An ultrasonic water immersion detection device capable of effectively removing bubbles on the surface of a sample

Abstract

An ultrasonic water immersion testing device for effectively removing air bubbles from sample surfaces includes a Y-direction guide rail, an X-direction guide rail, a fixed base, locking block A, locking block B, locking bolts, a bubble impact water flow pipe, a water pump, a vertical slide rod, and a pressure controller. The X-direction guide rail is mounted on the Y-direction guide rail and can move along the Y-direction guide rail. The fixed base is mounted on the X-direction guide rail and can move along the X-direction guide rail. Locking blocks A and B are mounted on the fixed base and, after being locked by the locking bolts, can clamp and fix the vertical slide rod. One end of the bubble impact water flow pipe is closed, and the other end is connected to the pressure controller through a spring tube. The pressure controller is connected to the water pump. The bubble impact water flow pipe is connected to the vertical slide rod through a connecting seat. Multiple bubble impact nozzles are provided on the bubble impact water flow pipe. The position of the bubble impact nozzles in the vertical direction can be adjusted by adjusting the position of the vertical slide rod. An ultrasonic probe is provided on the fixed base.

Description

Technical Field

[0001] This utility model belongs to the field of ultrasonic water immersion testing application technology, specifically relating to an ultrasonic water immersion testing device that effectively removes air bubbles from the sample surface. Background Technology

[0002] Ultrasonic testing is a crucial non-destructive testing technique widely used to detect internal defects in semiconductor devices, such as delamination, voids, and cracks. When testing semiconductor devices, to ensure effective ultrasonic waves, the device under test (DUT) needs to be immersed in a coupling medium to reduce signal attenuation; water is a commonly used medium. However, if the device surface is dry or uneven, rapid immersion in the coupling medium can cause air trapped on the device or air bubbles in the medium to adhere to the surface, resulting in strong ultrasonic wave attenuation. This negatively impacts test accuracy and results, potentially leading to misjudgments.

[0003] Currently, existing technologies for removing bubbles adhering to device surfaces generally employ physical methods (ultrasonic vibration, manual removal, etc.) and chemical methods (adding defoaming agents to the coupling medium, etc.). Ultrasonic vibration requires a long time, especially on uneven device surfaces such as the pin-fin structure of power modules, where bubbles tend to adhere to the center of the heat sink, which has a certain height, further increasing the time required and affecting testing efficiency. Manual removal relies on the usability of the tools, and operators forgetting this step can lead to misjudgments and wasted time. The defoaming effect of adding defoaming agents is affected by temperature, concentration, pH, etc., and the defoaming effect is sometimes unsatisfactory. Furthermore, the impact of the added chemical reagents on the safety and reliability of the device itself cannot be ignored, posing certain potential risks. Utility Model Content

[0004] This utility model aims to at least partially solve one of the technical problems in the related art.

[0005] Therefore, the technical solution adopted by this utility model is: an ultrasonic water immersion detection device for effectively removing air bubbles from the sample surface, including a Y-direction guide rail, an X-direction guide rail, a fixed base, locking block A, locking block B, locking bolts, a bubble impact water flow pipe, a water pump, a vertical slide rod, and a pressure controller. The X-direction guide rail is set on the Y-direction guide rail and can move in the Y-direction along the Y-direction guide rail. The fixed base is set on the X-direction guide rail and can move in the X-direction along the X-direction guide rail. Locking blocks A and B are installed on the fixed base. After being locked by the locking bolts, locking blocks A and B can clamp and fix the vertical slide rod. One end of the bubble impact water flow pipe is closed, and the other end is connected to the pressure controller through a spring tube. The pressure controller is connected to the water pump. The bubble impact water flow pipe is connected to the vertical slide rod through a connecting seat. Multiple bubble impact nozzles are provided on the bubble impact water flow pipe. An ultrasonic probe is provided on the fixed base.

[0006] The bubble impact nozzle is a narrow-angle fan-shaped nozzle.

[0007] The plurality of bubble impact nozzles are arranged at uniform intervals along the length of the bubble impact water flow pipe.

[0008] Both locking block A and locking block B are provided with semi-circular grooves. The semi-circular grooves on locking block A and locking block B are arranged opposite each other to form a circular hole for clamping the vertical slide rod. Locking block A is provided with a threaded through hole, and locking block B is provided with a threaded hole. One end of the locking bolt passes through the threaded through hole on locking block A and connects with the threaded hole on locking block B.

[0009] Compared with existing technologies, this invention has the following advantages: it effectively eliminates air bubbles on the surface of the device before ultrasonic testing, avoiding signal attenuation or imaging distortion caused by air bubbles. The bubble impact nozzle is a narrow-angle fan-shaped nozzle, and the water jet from the narrow-angle fan-shaped nozzle is fan-shaped and sprayed at an angle, which has obvious advantages for samples with complex three-dimensional structures, such as devices with large depth-to-width ratios and precision electronic components. The fan-shaped water jet from the narrow-angle fan-shaped nozzle has a large coverage area, which is advantageous for larger samples and can reduce the number of nozzles, saving costs. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the structure of this utility model;

[0011] Figure 2 This is a schematic diagram of the structure of the bubble impact water flow pipe.

[0012] Figure 3 This is a schematic diagram of the structure of a bubble impact nozzle. Detailed Implementation

[0013] To make the objectives, technical solutions, and advantages of this application clearer, the application will be described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application.

[0014] Conversely, this application covers any alternatives, modifications, equivalent methods, and schemes made within the spirit and scope of this application as defined by the claims. Furthermore, to provide the public with a better understanding of this application, certain specific details are described in detail below. However, this application can be fully understood by those skilled in the art even without these detailed descriptions.

[0015] See Figures 1-2 An ultrasonic water immersion testing device for effectively removing air bubbles from sample surfaces includes a Y-direction guide rail 1, an X-direction guide rail 2, a fixed base 3, locking block A4, locking block B5, locking bolts 6, an air bubble impact water flow pipe 7, a water pump 8, a vertical slide bar 9, and a pressure controller 11. The X-direction guide rail 2 is mounted on the Y-direction guide rail 1 and can move in the Y-direction along the Y-direction guide rail 1. The fixed base 3 is mounted on the X-direction guide rail 2 and can move in the X-direction along the X-direction guide rail 2. Locking blocks A4 and B5 are mounted on the fixed base 3 and locked in place. Block A4 and locking block B5 can clamp and fix the vertical slide rod 9 after being locked by locking bolt 6. The position of the bubble impact nozzle in the vertical direction can be adjusted by adjusting the position of the vertical slide rod. One end of the bubble impact water pipe 7 is closed, and the other end is connected to the pressure controller 11 through the elastic tube 10. The pressure controller 11 is connected to the water pump 8. The bubble impact water pipe 7 is connected to the vertical slide rod 9 through the connecting seat. Multiple bubble impact nozzles 12 are provided on the bubble impact water pipe 7. An ultrasonic probe 13 is provided on the fixing seat 3.

[0016] The bubble impact water flow pipe 7 is equipped with a liquid inlet connector 701, which is connected to the pressure controller 11 via a spring tube 10. The bubble impact water flow pipe 7 is also equipped with a threaded pipe 702, which is threadedly connected to the bubble impact nozzle 12.

[0017] The bubble impact nozzle 12 is a narrow-angle fan-shaped nozzle 12.

[0018] The plurality of bubble impact nozzles 12 are arranged at uniform intervals along the length of the bubble impact water flow pipe 7. The bubble impact nozzles are threadedly connected to the bubble impact water flow pipe, allowing for easy replacement of nozzles of different specifications.

[0019] Both locking blocks A4 and B5 are provided with semi-circular grooves. The semi-circular grooves on locking blocks A4 and B5 are arranged opposite each other to form a circular hole for clamping the vertical slide rod 9. Locking block A4 is provided with a threaded through hole, and locking block B5 is provided with a threaded hole. One end of the locking bolt 6 passes through the threaded through hole on locking block A4 and connects with the threaded hole on locking block B5.

[0020] In this embodiment, the sample to be tested is generally a semiconductor device, such as a power device: IGBT single tube, HPD packaged power module, etc., as well as other devices with different packaging structures.

[0021] During operation, the sample to be tested is placed in the water tank of the ultrasonic immersion testing equipment, meaning the sample is completely submerged below the liquid surface. After the sample enters the water, a small number of air bubbles may adhere to the surface of the sample. The position of the air bubble impact nozzle is adjusted, then the water pump is turned on, and the pressure controller is adjusted to a suitable pressure to spray the surface of the sample to eliminate the air bubbles. Then, the ultrasonic probe performs ultrasonic testing.

Claims

1. An ultrasonic water immersion testing device for effectively removing air bubbles from the sample surface, characterized in that: The system includes a Y-direction guide rail (1), an X-direction guide rail (2), a fixed base (3), locking block A (4), locking block B (5), a locking bolt (6), an air bubble impact water flow pipe (7), a water pump (8), a vertical slide bar (9), and a pressure controller (11). The X-direction guide rail (2) is mounted on the Y-direction guide rail (1) and can move in the Y direction along the Y-direction guide rail (1). The fixed base (3) is mounted on the X-direction guide rail (2) and can move in the X direction along the X-direction guide rail (2). Locking blocks A (4) and B (5) are mounted on the fixed base. (3) Locking block A (4) and locking block B (5) can clamp and fix the vertical slide rod (9) after being locked by locking bolt (6). One end of the bubble impact water pipe (7) is closed, and the other end is connected to the pressure controller (11) through the elastic tube (10). The pressure controller (11) is connected to the water pump (8). The bubble impact water pipe (7) is connected to the vertical slide rod (9) through the connecting seat. Multiple bubble impact nozzles (12) are provided on the bubble impact water pipe (7). An ultrasonic probe (13) is provided on the fixing seat (3).

2. The ultrasonic water immersion testing device for effectively removing air bubbles from the sample surface as described in claim 1, characterized in that: The bubble impact nozzle (12) is a narrow-angle fan-shaped nozzle (12).

3. The ultrasonic water immersion testing device for effectively removing air bubbles from the sample surface as described in claim 1, characterized in that: The plurality of bubble impact nozzles (12) are arranged at uniform intervals along the length of the bubble impact water flow pipe (7).

4. The ultrasonic water immersion testing device for effectively removing air bubbles from the sample surface as described in claim 1, characterized in that: Both locking block A (4) and locking block B (5) are provided with semi-circular grooves. The semi-circular grooves on locking block A (4) and locking block B (5) are arranged opposite each other to form a circular hole for clamping the vertical slide rod (9). Locking block A (4) is provided with a threaded through hole, and locking block B (5) is provided with a threaded hole. One end of the locking bolt (6) passes through the threaded through hole on locking block A (4) and connects to the threaded hole on locking block B (5).

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