Vacuum apparatus enabling three-dimensional motion measurement

Abstract

The utility model relates to vacuum measurement technical field, concretely is vacuum equipment that can realize three -dimensional motion measurement, through setting up three -dimensional motion measuring mechanism and sample holder in vacuum cavity, is equipped with measuring head on three -dimensional motion measuring mechanism, three -dimensional motion measuring mechanism can drive measuring head to carry out three -dimensional space motion in vacuum cavity, to make measuring head can from different angles and position to the sample to be measured placed on sample holder and carry out measurement, has overcome the limitation of traditional indirect measurement mode to the sample can carry out comprehensive and meticulous detection, effectively solved the device that measures or detects in the cavity on the vacuum equipment currently usually adopts the mode of indirect measurement, thus to the sample to be measured in the vacuum cavity expands measurement, however, the mode of indirect measurement is difficult to directly to the sample carries out comprehensive and meticulous detection, leads to the problem of insufficient measurement accuracy.

Description

Technical Field

[0001] This utility model relates to the field of vacuum measurement technology, specifically to a vacuum device capable of three-dimensional motion measurement. Background Technology

[0002] With the continuous advancement of modern science and technology, vacuum technology has been widely applied in numerous fields. Measuring samples within vacuum equipment has become an indispensable and crucial step in scientific research and industrial production. Measurements conducted in a vacuum environment effectively avoid interference from moisture, oxygen, and other impurities in the air, thereby improving the accuracy and reliability of the measurements.

[0003] Currently, devices for measurement or detection within the cavities of vacuum equipment typically employ indirect measurement methods, such as optical imaging through an observation window or the use of a fixed probe to collect single-point signals, thereby measuring the sample to be tested within the vacuum cavity. However, indirect measurement methods are difficult to directly perform comprehensive and detailed detection of the sample. They not only struggle to cover multiple points on the sample for multi-point measurement but also cannot achieve precise close-range or point-to-point measurements, resulting in insufficient measurement accuracy.

[0004] This utility model was proposed in response to the shortcomings of the existing technology. Utility Model Content

[0005] The aforementioned devices for measurement or detection within the cavity of vacuum equipment typically employ indirect measurement methods to measure the sample within the vacuum cavity. However, indirect measurement methods struggle to provide a comprehensive and detailed examination of the sample, resulting in insufficient measurement accuracy. The technical solution adopted by this invention to address this problem is as follows: A vacuum device capable of three-dimensional motion measurement includes a main body, which has a vacuum cavity and a sample loading / unloading port communicating with the vacuum cavity. The vacuum cavity is equipped with a three-dimensional motion measurement mechanism and a sample holder. The three-dimensional motion measurement mechanism is equipped with a measuring head. The three-dimensional motion measurement mechanism drives the measuring head to perform three-dimensional spatial motion within the vacuum cavity to perform three-dimensional measurement on the sample to be tested placed on the sample holder.

[0006] Furthermore, a mounting base plate is provided inside the vacuum cavity, and the three-dimensional motion measurement mechanism is mounted inside the vacuum cavity through the mounting base plate. The mounting base plate is provided with a horizontal adjustment mechanism, which is used to adjust the horizontal state of the three-dimensional motion measurement mechanism.

[0007] Furthermore, the main body of the device includes a lifting drive mechanism, which extends through the main body of the device into the vacuum chamber and is connected to the sample holder. The lifting drive mechanism is used to drive the sample holder to move vertically up and down in the vacuum chamber.

[0008] Furthermore, the three-dimensional motion measurement mechanism includes a first moving module arranged along a first direction, a second moving module arranged along a second direction, and a third moving module arranged along a third direction. The first moving module is drivenly connected to the second moving module to drive the second moving module to move along the first direction, the second moving module is drivenly connected to the third moving module to drive the third moving module to move along the second direction, and the third moving module is drivenly connected to the measuring head to drive the measuring head to move along the third direction.

[0009] Furthermore, the first moving module includes a first driving mechanism and a first sliding mechanism. The first driving mechanism includes a first driving motor, a first lead screw connected to the output end of the first driving motor, two first bearing seats arranged opposite each other along a first direction, and a first nut assembly mounted on the second moving module. The two sides of the first lead screw are rotatably mounted in the two first bearing seats, and the first lead screw is threadedly engaged with the first nut assembly. The first sliding mechanism includes a first guide rail mounted on the mounting base plate and a first slider mounted on the second moving module and slidably connected to the first guide rail.

[0010] Furthermore, the second moving module includes a second driving mechanism, a second sliding mechanism, and a second moving base connected to the first moving module. The second driving mechanism includes a second driving motor mounted on the second moving base, a second lead screw connected to the output end of the second driving motor, two second bearing seats arranged opposite each other along a second direction and respectively mounted on the second moving base, and a second nut assembly mounted on the third moving module. The two sides of the second lead screw are rotatably mounted in the two second bearing seats, and the second lead screw is threadedly engaged with the second nut assembly. The second sliding mechanism includes a second guide rail mounted on the second moving base and a second slider mounted on the third moving module and slidably connected to the second guide rail.

[0011] Furthermore, a measuring moving seat is provided between the measuring head and the third moving module. The measuring head is connected to the third moving module through the measuring moving seat. The third moving module includes a third driving mechanism, a third sliding mechanism, a third moving panel connected to the second moving module, and a third mounting seat connected to the third moving panel. The third driving mechanism includes a third driving motor mounted on the third mounting seat, a third lead screw connected to the output end of the third driving motor, two third bearing seats arranged opposite each other along a third direction and respectively mounted on the third mounting seat, and a third nut pair mounted on the measuring moving seat. The two sides of the third lead screw are rotatably mounted in the two third bearing seats, and the third lead screw is threadedly engaged with the third nut pair. The third sliding mechanism includes a third guide rail mounted on the third mounting seat and a third slider mounted on the measuring moving seat and slidably connected to the third guide rail.

[0012] Furthermore, the second drive motor is arranged along the first direction and its output end is provided with a first bevel gear pair, the second lead screw is arranged along the second direction and its side near the second drive motor is provided with a second bevel gear pair, the first bevel gear pair and the second bevel gear pair mesh with each other so that the output power of the second drive motor is transmitted from the first direction to the second direction.

[0013] Furthermore, the third drive motor is arranged along the first direction and its output end is provided with a third bevel gear pair, the third lead screw is arranged along the third direction and its side near the third drive motor is provided with a fourth bevel gear pair, the third bevel gear pair and the fourth bevel gear pair mesh with each other so that the output power of the third drive motor is transmitted from the first direction to the third direction.

[0014] Furthermore, the sample holder is located on the side of the vacuum chamber away from the first moving module, and the sample pick-up and drop-off port is located on the side of the device body close to the sample holder.

[0015] The beneficial effects of this utility model are as follows: This invention overcomes the limitations of traditional indirect measurement methods by setting up a three-dimensional motion measurement mechanism and a sample holder within a vacuum chamber. The three-dimensional motion measurement mechanism is equipped with a measuring head, which drives the measuring head to move in three-dimensional space within the vacuum chamber. This allows the measuring head to measure the sample placed on the sample holder from different angles and positions, thus enabling comprehensive and detailed testing of the sample. It effectively solves the problem that current devices for measuring or testing within vacuum equipment typically use indirect measurement methods to measure the sample within the vacuum chamber. However, indirect measurement methods cannot directly perform comprehensive and detailed testing of the sample, resulting in insufficient measurement accuracy.

[0016] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of the vacuum device of this utility model; Figure 2 This is a cross-sectional schematic diagram of the vacuum device of this utility model; Figure 3 This is one of the structural schematic diagrams of the three-dimensional motion measurement mechanism of this utility model; Figure 4 This is one of the structural schematic diagrams of the lifting drive mechanism of this utility model; Figure 5 This is the second schematic diagram of the structure of the three-dimensional motion measurement mechanism of this utility model; Figure 6 This is the third schematic diagram of the three-dimensional motion measurement mechanism of this utility model; Figure 7 This is the fourth structural schematic diagram of the three-dimensional motion measurement mechanism of this utility model; Figure 8 This is the second structural schematic diagram of the lifting drive mechanism of this utility model; Figure 9 for Figure 8 Cross-sectional view along line AA; Figure 10 for Figure 9 An enlarged view of section B marked on the map; Figure 11 This is an exploded view of the lifting drive mechanism of this utility model. Detailed Implementation

[0018] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0019] like Figures 1 to 11 The vacuum device shown includes a main body 1, a vacuum chamber 2, and a sample loading / unloading port 3 communicating with the vacuum chamber 2. The vacuum chamber 2 is equipped with a three-dimensional motion measurement mechanism 4 and a sample holder 5. The three-dimensional motion measurement mechanism 4 is equipped with a measuring head 40. The three-dimensional motion measurement mechanism 4 drives the measuring head 40 to perform three-dimensional spatial motion within the vacuum chamber 2 to perform three-dimensional measurement on the sample to be measured placed on the sample holder 5. This invention overcomes the limitations of traditional indirect measurement methods by setting up a three-dimensional motion measurement mechanism and a sample holder within a vacuum chamber. The three-dimensional motion measurement mechanism is equipped with a measuring head, which drives the measuring head to move in three-dimensional space within the vacuum chamber. This allows the measuring head to measure the sample placed on the sample holder from different angles and positions, thus enabling comprehensive and detailed testing of the sample. It effectively solves the problem that current devices for measuring or testing within vacuum equipment typically use indirect measurement methods to measure the sample within the vacuum chamber. However, indirect measurement methods cannot directly perform comprehensive and detailed testing of the sample, resulting in insufficient measurement accuracy.

[0020] Furthermore, the three-dimensional motion measurement mechanism 4 can precisely control the position and motion trajectory of the measuring head 40, ensuring that the measuring head 40 can accurately reach the specific position on the sample that needs to be measured, so that the data of each measurement point is more reliable, thereby improving the overall measurement accuracy.

[0021] Specifically, users can place the sample to be tested onto the sample holder 5 through the sample pick-up and drop-down port 3.

[0022] like Figures 1 to 11 The vacuum chamber 2 shown is provided with a mounting base plate 21. The three-dimensional motion measurement mechanism 4 is set in the vacuum chamber 2 through the mounting base plate 21. The mounting base plate 21 is provided with a horizontal adjustment mechanism 211, which is used to adjust the horizontal state of the three-dimensional motion measurement mechanism 4. Furthermore, the vacuum chamber 2 is usually an integral welded or cast structure, and its internal surface is difficult to machine with high precision. This can easily lead to problems such as uneven mounting surface and inaccurate reference when the three-dimensional motion measurement mechanism 4 is directly installed in the vacuum chamber 2. By setting the mounting base plate 21 as a transition platform and equipping it with a horizontal adjustment mechanism 211, the horizontal state of the three-dimensional motion measurement mechanism 4 can be adjusted without relying on the internal machining accuracy of the vacuum chamber 2, effectively compensating for the tilt or twist caused by the manufacturing error of the vacuum chamber 2.

[0023] Furthermore, the mounting base plate 21 provides a stable mounting carrier for the three-dimensional motion measurement mechanism 4, reducing the impact of internal structural vibration or other interference of the vacuum chamber 2 on the three-dimensional motion measurement mechanism 4; at the same time, the adjustment of the horizontal state can reduce the additional friction and stress during the movement of the three-dimensional motion measurement mechanism 4, effectively extending the service life of the equipment.

[0024] Furthermore, the horizontal adjustment mechanism 211 supports the fine-tuning of the three-dimensional motion measurement mechanism 4 after assembly without disassembly or return to the factory for processing, which greatly simplifies the assembly process and reduces production costs. At the same time, it can quickly restore the best working condition when the equipment is relocated or recalibrated, which helps to enhance the maintainability and adaptability of the equipment.

[0025] Optionally, in some embodiments, the horizontal adjustment mechanism 211 comprises several sets of wedge-shaped slider assemblies disposed between the inner wall of the vacuum chamber 2 and the mounting base plate 21. Each set of wedge-shaped slider assemblies includes a fixed wedge, a movable wedge, and an adjusting screw. The fixed wedge is fixedly connected to the inner wall of the vacuum chamber 2, and its top surface is an inclined wedge-shaped surface. The movable wedge is placed on the wedge-shaped surface of the fixed wedge, with its bottom surface in contact with the wedge-shaped surface of the fixed wedge. The top surface of the movable wedge contacts the bottom of the mounting base plate 21. The movable wedge is connected to the adjusting screw, which passes through a threaded hole on the fixed wedge. The adjusting screw can drive the movable wedge along the wedge of the fixed wedge. The three-dimensional motion measurement mechanism 4 is mounted on the mounting base plate 21 and adjusts synchronously with the horizontal state of the mounting base plate 21. Specifically, when the user rotates the adjusting screw, the movable wedge block generates a horizontal displacement along the inclined surface of the fixed wedge block. Due to the height change characteristics of the wedge surface, the height of the top surface of the movable wedge block changes slightly, which in turn drives the height change of the corresponding part of the mounting base plate 21. By adjusting the wedge slider assembly at different positions, the height of each part of the mounting base plate 21 can be adjusted so that the mounting base plate 21 reaches a horizontal state. Since the three-dimensional motion measurement mechanism 4 is mounted on the mounting base plate 21, its horizontal state is also indirectly adjusted to the required accuracy.

[0026] Optionally, in some embodiments, the horizontal adjustment mechanism 211 consists of several sets of adjusting screw assemblies disposed between the inner wall of the vacuum chamber 2 and the mounting base plate 21. Each set of adjusting screw assemblies includes a threaded hole disposed on the inner wall of the vacuum chamber 2 and an adjusting screw that mates with the threaded hole. One end of the adjusting screw contacts the bottom of the mounting base plate 21. The three-dimensional motion measurement mechanism 4 is mounted on the mounting base plate 21 and changes synchronously with the horizontal state of the mounting base plate 21. Specifically, the user can adjust the support height of the corresponding contact point of the mounting base plate 21 by rotating the adjusting screws at different positions to change the depth of their screwing into the threaded hole.

[0027] like Figures 1 to 11 The device body 1 shown includes a lifting drive mechanism 6, which extends through the device body 1 into the vacuum chamber 2 and is connected to the sample holder 5. The lifting drive mechanism 6 is used to drive the sample holder 5 to move vertically within the vacuum chamber 2. Specifically, by setting up a lifting drive mechanism 6, the lifting drive mechanism 6 drives the sample holder 5 to move vertically in the vacuum chamber 2. The lifting drive mechanism 6 cooperates with the three-dimensional motion measurement mechanism 4 so that the measuring head 40 does not need to complete all three-dimensional motion alone during the measurement process. Some of the motion can be realized by the lifting drive mechanism 6, which helps to reduce the motion load of the three-dimensional motion measurement mechanism 4.

[0028] Furthermore, by setting up a lifting drive mechanism 6 to achieve the vertical lifting of the sample holder 5, it is beneficial to significantly reduce the motion load of the three-dimensional motion measurement mechanism 4, simplify the structural settings of the three-dimensional motion measurement mechanism 4, and effectively reduce manufacturing costs and control difficulties.

[0029] Furthermore, the lifting drive mechanism 6 is configured to allow the measuring head 40 to adjust its measuring position more flexibly, reducing the vertical travel of the measuring head 40, thereby improving measurement efficiency and shortening measurement time.

[0030] Optionally, in some embodiments, the lifting drive mechanism 6 includes a lifting column 61 arranged vertically and a stepper motor. The two ends of the lifting column 61 are connected to the stepper motor and the sample holder 5, respectively. When the stepper motor is working, it drives the lifting column 61 to rise and fall vertically. The sample holder 5 rises and falls synchronously with the lifting column 61 to cooperate with the measuring head 40 to measure the sample to be tested. The stepper motor has high positioning accuracy and can accurately control the rotation angle by controlling the number of pulses, thereby accurately driving the lifting column 61 to achieve the lifting and falling of the sample holder 5, which is beneficial to meeting the requirements of the sample holder 5 for the accuracy of the lifting position.

[0031] Optionally, in some embodiments, the lifting drive mechanism 6 includes a lifting column 61 arranged vertically and a DC geared motor. The two ends of the lifting column 61 are connected to the DC geared motor and the sample holder 5, respectively. When the DC geared motor is working, it drives the lifting column 61 to rise and fall vertically. The sample holder 5 rises and falls synchronously with the lifting column 61 to cooperate with the measuring head 40 to measure the sample to be tested. The DC geared motor has a large output torque, which can provide sufficient power for the lifting column 61 to rise and fall.

[0032] Furthermore, as a preferred embodiment of the present invention and not a limitation thereof, the lifting drive mechanism 6 includes a lifting column 61 arranged in the vertical direction and a servo motor 62. The servo motor 62 has good speed regulation performance and response speed, and can quickly respond to control signals, thereby realizing precise control of the lifting speed and position of the lifting column 61. In addition, the servo motor 62 can make the lifting action of the sample holder 5 more stable and rapid, which is conducive to efficient cooperation with the measuring head 40 of the three-dimensional motion measuring mechanism 4, and helps to improve the smoothness of the overall measurement process.

[0033] Furthermore, the sample holder 5 is provided with several fixing slots 51, which are arranged at intervals around the circumference of the sample holder 5. By setting multiple fixing slots 51, multiple samples to be tested can be placed simultaneously during a single sample loading process. In conjunction with the three-dimensional motion measurement mechanism 4 and the lifting drive mechanism 6, continuous, automatic, and in-situ multi-point detection of all samples can be achieved, which is beneficial to significantly improve the utilization rate of the equipment. Secondly, when the sample holder 5 is rapidly or frequently raised and lowered in the vertical direction under the drive of the lifting column 61 and the servo motor 62, acceleration, vibration, or inertial force will be generated, which may easily cause the samples to be tested to loosen or even slip. By setting multiple fixing slots 51, the samples can be effectively and stably fixed on the sample holder 5, avoiding displacement, tilting, or falling caused by movement, and ensuring the safety and continuity of the measurement process.

[0034] Furthermore, the output end of the servo motor 62 is provided with a connecting flange 621, and the side of the lifting column 61 closest to the servo motor 62 is provided with a mounting flange 611. The connecting flange 621 and the mounting flange 611 are threaded together, so that the lifting column 61 and the output end of the servo motor 62 can be detachably connected. The connecting flange 621 and the mounting flange 611 are connected by threads, and the self-locking characteristic of the threads can form a stable connection structure, which can effectively transmit the torque of the servo motor 62 to the lifting column 61, ensuring that the lifting column 61 will not loosen or slip during the lifting process, and ensuring the stable operation of the lifting drive mechanism 6. Similarly, the side of the lifting column 61 away from the servo motor 62 can be detachably connected to the sample holder 5 by a threaded connection.

[0035] Furthermore, the lifting drive mechanism 6 includes a sealing mounting seat 63 disposed on the outer wall of the lifting column 61. A skeleton oil seal 631 for maintaining the airtightness of the vacuum chamber 2 is provided between the sealing mounting seat 63 and the lifting column 61. The skeleton oil seal 631 can tightly fit the gap between the outer wall of the lifting column 61 and the sealing mounting seat 63, preventing gas leakage inside the vacuum chamber 2 and preventing external air from entering the chamber, ensuring that the chamber always maintains the required vacuum environment and providing stable vacuum conditions for sample measurement. Specifically, a connecting seat is provided inside the vacuum chamber 2. The connecting seat is fixedly disposed inside the vacuum chamber 2. The sealing mounting seat 63 is connected to the connecting seat by a threaded connection, and a sealing ring is provided on the connection surface of the sealing mounting seat 63 and the connecting seat.

[0036] Furthermore, the lifting drive mechanism 6 includes a pressure plate 64 disposed on the side of the sealed mounting base 63 away from the sample holder 5. The pressure plate 64 is sleeved on the outer periphery of the lifting column 61 and is used to guide the lifting movement of the lifting column 61. The lifting column 61 reciprocates in the vertical direction under the drive of the servo motor 62. If there is a lack of effective guidance, it is easy to sway, wobble, or tilt, affecting the stability of the sample holder 5. By setting the pressure plate 64 and sleeved on the outer periphery of the lifting column 61, a radial constraint structure is formed, which can effectively guide the lifting column 61 to move linearly in the axial direction, which is beneficial to significantly improve its linearity of movement and The trajectory stability is improved to avoid jamming or wear caused by uneven loading. Secondly, if the guide is only achieved by the skeleton oil seal 631 at the sealing mounting base 63, the oil seal lip will be subjected to uneven force, which will accelerate wear and shorten the seal life. By introducing an independent pressure plate 64 for mechanical guidance, the motion guiding function and the sealing function can be separated, so that the skeleton oil seal 631 mainly undertakes the sealing function, reducing the lateral force it bears, thereby extending the service life of the seal and improving the long-term reliability of the vacuum system. Specifically, the pressure plate 64 is installed on the side of the sealing mounting base 63 away from the sample holder 5 by means of threaded connection.

[0037] like Figures 1 to 11 The three-dimensional motion measurement mechanism 4 shown includes a first moving module 41 arranged along a first direction, a second moving module 42 arranged along a second direction, and a third moving module 43 arranged along a third direction. The first moving module 41 is driven to the second moving module 42 to drive the second moving module 42 to move along the first direction. The second moving module 42 is driven to the third moving module 43 to drive the third moving module 43 to move along the second direction. The third moving module 43 is driven to the measuring head 40 to drive the measuring head 40 to move along a third direction. Specifically, the first direction corresponds to the X-axis direction of the coordinate system, the second direction corresponds to the Y-axis direction of the coordinate system, and the third direction corresponds to the Z-axis direction of the coordinate system. When the first moving module 41 is operating normally, the first moving module 41 drives the second moving module 42 to move along the X-axis direction; when the second moving module 42 is operating normally, the second moving module 42 drives the third moving module 43 to move along the Y-axis direction; when the third moving module 43 is operating normally, the third moving module 43 drives the measuring head 40 to move along the Z-axis direction.

[0038] Furthermore, the first moving module 41 moves along the X-axis, the second moving module 42 moves along the Y-axis, and the third moving module 43 moves along the Z-axis. The three move in coordination with each other, which can drive the measuring head 40 to achieve flexible combined movement in the X, Y, and Z dimensions, covering a larger measurement space range, which is conducive to meeting the measurement needs of samples at different positions and angles.

[0039] Furthermore, by adopting a moving module structure with orthogonal X, Y, and Z axes, the movements in each direction are independent of each other, reducing motion interference and facilitating precise control of the movement in each direction. This enables the measuring head 40 to accurately reach the preset measuring position, improving the positioning accuracy of the measurement and ensuring the acquisition of accurate measurement data.

[0040] Optionally, the first moving module 41 includes a first drive motor 411 disposed on the outer side wall of the device body 1, the second moving module 42 includes a second drive motor 421 disposed on the second moving base 420, and the third moving module 43 includes a third drive motor 431 mounted on the third mounting base 430. The first drive motor 411 is a common servo motor, while the second drive motor 421 and the third drive motor 431 are both vacuum servo motors. Vacuum servo motors can adapt to vacuum environments and have special designs in terms of sealing structure and material selection, resulting in relatively high costs. The second drive motor 421 and the third drive motor 431 are both vacuum servo motors, and the device... The first drive motor 411 on the outside of the main body 1 is a common servo motor. Under the premise of meeting the overall equipment performance requirements, it can effectively reduce the overall manufacturing cost of the equipment and achieve a reasonable balance between performance and cost. Secondly, common servo motors are easier to maintain and repair in an atmospheric environment. When the first drive motor 411 fails, the user can directly inspect and repair it on the outside of the main body 1, reducing the difficulty and time cost of maintenance. As for the second drive motor 421 and the third drive motor 431 working in the vacuum chamber 2, although maintenance is relatively complex, they are designed specifically for the vacuum environment, have high reliability, and have a relatively low probability of failure.

[0041] Furthermore, a magnetic fluid sealing assembly is provided at the through hole between the output shaft of the first drive motor 411 and the main body 1 of the device. The magnetic fluid sealing assembly includes an annular permanent magnet, a pole shoe, and a magnetic fluid. The magnetic field generated by the permanent magnet causes the magnetic fluid to be attracted into the gap between the pole shoe and the output shaft of the first drive motor 411, forming a dynamic seal. When the output shaft of the first drive motor 411 rotates, the magnetic fluid always remains sealed, which not only allows the output shaft of the first drive motor 411 to move flexibly, but also prevents gas from entering the vacuum chamber 2 through the gap.

[0042] Furthermore, the output shaft of the first drive motor 411 extends toward the vacuum chamber 2, and a coupling 413 is provided between the output shaft of the first drive motor 411 and the first lead screw 412. The coupling 413 can effectively compensate for the installation coaxiality error between the output shaft of the first drive motor 411 and the first lead screw 412, reduce the additional torque caused by shaft offset, and avoid vibration or jamming when the two rotate at high speed or the load changes. At the same time, the coupling 413 has a buffering and vibration absorption function, which can reduce the impact of the first drive motor 411 when starting and stopping on the first lead screw 412, which is beneficial to protecting the transmission components.

[0043] Optionally, the first moving module 41 includes a first lead screw 412 connected to the output end of the first drive motor 411, the second moving module 42 includes a second lead screw 422 connected to the output end of the second drive motor 421, and the third moving module 43 includes a third lead screw 432 connected to the output end of the third drive motor 431. The first lead screw 412, the second lead screw 422, and the third lead screw 432 are all trapezoidal threaded lead screws. The first nut assembly 71, the second nut assembly 72, and the third nut assembly 73 are all trapezoidal nut assemblies. The processing technology of trapezoidal threaded lead screws is relatively mature, and their surfaces can be treated for wear resistance and corrosion resistance. This is beneficial for adapting to the dry and lubrication-free environment inside the vacuum chamber 2, reducing pollution to the vacuum environment due to lubricant evaporation. Furthermore... Firstly, the trapezoidal thread has a larger clearance, making it less sensitive to dust and impurities. Even if a small amount of residual particles are present inside the vacuum chamber 2, they are less likely to cause jamming and affect transmission, thus reducing maintenance frequency. Secondly, the trapezoidal thread has a stable tooth profile and high root strength, enabling it to withstand large axial loads. In three-dimensional motion measurement, the trapezoidal thread screw and trapezoidal nut can stably bear the load, whether it is the self-weight of the measuring head 40, the contact pressure on the sample, or the combined load when various moving modules are linked, reducing the risk of thread deformation or damage. At the same time, the trapezoidal thread has a larger contact surface, resulting in uniform force distribution during transmission, which can reduce impact and vibration during movement, further improving the smoothness of the measuring head 40's movement and contributing to improved measurement accuracy.

[0044] like Figures 1 to 11The first moving module 41 shown includes a first driving mechanism and a first sliding mechanism 81. The first driving mechanism includes a first driving motor 411, a first lead screw 412 connected to the output end of the first driving motor 411, two first bearing seats 414 arranged opposite to each other along a first direction, and a first nut pair 71 mounted on the second moving module 42. The two sides of the first lead screw 412 are rotatably mounted in the two first bearing seats 414, and the first lead screw 412 is threadedly engaged with the first nut pair 71. The first sliding mechanism 81 includes a first guide rail 811 mounted on the mounting base plate 21, and a first slider 812 mounted on the second moving module 42 and slidably connected to the first guide rail 811. Specifically, when the first drive motor 411 starts, the output end of the first drive motor 411 drives the first lead screw 412 to rotate within two opposing first bearing seats 414. Since the first lead screw 412 is threadedly engaged with the first nut pair 71 mounted on the second moving module 42, the rotational motion of the first lead screw 412 is converted into the linear motion of the first nut pair 71, thereby driving the second moving module 42 to move along the first direction. At the same time, the first slider 812 mounted on the second moving module 42 slides synchronously on the first guide rail 811 on the mounting base plate 21, providing guidance and support for the movement of the second moving module 42, and realizing the stable movement of the second moving module 42 along the first direction.

[0045] Furthermore, the first drive motor 411 drives the first lead screw 412 to rotate. The rotational motion is converted into linear motion through the threaded engagement between the first lead screw 412 and the first nut pair 71. The transmission accuracy is high, which can realize the precise displacement control of the second moving module 42 and help meet the equipment's requirements for movement accuracy.

[0046] Furthermore, in the first sliding mechanism 81, the first slider 812 is slidably connected to the first guide rail 811, providing stable guidance for the movement of the second moving module 42, while distributing the force, reducing swaying and offset during the movement, and helping to ensure the smoothness of the movement.

[0047] Preferably, there are two first guide rails 811, which are arranged parallel to each other along a first direction. The first slider 812 is arranged corresponding to the first guide rails 811 and is located at the bottom of the second moving seat 420 in the second moving module 42. By setting two parallel first guide rails 811, more stable guidance can be provided, which helps to reduce the offset and shaking during the movement process and ensure the precise movement of the moving module and the measuring head 40. Secondly, the two parallel first guide rails 811 can provide stronger structural rigidity, reduce deformation caused by load or movement, and ensure the stability of the equipment under high load conditions.

[0048] like Figures 1 to 11 The second moving module 42 shown includes a second driving mechanism, a second sliding mechanism 82, and a second moving base 420 connected to the first moving module 41. The second driving mechanism includes a second driving motor 421 mounted on the second moving base 420, a second lead screw 422 connected to the output end of the second driving motor 421, two second bearing seats 424 arranged opposite to each other along the second direction and respectively mounted on the second moving base 420, and a second nut pair 72 mounted on the third moving module 43. The two sides of the second lead screw 422 are rotatably mounted in the two second bearing seats 424, and the second lead screw 422 is threadedly engaged with the second nut pair 72. The second sliding mechanism 82 includes a second guide rail 821 mounted on the second moving base 420, and a second slider 822 mounted on the third moving module 43 and slidably connected to the second guide rail 821. Specifically, when the second drive motor 421 starts, the output end of the second drive motor 421 drives the second lead screw 422 to rotate within the two second bearing seats 424 arranged opposite each other in the second direction on the second moving seat 420. Since the second lead screw 422 is threadedly engaged with the second nut pair 72 installed on the third moving module 43, the rotational motion of the second lead screw 422 is converted into the linear motion of the second nut pair 72, thereby driving the third moving module 43 to move in the second direction. At the same time, the second slider 822 installed on the third moving module 43 slides synchronously on the second guide rail 821 on the second moving seat 420, providing guidance and support for the movement of the third moving module 43, realizing the stable movement of the third moving module 43 in the second direction. The entire second moving module 42 is connected to the first moving module 41 through the second moving seat 420 and can move synchronously with the first moving module 41.

[0049] Specifically, the first nut assembly 71 is mounted on the second movable seat 420, and the second movable seat 420 is connected to the first lead screw 412 through the first nut assembly 71, so that the second movable seat 420 can move relative to the first lead screw 412 along the X-axis.

[0050] Furthermore, the second moving module 42 drives the third moving module 43 to move along the second direction through the second driving mechanism, and the whole is connected to the first moving module 41 through the second moving seat 420. It can move along the first direction with the first moving module 41, thereby realizing the precise displacement adjustment of the third moving module in two different directions, which is beneficial to meeting the equipment's need for multi-dimensional movement.

[0051] Furthermore, in the second sliding mechanism 82, the sliding cooperation between the second slider 822 and the second guide rail 821 provides precise guidance for the movement of the third moving module 43, effectively restricts its movement trajectory, avoids deviation, and helps ensure that the third moving module 43 moves smoothly along the second direction, which helps reduce vibration and noise during the movement process.

[0052] Preferably, there are two second guide rails 821, which are arranged parallel to each other along the second direction. The second slider 822 is arranged corresponding to the second guide rails 821 and is located at the bottom of the third moving panel 433 in the third moving module 43. By setting two parallel second guide rails 821, more stable guidance can be provided, which helps to reduce the offset and shaking during the movement process and ensure the accurate movement of the moving module and the measuring head 40. Secondly, the two parallel second guide rails 821 can provide stronger structural rigidity, reduce the deformation caused by load or movement, and ensure the stability of the equipment under high load conditions.

[0053] like Figures 1 to 11 A measuring moving base 401 is provided between the measuring head 40 and the third moving module 43. The measuring head 40 is connected to the third moving module 43 through the measuring moving base 401. The third moving module 43 includes a third driving mechanism, a third sliding mechanism 83, a third moving panel 433 connected to the second moving module 42, and a third mounting base 430 connected to the third moving panel 433. The third driving mechanism includes a third driving motor 431 mounted on the third mounting base 430 and a third cable connected to the output end of the third driving motor 431. The third screw 432 comprises a rod 432, two third bearing seats 434 arranged opposite each other along a third direction and respectively disposed on the third mounting base 430, and a third nut assembly 73 mounted on the measuring moving base 401. The two sides of the third screw 432 are rotatably mounted in the two third bearing seats 434 respectively, and the third screw 432 is threadedly engaged with the third nut assembly 73. The third sliding mechanism 83 includes a third guide rail 831 mounted on the third mounting base 430 and a third slider 832 mounted on the measuring moving base 401 and slidably connected to the third guide rail 831. Specifically, when the third drive motor 431 starts, the output end of the third drive motor 431 drives the third lead screw 432 to rotate within two third bearing seats 434 arranged opposite each other along the third third direction on the third mounting base 430. Since the third lead screw 432 is threadedly engaged with the third nut pair 73 installed on the measuring moving base 401, the rotational motion of the third lead screw 432 is converted into the linear motion of the third nut pair 73, thereby driving the measuring moving base 401 and the measuring head 40 connected to it to move along the third third direction. At the same time, the third slider 832 installed on the measuring moving base 401 slides synchronously on the third guide rail 831 on the third mounting base 430, providing guidance and support for the movement of the measuring head 40, realizing the stable movement of the measuring head 40 along the third third direction. The entire third moving module 43 is connected to the second moving module 42 through the third moving panel 433 and can move synchronously with the second moving module 420.

[0054] Specifically, the second nut assembly 72 is mounted on the third movable panel 433, which is connected to the second lead screw 422 via the second nut assembly 72, so that the third movable panel 433 can move relative to the Y-axis; similarly, the third nut assembly 73 is mounted on the measuring movable seat 401, which is connected to the third lead screw 432 via the third nut assembly 73, so that the measuring movable seat 401 can move relative to the Z-axis, thereby driving the measuring head 40 to move along the Z-axis direction.

[0055] Furthermore, the third moving module 43 drives the measuring head 40 to move along a third direction through the third driving mechanism, and the whole is connected to the second moving module 42 through the third moving panel 433. It can move along the second direction with the second moving module 42, and at the same time move along the first direction with the first moving module 41, so as to realize the precise displacement adjustment of the measuring head 40 in three-dimensional space, which is beneficial to meet the needs of multi-directional movement in complex measurement scenarios.

[0056] Furthermore, in the third sliding mechanism 83, the sliding cooperation between the third slider 832 and the third guide rail 831 provides precise guidance for the movement of the measuring moving seat 401 and the measuring head 40, effectively constrains the movement trajectory, avoids deviation or shaking, helps ensure that the measuring head 40 remains stable during movement, and helps reduce measurement errors caused by vibration.

[0057] Preferably, there are two third guide rails 831, which are arranged parallel to each other along a third direction. The third slider 832 is arranged corresponding to the third guide rails 831 and is located at the bottom of the measuring moving seat 401 in the third moving module 43. By setting two parallel third guide rails 831, more stable guidance can be provided, which helps to reduce the offset and shaking during the movement process and ensure the accurate movement of the moving module and the measuring head 40. Secondly, the two parallel third guide rails 831 can provide stronger structural rigidity, reduce deformation caused by load or movement, and ensure the stability of the equipment under high load conditions.

[0058] like Figures 1 to 11 The second drive motor 421 shown is arranged along the first direction and its output end is provided with a first bevel gear pair 4211. The second lead screw 422 is arranged along the second direction and its side near the second drive motor 421 is provided with a second bevel gear pair 4221. The first bevel gear pair 4211 and the second bevel gear pair 4221 mesh with each other so that the output power of the second drive motor 421 is transmitted from the first direction to the second direction. Specifically, the second drive motor 421 is set along the first direction. After starting, its output end drives the first bevel gear pair 4211 to rotate. Since the first bevel gear pair 4211 meshes with the second bevel gear pair 4221 on one side of the second lead screw 422 set along the second direction, the first direction power output by the second drive motor 421 is transmitted to the second direction through the meshing of the two bevel gear pairs, thereby driving the second lead screw 422 to rotate along its own axis, thus realizing the change of the power transmission direction.

[0059] Furthermore, through the meshing of the first bevel gear pair 4211 and the second bevel gear pair 4221, the power output by the second drive motor 421 along the first direction can be stably transmitted to the second lead screw 422 set along the second direction, thereby realizing the efficient conversion of power between different directions, which is beneficial to meeting the needs of the transmission system for changing the direction of power.

[0060] Furthermore, the second drive motor 421 is installed along the first direction, while the second lead screw 422 is driven along the second direction. Vertical transmission is achieved through the first bevel gear pair 4211 and the second bevel gear pair 4221. The Y-axis lead screw can be driven without changing the motor installation direction, effectively saving space in the Y-axis direction of the equipment and making the overall structure more compact.

[0061] like Figures 1 to 11The third drive motor 431 shown is arranged along the first direction and its output end is provided with a third bevel gear pair 4311. The third lead screw 432 is arranged along the third direction and its side near the third drive motor 431 is provided with a fourth bevel gear pair 4321. The third bevel gear pair 4311 and the fourth bevel gear pair 4321 mesh with each other so that the output power of the third drive motor 431 is transmitted from the first direction to the third direction. Specifically, when the third drive motor 431 is set along the first direction and starts, its output end drives the third bevel gear pair 4311 to rotate. Since the third bevel gear pair 4311 meshes with the fourth bevel gear pair 4321 on one side of the third lead screw 432 set along the third third direction, the first direction power output by the third drive motor 431 is transmitted to the third third direction through the meshing of the two bevel gear pairs, thereby driving the third lead screw 432 to rotate along its own axis, realizing the change of the power transmission direction from the first direction to the third third direction.

[0062] Furthermore, through the meshing of the third bevel gear pair 4311 and the fourth bevel gear pair 4321, the power output by the third drive motor 431 along the first direction can be stably transmitted to the third lead screw 432 set along the third direction, thereby realizing the efficient conversion of power between different directions, which is beneficial to meeting the needs of the third-direction transmission for changing the power direction.

[0063] Furthermore, the third drive motor 431 is installed along the first direction to avoid its axial extension occupying the third direction space, effectively shortening the overall structural length in the Z direction and making the third moving module more compact.

[0064] Furthermore, the cross-section of the third moving module 43 is shaped like a "7". The "7" shaped cross-section can realize functional partitioning. The horizontal section can be used to install the third drive motor 431, while the vertical section can integrate sliding mechanisms such as the third lead screw 432 and the third slide rail. This allows the components to be arranged in layers along the vertical direction in the vacuum chamber 2, avoiding the problem of excessive space occupation caused by stacking components on the same plane. This is beneficial for reserving more movement space for the sample holder 5 and the measuring head 40.

[0065] like Figures 1 to 11 The sample holder 5 shown is located on the side of the vacuum chamber 2 away from the first moving module 41, and the sample pick-up and drop-off port 3 is located on the side of the device body 1 close to the sample holder 5. Furthermore, the sample pick-up and drop-off port 3 is located close to the sample holder 5, so that the user can access the sample holder 5 without going deep into the vacuum chamber 2 when picking up or dropping samples, reducing the risk of collision with other components in the vacuum chamber 2 during operation.

[0066] Furthermore, the vacuum chamber 2 can be functionally divided into a measurement area and a sample area. The three-dimensional motion measurement mechanism 4 is located on one side, focusing on three-dimensional motion measurement, while the sample holder 5 is located on the other side, focusing on carrying the sample. This partitioned layout makes the motion trajectory of the measuring head 40 more concentrated in the sample holder 5 area, which helps to reduce the ineffective movement of the three-dimensional motion measurement mechanism 4 in the vacuum chamber 2 and helps to improve measurement efficiency. Secondly, the sample pick-up and drop-off port 3 is close to the sample holder 5, which can shorten the path of the sample from the sample pick-up and drop-off port 3 to the sample holder 5.

[0067] Furthermore, the layout of the sample loading port 3 and the three-dimensional motion measurement mechanism 4 reduces mechanical failures caused by improper sample handling and improves the reliability of the equipment. When the user operates at the sample loading port 3, they are far away from the three-dimensional motion measurement mechanism 4, which helps to reduce direct contact between the user and the three-dimensional motion measurement mechanism 4 and effectively improves the safety of operation.

[0068] The above examples are merely illustrative of the technical content of this utility model to facilitate reader understanding, but do not imply that the implementation of this utility model is limited to these embodiments. Any technical extensions or re-creations made based on this utility model are protected by this utility model. The scope of protection of this utility model is defined by the claims.

Claims

1. A vacuum device capable of three-dimensional motion measurement, comprising a main body (1), characterized in that: The main body (1) of the device is provided with a vacuum chamber (2) and a sample loading port (3) communicating with the vacuum chamber (2). The vacuum chamber (2) is provided with a three-dimensional motion measurement mechanism (4) and a sample holder (5). The three-dimensional motion measurement mechanism (4) is provided with a measuring head (40). The three-dimensional motion measurement mechanism (4) drives the measuring head (40) to perform three-dimensional spatial motion in the vacuum chamber (2) so as to carry out three-dimensional measurement on the sample to be tested placed on the sample holder (5).

2. The vacuum device capable of three-dimensional motion measurement according to claim 1, characterized in that: The vacuum cavity (2) is provided with a mounting base plate (21), and the three-dimensional motion measurement mechanism (4) is set in the vacuum cavity (2) through the mounting base plate (21). The mounting base plate (21) is provided with a horizontal adjustment mechanism (211), which is used to adjust the horizontal state of the three-dimensional motion measurement mechanism (4).

3. The vacuum device capable of three-dimensional motion measurement according to claim 1, characterized in that: The main body of the device (1) includes a lifting drive mechanism (6), which extends through the main body of the device (1) into the vacuum cavity (2) and is connected to the sample holder (5). The lifting drive mechanism (6) is used to drive the sample holder (5) to move vertically within the vacuum cavity (2).

4. The vacuum device capable of three-dimensional motion measurement according to claim 2, characterized in that: The three-dimensional motion measurement mechanism (4) includes a first moving module (41) arranged along a first direction, a second moving module (42) arranged along a second direction, and a third moving module (43) arranged along a third direction. The first moving module (41) is connected to the second moving module (42) to drive the second moving module (42) to move along the first direction. The second moving module (42) is connected to the third moving module (43) to drive the third moving module (43) to move along the second direction. The third moving module (43) is connected to the measuring head (40) to drive the measuring head (40) to move along a third direction.

5. The vacuum device capable of three-dimensional motion measurement according to claim 4, characterized in that: The first moving module (41) includes a first driving mechanism and a first sliding mechanism (81). The first driving mechanism includes a first driving motor (411), a first lead screw (412) connected to the output end of the first driving motor (411), two first bearing seats (414) arranged opposite to each other along a first direction, and a first nut pair (71) installed on the second moving module (42). The two sides of the first lead screw (412) are rotatably installed in the two first bearing seats (414), and the first lead screw (412) is threadedly engaged with the first nut pair (71). The first sliding mechanism (81) includes a first guide rail (811) installed on the mounting base plate (21) and a first slider (812) installed on the second moving module (42) and slidably connected to the first guide rail (811).

6. The vacuum device capable of three-dimensional motion measurement according to claim 4, characterized in that: The second moving module (42) includes a second driving mechanism, a second sliding mechanism (82), and a second moving seat (420) connected to the first moving module (41). The second driving mechanism includes a second driving motor (421) mounted on the second moving seat (420), a second lead screw (422) connected to the output end of the second driving motor (421), two second bearing seats (424) arranged opposite to each other along the second direction and respectively mounted on the second moving seat (420), and a second nut pair (72) mounted on the third moving module (43). The two sides of the second lead screw (422) are rotatably mounted in the two second bearing seats (424), and the second lead screw (422) is threadedly engaged with the second nut pair (72). The second sliding mechanism (82) includes a second guide rail (821) mounted on the second moving seat (420) and a second slider (822) mounted on the third moving module (43) and slidably connected to the second guide rail (821).

7. The vacuum device capable of three-dimensional motion measurement according to claim 4, characterized in that: A measuring moving base (401) is provided between the measuring head (40) and the third moving module (43). The measuring head (40) is connected to the third moving module (43) through the measuring moving base (401). The third moving module (43) includes a third driving mechanism, a third sliding mechanism (83), a third moving panel (433) connected to the second moving module (42), and a third mounting base (430) connected to the third moving panel (433). The third driving mechanism includes a third driving motor (431) mounted on the third mounting base (430) and a third lead screw connected to the output end of the third driving motor (431). 432) Two third bearing seats (434) are arranged opposite to each other along a third direction and are respectively arranged on the third mounting base (430), and a third nut pair (73) is installed on the measuring moving base (401). The two sides of the third lead screw (432) are rotatably installed in the two third bearing seats (434), and the third lead screw (432) is threadedly engaged with the third nut pair (73). The third sliding mechanism (83) includes a third guide rail (831) installed on the third mounting base (430) and a third slider (832) installed on the measuring moving base (401) and slidably connected to the third guide rail (831).

8. The vacuum device capable of three-dimensional motion measurement according to claim 6, characterized in that: The second drive motor (421) is arranged along the first direction and its output end is provided with a first bevel gear pair (4211). The second lead screw (422) is arranged along the second direction and its side near the second drive motor (421) is provided with a second bevel gear pair (4221). The first bevel gear pair (4211) and the second bevel gear pair (4221) mesh with each other so that the output power of the second drive motor (421) is transmitted from the first direction to the second direction.

9. The vacuum device capable of three-dimensional motion measurement according to claim 7, characterized in that: The third drive motor (431) is arranged along the first direction and its output end is provided with a third bevel gear pair (4311). The third lead screw (432) is arranged along the third direction and its side near the third drive motor (431) is provided with a fourth bevel gear pair (4321). The third bevel gear pair (4311) and the fourth bevel gear pair (4321) mesh with each other so that the output power of the third drive motor (431) is transmitted from the first direction to the third direction.

10. The vacuum device capable of three-dimensional motion measurement according to claim 4, characterized in that: The sample holder (5) is located on the side of the vacuum chamber (2) away from the first moving module (41), and the sample pick-up and drop-off port (3) is located on the side of the device body (1) close to the sample holder (5).

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