A quick-change mechanism for a coplanarity and bending measuring machine

Abstract

The utility model relates to detection equipment technical field especially is concerned about a kind of chuck quick-change mechanism for coplanarity and bending measuring machine, the input of measuring machine table is provided with feeding module, and feeding frame is laid along the length direction of measuring machine table, coplanarity detection module, appearance detection module and code reading detection module are provided with in the conveying direction side of measuring frame, material taking assembly is used to grab raw material on feeding frame respectively to coplanarity detection module, appearance detection module and code reading detection module, detection is carried out, and material taking suction nozzle is detachably arranged, which can facilitate the replacement of material taking suction nozzle to meet the model change of chip product on tray, the quick-change base and the base clamping groove are slidably matched, the base clamping groove can limit and support the quick-change base, and the replaced material taking suction nozzle can also maintain the original accuracy, without adjusting the position of quick-change base.

Description

Technical Field

[0001] This utility model relates to the field of testing equipment technology, and in particular to a quick-change suction cup mechanism for a coplanarity and bending measuring machine. Background Technology

[0002] After the chip is manufactured, the flatness of the chip and the gold fingers need to be inspected. Flatness can detect the presence of defects. The appearance of the semiconductor chip also needs to be inspected to sort out good and defective products and prevent defective chips from being packaged further. In this inspection process, a robotic arm is often needed to transport the chip products on the tray, pick up the chip and place it on the inspection surface for inspection, and then send the chip back to the tray. Since the tray carrying the chip needs to be changed in a timely manner according to production needs, the suction cup on the robotic arm also needs to be able to be quickly changed to the corresponding suction cup according to the chip. However, the replacement suction cup needs to maintain good accuracy and quick replacement. Therefore, a quick-change suction cup mechanism for coplanar and bending measuring machines is needed to solve the above problems. Utility Model Content

[0003] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a quick-change mechanism for a coplanarity and bending measuring machine, so as to solve the problem of quick change of suction cup in the prior art.

[0004] To achieve the above and other related objectives, this utility model provides the following technical solution: A quick-change chuck mechanism for a coplanarity and bending measuring machine includes: A measuring machine is provided with a feeding module at its input end, a feeding rack at its lower side, and the feeding rack being arranged along the length of the measuring machine. A coplanarity detection module, an appearance inspection module, and a code reading detection module are provided on one side of the feeding rack in the conveying direction. An output module is provided at the output end of the measuring machine. A material picking component is also provided on the measuring machine for picking up the raw materials from the feeding rack and transferring them to the coplanarity detection module, appearance inspection module, and code reading detection module for inspection. The material handling assembly includes a material handling frame, a material handling base slidably connected to the material handling frame, a material handling suction nozzle detachably connected to the material handling base, the material handling suction nozzle being used to grab raw materials on the material tray, a lifting drive component being provided on the material handling base, and the material handling suction nozzle being located at the movable end of the lifting drive component.

[0005] In one embodiment of the present invention, a suction nozzle base is provided between the movable ends of the lifting drive component of the material suction nozzle, a quick-change base is detachably connected to the suction nozzle base, a base slot is provided on the suction nozzle base, and the quick-change base and the base slot are slidably engaged.

[0006] In one embodiment of the present invention, a limiting pin is provided on one side of the base slot, and a limiting slot is provided on the side of the quick-change base. When the quick-change base is inserted into the base slot, the limiting pin passes through the side wall of the base slot and extends into the limiting slot to lock the quick-change base in the base slot.

[0007] In one embodiment of the present invention, a limiting seat is provided between the limiting pin and the side wall of the base slot, a positioning pin is slidably connected in the limiting seat, a positioning groove is provided in the positioning pin, the positioning groove is inclined along the length direction of the limiting pin, and a limiting post is provided on the limiting pin, the limiting post extends into the positioning groove and slides with the positioning groove.

[0008] In one embodiment of the present invention, the sliding direction of the positioning pin is perpendicular to the sliding direction of the limiting pin, a limiting bolt is provided on the limiting seat, a bolt groove is provided on the positioning pin, the limiting bolt passes through the limiting seat, and the front end of the limiting bolt abuts against the bolt groove.

[0009] In one embodiment of the present invention, the coplanarity detection module includes a camera assembly disposed on a measuring machine platform, the camera assembly being disposed facing the upper side of the measuring machine platform.

[0010] In one embodiment of the present invention, the appearance inspection module includes an inspection camera mounted on a measuring machine platform, the inspection camera being vertically and vertically connected to the measuring machine platform.

[0011] As described above, the quick-change suction cup mechanism for a coplanarity and bending measuring machine of this utility model has the following beneficial effects: the detachable design of the pick-up nozzle facilitates the replacement of the pick-up nozzle to meet the model changes of the chip products on the tray; the slidable fit between the quick-change base and the base slot allows the base slot to provide limiting support for the quick-change base, while also ensuring that the pick-up nozzle can maintain its original accuracy after subsequent replacement, eliminating the need for further adjustment of the quick-change base's position; the limiting pin passes through the side wall of the base slot and extends into the limiting slot to lock the quick-change base within the base slot; the cooperation between the limiting pin and the limiting slot ensures the connection stability between the quick-change base and the base slot, as well as the positioning accuracy of the quick-change base within the base slot. Attached Figure Description

[0012] Figure 1 The diagram shown is a structural schematic of the quick-change suction cup mechanism for a coplanarity and bending measuring machine disclosed in this embodiment of the present invention.

[0013] Figure 2The diagram shown is a schematic of the camera assembly structure of the suction cup quick-change mechanism for the coplanarity and bending measuring machine disclosed in an embodiment of this utility model.

[0014] Figure 3 Displayed as Figure 2 A partial enlarged view of the figure marked A in the attached diagram.

[0015] Figure 4 Displayed as Figure 2 A magnified view of part labeled B in the attached figure.

[0016] Figure 5 The diagram shown is a schematic diagram of the material handling base structure of the suction cup quick-change mechanism for the coplanarity and bending measuring machine disclosed in this embodiment of the present invention.

[0017] Figure 6 The diagram shown is a schematic diagram of the positioning pin structure of the quick-change suction cup mechanism for the coplanarity and bending measuring machine disclosed in this embodiment of the present invention.

[0018] Figure 7 The diagram shown is a schematic diagram of the limiting slot structure of the suction cup quick-change mechanism for the coplanarity and bending measuring machine disclosed in this embodiment of the present invention.

[0019] Component designation explanation 1. Measuring machine; 2. Picking rack; 3. Picking base; 4. Picking nozzle; 5. Lifting drive; 6. Nozzle base; 7. Quick-change base; 8. Base slot; 9. Limit pin; 10. Limit slot; 11. Limit seat; 12. Positioning pin; 13. Positioning slide; 14. Limit bolt; 15. Bolt slide; 16. Camera assembly; 17. Inspection camera; 18. Feeding module; 19. Coplanarity detection module; 20. Appearance inspection module; 21. Code reading detection module; 22. Limit post; 23. Feeding rack. Detailed Implementation

[0020] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. It should be noted that, unless otherwise specified, the following embodiments and features can be combined with each other.

[0021] Please see Figures 1 to 7This utility model provides a quick-change suction cup mechanism for a coplanarity and bending measuring machine. It includes a feeding module 18 at the input end of a measuring machine base 1. The feeding module 18 transports a tray carrying chips to a feeding rack 23 on its lower side. The feeding rack 23 then transports the tray to the subsequent inspection surface. The feeding rack 23 is arranged along the length of the measuring machine base 1. A coplanarity detection module 19, an appearance inspection module 20, and a code reading detection module 21 are arranged on one side of the feeding rack in the conveying direction. An output module is provided at the output end of the measuring machine base 1. A material picking component is also provided on the measuring machine base. The material picking component is used to pick up the raw materials from the feeding rack 23 and transfer them to the coplanarity detection module 19, the appearance inspection module 20, and the code reading detection module 21 for inspection.

[0022] The material handling assembly includes a material handling frame 2, a material handling base 3 slidably connected to the material handling frame 2, and a material handling nozzle 4 detachably connected to the material handling base 3. The detachable design of the material handling nozzle 4 allows for easy replacement to accommodate changes in the model of the chip products on the tray. The material handling nozzle 4 is used to grab the raw materials on the tray. A lifting drive 5 is provided on the material handling base 3, and the material handling nozzle 4 is located at the movable end of the lifting drive 5. When it is necessary to grab the chip in the tray on the feeding frame 23, the material handling base 3 moves the material handling nozzle 4 above the tray, and then the lifting drive 5 drives the material handling nozzle 4 to move downward to the suction working surface. After grabbing the chip, it is conveyed to the coplanarity detection module 19, the appearance inspection module 20, and the code reading detection module 21 for inspection.

[0023] A suction nozzle base 6 is provided between the movable ends of the lifting drive component 5 and the material suction nozzle 4. A quick-change base 7 is detachably connected to the suction nozzle base 6. A base slot 8 is provided on the suction nozzle base 6. The quick-change base 7 and the base slot 8 are slidably engaged. The base slot 8 can provide a limiting support for the quick-change base 7, and at the same time, it can ensure that the material suction nozzle 4 can maintain its original accuracy after subsequent replacement, without the need to adjust the position of the quick-change base 7.

[0024] A limiting pin 9 is provided on one side of the base slot 8, and a limiting slot 10 is provided on the side of the quick-change base 7. When the quick-change base 7 is inserted into the base slot 8, the limiting pin 9 passes through the side wall of the base slot 8 and extends into the limiting slot 10 to lock the quick-change base 7 in the base slot 8. The cooperation between the limiting pin 9 and the limiting slot 10 can ensure the connection stability between the quick-change base 7 and the base slot 8, as well as the positioning accuracy of the quick-change base 7 in the base slot 8.

[0025] A limiting seat 11 is provided between the limiting pin 9 and the side wall of the base slot 8. A positioning pin 12 is slidably connected in the limiting seat 11. A positioning groove 13 is provided in the positioning pin 12. The positioning groove 13 is inclined along the length direction of the limiting pin 9. A limiting post 22 is provided on the limiting pin 9. The limiting post 22 extends into the positioning groove 13 and slides with the positioning groove 13. When the positioning pin 12 is manually pulled to slide in the limiting seat 11, the limiting post 22 slides along the inclined direction of the positioning groove 13, thereby enabling the limiting pin 9 to move away from or closer to the base slot 8.

[0026] The sliding direction of the positioning pin 12 is perpendicular to the sliding direction of the limiting pin 9. A limiting bolt 14 is provided on the limiting seat 11, and a bolt groove 15 is provided on the positioning pin 12. The limiting bolt 14 passes through the limiting seat 11. When it is necessary to lock the positioning pin 12 in the limiting seat 11, the front end of the limiting bolt 14 is pressed against the bolt groove 15, thereby ensuring the stability of the positioning pin 12 in the limiting seat 11.

[0027] The coplanarity detection module 19 includes a camera assembly 16 mounted on a measuring machine platform. The camera assembly 16 is positioned facing the upper side of the measuring machine platform and is used to perform flatness detection on the chip surface.

[0028] The appearance inspection module 20 includes an inspection camera 17 mounted on a measuring machine platform. The inspection camera 17 is vertically and vertically connected to the measuring machine platform and is used to inspect the appearance of the chip.

[0029] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit this utility model. All equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A quick-change suction cup mechanism for a coplanarity and bending measuring machine, characterized in that, include: A measuring machine is provided with a feeding module at its input end, a feeding rack at its lower side, and the feeding rack being arranged along the length of the measuring machine. A coplanarity detection module, an appearance inspection module, and a code reading detection module are provided on one side of the feeding rack in the conveying direction. An output module is provided at the output end of the measuring machine. A material picking component is also provided on the measuring machine for picking up the raw materials from the feeding rack and transferring them to the coplanarity detection module, appearance inspection module, and code reading detection module for inspection. The material handling assembly includes a material handling frame, a material handling base slidably connected to the material handling frame, a material handling suction nozzle detachably connected to the material handling base, the material handling suction nozzle being used to grab raw materials on the material tray, a lifting drive component being provided on the material handling base, and the material handling suction nozzle being located at the movable end of the lifting drive component.

2. The quick-change suction cup mechanism for a coplanarity and bending measuring machine according to claim 1, characterized in that: A suction nozzle base is provided between the movable ends of the lifting drive component of the material suction nozzle. A quick-change base is detachably connected to the suction nozzle base. A base slot is provided on the suction nozzle base. The quick-change base and the base slot are slidably engaged.

3. The quick-change suction cup mechanism for a coplanarity and bending measuring machine according to claim 2, characterized in that: A limiting pin is provided on one side of the base slot, and a limiting slot is provided on the side of the quick-change base. When the quick-change base is inserted into the base slot, the limiting pin passes through the side wall of the base slot and extends into the limiting slot to lock the quick-change base in the base slot.

4. The quick-change suction cup mechanism for a coplanarity and bending measuring machine according to claim 3, characterized in that: A limiting seat is provided between the limiting pin and the side wall of the base slot. A positioning pin is slidably connected in the limiting seat. A positioning groove is provided in the positioning pin. The positioning groove is inclined along the length direction of the limiting pin. A limiting post is provided on the limiting pin. The limiting post extends into the positioning groove and slides with the positioning groove.

5. The quick-change suction cup mechanism for a coplanarity and bending measuring machine according to claim 4, characterized in that: The sliding direction of the positioning pin is perpendicular to the sliding direction of the limiting pin. A limiting bolt is provided on the limiting seat. A bolt groove is provided on the positioning pin. The limiting bolt passes through the limiting seat, and the front end of the limiting bolt abuts against the bolt groove.

6. The quick-change suction cup mechanism for a coplanarity and bending measuring machine according to claim 1, characterized in that: The coplanarity detection module includes a camera assembly mounted on a measuring machine platform, the camera assembly being positioned facing upwards on the measuring machine platform.

7. The quick-change suction cup mechanism for a coplanarity and bending measuring machine according to claim 1, characterized in that: The appearance inspection module includes an inspection camera mounted on a measuring machine platform, and the inspection camera is vertically and retractably connected to the measuring machine platform.

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