camera.

9. The laser focal spot analysis device as described in claim 1, characterized in that, The laser focal spot analysis device also includes a fixed-distance micrometer, which is positioned above the light inlet of the main unit of the focusing device. The magnification of the focal spot image is determined by the image displayed in the imaging camera using the fixed-distance micrometer.

10. The laser focal spot analysis device as described in claim 9, characterized in that, The top of the five-dimensional adjustment platform has a mounting surface, and a first mounting bracket is provided on the mounting surface. The main unit of the focusing device is mounted on the first mounting bracket.

11. The laser focal spot analysis device as described in claim 10, characterized in that, The laser focal spot analysis device also includes a second mounting bracket, which is located on one side of the five-dimensional adjustment platform, and the fixed-distance micrometer is mounted on the second mounting bracket. The second mounting bracket is also provided with a plane mirror, which is located above the micrometer. The plane mirror is used to reflect the laser emitted by the light source vertically to the micrometer.

12. The laser focal spot analysis device as described in claim 1, characterized in that, The effective aperture of the laser focal spot analysis device is greater than 20 mm.

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