Silane-ammonia gas mixed gas quantitative monitoring and analyzing system

Abstract

The utility model discloses a kind of silane-ammonia mixed gas quantitative monitoring analysis systems, comprising: ten-way valve, first to tenth interface are sequentially provided along preset order;High temperature chromatographic column, between the sixth interface and ninth interface of the ten-way valve is connected, and for separating out disilane from mixed gas in advance;Low temperature chromatographic column, with the fifth interface of the ten-way valve is connected, and for separating out silane and ammonia in mixed gas;Thermal conductivity detector, the low temperature chromatographic column and the seventh interface of the ten-way valve are connected with the thermal conductivity detector respectively, for detecting analysis of separated out disilane, silane and ammonia.Through high temperature chromatographic column, disilane in mixture is separated out in advance, then through low temperature chromatographic column, silane and ammonia in mixed gas are separated out, realize the rapid quantitative monitoring of three-component mixed gas, improve the efficiency of quantitative monitoring analysis, and monitoring analysis data is more stable.

Description

Technical Field

[0001] This utility model relates to the field of gas detection technology, and in particular to a quantitative monitoring and analysis system for a silane-ammonia mixed gas. Background Technology

[0002] Silane gases, as a type of electronic specialty gas, have become very important specialty gases used in semiconductor microelectronics processes. It can be said that almost all modern advanced integrated circuit production lines require the use of silane gases.

[0003] Silane and silane are key raw materials in the semiconductor chemical vapor deposition (CVD) process (used to generate silicon-based thin films for chips). If impurities (such as O2, H2O, or a mixture of both) are present in the gas, it can lead to film defects and chip performance failure. Furthermore, silanes are flammable (spontaneously igniting upon contact with air). A TCD thermal conductivity detector can monitor the real-time progress of silane production by detecting the concentration of silane and silane in the raw material gas. Real-time data immediately reflects the current reaction state. If the content of silane and silane deviates from the optimal range, operators can promptly adjust reaction parameters (such as temperature, pressure, and raw material ratios) to bring the product composition back to normal, reducing impurity formation at the source. Through real-time data, engineers can precisely determine the optimal temperature, pressure, and catalyst activity for achieving the highest yield of the target product, providing direct data support for continuous process improvement.

[0004] Therefore, real-time and rapid monitoring of the content of methylsilane and disilane is an important condition for accurately controlling the reaction time and ensuring silane production.

[0005] In existing technologies, gas chromatography analysis uses a porous polymer-packed column to separate silane, methyl silane, and ammonia under low-temperature conditions. However, silane cannot be pre-separated, resulting in excessively long analysis times, typically exceeding 50 minutes, and low monitoring and analysis efficiency. Utility Model Content

[0006] The purpose of this invention is to overcome the shortcomings of the prior art and provide a quantitative monitoring and analysis system for silane-ammonia mixed gas. By pre-separating silane from the mixture using a high-temperature chromatographic column and then separating silane and ammonia from the mixed gas using a low-temperature chromatographic column, the system achieves rapid quantitative monitoring of the three-component mixed gas, improves the efficiency of quantitative monitoring and analysis, and makes the monitoring and analysis data more stable.

[0007] This utility model provides a quantitative monitoring and analysis system for a silane-ammonia mixed gas, comprising: a ten-way valve, with a first to a tenth interface arranged in a preset order, wherein the first interface of the ten-way valve is a sample inlet, the second interface of the ten-way valve is a tail gas vent, and the fourth and eighth interfaces of the ten-way valve are respectively carrier gas inlets;

[0008] A metering ring is connected between the third and tenth ports of the ten-way valve;

[0009] A high-temperature chromatographic column is connected between the sixth and ninth ports of the ten-way valve and is used to pre-separate silane from the mixed gas.

[0010] A low-temperature chromatographic column is connected to the fifth port of the ten-way valve and is used to separate silane and ammonia from the mixed gas.

[0011] A thermal conductivity detector is provided, wherein the low-temperature chromatographic column and the seventh port of the ten-way valve are respectively connected to the thermal conductivity detector for detecting and analyzing the separated silane, methylsilane and ammonia.

[0012] In one of the alternative technical solutions, the silane-ammonia mixed gas quantitative monitoring and analysis system includes a quantitative loop flushing status;

[0013] When the silane-ammonia mixed gas quantitative monitoring and analysis system is in the quantitative loop flushing state, the ten-way valve is in the first valve position, the first interface is connected to the gas sample supply device, and the first interface is sequentially connected to the tenth interface, the quantitative loop, the third interface and the second interface.

[0014] In one of the alternative technical solutions, the silane-ammonia mixed gas quantitative monitoring and analysis system includes a gas separation state;

[0015] When the silane-ammonia mixed gas quantitative monitoring and analysis system is in the gas separation state, the ten-way valve is in the second valve position, and the fourth port, the third port, the quantitative loop, the tenth port, the ninth port, the high-temperature chromatographic column, the sixth port, the fifth port and the low-temperature chromatographic column are connected in sequence.

[0016] In one of the alternative technical solutions, the quantitative monitoring and analysis system for the silane-ammonia mixed gas includes the detection status of ethylsilane;

[0017] When the silane-ammonia mixed gas quantitative monitoring and analysis system is in the silane detection state, the ten-way valve is in the first valve position, and the eighth port, the ninth port, the high-temperature chromatographic column, the sixth port, the seventh port and the thermal conductivity detector are sequentially connected.

[0018] In one of the alternative technical solutions, the quantitative monitoring and analysis system for silane-ammonia mixed gas includes a silane-ammonia detection status;

[0019] When the silane-ammonia mixed gas quantitative monitoring and analysis system is in the silane-ammonia detection state, the ten-way valve is in the first valve position, and the fourth interface, the fifth interface, the low-temperature chromatographic column and the thermal conductivity detector are sequentially connected.

[0020] In one of the alternative technical solutions, the pipelines and valves of the silane-ammonia mixed gas quantitative monitoring and analysis system are all made of stainless steel.

[0021] In one of the alternative technical solutions, the ten-way valve is installed in a helium environment.

[0022] In one of the alternative technical solutions, the length of the low-temperature chromatographic column is longer than that of the high-temperature chromatographic column.

[0023] In one of the alternative technical solutions, the high-temperature chromatographic column is a Q column with a length of 2m and an outer diameter of 1 / 8 inch;

[0024] The low-temperature chromatographic column used is a Q column with a length of 3m and an outer diameter of 1 / 8 inch.

[0025] In one of the alternative technical solutions, the volume of the metering ring is 1 mL.

[0026] The above technical solution has the following beneficial effects:

[0027] The silane-ammonia mixed gas quantitative monitoring and analysis system provided by this utility model is equipped with a ten-way valve, a quantitative loop, a high-temperature chromatographic column, a low-temperature chromatographic column, and a thermal conductivity detector. The high-temperature chromatographic column is used to pre-separate silane. The mixed gas after silane separation enters the low-temperature chromatographic column, where silane and ammonia are separated. This achieves rapid quantitative monitoring of the three-component mixed gas, improves the efficiency of quantitative monitoring and analysis, and makes the monitoring and analysis data more stable. Attached Figure Description

[0028] The disclosure of this utility model will become more readily understood by referring to the accompanying drawings. It should be understood that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this utility model. In the drawings:

[0029] Figure 1 This is a schematic diagram of a quantitative monitoring and analysis system for a silane-ammonia mixed gas according to an embodiment of the present invention, wherein the ten-way valve is in the first valve position;

[0030] Figure 2This is a schematic diagram of a quantitative monitoring and analysis system for a silane-ammonia mixed gas according to an embodiment of the present invention, wherein the ten-way valve is in the second valve position;

[0031] Figure 3 A schematic diagram of the quantitative monitoring and analysis system for silane-ammonia mixed gas provided in an embodiment of the present invention when it is in the quantitative loop flushing state;

[0032] Figure 4 A schematic diagram of the silane-ammonia mixed gas quantitative monitoring and analysis system provided in an embodiment of the present invention when it is in a gas separation state;

[0033] Figure 5 A schematic diagram of the silane-ammonia mixed gas quantitative monitoring and analysis system provided in an embodiment of the present invention when it is in the silane detection state;

[0034] Figure 6 This is a schematic diagram of the silane-ammonia mixed gas quantitative monitoring and analysis system provided in an embodiment of the present invention when it is in the silane-ammonia detection state. Detailed Implementation

[0035] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. Identical components are indicated by the same reference numerals. It should be noted that the terms "front," "rear," "left," "right," "up," and "down" used in the following description refer to directions in the accompanying drawings, while the terms "inner" and "outer" refer to directions toward or away from the geometric center of a specific component, respectively.

[0036] like Figure 1-2 As shown, an embodiment of this utility model provides a quantitative monitoring and analysis system for a silane-ammonia mixed gas, comprising:

[0037] The ten-way valve 1 has a first to a tenth port 1-10 arranged in a preset order. The first port 1-1 of the ten-way valve 1 is the sample inlet, the second port 1-2 of the ten-way valve 1 is the exhaust gas vent, and the fourth port 1-4 and the eighth port 1-8 of the ten-way valve 1 are the carrier gas inlets.

[0038] The metering ring 2 is connected between the third port 1-3 and the tenth port 1-10 of the ten-way valve 1.

[0039] The high-temperature chromatographic column 3 is connected between the sixth port 1-6 and the ninth port 1-9 of the ten-way valve 1 and is used to pre-separate silane from the mixed gas.

[0040] The low-temperature chromatographic column 4 is connected to the fifth port 1-5 of the ten-way valve 1 and is used to separate silane and ammonia from the mixed gas.

[0041] The thermal conductivity detector 5, the low-temperature chromatographic column 4, and the seventh ports 1-7 of the ten-way valve 1 are connected to the thermal conductivity detector 5, respectively, for the detection and analysis of the separated silane, methyl silane, and ammonia.

[0042] The present invention provides a quantitative monitoring and analysis system for silane-ammonia mixed gas, which is used to quantitatively analyze the component content or concentration of silane, methylsilane and ammonia.

[0043] The silane-ammonia mixed gas quantitative monitoring and analysis system provided by this utility model includes a ten-way valve 1, a quantitative loop 2, a high-temperature chromatographic column 3, a low-temperature chromatographic column 4, and a thermal conductivity detector 5.

[0044] A ten-way valve 1 is a valve with ten channels (ports), mainly used to control the flow direction, diversion, or merging of fluids or gases. The ten-way valve 1 consists of a valve body and a valve core. The valve body has multiple inlets and outlets and internal channels, while the valve core is the component that controls the fluid switching. The ten-way valve 1 is a device in the prior art; for its structure and working principle, please refer to the descriptions in the prior art, which will not be detailed here.

[0045] The ten-way valve 1 includes, in a specific order, a first port 1-1, a second port 1-2, a third port 1-3, a fourth port 1-4, a fifth port 1-5, a sixth port 1-6, a seventh port 1-7, an eighth port 1-8, a ninth port 1-9, and a tenth port 1-10. By driving the valve core to rotate, adjacent ports of the ten-way valve 1 can be connected or disconnected.

[0046] Specifically: the ten-way valve 1 has a first valve position or a closed valve position, at which time... Figure 1 As shown, the first interface 1-1 is connected to the tenth interface 1-10, the second interface 1-2 is connected to the third interface 1-3, the fourth interface 1-4 is connected to the fifth interface 1-5, the sixth interface 1-6 is connected to the seventh interface 1-7, and the eighth interface 1-8 is connected to the ninth interface 1-9.

[0047] The ten-way valve 1 has a second valve position or an open valve position, at which time... Figure 2 As shown, the first interface 1-1 is connected to the second interface 1-2, the third interface 1-3 is connected to the fourth interface 1-4, the fifth interface 1-5 is connected to the sixth interface 1-6, the seventh interface 1-7 is connected to the eighth interface 1-8, and the ninth interface 1-9 is connected to the tenth interface 1-10.

[0048] The first interface 1-1 is the sample inlet, which is connected to the gas sample supply device 6 and used to supply sample gas to the ten-way valve 1. The sample gas is a mixture of silane, methyl silane, and ammonia. The gas sample supply device 6 can be a sample container, sample bottle, sample bag, etc.

[0049] The second port 1-2 of the ten-way valve 1 is a vent port for exhausting exhaust gas. The second port 1-2 is connected to the collection container 7, through which the exhaust gas is collected.

[0050] The fourth port 1-4 and the eighth port 1-8 of the ten-way valve 1 are the carrier gas inlets. The fourth port 1-4 is connected to the first carrier gas unit 8, and the eighth port 1-8 is connected to the second carrier gas unit 9. The first carrier gas unit 8 and the second carrier gas unit 9 respectively provide high-purity helium gas, providing power for the gas flow within the ten-way valve 1 at different stages.

[0051] The metering loop 2 is a tubular assembly used for the precise measurement and delivery of a fixed volume of gas / fluid. Its core function is to ensure consistent gas / fluid volume in each analysis or experiment, making it a crucial component in chromatographic analysis. The metering loop 2 connects between the third interface 1-3 and the tenth interface 1-10. (As shown...) Figure 1 As shown, the sample gas can flow into the metering ring 2 through the first interface 1-1 and the tenth interface 1-10, and then be discharged through the third interface 1-3 and the second interface 1-2 for cleaning the metering ring 2.

[0052] High-temperature column 3 is a column using porous polymer packing material, with a length selected between 1-5 m. The column temperature of high-temperature column 3 is between 180-250℃. At higher temperatures, the gaseous substances elute quickly, with silane eluting early and quickly (e.g., 2-3 min), allowing for pre-separation. At this temperature, silane and ammonia mix together and are difficult to separate; therefore, silane and ammonia will be separated in a subsequent stage.

[0053] High-temperature chromatographic column 3 is connected between the sixth port 1-6 and the ninth port 1-9 of the ten-way valve 1, and is used to pre-separate silane from the mixed gas. For example... Figure 2 As shown, the carrier gas entering from the fourth interface 1-4 enters the metering loop 2 through the third interface 1-3, and then drives the internal mixed gas of the metering loop 2 to enter the high-temperature chromatographic column 3 through the tenth interface 1-10 and the ninth interface 1-9 to complete the pre-separation of silane.

[0054] The low-temperature chromatographic column 4 is a column using porous polymer packing material, with a length selected between 1-5 m. The temperature of the low-temperature chromatographic column 4 is between 40-80℃. At this temperature, the gases elute slowly, with silane eluting slowly (e.g., 10-12 min), while silane and ammonia elute faster than silane, thus enabling the separation of silane and ammonia. The separation order of the gases at the suitable temperature of the low-temperature chromatographic column 4 is: silane first, then ammonia, and finally silane. Therefore, the low-temperature chromatographic column 4 can be used to separate silane and ammonia. Figure 2As shown, the mixed gas, which has undergone pre-separation of silane by the high-temperature chromatographic column 3, enters the low-temperature chromatographic column 4 through the sixth interface 1-6 and the fifth interface 1-5, and then the low-temperature chromatographic column 4 completes the separation of silane and ammonia.

[0055] The thermal conductivity detector (TCD) is the most widely used general-purpose detector in gas chromatography (GC). Its core principle is to utilize the difference in thermal conductivity between different gases (or vapors) to quantitatively or qualitatively analyze sample components by detecting changes in the temperature / resistance of a thermistor. The thermal conductivity detector (TCD) is a device in the prior art; for its structure and working principle, please refer to existing technology descriptions, which will not be detailed here.

[0056] The seventh interface 1-7 is connected to the thermal conductivity detector 5, and the rear end of the low-temperature chromatographic column 4 is connected to the thermal conductivity detector 5. The thermal conductivity detector 5 is used to detect and analyze the separated silane, methylsilane, and ammonia to determine the content / concentration of each component.

[0057] Combination Figure 1-2 As shown, after the pre-separation of silane is completed, the ten-way valve 1 switches from the open position to the closed position, as follows: Figure 1 As shown, the carrier gas entering through the eighth interface 1-8 drives the silane in the high-temperature chromatographic column 3 to enter the thermal conductivity detector 5 through the sixth interface 1-6 and the seventh interface 1-7, where it is detected and analyzed.

[0058] The silane and ammonia gas, which have been separated in the carrier gas-driven low-temperature chromatography column 4, enter through the fourth interface 1-4 and then enter the thermal conductivity detector 5 for detection and analysis.

[0059] In summary, the silane-ammonia mixed gas quantitative monitoring and analysis system provided by this utility model is equipped with a ten-way valve 1, a quantitative loop 2, a high-temperature chromatographic column 3, a low-temperature chromatographic column 4, and a thermal conductivity detector 5. The high-temperature chromatographic column 3 is used to pre-separate silane. The mixed gas after silane separation enters the low-temperature chromatographic column 4, where silane and ammonia are separated. This achieves rapid quantitative monitoring of the three-component mixed gas, improves the efficiency of quantitative monitoring and analysis, and makes the monitoring and analysis data more stable.

[0060] In one embodiment, such as Figure 3 As shown, the quantitative monitoring and analysis system for silane-ammonia mixed gas includes a quantitative loop flushing status.

[0061] When the silane-ammonia mixed gas quantitative monitoring and analysis system is in the quantitative loop flushing state, the ten-way valve 1 is in the first valve position, the first interface 1-1 is connected to the gas sample supply device 6, and the first interface 1-1 is connected to the tenth interface 1-10, the quantitative loop 2, the third interface 1-3 and the second interface 1-2 in sequence.

[0062] The solution provided in this embodiment can complete the rinsing of the metering ring 2 to keep the metering ring 2 clean.

[0063] The sample gas enters the metering loop 2 through the first port 1-1 and the tenth port 1-10, then flows through the third port 1-3 to the second port 1-2, and finally exits from the second port 1-2, rinsing the metering loop 2. After rinsing, the metering loop 2 is filled with the sample gas.

[0064] In one embodiment, such as Figure 4 As shown, the quantitative monitoring and analysis system for silane-ammonia mixed gas includes gas separation status.

[0065] When the silane-ammonia mixed gas quantitative monitoring and analysis system is in the gas separation state, the ten-way valve 1 is in the second valve position, and the fourth port 1-4, the third port 1-3, the quantitative loop 2, the tenth port 1-10, the ninth port 1-9, the high-temperature chromatographic column 3, the sixth port 1-6, the fifth port 1-5, and the low-temperature chromatographic column 4 are connected in sequence.

[0066] The solution provided in this embodiment can complete the pre-separation of silane, so as to avoid the problem of slow efficiency caused by separating the three substances in the same chromatographic column.

[0067] Specifically, after flushing the metering loop 2, the ten-way valve 1 is switched to the open position. The carrier gas introduced through the fourth port 1-4 carries the sample gas from the metering loop 2 through the tenth port 1-10 and the ninth port 1-9 into the high-temperature chromatographic column 3 for pre-separation, where the silane is pre-separated. The mixed silane and ammonia enter the low-temperature chromatographic column 4 through the sixth port 1-6 and the fifth port 1-5, where the silane and ammonia are separated.

[0068] In one embodiment, such as Figure 5 As shown, the quantitative monitoring and analysis system for silane-ammonia mixed gas includes the detection status of silane.

[0069] When the silane-ammonia mixed gas quantitative monitoring and analysis system is in the silane detection state, the ten-way valve 1 is in the first valve position, and the eighth port 1-8, the ninth port 1-9, the high-temperature chromatographic column 3, the sixth port 1-6, the seventh port 1-7 and the thermal conductivity detector 5 are connected in sequence.

[0070] The solution provided in this embodiment can complete the detection and analysis of silane.

[0071] Specifically, after the mixed silane and ammonia enter the low-temperature chromatographic column 4 through the sixth port 1-6 and the fifth port 1-5, the ten-way valve 1 is switched to the closed position. The carrier gas entering through the eighth port 1-8 drives the silane in the high-temperature chromatographic column 3 through the sixth port 1-6 and the seventh port 1-7 into the thermal conductivity detector 5 for detection and analysis.

[0072] In one embodiment, such as Figure 6 As shown, the quantitative monitoring and analysis system for silane-ammonia mixed gas includes the detection status of silane-ammonia.

[0073] When the silane-ammonia mixed gas quantitative monitoring and analysis system is in the silane-ammonia detection state, the ten-way valve 1 is in the first valve position, and the fourth port 1-4, the fifth port 1-5, the low temperature chromatographic column 4 and the thermal conductivity detector 5 are connected in sequence.

[0074] The solution provided in this embodiment can complete the detection and analysis of silane-ammonia.

[0075] Specifically, after the mixed silane and ammonia enter the low-temperature chromatographic column 4 through the sixth port 1-6 and the fifth port 1-5, the ten-way valve 1 is switched to the closed position, and the carrier gas entering through the fourth port 1-4 drives the silane and ammonia in the low-temperature chromatographic column 4 into the thermal conductivity detector 5 for detection and analysis.

[0076] By adopting the above-mentioned technical solution of this utility model, the components are rapidly and completely separated during the gas detection process, realizing rapid quantitative detection of the mixed gas. It can complete the quantitative detection of the three-component mixed gas in 10 minutes with a single injection, achieving the effect of real-time online analysis. It has the advantages of stable and reliable data and fast analysis speed.

[0077] In one embodiment, the piping and valves of the silane-ammonia mixed gas quantitative monitoring and analysis system are all made of stainless steel, which has good corrosion resistance and helps to extend its service life. All piping and valves in contact with the sample gas are made of stainless steel, such as stainless steel pipes and stainless steel valves, which will not be corroded by the gas or rust, thus extending their service life.

[0078] Preferably, the pipelines and valves are made of 316L stainless steel pipes, which are electrolytically polished, resulting in excellent pipeline performance.

[0079] In one embodiment, the ten-way valve 1 is placed in a helium environment, for example, in a helium-filled experimental chamber, to ensure that no air seeps in and affects the experimental results.

[0080] In one embodiment, the low-temperature chromatographic column 4 is longer than the high-temperature chromatographic column 3 to precisely match the separation difficulties and analytical requirements of the two components, ensuring separation effect while taking into account analytical efficiency.

[0081] The length of a chromatographic column determines its separation capability and analytical efficiency.

[0082] High-temperature chromatographic column 3 only needs to separate silane, and can be designed to be relatively short. Silane (SiH) is a single component (not requiring separation from other substances) and has a higher boiling point than silane, requiring high-temperature conditions (to avoid condensation within the column) for rapid elution. A short column can significantly shorten the retention time of silane within the column, improving response efficiency.

[0083] Low-temperature chromatography column 4 needs to separate silane and ammonia, and can be designed to be relatively long.

[0084] Silane (SiH) and ammonia (NH) have relatively similar molecular structures and polarities, and both are low-boiling-point, thermally unstable components (requiring low-temperature conditions to avoid decomposition). Short columns are insufficient for effective separation of these two components. Longer chromatographic columns provide higher separation capabilities by extending the retention and partition times of the components in the stationary phase, amplifying the subtle retention differences between silane and ammonia, and ultimately achieving clear separation of the two components, meeting the accuracy requirements of quantitative / qualitative analysis.

[0085] In one embodiment, the high-temperature chromatographic column 3 is a Q column with a length of 2m and an outer diameter of 1 / 8 inch. The low-temperature chromatographic column 4 is a Q column with a length of 3m and an outer diameter of 1 / 8 inch. While ensuring system compatibility by maintaining a uniform outer diameter (1 / 8 inch), the "column length difference" is used to precisely match the separation requirements of high-temperature and low-temperature scenarios, balancing separation effect and analytical efficiency.

[0086] The two columns use the same outer diameter (1 / 8 inch) and can be directly matched with the same chromatograph's inlet, detector and tubing connectors without the need for additional connectors or adapters, reducing equipment compatibility costs and simplifying experimental procedures (such as column switching, installation and maintenance).

[0087] In one embodiment, the volume of the quantitative loop 2 is 1 mL. The core function of the quantitative loop 2 is to accurately control the injection volume. 1 mL is a conventional medium volume, and its processing accuracy is easy to achieve. It can stably ensure that the injection volume is consistent each time and reduce quantitative deviation caused by fluctuations in the injection volume.

[0088] As needed, the above technical solutions can be combined to achieve the best technical effect.

[0089] The above are merely the principles and preferred embodiments of this utility model. It should be noted that, for those skilled in the art, several other modifications can be made based on the principles of this utility model, and these modifications should also be considered within the scope of protection of this utility model.

Claims

1. A quantitative monitoring and analysis system for a silane-ammonia mixed gas, characterized in that, include: The ten-way valve has a first to a tenth port arranged in a preset order. The first port of the ten-way valve is a sample inlet, the second port of the ten-way valve is a tail gas vent, and the fourth and eighth ports of the ten-way valve are carrier gas inlets. A metering ring is connected between the third and tenth ports of the ten-way valve; A high-temperature chromatographic column is connected between the sixth and ninth ports of the ten-way valve and is used to pre-separate silane from the mixed gas. A low-temperature chromatographic column is connected to the fifth port of the ten-way valve and is used to separate silane and ammonia from the mixed gas. A thermal conductivity detector is provided, wherein the low-temperature chromatographic column and the seventh port of the ten-way valve are respectively connected to the thermal conductivity detector for detecting and analyzing the separated silane, methylsilane and ammonia.

2. The quantitative monitoring and analysis system for silane-ammonia mixed gas according to claim 1, Its features are, The quantitative monitoring and analysis system for the silane-ammonia mixed gas includes a quantitative loop flushing status; When the silane-ammonia mixed gas quantitative monitoring and analysis system is in the quantitative loop flushing state, the ten-way valve is in the first valve position, the first interface is connected to the gas sample supply device, and the first interface is sequentially connected to the tenth interface, the quantitative loop, the third interface and the second interface.

3. The quantitative monitoring and analysis system for silane-ammonia mixed gas according to claim 1, Its features are, The quantitative monitoring and analysis system for silane-ammonia mixed gas includes gas separation status; When the silane-ammonia mixed gas quantitative monitoring and analysis system is in the gas separation state, the ten-way valve is in the second valve position, and the fourth port, the third port, the quantitative loop, the tenth port, the ninth port, the high-temperature chromatographic column, the sixth port, the fifth port and the low-temperature chromatographic column are connected in sequence.

4. The quantitative monitoring and analysis system for silane-ammonia mixed gas according to claim 1, Its features are, The quantitative monitoring and analysis system for silane-ammonia mixed gas includes the detection status of ethylsilane; When the silane-ammonia mixed gas quantitative monitoring and analysis system is in the silane detection state, the ten-way valve is in the first valve position, and the eighth port, the ninth port, the high-temperature chromatographic column, the sixth port, the seventh port and the thermal conductivity detector are sequentially connected.

5. The quantitative monitoring and analysis system for silane-ammonia mixed gas according to claim 1, Its features are, The quantitative monitoring and analysis system for silane-ammonia mixed gas includes the detection status of silane-ammonia. When the silane-ammonia mixed gas quantitative monitoring and analysis system is in the silane-ammonia detection state, the ten-way valve is in the first valve position, and the fourth interface, the fifth interface, the low-temperature chromatographic column and the thermal conductivity detector are sequentially connected.

6. The quantitative monitoring and analysis system for silane-ammonia mixed gas according to claim 1, Its features are, The pipelines and valves of the quantitative monitoring and analysis system for silane-ammonia mixed gas are all made of stainless steel.

7. The quantitative monitoring and analysis system for silane-ammonia mixed gas according to claim 1, Its features are, The ten-way valve is installed in a helium environment.

8. The quantitative monitoring and analysis system for silane-ammonia mixed gas according to claim 1, Its features are, The length of the low-temperature chromatographic column is longer than that of the high-temperature chromatographic column.

9. The quantitative monitoring and analysis system for silane-ammonia mixed gas according to claim 8, Its features are, The high-temperature chromatographic column used is a Q column with a length of 2m and an outer diameter of 1 / 8 inch; The low-temperature chromatographic column used is a Q column with a length of 3m and an outer diameter of 1 / 8 inch.

10. The quantitative monitoring and analysis system for silane-ammonia mixed gas according to claim 1, Its features are, The volume of the metering ring is 1 mL.

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